COMPOSITION FOR FORMING ANTIREFLECTION FILM FOR LITHOGRAPHY
    4.
    发明公开
    COMPOSITION FOR FORMING ANTIREFLECTION FILM FOR LITHOGRAPHY 有权
    ZUSAMMENSETZUNG ZUR BILDUNG EINER ANTIREFLEXSCHICHT F R DIE LITHOGRAPHIE

    公开(公告)号:EP1560070A4

    公开(公告)日:2006-02-08

    申请号:EP03751376

    申请日:2003-10-08

    CPC classification number: H01L21/0276 G03F7/038 G03F7/091 Y10S430/106

    Abstract: A composition for forming an antireflection film, which comprises a compound, an oligomer or a polymer comprising a triazine-trione moiety having a hydroxyalkyl structure as a substitute on a nitrogen atom. The composition can provide an antireflection film which exhibits good absorptivity for a light having a wavelength suitable for use in the production of a semiconductor device, has high antireflection effect, and exhibits a dry etching rate greater than that of a photoresist layer.

    Abstract translation: 提供了一种用于形成用于抗反射涂层的抗反射涂层的组合物,其在用于制造半导体器件的波长处具有良好的吸收光,其对光反射具有高保护效果,其具有高的干蚀刻速率 与光致抗蚀剂层相比。 具体地,用于形成抗反射涂层的组合物含有在氮原子上具有羟烷基结构作为取代基的三嗪三酮化合物,低聚物化合物或高分子化合物。

    ANTIREFLECTION FILM FOR SEMICONDUCTOR CONTAINING CONDENSATION TYPE POLYMER
    6.
    发明公开
    ANTIREFLECTION FILM FOR SEMICONDUCTOR CONTAINING CONDENSATION TYPE POLYMER 有权
    ANTIREFLEXFILMFÜREINEN HALBLEITER MIT POLYMERDISKONDENSATIONSTYPS

    公开(公告)号:EP1757986A4

    公开(公告)日:2009-04-08

    申请号:EP05728797

    申请日:2005-04-06

    Abstract: [PROBLEMS] To provide an antireflection film that exhibits a high light reflection preventing effect, being free from intermixing with photoresists, and that can be employed in a lithography process using irradiation beam, such as those from ArF excimer laser and F2 excimer laser, and further to provide a composition for forming such an antireflection film. [MEANS FOR SOLVING PROBLEMS] There is provided an antireflection film forming composition characterized by containing a polymer having a pyrimidinetrione structure, imidazolidinedione structure, imidazolidinetrione structure or triazinetrione structure and containing a solvent.

    Abstract translation: 本发明的目的在于提供一种抗光反射防止效果高,且不会与光致抗蚀剂混合的防反射膜,并且能够用于利用ArF准分子激光器和F2准分子激光器等的照射光的光刻工序中, 进一步提供用于形成这种抗反射膜的组合物。 [解决问题的手段]提供一种防反射膜形成用组合物,其特征在于,含有具有嘧啶三酮结构,咪唑烷二酮结构,咪唑烷三酮结构或三嗪三酮结构的聚合物,且含有溶剂。

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