公开(公告)号：EP1780765A2

公开(公告)日：2007-05-02

申请号：EP06123224.5

申请日：2006-10-31

申请人： FEI COMPANY

发明人： Tappel, Hendrik ,  Hees. van, Ian ,  Lankers, Danny ,  Giannuzzi, Lucille ,  Veen, van, Gerard ,  Young, Richard

IPC分类号： H01J37/20 ,  H01L21/68 ,  H01J37/30

CPC分类号： H01L21/68 ,  G01R31/2898 ,  H01J37/20 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/201 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20242 ,  H01L21/68764

摘要： A particle-optical apparatus comprising:
- A first source, for generating a first irradiating beam along a first axis;
- A second source, for generating a second irradiating beam along a second axis that intersects the first axis at a beam intersection point, the first and second axes defining a beam plane,
- A stage assembly for positioning a sample in the vicinity of the beam intersection point, provided with:

- A sample table to which the sample can be mounted;
- A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point,

wherein the set of actuators is further arranged to effect:
- rotation of the sample table about a rotation axis substantially parallel to the Z-axis, and;
- rotation of the sample table about a flip axis substantially perpendicular to the Z-axis,

whereby the flip axis can itself be rotated about the rotation axis.

摘要翻译： 甲粒子光学设备，包括： - 第一源，用于产生沿着第一轴的第一照射束; - 第二源，用于沿第二轴线产生第二照射束确实相交的第一轴线在束交叉点，所述第一和第二轴线限定一个光束平面上， - 为在附近定位样品A级组件（3） 光束交点，设置有： - 以可安装样品的样品台; - 一组致动器，布置成实现所述试样台的平移沿着方向基本上平行于在X轴垂直于光束平面，平行于束平面的Y轴，和平行Z轴的光束 规划所述X轴，Y轴和Z轴相互正交，并穿过分束交点，worin该组致动器进一步被布置成作用： - 样品台的旋转绕旋转轴线基本上平行于 Z轴，和; - 约倒装轴用的试样台大致垂直于所述Z轴，由此翻转轴线本身可以绕旋转轴线旋转。

公开(公告)号：EP1696219A1

公开(公告)日：2006-08-30

申请号：EP06110258.8

申请日：2006-02-22

申请人： FEI COMPANY

发明人： Giannuzzi, Lucille ,  Anzalone, Paul ,  Young, Richard ,  Phifer, Jr., Daniel

IPC分类号： G01N1/32 ,  H01J37/305

CPC分类号： G01N1/286 ,  G01N1/32 ,  G01N23/00 ,  H01J2237/2817 ,  H01J2237/31745 ,  Y10T428/24355

摘要： A method of sample extraction entails making multiple, overlapping cuts using a beam, such as a focused ion beam, to create a trench around a sample, and then undercutting the sample to free it. Because the sidewalls of the cut are not vertical, the overlapping cuts impinge on the sloping sidewalls formed by previous cuts. The high angle of incidence provides a greatly enhanced mill rate, so that making multiple overlapping cuts to produce a wide trench can requires less time than making a single, deep cut around the perimeter of a sample.

摘要翻译： 样品提取的方法需要使用诸如聚焦离子束的束来形成多个重叠的切割，以在样品周围产生沟槽，然后对样品进行底切以释放它。 因为切口的侧壁不是垂直的，所以重叠的切口冲击由先前切割形成的倾斜侧壁。 高入射角提供了大大提高的轧机速率，使得制造多个重叠切口以产生宽沟槽可以比在样品周边上进行单次深切割需要更少的时间。

公开(公告)号：EP2693457A2

公开(公告)日：2014-02-05

申请号：EP13176584.4

申请日：2013-07-16

申请人： FEI COMPANY

发明人： Young, Richard ,  Tanner, Ryan ,  Warschauer, Reinier

IPC分类号： H01J37/28 ,  H01J37/26

CPC分类号： H01J37/265 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/31749

摘要： A device for imaging and processing a workpiece having nanometric features through the use of at least one charged particle beam, by both fully automated procedures and manual assistance procedures. The device includes a user interface, including a schedule input entry device and a human operator ready input that can be placed in a first state or a second state and a procedure scheduler, accepting a schedule of procedures, including fully automated procedures and manual assistance procedures, from the schedule input entry device. Additionally, a procedure sequencer that, when the human operator ready input is in the second state, sequences through fully automated procedures until the human operator ready input is placed into the first state, at which time the sequencer begins sequencing the manual assistance procedures, after reaching a safe termination point for the fully automated procedures being performed.

