Strain gage pressure sensor wherein a gap is maintained between the
diaphragm and the substrate
    1.
    发明授权
    Strain gage pressure sensor wherein a gap is maintained between the diaphragm and the substrate 失效
    应变计压力传感器,其中在隔膜和基板之间保持间隙

    公开(公告)号:US6003380A

    公开(公告)日:1999-12-21

    申请号:US927269

    申请日:1997-09-11

    CPC分类号: G01L9/0051 G01L9/0055

    摘要: A pressure sensor prevents the occurrence of a large deformation or breakage of the diaphragm in a strain gage-type pressure sensor utilizing a thin plate-shaped insulating body as the diaphragm. The pressure sensor comprises an insulating diaphragm having a strain gage on its surface and a substrate positioned opposing the surface of the diaphragm on which the strain gage is mounted and kept a predetermined distance away from the surface. The diaphragm can be formed of material such as ceramic of alumina, zirconia or the like, silicon or crystal. The substrate can be formed of either the same material as the diaphragm, or the surface opposing the diaphragm can be formed of an insulator disposed on metal. The diaphragm and the substrate can be affixed using a low-melting glass.

    摘要翻译: 利用薄板状绝缘体作为膜片,压力传感器防止在应变计式压力传感器中出现隔膜的大的变形或断裂。 压力传感器包括其表面上具有应变计的绝缘隔膜和与隔膜的表面相对定位的基板,其上安装有应变计并保持与表面预定距离。 隔膜可以由诸如氧化铝,氧化锆等的陶瓷,硅或晶体的材料形成。 基板可以由与隔膜相同的材料形成,或者与隔膜相对的表面可以由布置在金属上的绝缘体形成。 隔膜和基板可以使用低熔点玻璃固定。

    MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING HEAD
    2.
    发明申请
    MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING HEAD 审中-公开
    普通磁记录头的制造方法

    公开(公告)号:US20100084262A1

    公开(公告)日:2010-04-08

    申请号:US12244298

    申请日:2008-10-02

    IPC分类号: G11B5/33

    摘要: The present invention relates to a method for manufacturing a perpendicular recording magnetic head. The method for manufacturing a perpendicular recording magnetic head according to the present invention includes first to third steps. At the first step, a main magnetic pole layer is formed on a foundation layer. At the second step, a main magnetic pole forming mask whose recording-medium-facing surface is of an inverted trapezoidal shape is formed on the main magnetic pole layer. At the third step, a main magnetic pole whose recording-medium-facing surface is of an inverted trapezoidal shape is formed by performing ion milling on a laminated structure including the foundation layer and the main magnetic pole layer from a direction which makes a given angle with a lamination direction according to a bevel angle of the inverted trapezoidal shape.

    摘要翻译: 本发明涉及一种用于制造垂直记录磁头的方法。 根据本发明的用于制造垂直记录磁头的方法包括第一至第三步骤。 在第一步骤中,在基础层上形成主磁极层。 在第二步骤中,在主磁极层上形成有记录介质相对表面为倒梯形形状的主磁极形成掩模。 在第三步骤中,通过对包括基础层和主磁极层的叠层结构进行离子铣削,形成具有倒梯形形状的记录介质相对表面的主磁极, 具有根据倒梯形形状的斜角的层叠方向。

    Method of forming magnetic pole section of perpendicular magnetic recording type thin-film magnetic head and manufacturing method of perpendicular magnetic recording type thin-film magnetic head
    4.
    发明授权
    Method of forming magnetic pole section of perpendicular magnetic recording type thin-film magnetic head and manufacturing method of perpendicular magnetic recording type thin-film magnetic head 有权
    形成垂直磁记录型薄膜磁头的磁极部分的方法和垂直磁记录型薄膜磁头的制造方法

    公开(公告)号:US08323517B2

    公开(公告)日:2012-12-04

    申请号:US12753557

    申请日:2010-04-02

    IPC分类号: B29D11/00

    摘要: A method of forming a magnetic pole section of a perpendicular magnetic recording type thin-film magnetic head and a method of manufacturing a perpendicular magnetic recording type thin-film magnetic head that include forming on an under layer a resist pattern having an opening, forming a first nonmagnetic layer, forming a first magnetic layer forming a magnetic layer pattern, removing the resist pattern and then applying a resist layer onto a first nonmagnetic layer and a magnetic layer pattern, developing or ashing partway the applied resist layer and baking the remaining resist layer, removing the first nonmagnetic layer from at least a side surface of the magnetic layer pattern by etching with the baked resist layer being left, removing all of the resist layer and then forming a second nonmagnetic layer on at least the magnetic layer pattern, and forming a second magnetic layer on the formed second nonmagnetic layer.

