PIEZOELECTRIC BASED MEMS STRUCTURE
    3.
    发明公开
    PIEZOELECTRIC BASED MEMS STRUCTURE 有权
    电气PIEZO基于MEMS结构

    公开(公告)号:EP2803094A1

    公开(公告)日:2014-11-19

    申请号:EP13706320.2

    申请日:2013-01-12

    摘要: In one embodiment, a method of deforming a MEMS structure includes providing a base layer (102), providing a first piezoelectric slab (106, 108, 110, 112) operably connected to a surface of the base layer (102), determining a desired deformation of the base layer, applying a first potential to a first electrode operably connected to the first piezoelectric slab, applying a second potential to a second electrode operably connected to the first piezoelectric slab (106, 108, 110, 112), and deforming the base layer (102) with the first piezoelectric slab (106, 108, 110, 112) using the applied first potential and the applied second potential based upon the determined desired deformation.

    RESISTIVE MEMS HUMIDITY SENSOR
    9.
    发明公开
    RESISTIVE MEMS HUMIDITY SENSOR 审中-公开
    电阻式微机电传感器

    公开(公告)号:EP2984474A1

    公开(公告)日:2016-02-17

    申请号:EP13821548.8

    申请日:2013-12-17

    IPC分类号: G01N27/12

    CPC分类号: G01N27/121

    摘要: A semiconductor device includes a substrate, an insulating film provided on a surface of the substrate, and a sensing film formed of a conductive material deposited on top of the insulating film. The sensing film defines at least one conductive path between a first position and a second position on the insulating film. A first circuit connection is electrically connected to the sensing film at the first position on the insulating layer, and a second circuit connection is electrically connected to the sensing film at the second position. A control circuit is operatively connected to the first circuit connection and the second circuit connection for measuring an electrical resistance of the sensing film. The sensing film has a thickness that enables a resistivity of the sensing film to be altered predictably in a manner that is dependent on ambient moisture content.

    摘要翻译: 半导体器件包括衬底,设置在衬底的表面上的绝缘膜和由沉积在绝缘膜的顶部上的导电材料形成的感测膜。 感测膜限定绝缘膜上的第一位置和第二位置之间的至少一个导电路径。 第一电路连接在绝缘层上的第一位置电连接到感测膜,并且第二电路连接在第二位置电连接到感测膜。 控制电路可操作地连接到第一电路连接和用于测量感测膜的电阻的第二电路连接。 感测膜具有能够以取决于环境水分含量的方式预测地改变感测膜的电阻率的厚度。

    PORTABLE DEVICE WITH TEMPERATURE SENSING
    10.
    发明公开
    PORTABLE DEVICE WITH TEMPERATURE SENSING 审中-公开
    具有温度便携式设备

    公开(公告)号:EP2974046A1

    公开(公告)日:2016-01-20

    申请号:EP14769253.7

    申请日:2014-03-07

    IPC分类号: H04B1/40

    摘要: A hand-held device having a housing and a processor disposed within the housing, includes a camera and a temperature sensing element having an adjustable field of view. The camera is configured to generate an image of an object and to permit the user to frame the image at a portion of the object to determine the temperature of the framed portion. The temperature sensing element includes a plurality of temperature sensors and the processor is configured to select ones of the plurality of sensors to produce a field of view (FOV) of the temperature sensing element that is less than or equal to the frame in the image. The selected sensors are activated to generate signals corresponding to the temperature of the object in the FOV and the processor is configured to determine a sensed temperature based on the sensor signals.