Multilayer dielectric for metal-insulator-metal capacitor

    公开(公告)号:US11916099B2

    公开(公告)日:2024-02-27

    申请号:US17341489

    申请日:2021-06-08

    CPC classification number: H01L28/60 H01L29/516

    Abstract: A semiconductor device is provided. The semiconductor device includes: a first conductive electrode; a first dielectric stack structure provided on the first conductive electrode; a second conductive electrode provided on the first dielectric stack structure; a second dielectric stack structure provided on the second conductive electrode; and a third conductive electrode provided on the first dielectric stack structure, wherein each of the first dielectric stack structure and the second dielectric stack structure include a first dielectric layer comprising a first material; a second ferroelectric dielectric layer comprising a second material and provided on the first dielectric layer, and a third dielectric layer comprising a third material and provided on the second ferroelectric dielectric layer.

    HIERARCHICAL COLOR DECOMPOSITION OF LIBRARY CELLS WITH BOUNDARY-AWARE COLOR SELECTION

    公开(公告)号:US20230050432A1

    公开(公告)日:2023-02-16

    申请号:US17399397

    申请日:2021-08-11

    Abstract: Aspects of the invention include systems and methods configured to provide hierarchical circuit designs that makes use of a color decomposition of library cells having boundary-aware color selection. A non-limiting example computer-implemented method includes placing a plurality of shapes within a hierarchical level of a chip design. The plurality of shapes can include a top boundary shape, a bottom boundary shape, one or more center boundary shapes, and one or more internal shapes. A hierarchical hand-off region is constructed by pinning the top boundary shape to a first mask, pinning the bottom boundary shape to a second mask, and pinning the one or more center boundary shapes to a same mask. The same mask is selected from one of the first mask and the second mask.

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