公开(公告)号：EP0712021B1

公开(公告)日：2001-09-26

申请号：EP95116566.1

申请日：1995-10-20

Applicant: DAEWOO ELECTRONICS CO., LTD

Inventor： Min, Yong-Ki, Video Research Center

IPC: G02B26/08

CPC classification number: B81C1/00214 ,  B81B2201/032 ,  B81B2201/042 ,  B81C1/00174 ,  B81C2201/0109 ,  G02B26/0858 ,  H04N9/30

公开(公告)号：EP3343266A1

公开(公告)日：2018-07-04

申请号：EP17172107.9

申请日：2017-05-20

Applicant: STMicroelectronics S.r.l.

Inventor： COSTANTINI, Sonia ,  CARMINATI, Marta ,  GATTI, Daniela Angela Luisa ,  CASTOLDI, Laura Maria ,  CARMINATI, Roberto

IPC: G02B26/08 ,  B81B7/00

CPC classification number: G02B26/0833 ,  B81B3/0083 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2203/0307 ,  B81B2203/058 ,  B81C1/00714 ,  B81C2203/032 ,  G02B26/105

Abstract: The micro-electro-mechanical device (20) is formed in a first wafer (40) overlying and bonded to a second wafer (70). A fixed part (91), a movable part (92), and elastic elements, elastically coupling the movable part and the fixed part, are formed in the first wafer. The movable part carries actuation elements (60) configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections (66) of the first wafer, formed by selectively removing part of a semiconductor layer (43). The composite wafer formed by the first and second wafers is cut to form a plurality of MEMS devices.

公开(公告)号：EP2945276A4

公开(公告)日：2016-07-27

申请号：EP13868579

申请日：2013-12-27

Applicant: ALPS ELECTRIC CO LTD ,  NAT INST OF ADVANCED IND SCIEN

Inventor： TAKATSUKA TOMOMASA ,  TAKAHASHI ISAO ,  SUGAWARA TEPPEI ,  MITSUMORI KENICHI ,  ASAKA KINJI ,  SUGINO TAKUSHI

IPC: H02N11/00 ,  C08K3/04 ,  C08K7/02 ,  C08L101/00

CPC classification number: B81B3/0021 ,  B81B2201/032 ,  F03G7/005

Abstract: Provided is a polymer actuator element that can maintain satisfactory durability and has a great displacement amount or a great generating force, and excellent responsiveness. A polymer actuator element 1 includes an electrolyte layer 2 and electrode layers 3 and 4, in which the electrode layers 3 and 4 include an activated carbon nanofiber and a carbon nanohorn.

公开(公告)号：EP3009395A1

公开(公告)日：2016-04-20

申请号：EP15188669.4

申请日：2015-10-07

Applicant: Ricoh Company, Ltd.

Inventor： NAKAGAWA, Jun ,  HASHIGUCHI, Tsuyoshi ,  WATANABE, Eri ,  AKANUMA, Goichi ,  KITAZAWA, Tomofumi

IPC: B81B3/00 ,  H01L41/053 ,  H01L41/113

CPC classification number: G02B26/101 ,  B81B3/0045 ,  B81B2201/032 ,  B81B2201/042 ,  G02B26/0858 ,  H04N9/3129

Abstract: A light deflector (2, 30) is provided including a mirror unit (4) having a light reflection plane, a movable frame (6) to support the mirror unit (4), a support frame (8) disposed to surround the movable frame (6), and a pair of serpentine beams (10, 12). In the light deflector (2, 30), the serpentine beam has one end attached to the support frame (8), and another end attached to the movable frame (6), the mirror unit (4) oscillates as deformation of the serpentine beams (10, 12) caused by application of voltage is transferred to the mirror unit (4) through the movable frame (6), and a portion that moves due to the deformation of the serpentine beams (10, 12) is provided with a vibration damper (16) which reduces vibration for the mirror unit (4).

公开(公告)号：EP2571156B1

公开(公告)日：2015-07-29

申请号：EP11780513.5

申请日：2011-04-27

Applicant: Konica Minolta Holdings, Inc.

Inventor： HIGASHINO Kusunoki ,  MATSUDA Shinya

IPC: B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  H01L41/09 ,  H01L41/047

CPC classification number: H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0127 ,  H01L41/0475

公开(公告)号：EP2322971B1

公开(公告)日：2014-04-30

申请号：EP10177223.4

申请日：2006-02-23

Applicant: Pixtronix, Inc.

Inventor： Hagood, Nesbitt W. ,  Steyn, Jasper Lodewyk

IPC: G02B26/02 ,  G09G3/34

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

公开(公告)号：EP2370346A2

公开(公告)日：2011-10-05

申请号：EP09805956.1

申请日：2009-11-25

Applicant: Freescale Semiconductor, Inc. ,  COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： PERRUCHOT, François ,  DEFAY, Emmanuel ,  REY, Patrice ,  LIU, Lianjun ,  PACHECO, Sergio

IPC: B81B3/00 ,  H01L41/09

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01L41/0933 ,  H01L41/094

Abstract: A micro or nano electromechanical transducer device (200) formed on a semiconductor substrate (210) comprises a movable structure (203) which is arranged to be movable in response to actuation of an actuating structure. First (206) and second (207) compensation layers are arranged to compensate a thermal effect produced by the different first and second thermal response characteristics of the mechanical structure and the at least one layer (202) of the actuating structure such that movement of the movable structure (203) is substantially independent of variations in temperature and to adjust a stress effect produced by the different first and second stress response characteristics of the mechanical structure and the at least one layer (202) of the actuating structure such that the movable structure is deflected a predetermined amount relative to the substrate when the electromechanical transducer device (200) is in an inactive state.

