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公开(公告)号:TWI582869B
公开(公告)日:2017-05-11
申请号:TW102109343
申请日:2013-03-15
发明人: 伊藤慎吾 , ITOH, SHINGO
IPC分类号: H01L21/60
CPC分类号: H01L23/49503 , H01L23/3107 , H01L23/3171 , H01L23/4952 , H01L24/05 , H01L24/45 , H01L24/48 , H01L24/73 , H01L24/85 , H01L2224/02166 , H01L2224/04042 , H01L2224/05624 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/05664 , H01L2224/05669 , H01L2224/32245 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/48247 , H01L2224/48463 , H01L2224/48465 , H01L2224/48471 , H01L2224/48479 , H01L2224/48624 , H01L2224/48639 , H01L2224/48644 , H01L2224/48647 , H01L2224/48655 , H01L2224/48664 , H01L2224/48669 , H01L2224/48824 , H01L2224/48839 , H01L2224/48844 , H01L2224/48847 , H01L2224/48855 , H01L2224/48864 , H01L2224/48869 , H01L2224/73265 , H01L2224/85051 , H01L2224/85186 , H01L2924/00014 , H01L2924/01047 , H01L2924/181 , H01L2924/00 , H01L2924/00012 , H01L2924/01204 , H01L2924/01205 , H01L2924/01203 , H01L2924/01056 , H01L2924/0102 , H01L2924/01038 , H01L2924/01004 , H01L2924/01013 , H01L2924/00015 , H01L2924/01016 , H01L2924/01017 , H01L2924/20752 , H01L2924/013 , H01L2924/20751 , H01L2924/20753 , H01L2224/4554
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公开(公告)号:TWI579392B
公开(公告)日:2017-04-21
申请号:TW104115090
申请日:2015-05-12
发明人: 米爾克 歐根 , MILKE, EUGEN , 艾諾茲 拉碧 , AINOUZ, LARBI , 普熱諾希爾 彼得 , PRENOSIL, PETER
CPC分类号: H01B13/0006 , B21C1/02 , C22C9/00 , C22F1/008 , C22F1/08 , C23C30/005 , H01B1/026 , H01B13/0016 , H01B13/0036 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/4312 , H01L2224/4321 , H01L2224/4382 , H01L2224/43847 , H01L2224/43848 , H01L2224/45014 , H01L2224/45015 , H01L2224/45016 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45664 , H01L2224/45666 , H01L2224/45669 , H01L2224/45671 , H01L2224/48091 , H01L2224/48247 , H01L2224/48472 , H01L2224/85065 , H01L2224/85075 , H01L2924/00011 , H01L2924/12041 , H01L2924/14 , H01L2924/181 , H01L2924/00014 , H01L2924/00015 , H01L2924/20759 , H01L2924/2076 , H01L2924/01201 , H01L2924/01202 , H01L2924/01203 , H01L2924/01204 , H01L2924/01001 , H01L2924/01007 , H01L2924/01046 , H01L2924/01047 , H01L2924/01005 , H01L2924/013 , H01L2924/00013 , H01L2924/00012 , H01L2924/01015 , H01L2924/01033 , H01L2924/00
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公开(公告)号:TW201714186A
公开(公告)日:2017-04-16
申请号:TW105143225
申请日:2015-09-18
