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公开(公告)号：US20150250045A1
公开(公告)日：2015-09-03
申请号：US14194027
申请日：2014-02-28
Applicant: ASML Netherlands B.V.
Inventor： Yezheng Tao , Daniel J.W. Brown , Alexander Schafgans , Michael David Caudill , Daniel J. Golich , Richard L. Sandstrom , Yoshiho Amada
CPC classification number: H05G2/008 , H01S3/1003 , H01S3/1301 , H01S3/1305 , H05G2/003
Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.
Abstract translation: 一种用于极紫外（EUV）光源的系统包括光放大器，其包括位于光束路径上的增益介质，所述光放大器被配置为在输入处接收光束并且向EUV光源发射输出光束 输出 反馈系统，其测量输出光束的性质并基于测量的属性产生反馈信号; 以及位于所述光束路径中并被配置为接收所述反馈信号并响应于所述反馈信号调整所述输出光束的特性的自适应光学器件。
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Patent Agency Ranking
公开(公告)号：US09380691B2
公开(公告)日：2016-06-28
申请号：US14194027
申请日：2014-02-28
Applicant: ASML Netherlands B.V.
Inventor： Yezheng Tao , Daniel J. W. Brown , Alexander Schafgans , Michael David Caudill , Daniel J. Golich , Richard L. Sandstrom , Yoshiho Amada
CPC classification number: H05G2/008 , H01S3/1003 , H01S3/1301 , H01S3/1305 , H05G2/003
Abstract: A system for an extreme ultraviolet (EUV) light source includes an optical amplifier including a gain medium positioned on a beam path, the optical amplifier configured to receive a light beam at an input and to emit an output light beam for an EUV light source at an output; a feedback system that measures a property of the output light beam and produces a feedback signal based on the measured property; and an adaptive optic positioned in the beam path and configured to receive the feedback signal and to adjust a property of the output light beam in response to the feedback signal.
Abstract translation: 一种用于极紫外（EUV）光源的系统包括光放大器，其包括位于光束路径上的增益介质，所述光放大器被配置为在输入处接收光束并且向EUV光源发射输出光束 输出 反馈系统，其测量输出光束的性质并基于测量的属性产生反馈信号; 以及位于所述光束路径中并被配置为接收所述反馈信号并响应于所述反馈信号调整所述输出光束的特性的自适应光学器件。
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3.发明授权Variable radius mirror dichroic beam splitter module for extreme ultraviolet source 有权用于极紫外光源的可变半径反射镜二向色光束分离器模块公开(公告)号：US09516729B2
公开(公告)日：2016-12-06
申请号：US14804976
申请日：2015-07-21
Applicant: ASML Netherlands B.V.
Inventor： Kevin W Zhang , Michael Purvis , Robert J Rafac , Alexander Schafgans
CPC classification number: H05G2/003 , G01J11/00 , G02B26/0825 , G02B27/141 , H05G2/005 , H05G2/008
Abstract: A laser produced plasma extreme ultraviolet laser source comprising at least one variable radius mirror. The at least one variable radius mirror to adjust a beam diameter of a main pulse at a specified distance from a pre-pulse focal plane, where the pre-pulse radiates droplets into target droplets and the main pulse radiates the target droplets into a plasma state to generate the extreme ultraviolet radiation.
Abstract translation: 激光产生包括至少一个可变半径反射镜的等离子体极紫外激光源。 所述至少一个可变半径镜，以调整与预脉冲焦平面相距规定距离处的主脉冲的光束直径，其中预脉冲将液滴辐射到目标液滴中，并且主脉冲将目标液滴辐射到等离子体状态 以产生极紫外线辐射。
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4.发明申请Variable Radius Mirror Dichroic Beam Splitter Module for Extreme Ultraviolet Source 有权用于极紫外光源的可变半径镜二向色光束分离器模块公开(公告)号：US20160174351A1
公开(公告)日：2016-06-16
申请号：US14804976
申请日：2015-07-21
Applicant: ASML Netherlands B.V.
