公开(公告)号：US4810529A

公开(公告)日：1989-03-07

申请号：US135578

申请日：1987-12-21

申请人： Joseph V. Mantese ,  Adolph L. Micheli ,  Jayant K. Bhagat ,  David B. Hicks

发明人： Joseph V. Mantese ,  Adolph L. Micheli ,  Jayant K. Bhagat ,  David B. Hicks

IPC分类号： C23C24/08 ,  G01N27/407 ,  B05D5/12 ,  G01N27/58

CPC分类号： G01N27/4076 ,  G01N27/4071

摘要： A method of producing a miniaturized, fixed volume, internal reference gas chamber comprising the pores of a porous material, suitable for use in a rapid response, highly precise, internal reference, solid electrolyte electrochemical-type oxygen sensor capable of detecting oxygen partial pressures in internal combustion engines operating within lean air/fuel mixtures is accomplished using a four step technique. A thin film layer of material is deposited onto a supporting substrate and patterned, said material comprises at least one component resistant to a subsequent removal step and at least one sacrificial component not resistant to the same subsequent removal step. The said material is then sealed everywhere except at an external orifice. The sacrificial component of said material is then decomposed and removed during a removal step, providing an interlocking network of porosity comprised within the porous component of said material. The internal reference gas chamber is positioned adjacent to the electrodes of the sense and pump cells comprised within the oxygen sensing device.

摘要翻译： 一种小型化，固定体积的内部参考气体室的方法，其包括适合用于快速响应的多孔材料的孔，高精度的内部参考，能够检测氧分压的固体电解质电化学型氧传感器 在稀空气/燃料混合物内运行的内燃机使用四步技术完成。 材料的薄膜层沉积在支撑衬底上并被图案化，所述材料包括至少一个抵抗随后的去除步骤的部件和至少一个对相同的随后的去除步骤不耐受的牺牲部件。 然后将所述材料密封在任何地方，除了在外部孔口处。 然后在去除步骤期间将所述材料的牺牲组分分解和除去，从而提供包含在所述材料的多孔组分内的孔隙的互锁网络。 内部参考气体室邻近包含在氧气感测装置内的感测和泵电池的电极定位。

公开(公告)号：US4810350A

公开(公告)日：1989-03-07

申请号：US122442

申请日：1987-11-19

申请人： Joseph V. Mantese ,  Adolph L. Micheli ,  Jayant K. Bhagat ,  David B. Hicks

发明人： Joseph V. Mantese ,  Adolph L. Micheli ,  Jayant K. Bhagat ,  David B. Hicks

IPC分类号： G01N27/416 ,  G01N27/417 ,  G01N27/46 ,  G01N27/58

CPC分类号： G01N27/417

摘要： A method of producing a miniaturized, fixed volume, internal reference gas chamber comprising the pores of a porous material, suitable for use in a rapid response, highly precise, internal reference, solid electrolyte electrochemical-type oxygen sensor capable of detecting oxygen partial pressures in internal combustion engines operating within lean air/fuel mixtures is accomplished using a four step technique. A thin film layer of material is deposited onto a supporting substrate and patterned, said material comprises at least one component resistant to a subsequent removal step and at least one sacrificial component not resistant to the same subsequent removal step. The said material is then sealed everywhere except at an external orifice. The sacrificial component of said material is then decomposed and removed during a removal step, providing an interlocking network of porosity comprised within the porous component of said material. The internal reference gas chamber is positioned adjacent to the electrodes of the sense and pump cells comprised within the oxygen sensing device.

摘要翻译： 一种小型化，固定体积的内部参考气体室的方法，其包括适合用于快速响应的多孔材料的孔，高精度的内部参考，能够检测氧分压的固体电解质电化学型氧传感器 在稀空气/燃料混合物内运行的内燃机使用四步技术完成。 材料的薄膜层沉积在支撑衬底上并被图案化，所述材料包括至少一个抵抗随后的去除步骤的部件和至少一个对相同的随后的去除步骤不耐受的牺牲部件。 然后将所述材料密封在任何地方，除了在外部孔口处。 然后在去除步骤期间将所述材料的牺牲组分分解和除去，从而提供包含在所述材料的多孔组分内的孔隙的互锁网络。 内部参考气体室邻近包含在氧气感测装置内的感测和泵电池的电极定位。

公开(公告)号：US5070317A

公开(公告)日：1991-12-03

申请号：US298158

申请日：1989-01-17

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： B81B7/00 ,  B81C99/00 ,  H01F17/00 ,  H01H50/00 ,  H01L23/64 ,  H01L27/08