申请人: 日鐵住金新材料股份有限公司 , NIPPON MICROMETAL CORPORATION , 新日鐵住金高新材料股份有限公司 , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
发明人: 小田大造 , ODA, DAIZO , 江藤基稀 , ETO, MOTOKI , 齋藤和之 , SAITO, KAZUYUKI , 榛原照男 , HAIBARA, TERUO , 大石良 , OISHI, RYO , 山田隆 , YAMADA, TAKASHI , 宇野智裕 , UNO, TOMOHIRO
IPC分类号: H01B1/02
CPC分类号: H01L24/45 , B32B15/00 , C22C5/04 , C22C9/00 , C22C9/06 , H01L24/43 , H01L2224/05624 , H01L2224/4312 , H01L2224/43125 , H01L2224/4321 , H01L2224/43825 , H01L2224/43826 , H01L2224/43827 , H01L2224/43848 , H01L2224/43986 , H01L2224/45 , H01L2224/45015 , H01L2224/45105 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45657 , H01L2224/45664 , H01L2224/45669 , H01L2224/45671 , H01L2224/48465 , H01L2224/48507 , H01L2224/48824 , H01L2224/85045 , H01L2224/85065 , H01L2224/85075 , H01L2224/85439 , H01L2924/00011 , H01L2924/00014 , H01L2924/01014 , H01L2924/10253 , H01L2924/1576 , H01L2924/181 , H01L2924/01031 , H01L2924/01032 , H01L2924/01028 , H01L2924/01077 , H01L2924/01078 , H01L2924/01005 , H01L2924/01015 , H01L2924/01012 , H01L2924/01029 , H01L2924/00012 , H01L2924/01202 , H01L2924/01203 , H01L2924/01204 , H01L2924/20106 , H01L2924/20107 , H01L2924/20108 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/20752 , H01L2924/013 , H01L2924/01007 , H01L2924/01001 , H01L2924/00013 , H01L2924/01004 , H01L2924/01046 , H01L2924/01033
摘要: 本發明提供一種接合線,其係於表面具有Pd被覆層之Cu接合線,且改善高溫高濕環境下之球接合部之接合可靠性,適合於車載用元件。 於具有Cu合金芯材、及形成於上述Cu合金芯材之表面之Pd被覆層之半導體裝置用接合線中,接合線包含合計為0.011~1.2質量%之Ga、Ge。藉此,可提昇高溫高濕環境下之球接合部之接合壽命,改善接合可靠性。較佳為Pd被覆層之厚度為0.015~0.150μm。若接合線進而含有分別為0.011~1.2質量%之Ni、Ir、Pt之1種以上,則可提昇175℃以上之高溫環境下之球接合部可靠性。又,若於Pd被覆層之表面進而形成包含Au及Pd之合金表皮層,則會改善楔接合性。
简体摘要: 本发明提供一种接合线,其系于表面具有Pd被覆层之Cu接合线,且改善高温高湿环境下之球接合部之接合可靠性,适合于车载用组件。 于具有Cu合金芯材、及形成于上述Cu合金芯材之表面之Pd被覆层之半导体设备用接合线中,接合线包含合计为0.011~1.2质量%之Ga、Ge。借此,可提升高温高湿环境下之球接合部之接合寿命,改善接合可靠性。较佳为Pd被覆层之厚度为0.015~0.150μm。若接合线进而含有分别为0.011~1.2质量%之Ni、Ir、Pt之1种以上,则可提升175℃以上之高温环境下之球接合部可靠性。又,若于Pd被覆层之表面进而形成包含Au及Pd之合金表皮层,则会改善楔接合性。
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公开(公告)号:TWI574279B
公开(公告)日:2017-03-11
申请号:TW105101101
申请日:2016-01-14
申请人: 日鐵住金新材料股份有限公司 , NIPPON MICROMETAL CORPORATION , 新日鐵住金高新材料股份有限公司 , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
发明人: 山田隆 , YAMADA, TAKASHI , 小田大造 , ODA, DAIZO , 大石良 , OISHI, RYO , 宇野智裕 , UNO, TOMOHIRO
IPC分类号: H01B1/02
