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    REVIEWED DEFECT SELECTION PROCESSING METHOD, DEFECT REVIEW METHOD, REVIEWED DEFECT SELECTION PROCESSING TOOL, AND DEFECT REVIEW TOOL
    2.
    发明申请
    REVIEWED DEFECT SELECTION PROCESSING METHOD, DEFECT REVIEW METHOD, REVIEWED DEFECT SELECTION PROCESSING TOOL, AND DEFECT REVIEW TOOL 有权
    回顾缺陷选择处理方法，缺陷审查方法，回顾缺陷选择处理工具和缺陷审查工具

    公开(公告)号：US20120093392A1

    公开(公告)日：2012-04-19

    申请号：US13266800

    申请日：2010-03-25

    申请人： Yuji Takagi ,  Minoru Harada ,  Yuichi Hamamura

    发明人： Yuji Takagi ,  Minoru Harada ,  Yuichi Hamamura

    IPC分类号： G06K9/62

    CPC分类号： G01N21/9501 ,  G01N21/956 ,  G01N2021/8867 ,  H01L22/12 ,  H01L22/20

    摘要： The present invention relates to semiconductor inspection and provides a technology capable of efficiently detecting a systematic defect. In the present system, with regard to the process (S7, S8) of matching hot spot (HS) points that can be simulated in advance and defect points obtained as a result of a visual inspection each other and the unmatched defect points, a process (S6, S9) of classifying the defect points into groups based on similarity of pattern layout at the defect points to determine the defects belonging to a pattern layout where defects frequently occur, thereby reliably detecting the systematic defect. Also, with a process (S11) of acquiring an uneven distribution in a defect occurrence distribution on a wafer, the systematic defect occurring due to topography of the wafer can also be detected.

    摘要翻译： 本发明涉及半导体检查，并且提供能够有效地检测系统缺陷的技术。 在本系统中，关于可以预先模拟的热点（HS）点和作为目视检查的结果获得的缺陷点与不匹配的缺陷点的处理（S7，S8），处理 （S6，S9），根据缺陷点的图案布局的相似度将缺陷点分类成组，以确定属于频繁发生缺陷的图案布局的缺陷，从而可靠地检测系统缺陷。 此外，通过获取晶片上的缺陷发生分布中的不均匀分布的处理（S11），也可以检测由于晶片的形貌而发生的系统缺陷。

    OPERATION SUPPORT APPARATUS, OPERATION SUPPORT METHOD AND COMPUTER PROGRAM
    3.
    发明申请
    OPERATION SUPPORT APPARATUS, OPERATION SUPPORT METHOD AND COMPUTER PROGRAM 审中-公开
    操作支持设备，操作支持方法和计算机程序

    公开(公告)号：US20100333009A1

    公开(公告)日：2010-12-30

    申请号：US12735825

    申请日：2009-01-22

    申请人： Isao Oshita ,  Shinichiroh Shimoi ,  Minoru Harada ,  Yukio Satou ,  Eiichi Sasaki

    发明人： Isao Oshita ,  Shinichiroh Shimoi ,  Minoru Harada ,  Yukio Satou ,  Eiichi Sasaki

    IPC分类号： G06F3/048

    CPC分类号： G06Q10/06

    摘要： An operation support apparatus includes a display device (16) displaying a setting screen including an operating instruction information setting section in which operating instruction information related to the operating instruction is set and an applicable condition setting section having a menu for setting an applicable condition when notifying the operating instruction information. A CPU (11) selects one item from display items in the menu based on an operating input by a PD (14), and performs control to change and display display items in a lower menu below the menu depending on the selected item.

    摘要翻译： 操作支持装置包括：显示装置，显示包括操作指示信息设置部分的设置画面，其中设置了与操作指令相关的操作指令信息;以及可应用条件设置部分，具有用于在通知时设置适用条件的菜单 操作说明信息。 CPU（11）基于PD（14）的操作输入从菜单中的显示项目中选择一个项目，并且根据所选择的项目执行控制以在菜单下方的菜单中更改和显示显示项目。

    Electronic apparatus having security function
    4.
    发明授权
    Electronic apparatus having security function 有权
    具有安全功能的电子设备

    公开(公告)号：US07093300B1

    公开(公告)日：2006-08-15

    申请号：US09360142

    申请日：1999-07-26

    申请人： Minoru Harada ,  Hiroyuki Watabe ,  Masaru Kamino

    发明人： Minoru Harada ,  Hiroyuki Watabe ,  Masaru Kamino

    IPC分类号： G06F1/26

    CPC分类号： G08B21/0213 ,  B60R25/00 ,  G08B13/1409 ,  G08B15/00 ,  G08B25/001

    摘要： In the event that an electronic apparatus having a security function is forcibly put into an inoperable state because electric power is shut off once by an operation equivalent to theft, the inoperable state can be canceled by using a code notified by the dealer by telephone, without carrying the electronic apparatus in its dealer. After electric power is supplied again, the vehicle-mounted compact disc (abbreviated as CD) reproduction apparatus is used to play back a CD, and its TOC information is used as a judgment identification code C1. When the code C1 is identical to the authorized identification code A21, the electronic apparatus is made operable. In order to cancel the inoperable state after the number of inconsistencies becomes 10 or more, the individual code A22 of an EEPROM 21 is indicated and notified to the dealer. The dealer carries out calculation by using the individual code A22, and a result B2 of the calculation is notified to the user. The user inputs the calculation result B2. Individual code calculating means carries out the same calculation as the above-mentioned calculation and obtains the calculation result B3. When the calculation result B2 coincides with the calculation result B3, the inoperable state can be canceled.

