公开(公告)号：US20170045355A1

公开(公告)日：2017-02-16

申请号：US14974892

申请日：2015-12-18

Applicant: Industrial Technology Research Institute

Inventor： Yi-Chen HSIEH ,  Chia-Liang YEH ,  Chia-Hung CHO ,  Yi-Chang CHEN ,  Yi-Sha KU ,  Chun-Wei LO

IPC: G01B11/24

CPC classification number: G01B11/24 ,  G01B2210/56 ,  H01L22/12

Abstract: A scattering measurement system is provided, including: a light source generator for generating a detection light beam with multi-wavelengths, wherein the detection light beam is incident on an object so as to generate a plurality of multi-order diffraction light beams with three-dimensional feature information; a spatial filter for filtering out zero-order light beams from the plurality of multi-order diffraction light beams; and a detector having a photosensitive array for receiving the plurality of multi-order diffraction light beams filtered out by the spatial filter and converting the filtered plurality of multi-order diffraction light beams into multi-order diffraction signals with the three-dimensional feature information. As such, the three-dimensional structure of the object can be obtained by comparing the multi-order diffraction signals with a database.

Abstract translation: 提供了一种散射测量系统，包括：用于产生具有多波长的检测光束的光源发生器，其中检测光束入射到物体上，以便产生多个三阶衍射光束， 三维特征信息; 用于滤除来自所述多个多级衍射光束的零级光束的空间滤波器; 以及检测器，其具有用于接收由空间滤波器滤除的多个多级衍射光束的光敏阵列，并将经滤波的多个多阶衍射光束转换成具有三维特征信息的多阶衍射信号。 因此，可以通过将多阶衍射信号与数据库进行比较来获得对象的三维结构。

公开(公告)号：US20240331178A1

公开(公告)日：2024-10-03

申请号：US18308223

申请日：2023-04-27

Applicant: Industrial Technology Research Institute

Inventor： Chia-Hung CHO ,  Yi-Sha KU ,  Cheng-Kang LEE

IPC: G06T7/521 ,  G01B11/22

CPC classification number: G06T7/521 ,  G01B11/22 ,  G06T2207/10028

Abstract: A measuring device includes a light source unit, a light modulation unit, a spectrum sensing unit, an image sensing unit, and a processing unit. The light source unit projects a first light path to a sample and receives a second light path reflected from the sample. The light module unit tilts the second light path to become a third light path or a fourth light path. The spectrum sensing unit receives the third light path to capture a spectrum corresponding to the microstructures. The image sensing unit receives the fourth light path to measure a captured image that corresponds to the sample. When the processing unit identifies the position of at least one of the microstructures in the captured image, the processing unit measures the depth of at least one of the microstructures from the spectrum for the identified area.

公开(公告)号：US20180137637A1

公开(公告)日：2018-05-17

申请号：US15394048

申请日：2016-12-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chia-Hung CHO ,  Po-Yi CHANG

IPC: G06T7/521

CPC classification number: G06T7/521 ,  G06T2207/10024 ,  G06T2207/20021 ,  G06T2207/20048

Abstract: A three-dimensional measurement system includes a projector, an image sensor, an image analyzing module and a measurement module. The projector provides a structured light pattern. The image sensor captures an object image of an object on which the structured light pattern is projected. The image analyzing module analyzes the object image to obtain a space coding image and a phase coding image according to gray level distribution of the object image. The measurement module calculates phase information of each of coordinate points in the phase coding image, calculates compensation information of a coordinate position, corresponding to a coordinate position of a point of discontinuity, in the space coding image, compensates the phase information of the point of discontinuity in the phase coding image by the compensation information, and calculates height information of the object according to the phase information of each of the coordinate points.

公开(公告)号：US20170059311A1

公开(公告)日：2017-03-02

申请号：US15249298

申请日：2016-08-26

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chia-Hung CHO ,  Kai-Ping CHUANG ,  Yi-Wei CHANG

IPC: G01B11/30 ,  B24B37/20 ,  G01B11/06

CPC classification number: G01B11/303 ,  B24B37/20 ,  G01B11/0608

Abstract: A surface measurement device includes a rotating platform, a motion lever, a measuring module and a control module. The rotating platform rotates an object at a rotating speed. The motion lever is above the rotating platform. The measuring module moves to a variety of measuring positions on the motion lever. When the measuring module is at one of the measuring positions, the measuring module measures the heights of a plurality of sampling points on the surface of the object in a sampling frequency. The control module selectively modifies the rotating speed of the rotating platform or the sampling frequency of the measuring module according to the measuring position of the measuring module to make the distance between the sampling points in at least a region of the surface of the object match a sampling rule.

