公开(公告)号：US20120024711A1

公开(公告)日：2012-02-02

申请号：US13257716

申请日：2010-03-25

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： C25D5/02

CPC分类号： C23C18/31 ,  C23C18/32 ,  C25D3/38 ,  C25D3/58 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： A composition for filling submicrometer sized features having an aperture size of 30 nanometers or less comprising a source of copper ions, and at least one suppressing agent selected from compounds of formula (I) wherein the R1 radicals are each independently selected from a copolymer of ethylene oxide and at least one further C3 to C4 alkylene oxide, said copolymer being a random copolymer. the R2 radicals are each independently selected from R1 or alkyl. X and Y are spacer groups independently, and X for each repeating unit independently, selected from C1 to C6 alkylen and Z—(O—Z)m wherein the Z radicals are each independently selected from C2 to C6 alkylen, n is an integer equal to or greater than 0. m is an integer equal to or greater than 1.

摘要翻译： 用于填充具有30纳米或更小孔径的亚微米尺寸特征的组合物，其包含铜离子源，以及至少一种选自式（I）化合物的抑制剂，其中R 1基团各自独立地选自乙烯的共聚物 氧化物和至少一种其它C 3至C 4环氧烷烃，所述共聚物是无规共聚物。 R 2基团各自独立地选自R 1或烷基。 X和Y独立地为间隔基，X独立地选自C 1 -C 6亚烷基和Z-（O-Z）m，其中Z基独立地选自C 2 -C 6亚烷基，n是等于 m以上的整数，m为1以上的整数。

公开(公告)号：US09617647B2

公开(公告)日：2017-04-11

申请号：US13384732

申请日：2010-07-19

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Alexandra Haag ,  Charlotte Emnet

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Alexandra Haag ,  Charlotte Emnet

IPC分类号： C25D5/02 ,  H01L21/288 ,  C25D3/58 ,  C25D3/38 ,  C25D3/02 ,  H01L21/768 ,  C25D3/40

CPC分类号： C25D3/38 ,  C25D3/02 ,  C25D3/40 ,  H01L21/2885 ,  H01L21/76877

摘要： A composition comprising at least one source of metal ions and at least one additive obtainable by reacting a polyhydric alcohol comprising at least 5 hydroxyl functional groups with at least a first alkylene oxide and a second alkylene oxide from a mixture of the first alkylene oxide and the second alkylene oxide or a third alkylene oxide, a second alkylene oxide, and a first alkylene oxide in aforesaid sequence, the third alkylene oxide having a longer alkyl chain than the second alkylene oxide and the second alkylene oxide having a longer alkyl chain than the first alkylene oxide.

公开(公告)号：US09011666B2

公开(公告)日：2015-04-21

申请号：US13140712

申请日：2009-12-08

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Sophia Ebert ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Sophia Ebert ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： C25D3/38 ,  C08G73/02 ,  C08L79/02 ,  H01L21/288 ,  H01L21/768 ,  C25D3/02 ,  H05K3/42

CPC分类号： C08G73/024 ,  C08L79/02 ,  C25D3/02 ,  C25D3/38 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1—OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2—N(R1—OH)2 (Ib) to give a polyalkanolamine(II), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(II).

摘要翻译： 包含金属离子源和至少一种流平剂的组合物，其可通过将至少一种通式为N（R 1 -OH）3（Ia）的三烷醇胺和/或至少一种通式R 2 -N的二链烷醇胺 R1-OH）2（Ib），得到聚链烷醇胺（II），其中R1基团各自独立地选自具有2至6个碳原子的二价，直链或支链脂族烃基，R2基团各自选自 氢和具有1至30个碳原子的直链或支链脂族，脂环族和芳族烃基，或通过所述聚链烷醇胺（II）的烷氧基​​化，取代或烷氧基化和取代得到的衍生物。

公开(公告)号：US20120128888A1

公开(公告)日：2012-05-24

申请号：US13387776

申请日：2010-07-16

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Alexandra Haag ,  Dieter Mayer ,  Charlotte Emnet

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Alexandra Haag ,  Dieter Mayer ,  Charlotte Emnet

IPC分类号： C09D7/12 ,  B05D1/18

CPC分类号： C25D3/38 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/42

摘要： According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I) X(OH)n (I) by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

摘要翻译： 根据本发明，提供了包含至少一种金属离子源和至少一种添加剂的组合物，所述添加剂可通过使a）至少一种式（I）的多元醇（I）X（OH）n（I ）与b）至少一种烯化氧以形成包含聚氧化烯侧链的多元醇缩合物，其中n是3至6的整数，X是具有2至10个的n价直链或支链脂族或脂环族基团 碳原子，其可以是取代或未取代的。

公开(公告)号：US20120027948A1

公开(公告)日：2012-02-02

申请号：US13259482

申请日：2010-03-29

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： B05D1/18 ,  B05D3/14 ,  C09D1/00

CPC分类号： C23C18/31 ,  C23C18/32 ,  C25D3/38 ,  C25D3/58 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： A composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides, said suppressing agent having a molecular weight Mw of 6000 g/mol or more.