    摘要翻译： 在具有安全功能的电子设备被强制投入不能操作状态的情况下，由于通过与盗窃相同的操作关闭一次电力，可以通过使用由经销商通过电话通知的代码来取消不可操作状态，而不用 在其经销商中携带电子设备。 在再次供电之后，使用车载光盘（简写为CD）再现装置来播放CD，并将其TOC信息用作判断识别码C 1。 当代码C 1与授权识别码A21相同时，电子设备可操作。 为了在不一致的数量变为10以上之后取消不可操作状态，EEPROM 21的各个代码A 22被指示并通知给经销商。 经销商通过使用单独的代码A22执行计算，并且向用户通知该计算的结果B 2。 用户输入计算结果B 2。 个别代码计算装置执行与上述计算相同的计算，并获得计算结果B 3。 当计算结果B 2与计算结果B 3一致时，可以取消不可操作的状态。

    Ozone generator
    5.
    发明授权
    Ozone generator 有权
    臭氧发生器

    公开(公告)号：US06932946B2

    公开(公告)日：2005-08-23

    申请号：US09885102

    申请日：2001-06-21

    申请人： Ryoichi Shinjo ,  Minoru Harada ,  Yukiko Nishioka

    发明人： Ryoichi Shinjo ,  Minoru Harada ,  Yukiko Nishioka

    IPC分类号： C01B13/11 ,  H01T23/00 ,  B01J19/08

    CPC分类号： C01B13/11 ,  C01B2201/12 ,  C01B2201/22

    摘要： An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, and a dielectric provided between the opposing electrodes. A gas flow passage for allowing flow of a material gas therethrough is defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.

    摘要翻译： 臭氧发生器包括一对间隔的相对电极，将该对电极连接到高压交流电源的导电构件，以在电极之间产生放电，以及设置在相对电极之间的电介质。 用于允许材料气体流过其中的气体流动通道由电极的表面限定。 该对电极的至少一个表面具有多个平行的凹槽。 材料气体在横向于槽的方向上在多个槽和电介质之间的空间中流动。

    Ozone generating apparatus
    7.
    发明授权
    Ozone generating apparatus 失效
    臭氧发生装置

    公开(公告)号：US5702673A

    公开(公告)日：1997-12-30

    申请号：US633551

    申请日：1996-04-17

    申请人： Naruhiko Kaji ,  Yutaka Nakano ,  Rempei Nakata ,  Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura

    发明人： Naruhiko Kaji ,  Yutaka Nakano ,  Rempei Nakata ,  Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura

    IPC分类号： C01B13/10 ,  C01B13/11

    CPC分类号： C01B13/11 ,  C01B13/10

    摘要： An ozone generating apparatus produces highly pure ozone gas which can be used in a semiconductor manufacturing process. The ozone generating apparatus comprises a high voltage source, an ozone generating cell which generates ozone gas by supplying a material gas while applying a high voltage from the high voltage source, and a passage for delivering the generated ozone gas from the ozone generating cell to a desired location. The passage comprises a material which has a passivation film formed by a passivation treatment in a dry process. The oxide passivation film comprises chromium oxide film, iron oxide film or a composite film of chromium oxide and iron oxide.

    摘要翻译： 臭氧发生装置产生可用于半导体制造工艺的高纯度臭氧气体。 臭氧发生装置包括高电压源，臭氧发生电池，其通过在从高电压源施加高电压的同时供给材料气体而产生臭氧气体，以及用于将产生的臭氧气体从臭氧发生电池输送到 理想位置。 该通道包括具有通过在干法中的钝化处理形成的钝化膜的材料。 氧化物钝化膜包括氧化铬膜，氧化铁膜或氧化铬和氧化铁的复合膜。

    Method and apparatus for reviewing defect
    8.
    发明授权
    Method and apparatus for reviewing defect 有权
    检查缺陷的方法和装置

    公开(公告)号：US09342879B2

    公开(公告)日：2016-05-17

    申请号：US14347127

    申请日：2012-07-06

    申请人： Yohei Minekawa ,  Kenji Nakahira ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

    发明人： Yohei Minekawa ,  Kenji Nakahira ,  Minoru Harada ,  Takehiro Hirai ,  Ryo Nakagaki

    IPC分类号： G06K9/00 ,  G06T7/00

    CPC分类号： G06T7/0004 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/20016 ,  G06T2207/30148

