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公开(公告)号：US20210140719A1
公开(公告)日：2021-05-13
申请号：US17092891
申请日：2020-11-09
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
IPC: F28D20/00
Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.
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公开(公告)号：US09956524B2
公开(公告)日：2018-05-01
申请号：US14289575
申请日：2014-05-28
Applicant: EBARA CORPORATION
Inventor： Toshiharu Nakazawa , Tetsuro Sugiura , Kohtaro Kawamura , Toyoji Shinohara , Takashi Kyotani , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki , Hideo Arai
CPC classification number: B01D53/74 , B01D53/005 , B01D2257/204 , B01D2257/2066 , B01D2257/553 , B01D2258/0216 , Y10T137/85978
Abstract: A vacuum pump with abatement function is used for evacuating a chamber of a manufacturing apparatus. The vacuum pump with abatement function includes a vacuum pump having a discharge port to which one or more abatement parts for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless are attached. The one or more abatement parts are selected, depending on the amount and kind of the exhaust gas discharged from the vacuum pump, from plural kinds of abatement parts which have different treatment types of exhaust gas and/or different treatment amounts of exhaust gas.
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公开(公告)号：US11796247B2
公开(公告)日：2023-10-24
申请号：US17100227
申请日：2020-11-20
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
CPC classification number: F25D29/001 , F25D17/02 , F25D2303/085 , F25D2400/34 , F25D2500/04 , F25D2600/02 , F25D2700/121 , F25D2700/123 , F25D2700/16
Abstract: A temperature control system is used for controlling a temperature of a control target to a target temperature that changes with lapse of time. The system includes: a first adjustment apparatus that includes a first tank that stores a first heat transfer medium, adjusts the temperature of the first heat transfer medium to a first set temperature, and supplies the temperature-adjusted first heat transfer medium; a first circulation circuit through which the first heat transfer medium flows from the first adjustment apparatus to a first flow-through path and returns to the first adjustment apparatus; an adjustment section that adjusts an amount of heat supplied from the first flow-through path to the control target; a memory that stores a relation between the lapse of time and the target temperature; and a controller.
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公开(公告)号：US20210148621A1
公开(公告)日：2021-05-20
申请号：US17100191
申请日：2020-11-20
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
Abstract: A cooling system includes: a first cooling apparatus electrically driven to supply a first heat transfer medium cooled to a first set temperature or lower; a plurality of second cooling apparatuses each of which includes a heat exchanger that exchanges heat between the first heat transfer medium supplied from the first cooling apparatus and a second heat transfer medium, and is electrically driven to supply a third heat transfer medium cooled to a second set temperature or lower, the second set temperature being changed individually with lapse of time; and a processor that obtains second set temperatures of the second cooling apparatuses and sets the first set temperature based on the obtained second set temperatures.
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公开(公告)号：US20210140688A1
公开(公告)日：2021-05-13
申请号：US17093002
申请日：2020-11-09
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
Abstract: A temperature control system is used for controlling a temperature of a control target. The system includes: a first circulation circuit through which a first heat transfer medium circulates; a second circulation circuit that is independent of the first circulation circuit and through which a second heat transfer medium circulates; and a third circulation circuit that is independent of the first circulation circuit and the second circulation circuit and through which a third heat transfer medium circulates. The third heat transfer medium has a usable temperature range wider than usable temperature ranges of the first heat transfer medium and the second heat transfer medium.
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Patent Agency Ranking
6.发明授权Sealing structure, vacuum pump motor including same sealing structure, and vacuum pump 有权密封结构，真空泵电机包括相同的密封结构和真空泵公开(公告)号：US09429166B2
公开(公告)日：2016-08-30
申请号：US13960283
申请日：2013-08-06
Applicant: EBARA CORPORATION
Inventor： Takanori Inada , Naoya Yoshida , Takashi Hozumi , Yoshinori Ojima , Toshiharu Nakazawa
CPC classification number: F04D29/08 , F04C15/008 , F04C29/0085 , H02K5/12 , H02K5/225
Abstract: A sealing structure for a vacuum pump motor which maintains the sealing properties of the vacuum pump motor in an ensured fashion, including a lead wire which is passed through an opening portion formed in a motor frame to be connected to a motor stator and a seal member which seals the opening portion. The lead wire includes a core wire portion and a covering portion which covers the core wire portion. The lead wire also includes a seal portion formed around at least part of the core wire portion inside the covering portion.
