公开(公告)号：US20020075932A1

公开(公告)日：2002-06-20

申请号：US10077327

申请日：2002-02-15

Applicant: Lambda Physik AG.

Inventor： Uwe Stamm

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/137 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser includes a gain medium surrounded by a resonator and including a line-narrowing module preferably including a prism beam expander and one or more etalons and/or a grating or grism within the resonator. The material of transmissive portions of the line-narrowing module including the prisms and the plates of the etalons comprises a material having an absorption coefficient of less than 5null10null3/cm at 248 nm incident radiation, less than 10null10null3/cm at 193 nm incident radiation, and less than 0.1/cm at 157 nm. Preferably the material also has a thermal conductivity greater than 2.0 W/mnull C.

Abstract translation: 准分子或分子氟激光器包括由谐振器包围的增益介质，并且包括在谐振器内优选地包括棱镜束扩展器和一个或多个标准具和/或光栅或棱镜的线条变窄模块。 包括棱镜和标准具的板的线变窄模块的透射部分的材料包括在248nm入射辐射下吸收系数小于5×10 -3 / cm的材料，在193处小于10×10 -3 / cm nm入射辐射，在157nm处小于0.1 / cm。 优选地，该材料还具有大于2.0W / m℃的热导率。

公开(公告)号：US20040252740A1

公开(公告)日：2004-12-16

申请号：US10338779

申请日：2003-01-06

Applicant: Lambda Physik AG.

Inventor： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

Abstract: A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

Abstract translation: 提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。 分子氟以初始分压提供，并在激光放电室内耗尽。 每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选每次注射小于0.2mbar，或已经在激光室内的F2的量的7％。 可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。 每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。 驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。 在每个范围内，气体注入和气体替换优选地基于对放电的总施加的电能和/或在时间和/或脉冲计数上进行。

公开(公告)号：US20030210715A1

公开(公告)日：2003-11-13

申请号：US10354945

申请日：2003-01-29

Applicant: Lambda Physik AG.

Inventor： Peter Lokai ,  Thomas Schroeder ,  Juergen Kleinschmidt ,  Uwe Stamm ,  Klaus Wolfgang Vogler

IPC: H01S003/10 ,  H01S003/22 ,  H01S003/223 ,  H01S003/08

CPC classification number: H01S3/225 ,  H01S3/1392

Abstract: A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

公开(公告)号：US20020186741A1

公开(公告)日：2002-12-12

申请号：US10114671

申请日：2002-04-01

Applicant: Lambda Physik AG

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei V. Govorkov

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/106 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  G01J1/4257 ,  G01J1/58 ,  G02B5/04 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70558 ,  G03F7/70575 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/0315 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08018 ,  H01S3/08036 ,  H01S3/08081 ,  H01S3/081 ,  H01S3/0811 ,  H01S3/0812 ,  H01S3/0971 ,  H01S3/09716 ,  H01S3/104 ,  H01S3/1055 ,  H01S3/1062 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/1312 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/1392 ,  H01S3/22 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser system generates a laser output bandwidth of less than 0.6 pm, and preferably 0.5-0.4 pm or less. The laser resonator has a line-narrowing unit preferably including a grating, and preferably also a beam expander, and may include one or more etalons or other interferometric devices. The grating may be preferably a blazed grating having a blaze angle greater than 76null, and is preferably around 80null. The grating structure is preferably defined by the surface of the grating substrate. The substrate is preferably aluminum. The system may further include an amplifier for increasing the energy of the sub-0.6 nm output beam.

Abstract translation: 准分子或分子氟激光系统产生小于0.6μm，优选0.5-0.4μm或更小的激光输出带宽。 激光谐振器具有优选地包括光栅的线窄变换单元，并且优选地还包括光束扩展器，并且可以包括一个或多个标准具或其它干涉测量装置。 光栅可以优选为具有大于76°的闪耀角度的闪耀光栅，并且优选地为大约80°。 光栅结构优选由光栅基板的表面限定。 基材优选为铝。 该系统还可以包括用于增加次0.6nm输出光束的能量的放大器。