    摘要翻译: 形成垂直磁记录型薄膜磁头的磁极部分的方法和制造垂直磁记录型薄膜磁头的方法,该方法包括在下层上形成具有开口的抗蚀剂图案,形成 第一非磁性层,形成形成磁性层图案的第一磁性层,去除抗蚀剂图案,然后在第一非磁性层和磁性层图案上施加抗蚀剂层,在所施加的抗蚀剂层的中途显影或灰化,并烘烤剩余的抗蚀剂层 通过对所述烘烤抗蚀剂层进行蚀刻从所述磁性层图案的至少一个侧表面去除所述第一非磁性层,除去所有所述抗蚀剂层,然后在至少所述磁性层图案上形成第二非磁性层,以及形成 在形成的第二非磁性层上的第二磁性层。

    Perpendicular magnetic write head, method of manufacturing the same, and magnetic write system
    6.
    发明申请
    Perpendicular magnetic write head, method of manufacturing the same, and magnetic write system 有权
    垂直写磁头,制造方法和磁性写入系统

    公开(公告)号:US20080253034A1

    公开(公告)日:2008-10-16

    申请号:US11713740

    申请日:2007-03-05

    摘要: The present invention is directed to providing a perpendicular magnetic write head which can suppress unintended erasure of information written on a write medium at a non-writing time by optimizing a magnetic domain structure of main component elements that are engaged in writing operation. In the perpendicular magnetic write head, an auxiliary magnetic pole layer is disposed on a trailing or leading side of a main magnetic pole layer, the auxiliary magnetic pole layer being recessed from the main magnetic pole layer. When the main magnetic pole layer has a tensile stress as its internal stress, a nonmagnetic layer disposed in a layer same as the auxiliary magnetic pole layer and in an area in front of the auxiliary magnetic pole layer, also has a tensile stress as its internal stress.

    摘要翻译: 本发明旨在提供一种垂直磁性写入头,其可以通过优化从事写入操作的主要组成元件的磁畴结构来抑制在非写入时刻写入写入介质的信息的意外擦除。 在垂直写磁头中,辅助磁极层设置在主磁极层的后侧或前侧,辅助磁极层从主磁极层凹入。 当主磁极层作为其内应力具有拉伸应力时,设置在与辅助磁极层相同的层中的非磁性层和在辅助磁极层前面的区域中也具有作为其内部的拉伸应力 强调。

    Thin-film magnetic head for perpendicular magnetic recording and method of making the same
    8.
    发明授权
    Thin-film magnetic head for perpendicular magnetic recording and method of making the same 有权
    用于垂直磁记录的薄膜磁头及其制作方法

    公开(公告)号:US08000064B2

    公开(公告)日:2011-08-16

    申请号:US12000519

    申请日:2007-12-13

    IPC分类号: G11B5/11 H04R31/00

    摘要: A perpendicular recording thin-film magnetic head comprises a main magnetic pole having a tip main magnetic pole part extending in a height direction from a medium-opposing surface and a base main magnetic pole part connected to the tip main magnetic pole part on a side opposite from the medium-opposing surface side and wider than the tip main magnetic pole part in a track width direction; a return yoke extending in the height direction from the medium-opposing surface and magnetically coupling with the base main magnetic pole part at a position distanced from the medium-opposing surface in the height direction, while opposing the tip main magnetic pole part through a write gap layer in a bit length direction in the medium-opposing surface; and a main magnetic pole adjacent magnetic shield layer extending along at least part of side faces of the main magnetic pole other than the medium-opposing surface as seen in a laminating direction, while holding a nonmagnetic layer between the main magnetic pole and the main magnetic pole adjacent magnetic shield layer.

    摘要翻译: 垂直记录薄膜磁头包括:主磁极,其具有从介质相对表面在高度方向上延伸的尖端主磁极部分和在相对侧的一侧连接到尖端主磁极部分的基极主磁极部分 从所述中等相对面侧开始并且比所述尖端主磁极部在轨道宽度方向上宽; 回转轭,其从中间相对表面在高度方向上延伸,并且在距离介质相对表面在高度方向上远离的位置处与基部主磁极部分磁耦合,同时通过写入方式与尖端主磁极部分相对 中间相对表面中的位长度方向上的间隙层; 以及与沿着层叠方向观察的中间相对面以外的主磁极的至少一部分的侧面相邻的磁屏蔽层的主磁极,同时在主磁极和主磁体之间保持非磁性层 极相邻磁屏蔽层。

