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公开(公告)号：US20030210715A1
公开(公告)日：2003-11-13
申请号：US10354945
申请日：2003-01-29
申请人： Lambda Physik AG.
IPC分类号： H01S003/10 , H01S003/22 , H01S003/223 , H01S003/08
CPC分类号： H01S3/225 , H01S3/1392
摘要： A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.
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公开(公告)号：US20020041614A1
公开(公告)日：2002-04-11
申请号：US09965498
申请日：2001-09-26
申请人： Lambda Physik AG
IPC分类号： H01S003/22 , H01S003/223
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.
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公开(公告)号：US20020031161A1
公开(公告)日：2002-03-14
申请号：US09923632
申请日：2001-08-06
申请人： Lambda Physik AG
IPC分类号： H01S003/098
CPC分类号： H01S3/08036 , H01S3/08 , H01S3/08081 , H01S3/1305 , H01S3/139 , H01S3/225
摘要： An apparatus and method are provided for bandwidth narrowing of an excimer laser to nullnullnull6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.
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公开(公告)号：US20020114362A1
公开(公告)日：2002-08-22
申请号：US10116903
申请日：2002-04-05
申请人： Lambda Physik AG
IPC分类号： H01S003/13
CPC分类号： H01S3/036 , G02B5/1814 , G02B5/1838 , H01S3/0315 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08059 , H01S3/0809 , H01S3/0971 , H01S3/1055 , H01S3/137 , H01S3/225 , H01S3/2258
摘要： An efficient F2 laser is provided with improvements in line selection, monitoring capabilities, alignment stabilization, performance at high repetition rates and polarization characteristics. Line selection is preferably provided by a transmission grating or a grism. The grating or grism preferably outcouples the laser beam. The line selection may be fully provided at the front optics module. A monitor grating and an array detector monitor the intensity of the selected (and unselected) lines for line selection control. An energy detector is enclosed in an inert gas purged environment at slight overpressure. A blue or green reference beam is used for F2 laser beam alignment stabilization and/or spectral monitoring of the output laser beam. The blue or green reference beam advantageously is not reflected out with a atomic fluorine red emission of the laser and is easily resolved from the red emission. The clearing ratio of the laser gas flow through the discharge area is reduced by narrowing the discharge width using improved laser electrodes and/or by increasing the gas flow rate through the discharge while maintaining uniformity by using a more aerodynamic discharge chamber. The F2 laser beam is substantially polarized, e.g., 98% or better, using at least one intracavity polarization element preferably in combination with Brewster discharge chamber windows.
摘要翻译： 提供高效的F2激光器，具有线路选择，监视功能，对准稳定性，高重复率性能和极化特性的改进。 线选择优选地由透射光栅或棱镜提供。 光栅或棱镜优选地将激光束输出耦合。 线路选择可以完全提供在前光学模块。 监视器光栅和阵列检测器监视所选（和未选择）线的强度用于线选择控制。 一个能量检测器被封闭在惰性气体吹扫的环境中，轻微的超压。 使用蓝色或绿色参考光束进行F2激光束对准稳定和/或输出激光束的光谱监测。 蓝色或绿色参考光束有利地不被激光的原子氟红色发射反射，并且容易地从红色发射中消除。 通过使用改进的激光电极使放电宽度变窄并且/或通过增加通过放电的气体流量而减小激光气体流过放电区域的清除率，同时通过使用更多的空气动力学放电室来保持均匀性。 使用至少一个腔内偏振元件，优选与布鲁斯特放电室窗口组合，F2激光束基本上被极化，例如98％或更好。
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公开(公告)号：US20040252740A1
公开(公告)日：2004-12-16
申请号：US10338779
申请日：2003-01-06
申请人： Lambda Physik AG.
发明人： Hans-Stephan Albrecht , Klaus Wolfgang Vogler , Juergen Kleinschmidt , Thomas Schroeder , Igor Bragin , Vadim Berger , Uwe Stamm , Wolfgang Zschocke , Sergei Govorkov
IPC分类号： H01S003/22 , H01S003/223
CPC分类号： G03F7/70025 , G02B5/1814 , G02B5/1838 , G03F7/70575 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/08031 , H01S3/08045 , H01S3/0971 , H01S3/1055 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
摘要翻译： 提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。 分子氟以初始分压提供，并在激光放电室内耗尽。 每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选每次注射小于0.2mbar，或已经在激光室内的F2的量的7％。 可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。 每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。 驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。 在每个范围内，气体注入和气体替换优选地基于对放电的总施加的电能和/或在时间和/或脉冲计数上进行。
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公开(公告)号：US20020110174A1
公开(公告)日：2002-08-15
申请号：US10121292
申请日：2002-04-12
申请人： Lambda Physik AG
IPC分类号： H01S003/223
CPC分类号： G03F7/70025 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
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公开(公告)号：US20020101901A1
公开(公告)日：2002-08-01
申请号：US10114184
申请日：2002-04-01
申请人： Lambda Physik AG
IPC分类号： H01S003/223
CPC分类号： G03F7/70025 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
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公开(公告)号：US20020101902A1
公开(公告)日：2002-08-01
申请号：US10114620
申请日：2002-04-01
申请人： Lambda Physik AG
IPC分类号： H01S003/223
CPC分类号： G03F7/70025 , G03F7/70575 , H01S3/036 , H01S3/134 , H01S3/225
摘要： A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.
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公开(公告)号：US20020034207A1
公开(公告)日：2002-03-21
申请号：US09965492
申请日：2001-09-26
申请人： Lambda Physik AG
IPC分类号： H01S003/22 , H01S003/223
CPC分类号： H01S3/225 , B23K26/12 , B23K26/128 , B23K26/705 , B23K2103/05 , G01J1/4257 , G03F7/70025 , G03F7/70558 , G03F7/70808 , H01S3/0014 , H01S3/134
摘要： A system is provided for delivering a laser beam of wavelength less than 200 nm from a laser, such as an F2 laser or ArF laser, through a sealed enclosure sealably connected to the laser, and preferably to another housing, leading ultimately to a workpiece. The enclosure is preferably evacuated and back-filled with an inert gas to adequately deplete any air, water, hydrocarbons or oxygen within the enclosure. Thereafter or alternatively, an inert gas flow is established and maintained within the enclosure during operation of the laser. The inert gas preferably has high purity, e.g., more than 99.5% and preferably more than 99.999%, wherein the inert is preferably nitrogen or a noble gas. The enclosure is preferably sealed by a window transparent to the sub-200 nm radiation for preventing contaminants generated in the enclosure from entering the housing and contaminating surfaces therein. The enclosure is preferably made of steel and/or copper, and the window is preferably made of CaF2.
摘要翻译： 提供了一种系统，用于通过可密封地连接到激光器的密封外壳，优选地将最终导向工件的激光器等激光器（例如F2激光器或ArF激光器）传送波长小于200nm的激光束。 外壳优选被抽空并用惰性气体反填充以充分消耗外壳内的任何空气，水，碳氢化合物或氧气。 之后或者替代地，在激光器的操作期间建立惰性气体流并保持在外壳内。 惰性气体优选具有高纯度，例如超过99.5％，优选大于99.999％，其中惰性气体优选为氮气或惰性气体。 外壳优选由对于200nm以下的辐射透明的窗口密封，以防止在外壳中产生的污染物进入壳体和污染表面。 外壳优选由钢和/或铜制成，并且窗口优选地由CaF 2制成。
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