Inventor： Kevin W. Zhang , Michael Purvis , Robert J. Rafac , Alexander Schafgans
CPC classification number: H05G2/003 , G01J11/00 , G02B26/0825 , G02B27/141 , H05G2/005 , H05G2/008
Abstract: A laser produced plasma extreme ultraviolet laser source comprising at least one variable radius mirror. The at least one variable radius mirror to adjust a beam diameter of a main pulse at a specified distance from a pre-pulse focal plane, where the pre-pulse radiates droplets into target droplets and the main pulse radiates the target droplets into a plasma state to generate the extreme ultraviolet radiation.
Abstract translation: 激光产生包括至少一个可变半径反射镜的等离子体极紫外激光源。 所述至少一个可变半径镜，以调整与预脉冲焦平面相距规定距离处的主脉冲的光束直径，其中预脉冲将液滴辐射到目标液滴中，并且主脉冲将目标液滴辐射到等离子体状态 以产生极紫外线辐射。
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公开(公告)号：US09209595B2
公开(公告)日：2015-12-08
申请号：US14593278
申请日：2015-01-09
Applicant: ASML Netherlands B.V.
Inventor： Kevin Zhang , Christo Liebenberg , Alexander Schafgans
CPC classification number: H01S3/227 , H01S3/036 , H01S3/104 , H01S3/134 , H01S3/2232 , H01S3/2316 , H05G2/008
Abstract: An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.
Abstract translation: 极紫外光系统包括光放大器系统和催化转化系统。 光放大器系统的每个光放大器包括产生放大光束的气体混合物形式的增益介质。 光放大器系统包括流体输入和气体混合物流过的流体输出。 催化转化系统流体地连接到光放大器系统的流体输出和光放大器系统的流体输入。 催化转化系统包括催化转化器，其包括壳体; 壳体内的衬底包括开口，气体混合物可通过该开口流动; 以及作为涂层施加到衬底的开口的内表面的催化剂，所述催化剂包括金属颗粒。 金属颗粒可以是贵金属的纳米颗粒。
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公开(公告)号：US20150222083A1
公开(公告)日：2015-08-06
申请号：US14593278
申请日：2015-01-09
Applicant: ASML Netherlands B.V.
Inventor： Kevin Zhang , Christo Liebenberg , Alexander Schafgans
IPC: H01S3/227
CPC classification number: H01S3/227 , H01S3/036 , H01S3/104 , H01S3/134 , H01S3/2232 , H01S3/2316 , H05G2/008
Abstract: An extreme ultraviolet light system includes an optical amplifier system and a catalytic conversion system. Each optical amplifier of the optical amplifier system includes a gain medium in the form of a gas mixture that produces an amplified light beam. The optical amplifier system includes a fluid input and a fluid output through which the gas mixture flows. The catalytic conversion system is fluidly connected to the fluid output of the optical amplifier system and to the fluid input of the optical amplifier system. The catalytic conversion system includes a catalytic converter that includes a housing; a substrate within the housing including openings through which the gas mixture can flow; and a catalyst applied as a coating to the interior surfaces of the openings of the substrate, the catalyst including particles of metal. The particles of metal can be nanoparticles of precious metal.
Abstract translation: 极紫外光系统包括光放大器系统和催化转化系统。 光放大器系统的每个光放大器包括产生放大光束的气体混合物形式的增益介质。 光放大器系统包括流体输入和气体混合物流过的流体输出。 催化转化系统流体地连接到光放大器系统的流体输出和光放大器系统的流体输入。 催化转化系统包括催化转化器，其包括壳体; 壳体内的衬底包括开口，气体混合物可通过该开口流动; 以及作为涂层施加到衬底的开口的内表面的催化剂，所述催化剂包括金属颗粒。 金属颗粒可以是贵金属的纳米颗粒。
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