Abstract:
The present invention provides: a cell cultivation vessel characterized in that the surface is coated with a copolymer comprising repeating units having organic groups represented by formula (a) and repeating units having organic groups represented by formula (b); a manufacturing method therefor; and a cell aggregate-manufacturing method using same (in the formulas, U a1 , U a2 , U b1 , U b2 and U b3 as well as An - are as set forth in the Description and the Claims).
Abstract:
There is provided a novel gate insulating film forming meterial in consideration of not only initial electric properties immediately after the production of a gate insulating film, but also electric properties after other steps are performed while producing a thin-film transistor using the gate insulating film, and even reliability in the electric properties of the produced element. A gate insulating film forming agent for a thin-film transistor comprising an oligomer compound or a polymer compound, both of which contain a repeating unit having a triazinetrione ring containing a hydroxyalkyl-containing group as a substituent on a nitrogen atom, and a solvent; a gate insulating film produced from the gate insulating film forming agent; a thin-film transistor having the gate insulating film; and a method for producing the gate insulating film or thin-film transistor.
Abstract:
A composition for forming an antireflection film, which comprises a compound, an oligomer or a polymer comprising a triazine-trione moiety having a hydroxyalkyl structure as a substitute on a nitrogen atom. The composition can provide an antireflection film which exhibits good absorptivity for a light having a wavelength suitable for use in the production of a semiconductor device, has high antireflection effect, and exhibits a dry etching rate greater than that of a photoresist layer.
Abstract:
[PROBLEMS] To provide an antireflection film that exhibits a high light reflection preventing effect, being free from intermixing with photoresists, and that can be employed in a lithography process using irradiation beam, such as those from ArF excimer laser and F2 excimer laser, and further to provide a composition for forming such an antireflection film. [MEANS FOR SOLVING PROBLEMS] There is provided an antireflection film forming composition characterized by containing a polymer having a pyrimidinetrione structure, imidazolidinedione structure, imidazolidinetrione structure or triazinetrione structure and containing a solvent.
Abstract:
A gap filler forming composition for lithography which is used in a dual damascene process for forming a gap filler having excellent planarization properties and filling properties is disclosed. Specifically, the gap filler forming composition is characterized by containing a polymer, a crosslinking agent, and a solvent and by being used in a semiconductor device production wherein a semiconductor substrate having a hole with an aspect ratio (height/diameter) of not less than 1 is covered with a photoresist and an image is transferred onto the semiconductor substrate by utilizing a lithography process.
Abstract:
A composition for forming anti-reflective coating for use in a lithographic process in manufacture of a semiconductor device, comprising as a component a resin containing cyanuric acid or a derivative thereof, or a resin containing a structural unit derived from cyanuric acid or a derivative thereof. The structural unit is preferably represented by formula (1): and can be contained in a main chain or a side chain, or both main chain and side chain of a resin. The anti-reflective coating for lithography obtained from the composition has a high reflection reducing effect and does not cause intermixing with a resist layer to give an excellent resist pattern. It has a higher selectivity in dry-etching compared with the resists.
Abstract:
An object of the present invention is to provide a composition for producing a fiber, which is preferable for immobilizing substances effective for cell adhesion. proliferation.differentiation and the like, and retains organic solvent resistance, a fiber obtained by spinning the composition, and a cell culture scaffold material using the fiber. A composition for producing a fiber, containing (A) a polymer compound containing a unit structure represented by the formula (1) and a unit structure represented by the formula (2), (B) a crosslinking agent, (C) an acid compound, and (D) a solvent wherein each symbol in the formulas (1) and (2) is as described in the DESCRIPTION.