Abstract translation: 表面测量装置包括旋转平台，运动杆，测量模块和控制模块。 旋转平台以旋转速度旋转物体。 运动杆位于旋转平台的上方。 测量模块移动到运动杆上的各种测量位置。 当测量模块处于测量位置之一时，测量模块以采样频率测量对象表面上的多个采样点的高度。 控制模块根据测量模块的测量位置选择性地修改旋转平台的旋转速度或测量模块的采样频率，使得至少一个对象表面区域中的采样点之间的距离与 抽样规则。

公开(公告)号：US20140333936A1

公开(公告)日：2014-11-13

申请号：US14270962

申请日：2014-05-06

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Po-Yi CHANG ,  Chia-Hung CHO ,  Yi-Sha KU ,  Deh-Ming SHYU

IPC: G01B11/06 ,  H01L21/66

CPC classification number: H01L22/26 ,  G01B9/02007 ,  G01B11/0625 ,  G01B11/0675 ,  H01L22/12

Abstract: In a thickness measuring system for a bonding layer according to an exemplary embodiment, an optical element changes the wavelength of a first light source to enable at least one second light source propagating through a bonding layer to be incident to an object, wherein the bonding layer has an upper interface and a lower interface that are attached to the object; and an optical image capturing and analysis unit receives a plurality of reflected lights from the upper and the lower interfaces to capture a plurality of interference images of different wavelengths, and analyzes the intensity of the plurality of interference images to compute the thickness information of the bonding layer.

Abstract translation: 在根据示例性实施例的用于接合层的厚度测量系统中，光学元件改变第一光源的波长，使得能够通过粘合层传播的至少一个第二光源入射到物体，其中，接合层 具有附接到对象的上界面和下界面; 并且光学图像捕获和分析单元从上界面和下界面接收多个反射光以捕获多个不同波长的干涉图像，并且分析多个干涉图像的强度以计算粘合的厚度信息 层。

公开(公告)号：US20210149337A1

公开(公告)日：2021-05-20

申请号：US17028012

申请日：2020-09-22

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsiang-Chun WEI ,  Chung-Lun KUO ,  Chia-Hung CHO ,  Chun-Wei LO ,  Chih-Hsiang LIU

IPC: G03H1/04 ,  G06T15/08 ,  G01B9/02 ,  G03H1/00

Abstract: An optical measurement system comprises a polarization beam splitter for dividing an incident beam into a reference beam and a measurement beam, a first beam splitter for reflecting the measurement beam to form a first reflected measurement beam, a spatial light modulator for modulating the first reflected measurement beam to form a modulated measurement beam, a condenser lens for focusing the modulated measurement beam to an object to form a penetrating measurement beam, an objective lens for converting the penetrating measurement beam into a parallel measurement beam, a mirror for reflecting the parallel measurement beam to form an object beam, a second beam splitter for reflecting the reference beam to a path coincident with that of the object beam, and a camera for receiving an interference signal generated by the reference beam and the object beam to generate an image of the object.

公开(公告)号：US20210080252A1

公开(公告)日：2021-03-18

申请号：US16717425

申请日：2019-12-17

Applicant: Industrial Technology Research Institute

Inventor： Chia-Hung CHO ,  Po-Yi CHANG ,  Yi-Sha KU ,  Kai-Ping CHUANG ,  Chih-Hsiang LIU ,  Fu-Cheng YANG

IPC: G01B11/25 ,  G06K9/32 ,  G06T7/521

Abstract: A three-dimension measurement device includes a moving device, a projecting device, a surface-type image-capturing device and a processing device. The moving device carries an object, and moves the object to a plurality of positions. The projecting device generates a first light to the object. The surface-type image-capturing device senses a second light generated by the object in response to the first light to generate a phase image on each of the positions. The processing device is coupled to the surface-type image-capturing device and receives the phase images. The processing device performs a region-of-interest (ROI) operation for the phase images to generate a plurality of ROI images. The processing device performs a multi-step phase-shifting operation for the ROI images to calculate the surface height distribution of the object.