CPC分类号: H01L24/45 , B23K35/0227 , B23K35/302 , B23K2201/40 , C22C5/04 , C22C9/00 , C22C9/04 , C22C9/06 , H01L23/49582 , H01L24/05 , H01L24/43 , H01L24/48 , H01L24/85 , H01L2224/05624 , H01L2224/43 , H01L2224/43125 , H01L2224/4321 , H01L2224/43825 , H01L2224/43848 , H01L2224/43986 , H01L2224/45 , H01L2224/45005 , H01L2224/45015 , H01L2224/45144 , H01L2224/45147 , H01L2224/45155 , H01L2224/45164 , H01L2224/45169 , H01L2224/45565 , H01L2224/45572 , H01L2224/45644 , H01L2224/45664 , H01L2224/45847 , H01L2224/45944 , H01L2224/45964 , H01L2224/4801 , H01L2224/48011 , H01L2224/48247 , H01L2224/48463 , H01L2224/48465 , H01L2224/48507 , H01L2224/48844 , H01L2224/48864 , H01L2224/78 , H01L2224/78301 , H01L2224/85 , H01L2224/85045 , H01L2224/85075 , H01L2224/85181 , H01L2224/85203 , H01L2224/85207 , H01L2224/85444 , H01L2224/85464 , H01L2924/00011 , H01L2924/10253 , H01L2924/15738 , H01L2924/15763 , H01L2924/35121 , H01L2924/20106 , H01L2924/20107 , H01L2924/20108 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/00014 , H01L2924/01046 , H01L2924/01078 , H01L2924/01029 , H01L2924/01079 , H01L2924/01028 , H01L2924/01015 , H01L2924/01005 , H01L2924/01004 , H01L2924/01026 , H01L2924/01012 , H01L2924/01022 , H01L2924/0103 , H01L2924/01047 , H01L2924/01014 , H01L2924/01202 , H01L2924/01203 , H01L2924/01204 , H01L2924/00015 , H01L2924/20751 , H01L2924/20752 , H01L2924/01007 , H01L2924/20654 , H01L2924/20655 , H01L2924/20656 , H01L2924/013 , H01L2924/00013 , H01L2924/00012 , H01L2924/00 , H01L2924/01033 , H01L2924/01083
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公开(公告)号:TW201709217A
公开(公告)日:2017-03-01
申请号:TW105133324
申请日:2015-07-24
申请人: 日鐵住金新材料股份有限公司 , NIPPON MICROMETAL CORPORATION , 新日鐵住金高新材料股份有限公司 , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
发明人: 山田隆 , YAMADA, TAKASHI , 小田大造 , ODA, DAIZO , 榛原照男 , HAIBARA, TERUO , 大石良 , OISHI, RYO , 齋藤和之 , SAITO, KAZUYUKI , 宇野智裕 , UNO, TOMOHIRO
CPC分类号: B23K35/0227 , B23K35/3013 , B23K35/302 , B23K2201/40 , C22C5/04 , C22C9/00 , C22C9/04 , C22C9/06 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/05624 , H01L2224/43 , H01L2224/4312 , H01L2224/43125 , H01L2224/4321 , H01L2224/4382 , H01L2224/43848 , H01L2224/43986 , H01L2224/45 , H01L2224/45005 , H01L2224/45015 , H01L2224/45105 , H01L2224/45109 , H01L2224/45111 , H01L2224/45113 , H01L2224/45118 , H01L2224/4512 , H01L2224/45147 , H01L2224/45155 , H01L2224/45169 , H01L2224/45173 , H01L2224/45178 , H01L2224/45541 , H01L2224/45565 , H01L2224/45572 , H01L2224/45644 , H01L2224/45664 , H01L2224/48227 , H01L2224/48247 , H01L2224/4845 , H01L2224/48463 , H01L2224/48824 , H01L2224/78 , H01L2224/78251 , H01L2224/85 , H01L2224/85065 , H01L2224/85075 , H01L2224/85203 , H01L2224/85444 , H01L2224/85464 , H01L2924/01005 , H01L2924/01012 , H01L2924/01015 , H01L2924/0102 , H01L2924/01032 , H01L2924/01033 , H01L2924/01034 , H01L2924/01052 , H01L2924/01057 , H01L2924/0665 , H01L2924/0705 , H01L2924/10253 , H01L2924/186 , H01L2924/01028 , H01L2924/0103 , H01L2924/01045 , H01L2924/01049 , H01L2924/01077 , H01L2924/01078 , H01L2924/01031 , H01L2924/0105 , H01L2924/01051 , H01L2924/01083 , H01L2924/01079 , H01L2924/01046 , H01L2924/01029 , H01L2924/01202 , H01L2924/01203 , H01L2924/01204 , H01L2924/00015 , H01L2924/20106 , H01L2924/20107 , H01L2924/20108 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/20752 , H01L2924/00014 , H01L2924/01014 , H01L2924/013 , H01L2924/00013 , H01L2924/20105 , H01L2924/01001 , H01L2924/01007 , H01L2924/00012 , H01L2924/00 , H01L2924/01027 , H01L2924/01047 , H01L2924/01013
摘要: 本發明係於具有Cu合金芯材與形成於其表面之Pd被覆層之半導體裝置用接合導線,謀求175℃~200℃之HTS中之球接合部之接合可靠性提高、與耐力比(=最大耐力/0.2%耐力):1.1~1.6之併存。 藉由於導線中含有Ni、Zn、Rh、In、Ir、Pt之1種以上總計0.03~2質量%,而提高HTS中之球接合部之接合可靠性,進而藉由於對於接合導線之垂直於導線軸之方向之芯材剖面測定結晶方位之結果中,將導線長度方向之結晶方位中、相對於導線長度方向而角度差為15度以下的結晶方位 之方位比率設為50%以上,且將接合導線之垂直於導線軸之方向之芯材剖面中之平均結晶粒徑設為0.9~1.3μm,而使耐力比為1.6以下。
简体摘要: 本发明系于具有Cu合金芯材与形成于其表面之Pd被覆层之半导体设备用接合导线,谋求175℃~200℃之HTS中之球接合部之接合可靠性提高、与耐力比(=最大耐力/0.2%耐力):1.1~1.6之并存。 借由于导线中含有Ni、Zn、Rh、In、Ir、Pt之1种以上总计0.03~2质量%,而提高HTS中之球接合部之接合可靠性,进而借由于对于接合导线之垂直于导线轴之方向之芯材剖面测定结晶方位之结果中,将导线长度方向之结晶方位中、相对于导线长度方向而角度差为15度以下的结晶方位<100>之方位比率设为50%以上,且将接合导线之垂直于导线轴之方向之芯材剖面中之平均结晶粒径设为0.9~1.3μm,而使耐力比为1.6以下。
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公开(公告)号:TW201708553A
公开(公告)日:2017-03-01
申请号:TW105137924
申请日:2016-05-26
申请人: 日鐵住金新材料股份有限公司 , NIPPON MICROMETAL CORPORATION , 新日鐵住金高新材料股份有限公司 , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
发明人: 山田隆 , YAMADA, TAKASHI , 小田大造 , ODA, DAIZO , 榛原照男 , HAIBARA, TERUO , 大石良 , OISHI, RYO , 齋藤和之 , SAITO, KAZUYUKI , 宇野智裕 , UNO, TOMOHIRO
