摘要:
The purpose of the present invention is to provide: a resin composition, a cured product of which has extremely low residual stress and exhibits excellent adhesion to a metal substrate such as a Pt, LT or Ta substrate after a wet heat test in the fields of semiconductors and MEMS/micromachine applications; a laminate of this resin composition; and a cured product of this resin composition or the laminate. The present invention is a photosensitive resin composition which contains an epoxy resin (A), a compound having a phenolic hydroxyl group (B) and a cationic photopolymerization initiator (C), and wherein: the epoxy resin (A) has a weighted average epoxy equivalent weight of 300 g/eq. or more; 20% by mass or more of the epoxy resin (A) is an epoxy resin represented by formula (1) and having an epoxy equivalent weight of 500-4,500 g/eq.; and the compound having a phenolic hydroxyl group (B) contains a phenolic compound having a specific structure.
摘要:
A radiation-sensitive resin composition comprising a binder resin (A), radiation-sensitive compound (B), cross-linking agent (C), and silane coupling agent (D) represented by the following general formula (1) is provided: where, in the general formula (1), R 1 to R 3 respectively independently are a monovalent alkyl group having 1 to 5 carbon atoms, R 4 is a divalent alkylene group having 1 to 10 carbon atoms, R 5 is a hydrogen atom or monovalent alkyl group having 1 to 5 carbon atoms, and R 6 to R 10 are a hydrogen atom or monavalent alkyl group having 1 to 5 carbon atoms.
摘要:
A coating for use with a hydrophilic sheet substrate to form a lithographic printing plate precursor, including at least one Compound A silane compound and at least one Compound B phosphinic acid or organic derivative thereof. Compounds A and B experience a synergistic interaction which substantially increases adhesion to the substrate of areas imaged by radiation. The resulting plate is exhibits high on-press durability suitable for high volume commercial uses without a preheat step prior to development, even when imaged with lower levels of radiation such as violet lasers. A method of preparing a lithographic printing plate includes imagewise exposing the coating on a surface of a hydrophilic substrate to violet radiation and developing in an alkaline aqueous solution without preheating.
摘要:
The purpose of the present invention is to provide: a photosensitive epoxy resin composition and/or a resist laminate of said resin composition that makes it possible to use photolithography to form an image having a vertical sidewall shape and fine resolution, low stress, and heat/humidity resistance; and a cured product of said resin composition and said resist laminate. The present invention is a photosensitive resin composition comprising (A) an epoxy resin; (B) a polyphenol compound having a specific structure; (C) a photocationic polymerization initiator; and (D) an epoxy group-containing silane compound. The epoxy resin (A) comprises: an epoxy resin (a) obtained by reacting a phenol derivative that is represented by formula (1) with an epihalohydrin; and an epoxy resin (b) that is represented by formula (2).
摘要:
The present invention provides a silicon-containing surface modifier wherein the modifier contains one or more of a repeating unit shown by the following general formula (A) and a partial structure shown by the following general formula (C).The present invention has an object to provide a resist underlayer film applicable not only to a negatively developed resist pattern formed by a hydrophilic organic compound but also to a conventional positively developed resist pattern formed by a hydrophobic compound.
摘要:
The invention provides a composition comprising at least the following A and B: A) polymer that comprises the following structural unit 1:
wherein L is CX-CYZ, where X, Y, and Z are each independently selected from hydrogen, an alkyl, or a substituted alkyl; and, M is an alkylene, an arylene, a substituted alkylene, a substituted arylene, or C(O)O-W-, where W is an alkylene or a substituted alkylene; and R', R", and R"' are each independently selected from an aromatic hydrocarbon, an aliphatic hydrocarbon, or a substituted hydrocarbon that comprises one or more of O, N, S, or Si atoms, provided that at least one of R', R", and R'" is selected from alkoxyl, aryloxyl, hydroxyl, halide, carboxyl, or carbonate; and, p is an integer from 1 to 10,000; and
with the proviso that the polymer does not comprise a polyhedral oligomeric silsesquioxane (POSS) structure; and B) a polymer formed from a first composition comprising at least one of Compound F1, Compound F2, Compound F3 and/or Compound F4, each as described herein.
摘要:
There is provided a lithographic resist underlayer film-forming composition for forming a resist underlayer film which can be used as a hard mask. A lithographic resist underlayer film-forming composition including a silane compound having sulfonamide group, wherein the silane compound having sulfonamide group is a hydrolyzable organosilane having a sulfonamide group in the molecule, a hydrolyzate thereof, or a hydrolytic condensation product thereof. The composition including a silane compound having sulfonamide group and a silane compound lacking a sulfonamide group, wherein the silane compound having sulfonamide group is present within the silane compounds overall in a proportion of less than 1 mol%, for example 0. 1 to 0.95 mol%.