摘要翻译： 一种包含金属离子源的组合物和至少一种抑制剂，其可通过使a）包含活性氨基官能团的胺化合物与b）环氧乙烷和至少一种选自C 3和C 4环氧烷烃的化合物的混合物反应，所述抑制剂 试剂的分子量Mw为6000g / mol以上。

公开(公告)号：US09869029B2

公开(公告)日：2018-01-16

申请号：US13387776

申请日：2010-07-16

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Alexandra Haag ,  Dieter Mayer ,  Charlotte Emnet

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Alexandra Haag ,  Dieter Mayer ,  Charlotte Emnet

IPC分类号： C25D5/02 ,  C25D3/58 ,  C25D3/38 ,  H01L21/288 ,  H01L21/768 ,  H05K3/42 ,  C25D7/12

CPC分类号： C25D3/38 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/42

摘要： According to the present invention a composition is provided comprising at least one source of metal ions and at least one additive obtainable by reacting a) a polyhydric alcohol condensate compound derived from at least one polyalcohol of formula (I) X(OH)n  (I) by condensation with b) at least one alkylene oxide to form a polyhydric alcohol condensate comprising polyoxyalkylene side chains, wherein n is an integer from 3 to 6 and X is an n-valent linear or branched aliphatic or cycloaliphatic radical having from 2 to 10 carbon atoms, which may be substituted or unsubstituted.

公开(公告)号：US20120118750A1

公开(公告)日：2012-05-17

申请号：US13384732

申请日：2010-07-19

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Alexandra Haag ,  Charlotte Emnet

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Dieter Mayer ,  Alexandra Haag ,  Charlotte Emnet

IPC分类号： C25D3/38 ,  C25D5/02

CPC分类号： C25D3/38 ,  C25D3/02 ,  C25D3/40 ,  H01L21/2885 ,  H01L21/76877

摘要： A composition comprising at least one source of metal ions and at least one additive obtainable by reacting a poly-hydric alcohol comprising at least 5 hydroxyl functional groups with at least a first alkylene oxide and a second alkylene oxide from a mixture of the first alkylene oxide and the second alkylene oxide or a third alkylene oxide, a second alkylene oxide, and a first alkylene oxide in aforesaid sequence, the third alkylene oxide having a longer alkyl chain than the second alkylene oxide and the second alkylene oxide having a longer alkyl chain than the first alkylene oxide.

摘要翻译： 一种组合物，其包含至少一种金属离子源和至少一种添加剂，其可通过使包含至少5个羟基官能团的多元醇与至少一种第一烯化氧和第二环氧烷烃从第一烯化氧 和第二环氧烷烃或第三环氧烷烃，第二环氧烷烃和第一烯化氧，所述第三烯化氧具有比所述第二烯化氧更长的烷基链，并且所述第二烯化氧的烷基链长于 第一种环氧烷。

公开(公告)号：US20120018310A1

公开(公告)日：2012-01-26

申请号：US13260173

申请日：2010-03-31

申请人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Goepfert ,  Roman Benedikt Raether ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： C25D3/38 ,  C25D5/02

CPC分类号： C23C18/31 ,  C23C18/32 ,  C25D3/38 ,  C25D3/58 ,  C25D7/123 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： Composition comprising a source of metal ions and at least one suppressing agent obtainable by reacting a) an amine compound comprising at least three active amino functional groups with b) a mixture of ethylene oxide and at least one compound selected from C3 and C4 alkylene oxides.

摘要翻译： 包含金属离子源的组合物和至少一种抑制剂，其可通过使a）包含至少三个活性氨基官能团的胺化合物与b）环氧乙烷和至少一种选自C3和C4环氧烷烃的化合物的混合物反应而获得。

公开(公告)号：US20110290659A1

公开(公告)日：2011-12-01

申请号：US13140712

申请日：2009-12-08

申请人： Cornelia Roeger-Göpfert ,  Roman Benedikt Raether ,  Sopia Ebert ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

发明人： Cornelia Roeger-Göpfert ,  Roman Benedikt Raether ,  Sopia Ebert ,  Charlotte Emnet ,  Alexandra Haag ,  Dieter Mayer

IPC分类号： C25D3/38 ,  C25D3/02

CPC分类号： C08G73/024 ,  C08L79/02 ,  C25D3/02 ,  C25D3/38 ,  H01L21/2885 ,  H01L21/76877 ,  H05K3/423

摘要： A composition comprising a source of metal ions and at least one leveling agent obtainable by condensing at least one trialkanolamine of the general formula N(R1—OH)3 (Ia) and/or at least one dialkanolamine of the general formula R2—N(R1—OH)2 (Ib) to give a polyalkanolamine(II), wherein the R1 radicals are each independently selected from a divalent, linear or branched aliphatic hydrocarbon radical having from 2 to 6 carbon atoms, and the R2 radicals are each selected from hydrogen and linear or branched aliphatic, cycloaliphatic and aromatic hydrocarbon radicals having from 1 to 30 carbon atoms, or derivatives obtainable by alkoxylation, substitution or alkoxylation and substitution of said polyalkanolamine(II).

摘要翻译： 包含金属离子源和至少一种流平剂的组合物，其可通过将至少一种通式为N（R 1 -OH）3（Ia）的三烷醇胺和/或至少一种通式R 2 -N的二链烷醇胺 R1-OH）2（Ib），得到聚链烷醇胺（II），其中R1基团各自独立地选自具有2至6个碳原子的二价，直链或支链脂族烃基，R2基团各自选自 氢和具有1至30个碳原子的直链或支链脂族，脂环族和芳族烃基，或通过所述聚链烷醇胺（II）的烷氧基​​化，取代或烷氧基化和取代得到的衍生物。