CPC分类号: B23K35/0227 , B23K35/3013 , B23K35/302 , B23K2201/40 , C22C5/04 , C22C9/00 , C22C9/04 , C22C9/06 , H01L24/05 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/05624 , H01L2224/43 , H01L2224/4312 , H01L2224/43125 , H01L2224/4321 , H01L2224/4382 , H01L2224/43848 , H01L2224/43986 , H01L2224/45 , H01L2224/45005 , H01L2224/45015 , H01L2224/45105 , H01L2224/45109 , H01L2224/45111 , H01L2224/45113 , H01L2224/45118 , H01L2224/4512 , H01L2224/45147 , H01L2224/45155 , H01L2224/45169 , H01L2224/45173 , H01L2224/45178 , H01L2224/45541 , H01L2224/45565 , H01L2224/45572 , H01L2224/45644 , H01L2224/45664 , H01L2224/48227 , H01L2224/48247 , H01L2224/4845 , H01L2224/48463 , H01L2224/48824 , H01L2224/78 , H01L2224/78251 , H01L2224/85 , H01L2224/85065 , H01L2224/85075 , H01L2224/85203 , H01L2224/85444 , H01L2224/85464 , H01L2924/01005 , H01L2924/01012 , H01L2924/01015 , H01L2924/0102 , H01L2924/01032 , H01L2924/01033 , H01L2924/01034 , H01L2924/01052 , H01L2924/01057 , H01L2924/0665 , H01L2924/0705 , H01L2924/10253 , H01L2924/186 , H01L2924/01028 , H01L2924/0103 , H01L2924/01045 , H01L2924/01049 , H01L2924/01077 , H01L2924/01078 , H01L2924/01031 , H01L2924/0105 , H01L2924/01051 , H01L2924/01083 , H01L2924/01079 , H01L2924/01046 , H01L2924/01029 , H01L2924/01202 , H01L2924/01203 , H01L2924/01204 , H01L2924/00015 , H01L2924/20106 , H01L2924/20107 , H01L2924/20108 , H01L2924/20109 , H01L2924/2011 , H01L2924/20111 , H01L2924/20752 , H01L2924/00014 , H01L2924/01014 , H01L2924/013 , H01L2924/00013 , H01L2924/20105 , H01L2924/01001 , H01L2924/01007 , H01L2924/00012 , H01L2924/00 , H01L2924/01027 , H01L2924/01047 , H01L2924/01013
摘要: 本發明之半導體裝置用接合線具有Cu合金芯材、及形成於其表面之Pd被覆層,可同時實現高溫下之球接合部之接合可靠性提高、及耐力比(=最大耐力/0.2%耐力):1.1~1.6。 藉由使導線中包含賦予高溫環境下之連接可靠性之元素而提高高溫下之球接合部之接合可靠性,進而,藉由於對接合線之垂直於導線軸之方向之芯材剖面測定結晶方位之結果中,將導線長度方向之結晶方位中相對於導線長度方向之角度差為15度以下之結晶方位 之方位比率設為30%以上,且將接合線之垂直於導線軸之方向之芯材剖面中之平均結晶粒徑設為0.9~1.5μm,而將耐力比設為1.6以下。
简体摘要: 本发明之半导体设备用接合线具有Cu合金芯材、及形成于其表面之Pd被覆层,可同时实现高温下之球接合部之接合可靠性提高、及耐力比(=最大耐力/0.2%耐力):1.1~1.6。 借由使导线中包含赋予高温环境下之连接可靠性之元素而提高高温下之球接合部之接合可靠性,进而,借由于对接合线之垂直于导线轴之方向之芯材剖面测定结晶方位之结果中,将导线长度方向之结晶方位中相对于导线长度方向之角度差为15度以下之结晶方位<100>之方位比率设为30%以上,且将接合线之垂直于导线轴之方向之芯材剖面中之平均结晶粒径设为0.9~1.5μm,而将耐力比设为1.6以下。
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公开(公告)号:TW201631601A
公开(公告)日:2016-09-01
申请号:TW104118465
申请日:2015-06-05
申请人: 日鐵住金新材料股份有限公司 , NIPPON MICROMETAL CORPORATION , 新日鐵住金高新材料股份有限公司 , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
发明人: 小田大造 , ODA, DAIZO , 江藤基稀 , ETO, MOTOKI , 山田隆 , YAMADA, TAKASHI , 榛原照男 , HAIBARA, TERUO , 大石良 , OISHI, RYO , 宇野智裕 , UNO, TOMOHIRO , 小山田哲哉 , OYAMADA, TETSUYA
