Salt and resist composition
    6.
    发明专利
    Salt and resist composition 审中-公开
    盐和组合物

    公开(公告)号:JP2011116746A

    公开(公告)日:2011-06-16

    申请号:JP2010230577

    申请日:2010-10-13

    摘要: PROBLEM TO BE SOLVED: To provide a resist composition which can form resist patterns having excellent resolution and line edge roughness, and to provide a salt useful for the resist composition. SOLUTION: There are provided the salt represented by formula (B1) [wherein, Q 1 and Q 2 are each independently F or 1C to 6C perfluoroalkyl; L 1 is a single bond, or a linear or branched divalent 1C to 17C saturated aliphatic hydrocarbon group; Y 1 is a group represented by formula (B2) which may have one or more substituents; Z + is an organic cation], and the resist composition containing the salt represented by formula (B1) as an acid-generating agent. COPYRIGHT: (C)2011,JPO&INPIT

    摘要翻译: 要解决的问题:提供能够形成具有优异的分辨率和线边缘粗糙度的抗蚀剂图案的抗蚀剂组合物,并提供可用于抗蚀剂组合物的盐。 提供由式(B1)表示的盐[其中,Q 1 和Q 2 各自独立地为F或1C至6C全氟烷基; L 1 是单键或直链或支链二价1C至17C饱和脂族烃基; Y(SP)1是由式(B2)表示的基团,其可以具有一个或多个取代基; Z + 是有机阳离子],和含有式(B1)表示的盐作为酸发生剂的抗蚀剂组合物。 版权所有(C)2011,JPO&INPIT

    Polyurethane-forming polyol component comprising anionic diol and composition
    10.
    发明专利
    Polyurethane-forming polyol component comprising anionic diol and composition 有权
    聚氨酯形成的包含阴离子和组合物的多元醇组分

    公开(公告)号:JP2005015500A

    公开(公告)日:2005-01-20

    申请号:JP2003125070

    申请日:2003-04-30

    摘要: PROBLEM TO BE SOLVED: To solve the problem of an unsatisfactory level of the resistance to hydrolysis of a polyurethane resin for practical purposes in spite of its good dyeability although heretofore it is known that use of a high-molecular weight polyol composed of a sulfonate-containing polyester polyol imparts dyeability, hygroscopicity and the like to the polyurethane resin. SOLUTION: The polyurethane-forming polyol component comprises an anionic diol (A1). An anionic diol composition is composed of the anionic diol (A1), another active hydrogen atom-containing compound (A2) and/or a compounding component (A3) selected from the group consisting of an inert solvent (A31) and an additive (A32), and does not contain >85 mol% (A2) based on the total number of moles of (A1) and (A2). COPYRIGHT: (C)2005,JPO&NCIPI

    摘要翻译: 解决问题:尽管迄今为止,尽管迄今为止,尽管迄今为止,为了解决聚氨酯树脂的耐水解性不能令人满意的问题,尽管迄今为止,已知使用由以下组成的高分子量多元醇 含有磺酸酯的聚酯多元醇赋予了聚氨酯树脂的染色性,吸湿性等。 解决方案:聚氨酯形成多元醇组分包含阴离子二醇(A1)。 阴离子二醇组合物由阴离子二醇(A1),含有活性氢原子的化合物(A2)和/或选自惰性溶剂(A31)和添加剂(A32)的配混组分(A3)组成 ),并且基于(A1)和(A2)的总摩尔数不含有> 85摩尔%(A2)。 版权所有(C)2005,JPO&NCIPI