公开(公告)号：US20060284516A1

公开(公告)日：2006-12-21

申请号：US11448799

申请日：2006-06-08

申请人： Keiichi Shimaoka ,  Hirofumi Funabashi ,  Yasuichi Mitsushima ,  Toshiaki Nakagawa ,  Toshihiro Wakita ,  Shigeru Ando ,  Nobutaka Ono

发明人： Keiichi Shimaoka ,  Hirofumi Funabashi ,  Yasuichi Mitsushima ,  Toshiaki Nakagawa ,  Toshihiro Wakita ,  Shigeru Ando ,  Nobutaka Ono

IPC分类号： H01L41/00

CPC分类号： H04R19/04 ,  H04R3/005

摘要： A microphone that may identify the direction along which acoustic waves propagate with one diaphragm, and which has superior durability is provided. The microphone comprises a circular diaphragm. The diaphragm is supported at the center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one of the surfaces of the diaphragm. Second electrodes are arranged so that each second electrode faces corresponding first electrode with gap. Each first electrode and corresponding second electrode facing thereto form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm. Fourth electrodes are arranged so that each fourth electrode faces corresponding third electrode with gap. Each third electrode and corresponding fourth electrode facing thereto form a second capacitor. The controller applies a voltage to each of the second capacitors so that the capacitance of each of the first capacitors will be a constant value. The controller identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors. Vibration of the diaphragm will be inhibited by the voltages applied to the second capacitors while the direction is identified based on the voltages. The durability of the diaphragm can be improved.

摘要翻译： 提供可以识别声波以一个隔膜传播的方向并且具有优异的耐久性的麦克风。 麦克风包括圆形隔膜。 隔膜在其中心部分被支撑。 当隔膜接收到声波时，围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上。 第二电极布置成使得每个第二电极面对具有间隙的相应的第一电极。 每个第一电极和与其对应的相应的第二电极形成第一电容器。 第三电极布置在隔膜的另一个表面上。 第四电极布置成使得每个第四电极具有间隙的相应的第三电极。 每个第三电极和与其对应的相应的第四电极形成第二电容器。 控制器向每个第二电容器施加电压，使得每个第一电容器的电容将为恒定值。 控制器基于施加到每个第二电容器的电压的差异来识别声波传播的方向。 通过施加到第二电容器的电压来抑制振膜的振动，同时基于电压来识别方向。 可以提高隔膜的耐久性。

公开(公告)号：US07888840B2

公开(公告)日：2011-02-15

申请号：US11448799

申请日：2006-06-08

申请人： Keiichi Shimaoka ,  Hirofumi Funabashi ,  Yasuichi Mitsushima ,  Toshiaki Nakagawa ,  Toshihiro Wakita ,  Shigeru Ando ,  Nobutaka Ono

发明人： Keiichi Shimaoka ,  Hirofumi Funabashi ,  Yasuichi Mitsushima ,  Toshiaki Nakagawa ,  Toshihiro Wakita ,  Shigeru Ando ,  Nobutaka Ono

IPC分类号： H02N2/00 ,  H04R25/00

CPC分类号： H04R19/04 ,  H04R3/005

摘要： A microphone that identifies the direction along which acoustic waves propagate with one diaphragm, and has superior durability is provided. The microphone includes a circular diaphragm supported at a center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one surface of the diaphragm and second electrodes are arranged facing corresponding first electrodes to form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm and fourth electrodes are arranged facing corresponding third electrodes to form a second capacitor. A controller applies a voltage to the second capacitors so that the capacitance of the first capacitors will be constant and identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors.