CPC分类号： B81B7/0077 ,  B81C1/00214 ,  H01F17/0033 ,  H01H50/005 ,  H01L23/645 ,  H01L27/08 ,  H01F2017/0086 ,  H01H2001/0057 ,  H01L2924/0002 ,  H01L2924/3011

摘要： Spaced apart conductive strips are provided in a first and third of three layers covering a semiconductor substrate. Magnetic core material is included in the second layer so as to be interposed between the conductive strips of the first and second layers. The first and second layers are joined at suitable points so that their respective conductive strips combine to form a helical electrical path which spirals about a core portion of the magnetic material in the second layer. The second layer can be patterned to define a toroidal magnetic path and/or to define a path including a magnetic gap. The armature of an electromechanical relay can be formed within the optional gap by depositing magnetic armature material to partially overlap a sacrificial support base. When the sacrificial support base is etched away, it leaves the overlying armature material free to move.

摘要翻译： 间隔开的导电条设置在覆盖半​​导体衬底的三层中的第一和第三层中。 磁芯材料包括在第二层中，以便插入在第一层和第二层的导电条之间。 第一层和第二层在合适的点处接合，使得它们各自的导电条组合形成螺旋形电路径，其围绕第二层中的磁性材料的芯部分螺旋形。 第二层可以被图案化以限定环形磁路和/或限定包括磁隙的路径。 机电继电器的电枢可以通过沉积磁性电枢材料部分地重叠牺牲支撑基座而形成在任选的间隙内。 当牺牲支撑基底被蚀刻掉时，它离开上覆的电枢材料自由移动。

公开(公告)号：US4668374A

公开(公告)日：1987-05-26

申请号：US882689

申请日：1986-07-07

申请人： Jayant K. Bhagat ,  David S. Howarth

发明人： Jayant K. Bhagat ,  David S. Howarth

IPC分类号： G01N27/407 ,  G01N27/419 ,  G01N27/58

CPC分类号： G01N27/4071 ,  G01N27/419 ,  Y10T29/49002

摘要： A rapid-response gas sensor for measuring the relative presence of a gas in a mixture of gases and its method of manufacture. The sensor is fabricated using microelectronics technology to form multiple thin-film solid-electrolyte pump and sense cells within a hermetically sealed sensor cavity.

摘要翻译： 一种用于测量气体在气体混合物中的相对存在的快速响应气体传感器及其制造方法。 传感器使用微电子技术制造，以形成多个薄膜固体电解质泵，并在密封的传感器腔内感测电池。

公开(公告)号：US4861731A

公开(公告)日：1989-08-29

申请号：US151534

申请日：1988-02-02

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： H01L29/74

CPC分类号： H01L29/7436

摘要： A semiconductor power device with bipolar regenerative switching characteristics provides insulated gate structures for controlling device turn-on and turn-off. Rapid turn-off is achieved in part by a lateral field effect pinch resistance and a vertical field effect pinch resistance produced by an electrically floating structure. The device is electrically isolated by layer of dielectric which allows it to be easily integrated with other circuit elements. The device can be controlled by low current and low positive voltages which provides for simpler interfacing and better electrical compatibility with other circuits in an automotive system. A method of manufactuing this device is also provided.

摘要翻译： 具有双极再生开关特性的半导体功率器件提供用于控制器件导通和关断的绝缘栅极结构。 快速关断部分地由电浮动结构产生的横向场效应夹紧电阻和垂直场效应夹持电阻实现。 该器件由电介质层电隔离，允许其容易地与其它电路元件集成。 该器件可以由低电流和低正电压控制，这提供了更简单的接口和与汽车系统中其他电路的更好的电气兼容性。 还提供了制造该装置的方法。

公开(公告)号：US4786958A

公开(公告)日：1988-11-22

申请号：US931345

申请日：1986-11-17

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： H01L29/73 ,  H01L21/331 ,  H01L21/76 ,  H01L29/08 ,  H01L29/10 ,  H01L29/739 ,  H01L29/74 ,  H01L29/744 ,  H01L29/745 ,  H01L29/749 ,  H01L29/78

CPC分类号： H01L29/1016 ,  H01L29/7436 ,  H01L29/745 ,  H01L29/7455

摘要： A semiconductor power device with bipolar regenerative switching characteristics provides insulated gate structures for controlling device turn-on and turn-off. Rapid turn-off is achieved in part by a lateral field effect pinch resistance and a vertical field effect pinch resistance produced by an electrically floating structure. The device is electrically isolated by layer of dielectric which allows it to be easily integrated with other circuit elements. The device can be controlled by low current and low positive voltages which provide for simpler interfacing and better electrical compatibility with other circuits in an automotive system. A method of manufacturing this device is also provided.

