MEMS transducer amplifiers
    1.
    发明授权

    公开(公告)号:US10582309B2

    公开(公告)日:2020-03-03

    申请号:US16549625

    申请日:2019-08-23

    Abstract: This applications relates to methods and apparatus for amplifying signals from capacitive transducers, in particular MEMS transducers such as MEMS capacitive microphones. An amplifier circuit has a signal node for receiving the input signal, a transducer biasing node for outputting a transducer bias voltage for biasing the capacitive transducer, and a voltage buffer configured to generate a buffered bias voltage at a buffer node. An amplifier arrangement is configured to receive the input signal from the signal node and the buffered bias voltage. The amplifier circuit comprises a signal path for supplying the buffered bias voltage to the transducer biasing node via a first capacitance, and the amplifier arrangement comprises a feedback resistor network configured such that: a change in input signal with respect to the buffered bias voltage results in a change in the output signal with respect to the buffered bias voltage with a gain greater than one; and a change in the buffered bias voltage results in a change in the output signal with a gain equal to one.

    MEMS device
    2.
    发明授权

    公开(公告)号:US10313800B2

    公开(公告)日:2019-06-04

    申请号:US15946590

    申请日:2018-04-05

    Abstract: MEMS devices are disclosed including a MEMS microphone device comprising a first transducer adjoining a sound port, a second transducer not adjoining a sound port, a housing defining a shared volume for the first and second transducers, and circuitry arranged to combine a first signal from the first transducer and a second signal from the second transducer to produce an output signal.

    MEMS transducer amplifiers
    4.
    发明授权

    公开(公告)号:US10455331B2

    公开(公告)日:2019-10-22

    申请号:US15916597

    申请日:2018-03-09

    Abstract: An amplifier circuit has a transducer biasing node for outputting a transducer bias voltage for biasing the capacitive transducer and a signal node for receiving the input signal. An amplifier arrangement comprising a feedback resistor network provides an amplified output signal. A voltage buffer provides a buffered bias voltage at a buffer node which is connected to a terminal of the feedback resistor network, to at least partly define the quiescent level of the output signal. The buffer node is electrically coupled to the transducer biasing node via a capacitance which may form part of a bias filter.

    MEMs devices
    5.
    发明授权

    公开(公告)号:US10244331B1

    公开(公告)日:2019-03-26

    申请号:US15953094

    申请日:2018-04-13

    Abstract: The present disclosure relates to a micro electro-mechanical system (MEMS) device comprising a fixed electrode, a moveable electrode that is moveable with respect to the fixed electrode and an output terminal for outputting a transducer output signal indicative of a capacitance between the fixed electrode and the moveable electrode. A package is provided which houses the fixed electrode and the moveable electrode, the package defining a first volume on a first side of the moveable electrode. The moveable electrode is moveable within the first volume in response to sound or pressure waves incident on the moveable electrode. A power dissipation element is disposed within the package. The power dissipation element is configured to receive a generated stimulus signal and to dissipate heat into the first volume so as to modulate the pressure of air within the first volume in accordance with the received generated stimulus signal.

    Signal processing for MEMS capacitive transducers

    公开(公告)号:US10070223B2

    公开(公告)日:2018-09-04

    申请号:US15628057

    申请日:2017-06-20

    Abstract: This application relates to circuitry for processing sense signals generated by MEMS capacitive transducers for compensating for distortion in such sense signals. The circuitry has a signal path between an input (204) for receiving the sense signal and an output (205) for outputting an output signal based on said sense signal. Compensation circuitry (206, 207) is configured to monitor the signal at a first point along the signal path and generate a correction signal (Scorr); and modify the signal at at least a second point along said signal path based on said correction signal. The correction signal is generated as a function of the value of the signal at the first point along the signal path so as to introduce compensation components into the output signal that compensate for distortion components in the sense signal. The first point in the signal path may be before or after the second point in the signal path. The monitoring may be performed in an analogue or a digital part of the signal path and in either case the modification may be applied in an analogue or a digital part of the signal path.

    MEMS devices
    10.
    发明授权

    公开(公告)号:US10433054B1

    公开(公告)日:2019-10-01

    申请号:US15939994

    申请日:2018-03-29

    Abstract: The present disclosure relates to a protection system for protecting a MEMS transducer of a MEMS device from electrostatic capture, wherein the MEMS transducer is operable in a normal-sensitivity, mode and in a reduced-sensitivity mode. The protection system comprises: an overload detector for detecting an overload condition arising as a result of an excessive sound pressure level at the MEMS transducer; a signal estimator configured to generate an estimate of a sound pressure level at the MEMS transducer; and a controller configured, in response to detection by the overload detector of an overload condition, to: disable an output of the MEMS transducer; and after a delay of a first predetermined period of time: cause the MEMS transducer to operate in the reduced-sensitivity mode; enable the output of the MEMS transducer; and cause the MEMS transducer to return to the normal-sensitivity mode if the estimate of the sound pressure level generated by the signal estimator while the MEMS transducer is operating in the reduced-sensitivity mode is below a safe sound pressure level threshold for a second predetermined period of time.

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