公开(公告)号：US07268472B2

公开(公告)日：2007-09-11

申请号：US10705251

申请日：2003-11-12

申请人： Takamitsu Higuchi ,  Setsuya Iwashita ,  Hiromu Miyazawa ,  Koji Sumi ,  Masami Murai ,  Maki Ito ,  Li Xin-Shan

发明人： Takamitsu Higuchi ,  Setsuya Iwashita ,  Hiromu Miyazawa ,  Koji Sumi ,  Masami Murai ,  Maki Ito ,  Li Xin-Shan

IPC分类号： H01L41/047 ,  H01L41/22

CPC分类号： H01L41/04 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L21/31691 ,  H01L41/0973 ,  H01L41/316

摘要： An intermediate film (15, 12, 53) is formed on a substrate (11, 52), a bottom electrode (13, 542) is formed on top of this intermediate film, a ferroelectric film (24) or piezoelectric film (543) is formed on top of this bottom electrode by an ion beam assist method, and a top electrode (25, 541) is formed on top of this ferroelectric film or piezoelectric film. The ferroelectric film or piezoelectric film is formed by PZT, BST or a relaxer material. As a result of the use of an ion beam assist method in the formation of any one of the intermediate film, bottom electrode, ferroelectric film or piezoelectric film, a piezoelectric device or ferroelectric device which has a piezoelectric film or ferroelectric film with an in-plane orientation can be manufactured with good efficiency.

摘要翻译： 在基板（11,52）上形成中间膜（15,12,53），在该中间膜的顶部，铁电体膜（24）或压电膜（543）上形成有底部电极（13,542） 通过离子束辅助法形成在该底部电极的顶部上，并且在该铁电体膜或压电膜的顶部上形成顶部电极（25,541）。 铁电体膜或压电膜由PZT，BST或松弛材料形成。 通过使用离子束辅助方法来形成中间膜，底部电极，铁电体膜或压电膜中的任一个的结果，具有压电膜或铁电体膜的压电器件或铁电体器件， 可以以高效率制造平面取向。

公开(公告)号：US20050210645A1

公开(公告)日：2005-09-29

申请号：US11076028

申请日：2005-03-10

申请人： Li Xin-Shan ,  Masami Murai ,  Toshinao Shinbo ,  Maki Ito

发明人： Li Xin-Shan ,  Masami Murai ,  Toshinao Shinbo ,  Maki Ito

IPC分类号： B41J2/16 ,  B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B81C1/00 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/319 ,  H01L41/39 ,  H02N2/00 ,  H04R17/00

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  H04R17/00 ,  Y10T29/42 ,  Y10T29/49401

摘要： An object of the present invention is to provide a method of manufacturing an actuator device, and a liquid jet head, which can improve characteristics of a piezoelectric layer constituting piezoelectric elements and can stabilize the characteristics of the piezoelectric layer. A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

摘要翻译： 本发明的目的在于提供一种能够提高构成压电元件的压电层的特性，并能够稳定压电体层的特性的致动器装置和液体喷射头的制造方法。 形成振动板的步骤包括形成绝缘膜以使绝缘膜的表面粗糙度Ra在1nm至3nm的范围内的步骤：绝缘膜由已获得的氧化锆制成 通过沉积锆层，因此通过在预定温度下热氧化锆层，以及构成振动板最上表面的绝缘膜。 此外，形成压电元件的步骤包括：通过使用溅射法将钛（Ti）施加到下电极上并在其上形成晶种钛层的步骤; 以及通过将压电材料施加到种子钛层上形成压电前体膜的步骤，以及通过烘烤形成压电层并使压电前体层结晶的步骤。

公开(公告)号：US20050168524A1

公开(公告)日：2005-08-04

申请号：US10995945

申请日：2004-11-24

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/08 ,  B41J2/01 ,  B41J2/045 ,  B41J2/16 ,  B44C1/22

