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86 条记录 (耗时 0.015 秒)

    WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD
    64.
    发明公开
    WAFER PROCESSING DEVICE, WAFER PROCESSING SYSTEM AND CONTROL METHOD 审中-实审

    公开(公告)号：EP4386822A1

    公开(公告)日：2024-06-19

    申请号：EP22918427.0

    申请日：2022-12-23

    申请人： Jiangsu Leadmicro Nano-Technology Co., Ltd.

    发明人： ZHOU, Ren ,  YANG, Dezan ,  WANG, Zhuo ,  XIE, Tian ,  ZHU, Xiaoli

    IPC分类号： H01L21/67 ,  H01L21/677

    CPC分类号： H01L21/677 ,  H01L21/67 ,  Y02P70/50

    摘要： The present disclosure provides a wafer processing device, a wafer processing system and a control method. The wafer processing device includes a driving unit, a transfer chamber, a plurality of process chambers and a bearing assembly; the bearing assembly is arranged in the transfer chamber, the process chamber is coupled to the transfer chamber, the process chamber is used for processing wafers, the bearing assembly is used for supporting the wafer, the driving unit is used for adjusting a position of the bearing assembly in the transfer chamber, and the driving unit is further used for driving the bearing assembly to move between the transfer chamber and the process chambers. The wafer processing device of the present disclosure can directly transport the wafers to be processed to the process chambers by the driving unit for the processing treatment, and can retain or transfer the wafers to be transferred or not to be directly processed in the transfer chamber, thus reducing the time of wafers occupying the working station due to different groups of wafers waiting for process, which will speed up the processing efficiency of the wafers and provide basic conditions for synchronously processing groups of wafers by the transfer chamber and the bearing assembly.

    CONVEYANCE SYSTEM
    65.
    发明公开
    CONVEYANCE SYSTEM 审中-公开

    公开(公告)号：EP3388368A1

    公开(公告)日：2018-10-17

    申请号：EP16872704.8

    申请日：2016-10-13

    申请人： Murata Machinery, Ltd.

    发明人： HONDA Osamu ,  YAMADA Keiji ,  ONO Daisuke ,  NOZAWA Takashi

    IPC分类号： B65G1/00 ,  H01L21/677

    CPC分类号： H01L21/67754 ,  B65G1/00 ,  B65G43/00 ,  H01L21/677 ,  H01L21/67724 ,  H01L21/67763

    摘要： A conveyance system includes a track, ceiling conveyance vehicles, storage apparatuses, and a conveyance controller configured or programmed to control operations of the ceiling conveyance vehicles and a local vehicle in accordance with an operation mode. The storage apparatus includes a storage part and the local vehicle that transfer a FOUP between the storage part and an apparatus port. The conveyance controller switches the operation mode among a first mode prohibiting transfer from the apparatus port to the storage part by the local vehicle, a second mode prohibiting transfer to the storage part by any of the ceiling conveyance vehicles and transfer from the storage part to the apparatus port by the local vehicle, and a third mode that does not restrict transfer by the local vehicle.

    CONVEYOR CAR SYSTEM
    67.
    发明公开
    CONVEYOR CAR SYSTEM 审中-公开

    公开(公告)号：EP3336016A1

    公开(公告)日：2018-06-20

    申请号：EP16836865.2

    申请日：2016-06-17

    申请人： Murata Machinery, Ltd.

