Thin film magnetic head, thin film magnetic head device, and magnetic recording/reproducing apparatus
    1.
    发明授权
    Thin film magnetic head, thin film magnetic head device, and magnetic recording/reproducing apparatus 有权
    薄膜磁头,薄膜磁头装置和磁记录/重放装置

    公开(公告)号:US08760805B2

    公开(公告)日:2014-06-24

    申请号:US13176134

    申请日:2011-07-05

    IPC分类号: G11B5/127

    摘要: A thin-film magnetic head includes a slider substrate and a write element. The slider substrate has an air bearing surface at one side thereof. The write element has a recording magnetic pole film. The recording magnetic pole film is disposed on a plane crossing the air bearing surface over the slider substrate and has a large-width portion and a small-width portion continuously arranged in the named order toward the air bearing surface. The small-width portion has a smaller width than the large-width portion. Of the large-width portion and the small-width portion, at least the small-width portion has a first portion and a second portion. The second portion is continuous with an upper end of the first portion and has both side faces inclined in such a direction as to increase the width. An external angle of the first portion formed by a plane parallel to a bottom face and the side face is larger than an external angle of the second portion formed by a plane parallel to the bottom face and the side face.

    摘要翻译: 薄膜磁头包括滑块基板和写入元件。 滑块基板在其一侧具有空气轴承表面。 写元件具有记录磁极膜。 记录磁极膜设置在与滑动基板上的空气轴承表面相交的平面上,并且具有朝向空气轴承表面依次连续排列的大宽度部分和小宽度部分。 小宽度部分的宽度比宽度大的部分小。 在大宽度部分和小宽度部分中,至少小宽度部分具有第一部分和第二部分。 第二部分与第一部分的上端连续,并且具有在增加宽度的方向上倾斜的两个侧面。 由平行于底面和侧面的平面形成的第一部分的外角比由平行于底面和侧面的平面形成的第二部分的外角大。

    Method for manufacturing thin-film magnetic head
    2.
    发明授权
    Method for manufacturing thin-film magnetic head 有权
    制造薄膜磁头的方法

    公开(公告)号:US08404431B1

    公开(公告)日:2013-03-26

    申请号:US13289369

    申请日:2011-11-04

    IPC分类号: G02B5/127

    摘要: A method for manufacturing a thin-film magnetic head includes processes of forming a polishing position sensor and a recording head portion alongside on one side of a wafer. The process of forming the recording head portion has a step of performing a photolithography process after applying an alkali soluble resin film and a photoresist film in the named order. The process of forming the polishing position sensor has a step of performing a photolithography process on the photoresist film while having only the photoresist film out of the alkali soluble resin film and the photoresist film.

    摘要翻译: 一种制造薄膜磁头的方法包括在晶片的一侧旁边形成研磨位置传感器和记录头部的工序。 形成记录头部分的过程具有按照所述顺序施加碱溶性树脂膜和光致抗蚀剂膜之后进行光刻工艺的步骤。 形成抛光位置传感器的过程具有在光致抗蚀剂膜上进行光刻工艺的步骤,同时在碱溶性树脂膜和光致抗蚀剂膜中仅具有光致抗蚀剂膜。

    Method of forming magnetic pole section of perpendicular magnetic recording type thin-film magnetic head and manufacturing method of perpendicular magnetic recording type thin-film magnetic head
    3.
    发明授权
    Method of forming magnetic pole section of perpendicular magnetic recording type thin-film magnetic head and manufacturing method of perpendicular magnetic recording type thin-film magnetic head 有权
    形成垂直磁记录型薄膜磁头的磁极部分的方法和垂直磁记录型薄膜磁头的制造方法

    公开(公告)号:US08323517B2

    公开(公告)日:2012-12-04

    申请号:US12753557

    申请日:2010-04-02

    IPC分类号: B29D11/00

    摘要: A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.

    摘要翻译: 形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法,该方法包括在下层上形成具有开口的抗蚀剂图案,形成 第一非磁性层,形成形成磁性层图案的第一磁性层,去除抗蚀剂图案,然后在第一非磁性层和磁性层图案上施加抗蚀剂层,在所施加的抗蚀剂层的中途显影或灰化,并烘烤剩余的抗蚀剂层 通过对所述烘烤抗蚀剂层进行蚀刻从所述磁性层图案的至少一个侧表面去除所述第一非磁性层,除去所有所述抗蚀剂层,然后在至少所述磁性层图案上形成第二非磁性层,以及形成 在形成的第二非磁性层上的第二磁性层。

    MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING HEAD
    6.
    发明申请
    MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING HEAD 审中-公开
    普通磁记录头的制造方法