Abstract translation: 一种用于真空泵电机的密封结构，其以确保的方式保持真空泵电机的密封性能，包括通过形成在马达框架中的开口部分以连接到电动机定子的引线和密封构件 其密封开口部分。 引线包括芯线部分和覆盖芯线部分的覆盖部分。 引线还包括围绕覆盖部分内的芯线部分的至少一部分形成的密封部分。
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公开(公告)号：US20130272904A1
公开(公告)日：2013-10-17
申请号：US13853005
申请日：2013-03-28
Applicant: Ebara Corporation
Inventor： Takashi Hozumi , Naoya Yoshida , Yoshinori Ojima , Takanori Inada , Toshiharu Nakazawa , Atsushi Oyama
IPC: F04D29/60
CPC classification number: H02K5/128 , F04D17/08 , F04D25/06 , F04D29/60 , H02K3/18 , H02K3/487 , H02K2005/1287
Abstract: Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive.
Abstract translation: 提供了一种与真空泵耦合并用作真空泵的旋转驱动源的罐式电动机。 固定电机包括：定子芯; 设置在所述定子铁芯的内侧的转子; 并且设置在定子铁芯和转子之间的非导电罐。 非导电罐被构造成将定子铁芯和转子彼此分离。 非导电罐由树脂，陶瓷或其复合材料制成。 非导电罐用粘合剂结合到定子芯上。
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公开(公告)号：US20210148630A1
公开(公告)日：2021-05-20
申请号：US17100227
申请日：2020-11-20
Inventor： Akihiro Ito , Norio Kokubo , Masayuki Kouketsu , Isahiro Hasegawa , Toshiharu Nakazawa , Keisuke Takanashi , Yukihiro Fukusumi
Abstract: A temperature control system is used for controlling a temperature of a control target to a target temperature that changes with lapse of time. The system includes: a first adjustment apparatus that includes a first tank that stores a first heat transfer medium, adjusts the temperature of the first heat transfer medium to a first set temperature, and supplies the temperature-adjusted first heat transfer medium; a first circulation circuit through which the first heat transfer medium flows from the first adjustment apparatus to a first flow-through path and returns to the first adjustment apparatus; an adjustment section that adjusts an amount of heat supplied from the first flow-through path to the control target; a memory that stores a relation between the lapse of time and the target temperature; and a controller.
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公开(公告)号：US10320260B2
公开(公告)日：2019-06-11
申请号：US15437197
申请日：2017-02-20
Applicant: EBARA CORPORATION
Inventor： Takashi Hozumi , Naoya Yoshida , Yoshinori Ojima , Takanori Inada , Toshiharu Nakazawa , Atsushi Oyama
Abstract: Provided is a canned motor to be coupled to a vacuum pump and used as a rotary driving source for the vacuum pump. The canned motor includes: a stator core; a rotor provided on an inner side of the stator core; and a non-conductive can provided between the stator core and the rotor. The non-conductive can is configured to separate the stator core and the rotor from each other. The non-conductive can is made of resin, ceramic, or composite material thereof. The non-conductive can is bonded to the stator core with an adhesive.
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公开(公告)号：US09822974B2
公开(公告)日：2017-11-21
申请号：US14226737
申请日：2014-03-26
Applicant: EBARA CORPORATION
Inventor： Kohtaro Kawamura , Toyoji Shinohara , Tetsuro Sugiura , Hideo Arai , Toshiharu Nakazawa , Keiichi Ishikawa , Seiji Kashiwagi , Yasuhiko Suzuki , Takashi Kyotani
CPC classification number: F23J13/00 , B01D53/68 , B01D53/76 , B01D2251/102 , B01D2257/204 , B01D2257/553 , B01D2258/0216 , F04B37/14 , F04C25/02 , F04C2220/30 , F23G5/32 , F23G7/065 , F23J2219/00 , F23J2900/01007 , F23L17/00
Abstract: A vacuum pump includes a vacuum pump having a discharge port to which an abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless is attached. The vacuum pump includes a cylindrical member having an exhaust gas introduction port for introducing the exhaust gas to be treated and a gas outlet port for discharging gases which have been treated, a plurality of fuel nozzles provided at a circumferential wall of the cylindrical member for ejecting a fuel, and a plurality of air nozzles provided at the circumferential wall of the cylindrical member for ejecting air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall. The air nozzles are disposed at a plurality of stages spaced in an axial direction of the cylindrical member.
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