摘要翻译： 具有双极再生开关特性的半导体功率器件提供用于控制器件导通和关断的绝缘栅极结构。 快速关断部分地由电浮动结构产生的横向场效应夹紧电阻和垂直场效应夹持电阻实现。 该器件由电介质层电隔离，允许其容易地与其它电路元件集成。 该器件可以由低电流和低正电压控制，这提供了更简单的接口和与汽车系统中其他电路的更好的电气兼容性。 还提供了一种制造该器件的方法。

公开(公告)号：US4575921A

公开(公告)日：1986-03-18

申请号：US656182

申请日：1984-10-01

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： H01L21/033 ,  H01L21/311 ,  H01L21/318 ,  H01L21/265

CPC分类号： H01L21/033 ,  H01L21/31105 ,  H01L21/3185 ,  Y10S148/082 ,  Y10S148/112 ,  Y10S148/114

摘要： A method of forming a silicon nitride coating in situ on a silicon surface by ion milling. The ion milling and silicon nitride formation process are uniquely integrated in semiconductor manufacturing methods to provide several benefits, including contact areas being substantially registered with and self-aligned with functional regions.

摘要翻译： 通过离子研磨在硅表面上原位形成氮化硅涂层的方法。 离子研磨和氮化硅形成方法独特地集成在半导体制造方法中，以提供若干益处，包括接触面积基本上与功能区域对准并且与其自对准。

公开(公告)号：US4630092A

公开(公告)日：1986-12-16

申请号：US667845

申请日：1984-11-02

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： H01L29/06 ,  H01L29/10 ,  H01L29/423 ,  H01L29/745 ,  H01L29/749 ,  H01L29/72 ,  H01L27/06 ,  H01L29/08

CPC分类号： H01L29/42308 ,  H01L29/0684 ,  H01L29/1016 ,  H01L29/745 ,  H01L29/7455 ,  H01L29/749

摘要： A new semiconductor power device, suitable for electrical switching in automotive applications, is proposed. This device combines the low specific on-resistance achievable with bipolar regenerative switching devices with the convenience of insulated gate control of not only turn-on but also turn-off. A device structure is presented that also includes a pinch resistance effect to more rapidly produce turn-off.

摘要翻译： 提出了一种适用于汽车应用中的电气开关的新型半导体功率器件。 该器件将可实现的低比导通电阻与双极型再生开关器件相结合，不仅可以实现接通而且关断的绝缘栅极控制。 提出了一种装置结构，其还包括夹紧电阻效应以更快地产生关断。

公开(公告)号：US4528211A

公开(公告)日：1985-07-09

申请号：US548712

申请日：1983-11-04

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： H01L21/033 ,  H01L21/311 ,  H01L21/318

CPC分类号： H01L21/033 ,  H01L21/31105 ,  H01L21/3185 ,  Y10S438/911 ,  Y10S438/974

摘要： A method of forming a silicon nitride coating in situ on a silicon surface by ion milling. The ion milling and silicon nitride formation process are uniquely integrated in semiconductor manufacturing methods to provide several benefits, including contact areas being substantially registered with and self-aligned with functional regions.

公开(公告)号：US4636830A

公开(公告)日：1987-01-13

申请号：US667827

申请日：1984-11-02

申请人： Jayant K. Bhagat

发明人： Jayant K. Bhagat

IPC分类号： H01L29/06 ,  H01L29/10 ,  H01L29/423 ,  H01L29/745 ,  H01L29/749 ,  H01L29/72 ,  H01L29/08 ,  H01L29/78

CPC分类号： H01L29/7455 ,  H01L29/0684 ,  H01L29/1016 ,  H01L29/42308 ,  H01L29/745 ,  H01L29/749

摘要： A new semiconductor power device, suitable for electrical switching in automotive applications, is proposed. This device combines the low specific on-resistance achievable with bipolar regenerative switching devices with the convenience of insulated gate control of not only turn-on but also turn-off. A device structure is presented that also includes a pinch resistance effect to more rapidly produce turn-off. The anode region of the device is electrically shorted to its contiguous N-type region.

摘要翻译： 提出了一种适用于汽车应用中的电气开关的新型半导体功率器件。 该器件将可实现的低比导通电阻与双极型再生开关器件相结合，不仅可以实现接通而且关断的绝缘栅极控制。 提出了一种装置结构，其还包括夹紧电阻效应以更快地产生关断。 器件的阳极区域与其邻接的N型区域电短路。