摘要:
A rotary cutting apparatus includes a pair of cutting tools each having a cutting blade along a tip end of its outer peripheral portion having a mountain-shaped cross section, and cuts a cylindrical material into pieces with a predetermined width by sandwiching the cylindrical material between the cutting blades so the cutting blades are respectively placed on inner and outer peripheries of the cylindrical material, and relatively rotating and moving the pair of cutting tools along an entire circumference of the cylindrical material. A second imaginary line connecting an axial center of the cylindrical material and an axial center of the inner peripheral-side cutting tool is shifted in a circumferential direction of the cylindrical material about the axial center of the cylindrical material with respect to a first imaginary line connecting the axial center of the cylindrical material and an axial center of the outer peripheral-side cutting tool.
摘要:
A coating method, which uses a coating apparatus including a rotatable tray having a recessed portion for accommodating a substrate and rotatable together with the substrate, a nozzle for supplying a coating liquid, and an applicator for spreading the coating liquid, includes the steps of placing a substrate into the recessed portion of the tray, positioning the nozzle over a non-recessed portion of the upper surface of the tray, supplying a coating liquid from the nozzle, and forming a coating liquid pool only on the non-recessed portion of the upper surface of the tray, moving the applicator in a horizontal direction while maintaining a certain distance with respect to the upper surface of the substrate for spreading the coating liquid of the coating liquid pool over the entire upper surface of the substrate, and releasing the substrate from the recessed portion of the tray.
摘要:
A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要:
An electromagnetic relay includes an electromagnetic relay body having an electromagnet and a contact part, the contact part opening and closing along with movement of the electromagnet, a terminal member supporting the electromagnetic relay body, and a base member supporting the terminal member. The terminal member has a connecting part electrically connected to the electromagnetic relay body, the electromagnetic relay body is supported by the connecting part while providing a clearance between the base member and the electromagnetic relay body.
摘要:
A separating apparatus includes a sucking plate for sticking to a support plate by suction. The sucking plate has sucking holes for expelling gas from a space between the sucking plate and the support plate. Each of the sucking holes has a diameter of not less than 0.3 mm and not more than an outer diameter of the support plate. This makes it possible to separate a supporting plate from a wafer without breaking the wafer.
摘要:
Disclosed is an adhesive composition whose component is a polymer obtained by copolymerizing a monomer composition containing styrene, a (meth)acrylic acid ester having a cyclic structure, and an alkyl(meth)acrylate having a chain structure. The monomer composition further contains a carboxylic acid having an ethylene double bond, a bifunctional monomer, and a styrene macromonomer. The polymer has a styrene block segment. This can improve heat resistance, adhesive strength in a high temperature environment, alkaline resistance, and easiness in stripping of an adhesive composition that has been subjected to a high temperature process. As a result, there can be obtained an adhesive composition which has high heat resistance, adhesive strength in a high temperature environment, and alkali resistance, and which can be easily stripped off after the adhesive composition is processed at a high temperature.
摘要:
An attaching device which makes it possible to accurately perform alignment when the diameters of a substrate and a supporting plate are substantially the same includes a mounting plate for mounting a semiconductor wafer thereon, a pressing plate for pressing a supporting plate onto the semiconductor wafer, and a pair of alignment members. The pair of alignment members are arranged to freely move back and forth in a horizontal direction, and blades for supporting a lower surface of the periphery of the supporting plate and pushing members for performing positioning in a state where the supporting plate is superposed on the semiconductor wafer are provided at tip ends of the alignment members.
摘要:
A stripping method for stripping a support plate from a laminate including a substrate and the support plate adhered to the wafer via an adhesive layer, in which the adhesive layer is formed from an adhesive compound soluble in a non-polar solvent or a highly polar solvent; and the stripping method includes the step of supplying the non-polar solvent or the highly polar solvent, so that the non-polar solvent or the highly polar solvent is retained at least on an edge portion of that surface of the laminate which faces the support plate, and on a lateral surface of the laminate.
摘要:
A main controller used in a security system having a sensor or a camera performs wireless communication with the sensor or the camera so as to control the sensor or the camera. The main controller has a plurality of communication sections that perform wireless communication by using communication systems having different communication speeds. The camera transmits and receives information by performing wireless communication with the main controller. The camera is provided with a first camera communication section and a second camera communication section that perform wireless communication by using communication systems having different communication speeds, and a camera communication control section for selecting the first camera communication section and the second camera communication section according to the information to be transmitted and received, as a communication section to perform communication.
摘要:
To provide a perforated support plate with high rigidity, the perforated support plate for supporting a surface of a wafer by interposing an adhesive layer comprises a reinforcing part for deflection prevention.