公开(公告)号：US20020015430A1

公开(公告)日：2002-02-07

申请号：US09858147

申请日：2001-05-14

Applicant: Lambda Physik AG

Inventor： Rustem Osmanow ,  Uwe Stamm ,  Andreas Targsdorg

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/0975

Abstract: Method and system for providing an excimer or molecular fluorine laser including a laser tube filled with a laser gas surrounded by an optical resonator, where the laser tube has multiple electrodes including a pair of main discharge electrodes connected to a discharge circuit for exciting the laser gas to produce a laser output beam. The discharge circuit has an all solid state switch and preferably does not include a transformer. The solid state switch includes multiple solid state devices that may be capable of switching voltages in excess of 12 kV, such as 14-32 kV or more, or the voltage needed to switch the laser. The series of switches has a rise time of approximately less than 300 ns, and preferably around 100 ns or less. The switch may be capable of switching voltages of slightly more than half, but less than the entire voltage needed to produce laser pulses of desired energies, and a voltage doubling circuit may be used to produce the voltage required to produce the desired output pulse energies. An oscillator-amplifier configuration may be used, wherein an oscillator switch may be capable of switching voltages less than the entire voltage needed to produce the desired laser pulse energies, while the amplifier amplifies the pulses to the desired pulse energies.

Abstract translation: 用于提供准分子或分子氟激光的方法和系统，其包括填充有由光学谐振器包围的激光气体的激光管，其中激光管具有多个电极，其包括连接到用于激发激光气体的放电电路的一对主放电电极 以产生激光输出光束。 放电电路具有全固态开关，并且优选地不包括变压器。 固态开关包括多个固态器件，其能够切换超过12kV的电压，例如14-32kV或更高，或切换激光所需的电压。 该系列开关具有大约小于300ns的上升时间，优选地在约100ns以下。 该开关可能能够切换稍大于一半但小于产生所需能量的激光脉冲所需的整个电压的电压，并且可以使用倍压电路来产生产生所需输出脉冲能量所需的电压。 可以使用振荡器放大器配置，其中振荡器开关可以能够切换小于产生所需激光脉冲能量所需的整个电压的电压，而放大器将脉冲放大到期望的脉冲能量。

公开(公告)号：US20010033594A1

公开(公告)日：2001-10-25

申请号：US09826372

申请日：2001-04-03

Applicant: Lambda Physik AG.

Inventor： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

Abstract: A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

Abstract translation: 用于准分子或分子氟激光的激光器包括与气体流动容器连接并具有一对主电极和预电离单元的电极室，每个主电极连接到放电电路。 扰流器设置在电极室内，并且被成形为提供通过主电极之间的放电区域的更均匀的气流，以便将一个预电离单元与其中一个主电极隔离，并且反射在放电中产生的声波 区域进入气流容器，用于吸收。 扰流器单元可以在放电区域的任一侧上包括一对相对的扰流器元件。 一个或两个主电极包括基部和可以是从基部突出的接头的中心部分。 中心部分基本上承载周期性放电电流，使得放电宽度可以明显小于基部的宽度。 两个主电极的曲率可以符合通过放电室的气流的曲率，以进一步提高空气动力性能。 多个低感应导电肋连接到接地的主电极并成形为提供通过相邻肋之间限定的开口的更均匀的气体流。

公开(公告)号：US20010030986A1

公开(公告)日：2001-10-18

申请号：US09826296

申请日：2001-04-03

Applicant: Lambda Physik AG

Inventor： Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Ulrich Rebhan

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225

Abstract: A laser for an excimer or molecular fluorine laser includes an electrode chamber connected with a gas flow vessel and having a pair of main electrodes and a preionization unit each connected to a discharge circuit. A spoiler is provided within the electrode chamber and is shaped to provide a more uniform gas flow through the discharge area between the main electrodes, to shield one of the preionization units from one of the main electrodes, and to reflect acoustic waves generated in the discharge area into the gas flow vessel for absorption therein. A spoiler unit may include a pair of opposed spoiler elements on either side of the discharge area. One or both main electrodes includes a base portion and a center portion which may be a nipple protruding from the base portion. The center portion substantially carries the periodic discharge current such that the discharge width is and may be significantly less than the width of the base portion. The curvatures of both main electrodes may conform to the curvature of the gas flow through the discharge chamber to further improve aerodynamic performance. A plurality of low inductive conducting ribs are connected to the grounded main electrode and shaped to provide a more uniform flow of gases through openings defined between adjacent ribs.