摘要翻译： 一种麦克风，用于识别声波以一个隔膜传播的方向，并具有优异的耐久性。 麦克风包括在其中心部分处支撑的圆形隔膜。 当隔膜接收到声波时，围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上，并且第二电极被布置成面对相应的第一电极以形成第一电容器。 第三电极布置在隔膜的另一个表面上，第四电极被布置成面对相应的第三电极以形成第二电容器。 控制器向第二电容器施加电压，使得第一电容器的电容将是恒定的，并且基于施加到每个第二电容器的电压的差异来识别声波传播的方向。

公开(公告)号：US06936484B2

公开(公告)日：2005-08-30

申请号：US10618085

申请日：2003-07-14

申请人： Masakazu Kanechika ,  Kenji Nakashima ,  Yasuichi Mitsushima ,  Tetsu Kachi

发明人： Masakazu Kanechika ,  Kenji Nakashima ,  Yasuichi Mitsushima ,  Tetsu Kachi

IPC分类号： H01L21/265 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/335 ,  H01L21/8242 ,  H01L29/06 ,  H01L29/76 ,  H01L29/788 ,  H01L21/00

CPC分类号： H01L21/26506 ,  H01L21/26566 ,  H01L21/3065 ,  H01L21/3086 ,  H01L27/10864 ,  H01L29/0657 ,  H01L29/66439 ,  H01L29/7613 ,  H01L29/7888

摘要： An impurity precipitation region is formed by introducing an impurity, e.g., oxygen, into a silicon substrate or a silicon layer and thermally treating it, and performing high selectivity anisotropic etching with the precipitation region used as a micro mask. Thus, a cone (conic body or truncated conic body having an annular leading end) having a very sharp and slender needle shape with an aspect ratio of about 10 and a diameter of about 10 nm to 30 nm in the vicinity of its leading end is obtained with the micro mask used as the top. By forming an insulation layer and a drive electrode such as a gate electrode around the cone, the cone can be used for a field emission device, a single electron transistor, a memory device, a high frequency switching device, a probe of a scanning type microscope or the like.

摘要翻译： 通过将诸如氧的杂质引入到硅衬底或硅层中并对其进行热处理并且使用用作微掩模的沉淀区进行高选择性各向异性蚀刻来形成杂质析出区。 因此，在其前端附近具有纵横比为约10和直径约10nm至30nm的非常锋利且细长的针形的锥体（圆锥体或具有环形前端的截头圆锥体） 用微型掩模作为顶部获得。 通过在锥体周围形成绝缘层和诸如栅电极的驱动电极，锥体可用于场致发射器件，单电子晶体管，存储器件，高频开关器件，扫描型探针 显微镜等。

公开(公告)号：US06785117B2

公开(公告)日：2004-08-31

申请号：US10386100

申请日：2003-03-12

申请人： Minekazu Sakai ,  Toshiyuki Tsuchiya ,  Hirofumi Funabashi ,  Norio Fujitsuka ,  Yasuichi Mitsushima

发明人： Minekazu Sakai ,  Toshiyuki Tsuchiya ,  Hirofumi Funabashi ,  Norio Fujitsuka ,  Yasuichi Mitsushima

IPC分类号： H01G700

CPC分类号： G01P15/125 ,  G01P15/18 ,  G01P2015/0814 ,  G01P2015/082

摘要： A capacitive device includes a substrate, a movable electrode, and a fixed electrode. The movable electrode is located above a surface of the substrate and is movable with respect to the substrate along directions that are substantially orthogonal to the surface. The fixed electrode is stationary with respect to the substrate. When the movable electrode is displaced in a first direction that is substantially orthogonal to the surface, the total sum of area-distance quotients in the overlap between the electrodes remains substantially unchanged or decreases to provide a first reduction rate that is substantially zero or more. On the other hand, when the movable electrode is displaced in a second direction that is substantially opposite to the first direction, the total sum of area-distance quotients remains substantially unchanged or decreases to provide a second reduction rate that is substantially zero or more. The reduction rates are different from each other.

摘要翻译： 电容器件包括衬底，可动电极和固定电极。 可移动电极位于基板的表面上方并且能够沿与基板正交的方向相对于基板移动。 固定电极相对于基板是静止的。 当可移动电极在基本上与表面正交的第一方向上位移时，电极之间的重叠中的面积 - 距离商的总和基本上保持不变或减小，以提供基本为零或更大的第一减小率。 另一方面，当可移动电极在与第一方向基本相反的第二方向上移位时，面积 - 距离商的总和基本上保持不变或减小，从而提供基本为零或更大的第二减小率。 缩减率彼此不同。