    发明人： MOTOORI Yoichi

    IPC分类号： B65G1/00 ,  B61B3/02 ,  G05D1/02 ,  H01L21/677

    CPC分类号： B65G17/20 ,  B61B3/02 ,  B65G1/00 ,  B65G1/065 ,  B65G37/02 ,  B65G2201/0297 ,  G05D1/02 ,  H01L21/677

    摘要： A transport vehicle system (1) includes: a first transport vehicle (40A) configured to travel on a lower track (20) in one direction; a second transport vehicle (40B) configured to travel on an upper track in one direction; a first transfer section (13) onto which a conveyed object (F) is delivered from the second transport vehicle and from which the conveyed object is received by the first transport vehicle; and a second transfer section (15) onto which the conveyed object is delivered from the first transport vehicle and from which the conveyed object is received by the second transport vehicle. The area (10) has a first region (10A) and a second region (10B), the lower track is arranged across the first region and the second region, and the first transfer section and the second transfer section are arranged in the first region. A third transfer section (11A) in which the conveyed object can be transferred to or from the first transport vehicle is arranged in the second region. The lower track in the first region is arranged along the second transfer section and the first transfer section in this order in the one direction. The upper track in the first region is arranged along the first transfer section and the second transfer section in this order.

    PITCH CHANGE DEVICE AND PITCH CHANGE METHOD
    69.
    发明公开
    PITCH CHANGE DEVICE AND PITCH CHANGE METHOD 审中-公开
    TONHÖHENÄNDERUNGSVORRICHTUNGUNDTONHÖHENÄNDERUNGSVERFAHREN

    公开(公告)号：EP2584597A4

    公开(公告)日：2017-05-17

    申请号：EP11795769

    申请日：2011-06-15

    申请人： NISSAN MOTOR

    发明人： KITAYAMA TOMOHIRO ,  YASOOKA TAKESHI

    IPC分类号： H01L21/677 ,  B65G1/02

    CPC分类号： B65G1/026 ,  H01L21/677 ,  H01L21/67781

    摘要： A pitch conversion device and pitch conversion method is directed to convert the pit of a plurality of partition members (90) arranged parallel to each other along The X-direction and include a plurality of entry members (11) arranged parallel to each other in The X-direction and configured to enter between neighboring partition members (90), and a pushing member (31) to push the plurality of entry members (11) in turn and allow them to enter neighboring partition members (90) associated while moving in the X direction. The entry members (11) are biased in a exiting direction from between the neighboring partition members (90).

    摘要翻译： 本发明提供一种间距变换装置和间距变换方法，该多个间隔部件（90）的凹坑沿X方向相互平行地排列，并且包括相互平行配置的多个入口部件（11） 并且构造成进入相邻分隔构件（90）之间;以及推动构件（31），用于依次推动所述多个进入构件（11）并且允许它们进入相邻分隔构件（90） X方向。 入口部件（11）从相邻的分隔部件（90）之间向出口方向偏置。

    CARRIER AND CARRYING SYSTEM
    70.
    发明公开
    CARRIER AND CARRYING SYSTEM 有权
    载体以及携带系统

    公开(公告)号：EP2626319A4

    公开(公告)日：2017-03-29

    申请号：EP11830468

    申请日：2011-09-08

    申请人： MURATA MACHINERY LTD

    发明人： YAMAMOTO TARO ,  FUJIWARA YUSUKE

    IPC分类号： B61B3/02 ,  H01L21/677

    CPC分类号： H01L21/677 ,  B61B3/02 ,  H01L21/6773 ,  H01L21/67733

    摘要： A transport vehicle is provided for effectively reducing the shaking of a transport article. The transport vehicle (200) includes a travelling unit (210), a transport unit (220), a fall prevention member (260), and a shaking reduction member (270). The travelling unit (210) travels along a rail (100) provided on a ceiling. The transport unit (220) transports a transport article (400). The fall prevention member (260) is rotatably supported such that it can rotate between a fall prevention position and a retracted position. The fall prevention member (260) is, at the fall prevention position, below the transport article (400). A pushing portion (272) of the shaking reduction member (270) pushes against a side surface of the transport article (400) with a pushing surface thereof in conjunction with the rotating of the fall prevention member (260) from the retracted position to the fall prevention position. A lever portion (271) of the shaking reduction member (270) has one end supporting the pushing portion (272) and the other end rotatably supported in a manner coaxial with the fall prevention member (260).