Methods of forming electromigration and thermal gradient based fuse structures
    3.
    发明授权
    Methods of forming electromigration and thermal gradient based fuse structures 有权
    形成电迁移和基于热梯度的熔丝结构的方法

    公开(公告)号:US08368171B2

    公开(公告)日:2013-02-05

    申请号:US11605119

    申请日:2006-11-27

    IPC分类号: H01L23/52 H01L29/40

    摘要: Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a metallic fuse structure by forming at least one via on a first interconnect structure, lining the at least one via with a barrier layer, and then forming a second interconnect structure on the at least one via.

    摘要翻译: 描述形成微电子结构的方法。 这些方法的实施例包括通过在第一互连结构上形成至少一个通孔来形成金属熔丝结构,将所述至少一个通孔与阻挡层衬里,然后在所述至少一个通孔上形成第二互连结构。

    Methods of forming electromigration and thermal gradient based fuse structures
    4.
    发明授权
    Methods of forming electromigration and thermal gradient based fuse structures 有权
    形成电迁移和基于热梯度的熔丝结构的方法

    公开(公告)号:US07662674B2

    公开(公告)日:2010-02-16

    申请号:US11133835

    申请日:2005-05-20

    IPC分类号: H01L21/82 H01L21/336

    摘要: Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a metallic fuse structure by forming at least one via on a first interconnect structure, lining the at least one via with a barrier layer, and then forming a second interconnect structure on the at least one via.

    摘要翻译: 描述形成微电子结构的方法。 这些方法的实施例包括通过在第一互连结构上形成至少一个通孔来形成金属熔丝结构,将所述至少一个通孔与阻挡层衬里,然后在所述至少一个通孔上形成第二互连结构。