    公开(公告)号:US20100084262A1

    公开(公告)日:2010-04-08

    申请号:US12244298

    申请日:2008-10-02

    IPC分类号: G11B5/33

    摘要: The present invention relates to a method for manufacturing a perpendicular recording magnetic head. The method for manufacturing a perpendicular recording magnetic head according to the present invention includes first to third steps. At the first step, a main magnetic pole layer is formed on a foundation layer. At the second step, a main magnetic pole forming mask whose recording-medium-facing surface is of an inverted trapezoidal shape is formed on the main magnetic pole layer. At the third step, a main magnetic pole whose recording-medium-facing surface is of an inverted trapezoidal shape is formed by performing ion milling on a laminated structure including the foundation layer and the main magnetic pole layer from a direction which makes a given angle with a lamination direction according to a bevel angle of the inverted trapezoidal shape.

    摘要翻译: 本发明涉及一种用于制造垂直记录磁头的方法。 根据本发明的用于制造垂直记录磁头的方法包括第一至第三步骤。 在第一步骤中,在基础层上形成主磁极层。 在第二步骤中,在主磁极层上形成有记录介质相对表面为倒梯形形状的主磁极形成掩模。 在第三步骤中,通过对包括基础层和主磁极层的叠层结构进行离子铣削,形成具有倒梯形形状的记录介质相对表面的主磁极, 具有根据倒梯形形状的斜角的层叠方向。

    Perpendicular magnetic write head, method of manufacturing the same, and magnetic write system
    8.
    发明申请
    Perpendicular magnetic write head, method of manufacturing the same, and magnetic write system 有权
    垂直写磁头,制造方法和磁性写入系统

    公开(公告)号:US20080253034A1

    公开(公告)日:2008-10-16

    申请号:US11713740

    申请日:2007-03-05

    摘要: The present invention is directed to providing a perpendicular magnetic write head which can suppress unintended erasure of information written on a write medium at a non-writing time by optimizing a magnetic domain structure of main component elements that are engaged in writing operation. In the perpendicular magnetic write head, an auxiliary magnetic pole layer is disposed on a trailing or leading side of a main magnetic pole layer, the auxiliary magnetic pole layer being recessed from the main magnetic pole layer. When the main magnetic pole layer has a tensile stress as its internal stress, a nonmagnetic layer disposed in a layer same as the auxiliary magnetic pole layer and in an area in front of the auxiliary magnetic pole layer, also has a tensile stress as its internal stress.

    摘要翻译: 本发明旨在提供一种垂直磁性写入头,其可以通过优化从事写入操作的主要组成元件的磁畴结构来抑制在非写入时刻写入写入介质的信息的意外擦除。 在垂直写磁头中,辅助磁极层设置在主磁极层的后侧或前侧,辅助磁极层从主磁极层凹入。 当主磁极层作为其内应力具有拉伸应力时,设置在与辅助磁极层相同的层中的非磁性层和在辅助磁极层前面的区域中也具有作为其内部的拉伸应力 强调。

    Strain gage pressure sensor wherein a gap is maintained between the
diaphragm and the substrate
    10.
    发明授权
    Strain gage pressure sensor wherein a gap is maintained between the diaphragm and the substrate 失效
    应变计压力传感器,其中在隔膜和基板之间保持间隙

    公开(公告)号:US6003380A

    公开(公告)日:1999-12-21

    申请号:US927269

    申请日:1997-09-11

    CPC分类号: G01L9/0051 G01L9/0055

    摘要: A pressure sensor prevents the occurrence of a large deformation or breakage of the diaphragm in a strain gage-type pressure sensor utilizing a thin plate-shaped insulating body as the diaphragm. The pressure sensor comprises an insulating diaphragm having a strain gage on its surface and a substrate positioned opposing the surface of the diaphragm on which the strain gage is mounted and kept a predetermined distance away from the surface. The diaphragm can be formed of material such as ceramic of alumina, zirconia or the like, silicon or crystal. The substrate can be formed of either the same material as the diaphragm, or the surface opposing the diaphragm can be formed of an insulator disposed on metal. The diaphragm and the substrate can be affixed using a low-melting glass.

    摘要翻译: 利用薄板状绝缘体作为膜片,压力传感器防止在应变计式压力传感器中出现隔膜的大的变形或断裂。 压力传感器包括其表面上具有应变计的绝缘隔膜和与隔膜的表面相对定位的基板,其上安装有应变计并保持与表面预定距离。 隔膜可以由诸如氧化铝,氧化锆等的陶瓷,硅或晶体的材料形成。 基板可以由与隔膜相同的材料形成,或者与隔膜相对的表面可以由布置在金属上的绝缘体形成。 隔膜和基板可以使用低熔点玻璃固定。