CPC分类号: H01L24/45 , C22C9/00 , C22F1/08 , H01L24/05 , H01L24/43 , H01L24/48 , H01L24/85 , H01L2224/05624 , H01L2224/4312 , H01L2224/43125 , H01L2224/4321 , H01L2224/43848 , H01L2224/45 , H01L2224/45005 , H01L2224/45015 , H01L2224/45109 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/45609 , H01L2224/45644 , H01L2224/45664 , H01L2224/48011 , H01L2224/48247 , H01L2224/48465 , H01L2224/48507 , H01L2224/48824 , H01L2224/85045 , H01L2224/85054 , H01L2224/85065 , H01L2224/85075 , H01L2224/8509 , H01L2224/85203 , H01L2224/85439 , H01L2924/00011 , H01L2924/01005 , H01L2924/01012 , H01L2924/01015 , H01L2924/01028 , H01L2924/01031 , H01L2924/01032 , H01L2924/01045 , H01L2924/01046 , H01L2924/01078 , H01L2924/10253 , H01L2924/1576 , H01L2924/181 , H01L2924/00014 , H01L2924/00012 , H01L2924/20106 , H01L2924/20107 , H01L2924/20108 , H01L2924/20109 , H01L2924/20111 , H01L2924/20752 , H01L2924/01204 , H01L2924/01049 , H01L2924/01014 , H01L2924/01029 , H01L2924/013 , H01L2924/00013 , H01L2924/01001 , H01L2924/01007 , H01L2924/20105 , H01L2924/20656 , H01L2924/00 , H01L2924/2011 , H01L2924/01004 , H01L2924/01033
摘要: 本發明提供一種對表面具有Pd被覆層之Cu接合導線改善高溫高濕環境下之球接合部之接合可靠性而適於車載裝置的接合導線。於具有Cu合金芯材、與形成於上述Cu合金芯材之表面上之Pd被覆層的半導體裝置用接合導線中,接合導線包含0.011~1.2質量%之In,Pd被覆層之厚度為0.015~0.150μm。藉此,可延長高溫高濕環境下之球接合部之接合壽命,改善接合可靠性。若Cu合金芯材含有分別為0.05~1.2質量%之Pt、Pd、Rh、Ni中之1種以上,則可提高175℃以上之高溫環境下之球接合部可靠性。又,若於Pd被覆層之表面進而形成Au表皮層,則楔形接合性改善。
简体摘要: 本发明提供一种对表面具有Pd被覆层之Cu接合导线改善高温高湿环境下之球接合部之接合可靠性而适于车载设备的接合导线。于具有Cu合金芯材、与形成于上述Cu合金芯材之表面上之Pd被覆层的半导体设备用接合导线中,接合导线包含0.011~1.2质量%之In,Pd被覆层之厚度为0.015~0.150μm。借此,可延长高温高湿环境下之球接合部之接合寿命,改善接合可靠性。若Cu合金芯材含有分别为0.05~1.2质量%之Pt、Pd、Rh、Ni中之1种以上,则可提高175℃以上之高温环境下之球接合部可靠性。又,若于Pd被覆层之表面进而形成Au表皮层,则楔形接合性改善。
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公开(公告)号:TWI538122B
公开(公告)日:2016-06-11
申请号:TW103119323
申请日:2014-06-04
申请人: 矽格瑪科技有限公司
CPC分类号: H01L2224/43 , H01L2224/45 , H01L2224/45015 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/45644 , H01L2224/45664 , H01L2924/00011 , H01L2924/181 , H01L2924/2076 , H01L2924/20759 , H01L2924/20758 , H01L2924/00 , H01L2924/013 , H01L2924/01083 , H01L2924/00013 , H01L2924/00012 , H01L2924/01033 , H01L2924/01204 , H01L2924/20751 , H01L2924/20752 , H01L2924/20753 , H01L2924/20754 , H01L2924/20755
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公开(公告)号:TWI535866B
公开(公告)日:2016-06-01
申请号:TW101105602
申请日:2012-02-21
发明人: 加納學 , KANOU, GAKU