摘要翻译： 一种用于成像和处理通过使用至少一个带电粒子束的具有纳米级特征的工件的装置，由这两个完全自动化的程序和手动协助程序。 该装置包括一个用户接口，包括日程输入输入装置和人类操作者准备好输入确实可在第一状态或第二状态和程序调度器放置，接受的步骤的时间表，包括全自动化程序和手动协助程序 从时间表输入进入装置。 此外，一个程序定序器，当操作人员就绪输入处于所述第二状态时，通过完全自动化的程序序列，直到操作人员准备输入被置于第一状态时，在WhichTime定序开始测序手动辅助程序，后 深远的完全自动化的过程在安全终止点执行。

公开(公告)号：EP2533278A3

公开(公告)日：2013-03-20

申请号：EP12171116.2

申请日：2012-06-07

申请人： FEI COMPANY

发明人： Warschauer, Reinier ,  Young, Richard ,  Rue, Chad ,  Carleson, Peter

IPC分类号： H01L21/66 ,  H01J37/28 ,  H01J37/304 ,  G06T7/00

CPC分类号： H01L22/12 ,  G06T7/73 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/31749 ,  H01L2924/0002 ,  H01L2924/00

摘要： An improved method of high accuracy beam placement for local area navigation in the field of semiconductor chip manufacturing is described. Preferred embodiments of the present invention can be used to rapidly navigate to one single bit cell in a memory array or similar structure, for example to characterize or correct a defect in that individual bit cell. High-resolution scanning is used to scan a "strip" of cells on the one edge of the array (along either the X axis and the Y axis) to locate a row containing the desired cell followed by a similar high-speed scan along the located row (in the remaining direction) until the desired cell location is reached. This allows pattern-recognition tools to be used to automatically "count" the cells necessary to navigate to the desired cell, without the large expenditure of time required to image the entire array.

摘要翻译： 描述了半导体芯片制造领域中用于局部导航的高精度光束布置的改进方法。 本发明的优选实施例可用于快速导航到存储器阵列或类似结构中的一个单个位单元，例如用于表征或校正该单独位单元中的缺陷。 使用高分辨率扫描来扫描阵列的一个边缘（沿X轴和Y轴）的单元格的“条带”，以便定位包含所需单元格的行，然后沿着沿着该方向的类似高速扫描 （在剩余方向上），直到达到所需的单元格位置。 这允许使用模式识别工具来自动“计数”导航到所需单元格所需的单元格，而不需要大量的时间来对整个阵列进行成像。

公开(公告)号：EP2226830A3

公开(公告)日：2011-04-06

申请号：EP10155688.4

申请日：2010-03-05

申请人： FEI Company

发明人： Toth, Milos ,  Young, Richard ,  Henstra, Alexander ,  De Jong, Alan ,  Mulders, Johannes

IPC分类号： H01J37/04 ,  H01J37/30 ,  H01J37/302

CPC分类号： H01J37/3056 ,  B81C99/0095 ,  H01J37/045 ,  H01J37/302 ,  H01J2237/0432 ,  H01J2237/04756 ,  H01J2237/2001 ,  H01J2237/24535 ,  H01J2237/30472

摘要： Electron-beam-induced chemical reactions with precursor gases are controlled by adsorbate depletion control. Adsorbate depletion can be controlled by controlling the beam current, preferably by rapidly blanking the beam, and by cooling the substrate (54). The beam (12,13) preferably has a low energy to reduce the interaction volume. By controlling the depletion and the interaction volume, a user has the ability to produce precise shapes.