    Thin-film magnetic head including two magnetic layers and flat spiral coil, and method of manufacturing same
    9.
    发明授权
    Thin-film magnetic head including two magnetic layers and flat spiral coil, and method of manufacturing same 有权
    包括两个磁性层和扁平螺旋线圈的薄膜磁头及其制造方法

    公开(公告)号:US07826175B2

    公开(公告)日:2010-11-02

    申请号:US11797473

    申请日:2007-05-03

    IPC分类号: G11B5/17

    CPC分类号: G11B5/3116

    摘要: A thin-film magnetic head includes a first magnetic layer, a flat, spiral-shaped coil, a toroidal-shaped insulating layer covering the coil, and a second magnetic layer touching the insulating layer and disposed to sandwich part of the coil between itself and the first magnetic layer. The second magnetic layer has a recessed portion that enters a space inside the insulating layer. In the recessed portion, the bottom surface of the second magnetic layer includes a first flat portion a part of which touches the top surface of the first magnetic layer, while the top surface of the second magnetic layer includes a second flat portion located in the space and substantially parallel to the first flat portion. In a cross section that divides each of the first and second magnetic layers into two equal portions, the second flat portion is 0.3 to 6 μm in length, and a distance from an edge of the interface between the top surface of the first magnetic layer and the first flat portion closer to the medium facing surface to an edge of the top surface of the first magnetic layer farther from the medium facing surface is 0.35 to 0.95 times the length of the first flat portion.

    摘要翻译: 薄膜磁头包括第一磁性层,扁平螺旋形线圈,覆盖线圈的环形绝缘层和接触绝缘层的第二磁性层,并且设置成将线圈的一部分夹在其自身与 第一磁性层。 第二磁性层具有进入绝缘层内的空间的凹部。 在凹部中,第二磁性层的底表面包括第一平坦部分,其一部分接触第一磁性层的顶表面,而第二磁性层的顶表面包括位于该空间中的第二平坦部分 并且基本上平行于第一平坦部分。 在将第一和第二磁性层中的每一个分成两个相等部分的横截面中,第二平坦部分的长度为0.3至6μm,并且与第一磁性层的顶表面之间的界面边缘与 第一平坦部分比第一平坦部分的长度更靠近第一磁性层的顶表面的与介质相对表面更远的介质面向表面的边缘的第一平坦部分是0.35至0.95倍。

    Magnetic head for perpendicular magnetic recording and method of manufacturing the same, the magnetic head including pole layer and two shields sandwiching the pole layer
    10.
    发明授权
    Magnetic head for perpendicular magnetic recording and method of manufacturing the same, the magnetic head including pole layer and two shields sandwiching the pole layer 有权
    用于垂直磁记录的磁头及其制造方法,磁头包括磁极层和两个屏蔽夹住磁极层

    公开(公告)号:US07796359B2

    公开(公告)日:2010-09-14

    申请号:US11892541

    申请日:2007-08-23

    IPC分类号: G11B5/127

    摘要: A magnetic head includes a pole layer, a first and a second shield disposed to sandwich the pole layer, and a nonmagnetic layer disposed around the first shield. The pole layer includes a first portion having an end face located in a medium facing surface, and a second portion that is located farther from the medium facing surface than is the first portion. The second portion is greater in thickness than the first portion. A bottom surface of the second portion is located closer to a substrate than is a bottom surface of the first portion. The first shield has a first top surface portion opposed to the bottom surface of the first portion with the first gap layer in between. The nonmagnetic layer has a second top surface portion opposed to the bottom surface of the second portion with the first gap layer in between. A difference in level is formed between the first and the second top surface portion such that the second top surface portion is located closer to the substrate than is the first top surface portion.

    摘要翻译: 磁头包括极层,设置成夹住极层的第一和第二屏蔽件以及围绕第一屏蔽件设置的非磁性层。 极层包括具有位于介质面向表面中的端面的第一部分和比第一部分更远离介质面向表面的第二部分。 第二部分的厚度大于第一部分。 第二部分的底表面比第一部分的底表面更靠近基底。 第一屏蔽具有与第一部分的底表面相对的第一顶表面部分,其间具有第一间隙层。 非磁性层具有与第二部分的底表面相对的第二顶表面部分,其间具有第一间隙层。 在第一顶表面部分和第二顶表面部分之间形成水平差,使得第二顶表面部分比第一顶表面部分更靠近基底。