CPC分类号: B23K35/302 , C22C9/00 , C22C9/08 , C25C1/12 , H01L24/43 , H01L24/45 , H01L2224/43 , H01L2224/45015 , H01L2224/45147 , H01L2924/00011 , H01L2924/00014 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01028 , H01L2924/01029 , H01L2924/01033 , H01L2924/01047 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/00 , H01L2924/01204 , H01L2924/01005 , H01L2924/01056 , H01L2924/01004 , H01L2924/01083 , H01L2924/0102 , H01L2924/01058 , H01L2924/01027 , H01L2924/01024 , H01L2924/01066 , H01L2924/01063 , H01L2924/01064 , H01L2924/01032 , H01L2924/01049 , H01L2924/01077 , H01L2924/01057 , H01L2924/01012 , H01L2924/01042 , H01L2924/0106 , H01L2924/01046 , H01L2924/01078 , H01L2924/01045 , H01L2924/01044 , H01L2924/01051 , H01L2924/0105 , H01L2924/01038 , H01L2924/01039 , H01L2924/01022 , H01L2924/0107 , H01L2924/0103 , H01L2924/0104 , H01L2924/01092 , H01L2924/20752 , H01L2924/013 , H01L2224/48
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公开(公告)号:TW201602371A
公开(公告)日:2016-01-16
申请号:TW104115090
申请日:2015-05-12
发明人: 米爾克 歐根 , MILKE, EUGEN , 艾諾茲 拉碧 , AINOUZ, LARBI , 普熱諾希爾 彼得 , PRENOSIL, PETER
CPC分类号: H01B13/0006 , B21C1/02 , C22C9/00 , C22F1/008 , C22F1/08 , C23C30/005 , H01B1/026 , H01B13/0016 , H01B13/0036 , H01L24/43 , H01L24/45 , H01L24/48 , H01L2224/4312 , H01L2224/4321 , H01L2224/4382 , H01L2224/43847 , H01L2224/43848 , H01L2224/45014 , H01L2224/45015 , H01L2224/45016 , H01L2224/45144 , H01L2224/45147 , H01L2224/45565 , H01L2224/45572 , H01L2224/45639 , H01L2224/45644 , H01L2224/45655 , H01L2224/45664 , H01L2224/45666 , H01L2224/45669 , H01L2224/45671 , H01L2224/48091 , H01L2224/48247 , H01L2224/48472 , H01L2224/85065 , H01L2224/85075 , H01L2924/00011 , H01L2924/12041 , H01L2924/14 , H01L2924/181 , H01L2924/00014 , H01L2924/00015 , H01L2924/20759 , H01L2924/2076 , H01L2924/01201 , H01L2924/01202 , H01L2924/01203 , H01L2924/01204 , H01L2924/01001 , H01L2924/01007 , H01L2924/01046 , H01L2924/01047 , H01L2924/01005 , H01L2924/013 , H01L2924/00013 , H01L2924/00012 , H01L2924/01015 , H01L2924/01033 , H01L2924/00
摘要: 本發明係關於一種用於製造包含具有表面之核心之接合線之方法,其中該核心包含98.0%銅且具有在7500μm2至600000μm2範圍內之橫截面積及在40N/mm2至95N/mm2範圍內之彈性極限RP0.2(屈服強度),該方法包含以下步驟:(a)提供銅核心前體;(b)牽拉該前體直至達到該線核心之最終直徑為止;(c)在650℃至1000℃範圍內之最小退火溫度下在其整個橫截面上將該經牽拉線退火並持續在4秒至2小時範圍內之最小退火時間。
简体摘要: 本发明系关于一种用于制造包含具有表面之内核之接合线之方法,其中该内核包含98.0%铜且具有在7500μm2至600000μm2范围内之横截面积及在40N/mm2至95N/mm2范围内之弹性极限RP0.2(屈服强度),该方法包含以下步骤:(a)提供铜内核前体;(b)牵拉该前体直至达到该线内核之最终直径为止;(c)在650℃至1000℃范围内之最小退火温度下在其整个横截面上将该经牵拉线退火并持续在4秒至2小时范围内之最小退火时间。
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