公开(公告)号：EP3018693B1

公开(公告)日：2018-12-26

申请号：EP15192862.9

申请日：2015-11-04

申请人： FEI Company

发明人： Brogden, Valerie ,  Blackwood, Jeff ,  Schmidt, Michael ,  Trivedi, Dhruti ,  Young, Richard ,  Miller, Tom ,  Routh, Jr., Brian ,  Stone, Stacey ,  Templeton, Todd

IPC分类号： H01J37/304 ,  G01N1/28

CPC分类号： H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

摘要： Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：EP2367195B1

公开(公告)日：2014-03-12

申请号：EP11165381.2

申请日：2009-11-02

申请人： FEI Company

发明人： Young, Richard ,  Peterson, Brennan ,  Moriarty, Michael ,  Schampers, Ruud

IPC分类号： H01J37/304 ,  H01J37/305 ,  G01N1/28

CPC分类号： H01J37/3056 ,  G01N1/286 ,  H01J37/304 ,  H01J2237/24455 ,  H01J2237/30466 ,  H01J2237/31745 ,  H01J2237/31749

公开(公告)号：EP2367195A3

公开(公告)日：2012-11-21

申请号：EP11165381.2

申请日：2009-11-02

申请人： FEI Company

发明人： Young, Richard ,  Peterson, Brennan ,  Moriarty, Michael ,  Schampers, Ruud

IPC分类号： H01J37/304 ,  H01J37/305 ,  G01N1/28

CPC分类号： H01J37/3056 ,  G01N1/286 ,  H01J37/304 ,  H01J2237/24455 ,  H01J2237/30466 ,  H01J2237/31745 ,  H01J2237/31749

摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.

公开(公告)号：EP2367195A2

公开(公告)日：2011-09-21

申请号：EP11165381.2

申请日：2009-11-02

申请人： FEI Company

发明人： Young, Richard ,  Peterson, Brennan ,  Moriarty, Michael ,  Schampers, Ruud

IPC分类号： H01J37/304 ,  H01J37/305 ,  G01N1/28

CPC分类号： H01J37/3056 ,  G01N1/286 ,  H01J37/304 ,  H01J2237/24455 ,  H01J2237/30466 ,  H01J2237/31745 ,  H01J2237/31749

摘要： An improved method for TEM sample creation. The use of a SEM-STEM detector in the dual-beam FIB/SEM allows a sample to be thinned using the FIB, while the STEM signal is used to monitor sample thickness. A preferred embodiment of the present invention can measure the thickness of or create S/TEM samples by using a precise endpoint detection method that is reproducible and suitable for automation. Preferred embodiments also enable automatic endpointing during TEM lamella creation and provide users with direct feedback on sample thickness during manual thinning. Preferred embodiments of the present invention thus provide improved methods for endpointing sample thinning and methods to partially or fully automate endpointing to increase throughput and reproducibility of TEM sample creation.

摘要翻译： 一种改进的TEM样品创建方法。 在双光束FIB / SEM中使用SEM-STEM检测器允许使用FIB对样品进行稀释，而STEM信号用于监测样品厚度。 本发明的一个优选实施例可以通过使用可重复且适合自动化的精确终点检测方法来测量S / TEM样品的厚度或产生S / TEM样品。 优选实施例还可以在TEM薄片创建期间实现自动终点，并且在手动稀疏期间向用户提供关于样品厚度的直接反馈。 因此，本发明的优选实施例提供了用于终止样品稀释的改进方法以及部分或全部自动化终点以提高TEM样品产生的生产量和再现性的方法。

公开(公告)号：EP3018693A1

公开(公告)日：2016-05-11

申请号：EP15192862.9

申请日：2015-11-04

申请人： FEI Company

发明人： Brogden, Valerie ,  Blackwood, Jeff ,  Schmidt, Michael ,  Trivedi, Dhruti ,  Young, Richard ,  Miller, Tom ,  Routh, Jr., Brian ,  Stone, Stacey ,  Templeton, Todd

IPC分类号： H01J37/304 ,  G01N1/28

CPC分类号： H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

摘要： Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

摘要翻译： 描述了有助于自动提取薄片并将薄片附着到样品网格上以在透射电子显微镜上观察的技术。 本发明的一些实施例涉及使用机器视觉来确定薄片，探针和/或TEM网格的位置，以将探针附着到薄片和将薄片附接到TEM网格。 便于使用机器视觉的技术包括成形探针尖端，使其位置可以被图像识别软件容易地识别。 图像减法技术可用于确定附着于探针的薄片的位置，以将薄片移动到TEM网格以进行附着。 在一些实施例中，参考结构在探头上或薄片上铣削以便于图像识别。