    摘要： A method for reviewing defect, comprising the steps of: as an image acquisition step, imaging a surface of a sample using arbitrary image acquisition condition selected from a plurality of image acquisition conditions and obtaining a defect image; as a defect position calculation step, proceeding the defect image obtained by the image acquisition step and calculating a defect position on the surface of the sample; as a defect detection accuracy calculation step, obtaining a defect detection accuracy of the defect position calculated by the defect position calculation step; and as a conclusion determination step, determinating whether the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined requirement or not; wherein until it is determined that the defect detection accuracy obtained by the defect detection accuracy calculation step meets a predetermined in the conclusion determination step, the image acquisition condition is selected from the plurality of image acquisition conditions once again and the image acquisition step, the defect position calculation step, the defect detection accuracy calculation step and the conclusion determination step are repeated.

    摘要翻译： 一种检查缺陷的方法，包括以下步骤：作为图像获取步骤，使用从多个图像获取条件中选择的任意图像获取条件对样本的表面进行成像并获得缺陷图像; 作为缺陷位置计算步骤，进行通过图像获取步骤获得的缺陷图像，并计算样本表面上的缺陷位置; 作为缺陷检测精度计算步骤，获得由缺陷位置计算步骤计算的缺陷位置的缺陷检测精度; 以及作为结论确定步骤，确定由缺陷检测精度计算步骤获得的缺陷检测精度是否满足预定要求; 其中直到确定由缺陷检测精度计算步骤获得的缺陷检测精度在结论确定步骤中达到预定值时，再次从多个图像获取条件中选择图像获取条件，并且图像获取步骤，缺陷 位置计算步骤，重复缺陷检测精度计算步骤和结论确定步骤。

    Method and system for observing a specimen using a scanning electron microscope
    9.
    发明授权
    Method and system for observing a specimen using a scanning electron microscope 有权
    使用扫描电子显微镜观察样品的方法和系统

    公开(公告)号：US07932493B2

    公开(公告)日：2011-04-26

    申请号：US12153333

    申请日：2008-05-16

    申请人： Minoru Harada ,  Ryo Nakagaki ,  Kenji Obara

    发明人： Minoru Harada ,  Ryo Nakagaki ,  Kenji Obara

    IPC分类号： G01N23/22 ,  G06K9/00

    CPC分类号： G01N23/225 ,  H01J2237/216

    摘要： It is intended to reduce the auto focusing time and to increase the stability in a case that a defect on a specimen that has been detected by an inspection apparatus is observed by using a scanning electron microscope. One or more regions to be used for auto focusing are set in an imaging region or its neighborhood on the basis of semiconductor design information. A target focusing position in the imaging region is determined by performing auto focusing using the thus-set regions. The determined target focusing position is used for low-magnification imaging and high-magnification imaging. An auto focusing mode that is suitable for each imaging region is selected on the basis of the semiconductor design information.

    摘要翻译： 为了减少自动聚焦时间，并且通过使用扫描电子显微镜来观察检查装置检测到的检体的缺陷的情况下的稳定性。 用于自动聚焦的一个或多个区域基于半导体设计信息设置在成像区域或其邻域中。 通过使用如此设定的区域进行自动聚焦来确定成像区域中的目标对焦位置。 所确定的目标对焦位置用于低倍率成像和高倍率成像。 基于半导体设计信息选择适合于每个成像区域的自动对焦模式。

    PROCESS FOR PRODUCTION OF CRYSTAL OF PURINE NUCLEOSIDE COMPOUND
    10.
    发明申请
    PROCESS FOR PRODUCTION OF CRYSTAL OF PURINE NUCLEOSIDE COMPOUND 有权
    磷酸核苷化合物晶体生产工艺

    公开(公告)号：US20090326213A1

    公开(公告)日：2009-12-31

    申请号：US12504839

    申请日：2009-07-17

    申请人： Masaki NAITO ,  Yoshitomo Kimura ,  Hiroya Ueda ,  Minoru Harada

    发明人： Masaki NAITO ,  Yoshitomo Kimura ,  Hiroya Ueda ,  Minoru Harada

    IPC分类号： C07H19/20 ,  C07H19/16

    CPC分类号： C07H19/167 ,  C07D473/30 ,  C07H19/173

    摘要： Crystals of a purine nucleoside compound, particularly crystals of 2′,3′-dideoxyinosine, which have excellent storage stability and have a concentration of phosphate attached to the crystal of 25 ppm or more, may be produce by: (1) preparing an aqueous solution containing phosphate ion (PO43−) and a purine nucleoside compound; and (2) crystallizing the purine nucleoside compound from the aqueous solution.

    摘要翻译： 具有优异的储存稳定性和具有25ppm以上结晶的磷酸盐浓度的嘌呤核苷化合物，特别是2'，3'-二脱氧肌苷的晶体可以通过以下方法制备：（1）制备水溶液 含有磷酸根离子（PO43-）和嘌呤核苷化合物的溶液; 和（2）从水溶液中结晶嘌呤核苷化合物。