公开(公告)号：US20020075933A1

公开(公告)日：2002-06-20

申请号：US10077328

申请日：2002-02-15

Applicant: Lambda Physik AG

Inventor： Uwe Stamm ,  Sergei V. Govorkov

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/0057 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0805 ,  H01S3/081 ,  H01S3/0812 ,  H01S3/106 ,  H01S3/1062 ,  H01S3/1305 ,  H01S3/137 ,  H01S3/225 ,  H01S3/2258 ,  Y10S372/70

Abstract: A narrow band molecular fluorine laser system includes an oscillator and an amplifier, wherein the oscillator produces a 157 nm beam having a linewidth less than 1 pm and the amplifier increases the power of the beam above a predetermined amount, such as more than one or several Watts. The oscillator includes a discharge chamber filled with a laser gas including molecular fluorine and a buffer gas, electrodes within the discharge chamber connected to a discharge circuit for energizing the molecular fluorine, and a resonator including the discharge chamber for generating a laser beam having a wavelength around 157 nm. Line-narrowing optics are included intra- and/or extra-resonator for reducing the linewidth of the laser beam to less than 1 pm. The amplifier may be the same or a different discharge chamber, and optical and/or electronic delays may be used for timing pulses from the oscillator to reach the amplifier at a maximum in the discharge current of the amplifier.

Abstract translation: 窄带分子氟激光系统包括振荡器和放大器，其中振荡器产生具有小于1μm的线宽的157nm波束，并且放大器将波束的功率增加到高于预定量，例如多于一个或多个 瓦特。 所述振荡器包括：填充有分子氟和缓冲气体的激光气体的放电室，所述放电室内的电极连接到用于激励分子氟的放电电路;以及谐振器，包括所述放电室，用于产生具有波长 约157nm。 线狭窄光学器件包括内部和/或超谐振器，用于将激光束的线宽减小到小于1 pm。 放大器可以是相同的或不同的放电室，并且光学和/或电子延迟可用于来自振荡器的定时脉冲以放大器的放电电流中的最大值到达放大器。

公开(公告)号：US20020018505A1

公开(公告)日：2002-02-14

申请号：US09883097

申请日：2001-06-13

Applicant: Lambda Physik AG

Inventor： Dirk Basting ,  Sergei Govorkov ,  Juergen Kleinschmidt ,  Peter Lokai ,  Uwe Stamm

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/08059 ,  H01S3/1062 ,  H01S3/134 ,  H01S3/137 ,  H01S3/2258

Abstract: A F2-laser includes a discharge chamber filled with a gas mixture including molecular fluorine for generating a spectral emission in a wavelength range between 157 nm and 158 nm including a primary line and a secondary line, multiple electrodes coupled with a power supply circuit for producing a pulsed discharge to energize the molecular fluorine, a resonator including the discharge chamber and an interferometric device for generating a laser beam having a bandwidth of less than 1 pm, and a wavelength monitor coupled in a feedback loop with a processor for monitoring a spectral distribution of the laser beam. The processor controls an interferometric spectrum of the interferometric device based on the monitored spectral distribution such that sidebands within the spectral distribution are substantially minimized.

Abstract translation: F2激光器包括填充有包括分子氟的气体混合物的放电室，用于在包括初级线和次级线的157nm和158nm之间的波长范围内产生光谱发射，多个电极与用于生产的电源电路 用于激发分子氟的脉冲放电，包括放电室的谐振器和用于产生具有小于1ms的带宽的激光束的干涉仪，以及耦合在反馈环路中的波长监测器，用于监测光谱分布 的激光束。 处理器基于监测的光谱分布来控制干涉测量装置的干涉光谱，使得光谱分布内的边带基本上最小化。

公开(公告)号：US20020012368A1

公开(公告)日：2002-01-31

申请号：US09849600

申请日：2001-05-04

Applicant: Lambda Physik AG

Inventor： Jurgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

IPC: H01S003/13

CPC classification number: H01S3/1392 ,  H01S3/225

Abstract: A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F2-laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.

Abstract translation: 波长校准系统确定准分子或分子激光系统的窄谱分光发射带的绝对波长。 该系统包括模块，该模块包括与激光系统的可变范围内的变窄带周围的激光输出光束的分量光学相互作用的元件。 通过监测模块内的电压变化来检测层间谐振，或者通过光电检测设备检测光吸收。 当发生光学转变并被检测时，窄带的绝对波长可以精确地确定。 当该系统具体包括ArF-准分子激光室时，该模块优选地是含有吸光约193nm的元素的加合加速器，该元件优选为选自砷，碳，氧，铁 ，气态烃，卤化烃，碳污染的惰性气体，锗和铂蒸气。 当该系统具体包括F2激光室时，该模块优选为含有吸收约157nm的元素的加合加速器，该元件优选为选自硒，溴和硅的气体或蒸汽。 该模块可选地是可配置为用光吸收气体吹扫的净化室。