Abstract translation: 形成在半导体衬底上的微型或纳米机电换能器装置包括可移动结构，其被布置成响应于致动结构的致动而可移动。 可移动结构包括机械结构，其包括具有第一热响应特性和第一机械应力响应特性的至少一个机械层，所述致动结构的至少一层，所述至少一层具有与 第一热响应特性和与第一机械应力响应特性不同的第二机械应力响应特性，具有第三热响应特性和第三机械应力特性的第一补偿层，以及具有第四热响应特性的第二补偿层和 第四机械应力响应特性。 第一和第二补偿层被布置成补偿由机械结构和致动结构的至少一个层的不同的第一和第二热响应特性产生的热效应，使得可移动结构的运动基本上与 并且调节由所述机械结构和所述致动结构的所述至少一个层的不同的第一和第二应力响应特性产生的应力效应，使得当所述机电换能器装置 处于非活动状态。

公开(公告)号：EP2370345A2

公开(公告)日：2011-10-05

申请号：EP09805955.3

申请日：2009-11-25

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Inventor： LIU, Lianjun ,  PACHECO, Sergio ,  PERRUCHOT, François ,  DEFAY, Emmanuel ,  REY, Patrice

IPC: B81B3/00 ,  H01L41/09

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01L41/0933 ,  H01L41/094

Abstract: A micro or nano electromechanical transducer device (200) formed on a semiconductor substrate comprises a movable structure (203) which is arranged to be movable in response to actuation of an actuating structure. The movable structure comprises a mechanical structure having at least one mechanical layer (204) having a first thermal response characteristic, at least one layer (202) of the actuating structure having a second thermal response characteristic different to the first thermal response characteristic, and a thermal compensation structure having at least one thermal compensation layer (206). The thermal compensation layer is different to the at least one layer (202) and is arranged to compensate a thermal effect produced by the mechanical layer and the at least one layer of the actuating structure such that the movement of the movable structure is substantially independent of variations in temperature.

Abstract translation: 形成在半导体衬底上的微型或纳米机电换能器装置包括可移动结构，其被布置成响应于致动结构的致动而可移动。 可移动结构包括具有至少一个具有第一热响应特性的机械层的机械结构，至少一层致动结构具有与第一热响应特性不同的第二热响应特性，以及至少具有至少 一个热补偿层。 热补偿层不同于至少一个层，并且被布置成补偿由机械层和致动结构的至少一个层产生的热效应，使得可移动结构的运动基本上与温度变化无关 。

公开(公告)号：EP2287110A2

公开(公告)日：2011-02-23

申请号：EP10176478.5

申请日：2006-02-23

Applicant: Pixtronix Inc.

Inventor： Hagood, Nesbitt W. ,  Steyn, Jasper Lodewyk

IPC: B81B3/00 ,  G02B26/04 ,  G09G3/22 ,  B81B7/04 ,  G02B26/08

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

Abstract: A display apparatus comprises a modulator for selectively interacting with light in an optical path to form an image on the display apparatus. A controllable first electrostatic actuator provides a first mechanical support for the modulator, the first mechanical support providing a supportive connection from a first location on the modulator to a surface over which the modulator is supported. A second mechanical support provides a supportive connection from a second location on the modulator to the surface. The first electrostatic actuator drives the modulator in a plane substantially parallel to the surface.

Abstract translation: 显示装置包括用于选择性地与光路中的光相互作用以在显示装置上形成图像的调制器。 可调节的第一静电致动器为调制器提供第一机械支撑，第一机械支撑件提供从调制器上的第一位置到支撑调制器的表面的支撑连接。 第二机械支撑件提供从调制器上的第二位置到表面的支撑连接。 第一静电致动器驱动调制器在大致平行于表面的平面中。

公开(公告)号：EP1829819A3

公开(公告)日：2009-06-24

申请号：EP06125198.9

申请日：2006-12-01

Applicant: Honeywell International Inc.

Inventor： Younger, Dan W. ,  Lust, Lisa M

IPC: B81B7/00

CPC classification number: B81B7/0087 ,  B81B2201/032 ,  F28F13/00 ,  F28F2270/00 ,  G05D23/024

Abstract: A thermal isolation structure for use in passively regulating the temperature of a microdevice is disclosed. The thermal isolation structure can include a substrate wafer and a cap wafer defining an interior cavity, and a number of double-ended or single-ended thermal bimorphs coupled to the substrate wafer and thermally actustable between an initial position and a deformed position. The thermal bimorphs can be configured to deform and make contact with the cap wafer at different temperatures, creating various thermal shorts depending on the temperature of the substrate wafer. When attached to a microdevice such as a MEMS device, the thermal isolation structure can be configured to maintain the attached device at a constant temperature or within a particular temperature range.