公开(公告)号：US20230160879A1

公开(公告)日：2023-05-25

申请号：US17563701

申请日：2021-12-28

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsiang-Chun WEI ,  Chih-Hsiang LIU ,  Chung-Lun KUO ,  Chun-Wei LO ,  Chia-Hung CHO ,  Wei-Hsiung TSAI

IPC: G01N33/50 ,  G06T7/00 ,  G03H1/04 ,  G03H1/08 ,  G03H1/00 ,  G01N15/14

CPC classification number: G01N33/505 ,  G06T7/0012 ,  G03H1/0443 ,  G03H1/0866 ,  G03H1/0005 ,  G01N15/1475 ,  G06T2207/30024 ,  G06T2207/10064 ,  G06T2207/10056 ,  G03H2001/0033 ,  G03H2001/005 ,  G06T2207/20081 ,  G06T2207/20084

Abstract: A method of training AI for label-free cell viability determination includes a step of providing a cell sample, a step of obtaining a fluorescence image and a DHM image of the cell sample, a step of determining a first cell viability of the cell sample according to the fluorescence image of the cell sample, a step of labeling the DHM image of the cell sample as a model specifying the first cell viability, and a step of performing AI training by using the model containing the DHM image of the cell sample.

公开(公告)号：US20170146339A1

公开(公告)日：2017-05-25

申请号：US14983053

申请日：2015-12-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsiang-Chun WEI ,  Yi-Sha KU ,  Chia-Hung CHO ,  Chieh-Yu WU ,  Chun-Wei LO ,  Chih-Hsiang LIU

IPC: G01B11/22 ,  G01B11/06

CPC classification number: G01B11/22 ,  G01B11/0616 ,  G01B11/2441 ,  G01B2210/56 ,  H01L22/12

Abstract: A measurement system is configured to measure a surface structure of a sample. The surface of the sample has a thin film and a via, the depth of the via is larger than the thickness of the thin film. The measurement system includes a light source, a first light splitter, a first aperture stop, a lens assembly, a second aperture stop, a spectrum analyzer and an analysis module. The first light splitter disposed in the light emitting direction of the light source. The first aperture stop disposed between the light source and the first light splitter. The lens assembly is disposed between the first light splitter and the sample. The second aperture stop is disposed between the lens assembly and the first light splitter. The spectrum analyzer is disposed to at a side of the first light splitter opposite to the sample.

公开(公告)号：US20170059310A1

公开(公告)日：2017-03-02

申请号：US14934607

申请日：2015-11-06

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Chia-Hung CHO ,  Kai-Ping CHUANG ,  Ming-Cheng TSAI

IPC: G01B11/30

CPC classification number: G01B11/303 ,  G01B21/04

Abstract: A surface measuring device includes a rotary platform, a shifting lever, a measuring module, and a control module. The rotary platform carries an object under test and rotates the object under test at a rotating speed. The shifting lever is above the rotary platform. The measuring module disposed on the shifting lever moves to measurement positions on the shifting lever and performs a surface height measurement at a sampling frequency to sampling points on a surface of the object under test when located at one measurement position. The control module selectively adjusts the rotational speed for the rotary platform or the sampling frequency for the measuring module according to the measurement position of the measuring module on the shifting lever in order to fit a distance between the sampling points on at least one part of the surface of the object under test to a sampling rule.

Abstract translation: 表面测量装置包括旋转平台，变速杆，测量模块和控制模块。 旋转平台承载待测物体，以转速旋转被测物体。 变速杆位于旋转平台的上方。 设置在变速杆上的测量模块移动到变速杆上的测量位置，并且当位于一个测量位置时，以采样频率对被测试物体的表面上的采样点进行表面高度测量。 控制模块根据测量模块在变速杆上的测量位置选择性地调节旋转平台的旋转速度或测量模块的采样频率，以便在至少一部分的采样点之间设置距离 被测物体的表面为抽样规则。