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US20050190239A1

公开(公告)日：2005-09-01

申请号：US11056207

申请日：2005-02-14

申请人： Maki Ito ,  Li Xin-Shan ,  Masami Murai

发明人： Maki Ito ,  Li Xin-Shan ,  Masami Murai

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/09 ,  H01L41/187 ,  H01L41/22

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1646 ,  B41J2002/14241 ,  B41J2002/14419 ,  H01L41/0973

摘要： Provided are an actuator device, a liquid jet head and a liquid jet apparatus, which can improve reliability by preventing peeling-off of respective films forming a vibration plate. The vibration plate has a first oxide film (elastic film 50) formed on the one surface of a passage-forming substrate 10, and a second oxide film (insulation film 55) formed on the first oxide film 50 by use of a sputtering method. In only a part of an interface between the first and second oxide films 50 and 55, an altered layer is formed which has a first element that is a constituent element other than oxygen included in the first oxide film 50 and a second element that is a constituent element other than oxygen included in the second oxide film 55, and which is a layer in which a proportion of the first element is lower than that in the first oxide film 50 and a proportion of the second element is lower than that in the second oxide film 55. A proportion of the altered layer in the entire interface between the first and second oxide films 50 and 55 is not more than 10%.

摘要翻译： 提供了致动器装置，液体喷射头和液体喷射装置，其可以通过防止形成振动板的各个膜的剥离来提高可靠性。 振动板具有形成在通道形成基板10的一个表面上的第一氧化膜（弹性膜50）和通过溅射法形成在第一氧化物膜50上的第二氧化膜（绝缘膜55）。 在第一和第二氧化物膜50和55之间的界面的仅一部分中，形成改变的层，其具有作为第一氧化膜50中包含的除了氧以外的构成元素的第一元素，第二元素是 第二氧化膜55中包含的除了氧以外的构成元素，其中第一元素的比例低于第一氧化物膜50中的比例和第二元素的比例低于第二元素 氧化膜55.第一和第二氧化物膜50和55之间的整个界面中的改变层的比例不大于10％。

公开(公告)号：US20050122005A1

公开(公告)日：2005-06-09

申请号：US10705251

申请日：2003-11-12

申请人： Takamitsu Higuchi ,  Setsuya Iwashita ,  Hiromu Miyazawa ,  Koji Sumi ,  Masami Murai ,  Maki Ito ,  Li Xin-Shan

发明人： Takamitsu Higuchi ,  Setsuya Iwashita ,  Hiromu Miyazawa ,  Koji Sumi ,  Masami Murai ,  Maki Ito ,  Li Xin-Shan

IPC分类号： B41J2/16 ,  H01L21/316 ,  H01L41/047 ,  H01L41/09 ,  H01L41/22

CPC分类号： H01L41/04 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1634 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1645 ,  B41J2/1646 ,  H01L21/31691 ,  H01L41/0973 ,  H01L41/316

摘要： An intermediate film (15, 12, 53) is formed on a substrate (11, 52), a bottom electrode (13, 542) is formed on top of this intermediate film, a ferroelectric film (24) or piezoelectric film (543) is formed on top of this bottom electrode by an ion beam assist method, and a top electrode (25, 541) is formed on top of this ferroelectric film or piezoelectric film. The ferroelectric film or piezoelectric film is formed by PZT, BST or a relaxer material. As a result of the use of an ion beam assist method in the formation of any one of the intermediate film, bottom electrode, ferroelectric film or piezoelectric film, a piezoelectric device or ferroelectric device which has a piezoelectric film or ferroelectric film with an in-plane orientation can be manufactured with good efficiency.

摘要翻译： 在基板（11,52）上形成中间膜（15,12,53），在该中间膜的顶部，铁电体膜（24）或压电膜（543）上形成有底部电极（13,542） 通过离子束辅助法形成在该底部电极的顶部上，并且在该铁电体膜或压电膜的顶部上形成顶部电极（25,541）。 铁电体膜或压电膜由PZT，BST或松弛材料形成。 通过使用离子束辅助方法来形成中间膜，底部电极，铁电体膜或压电膜中的任一个的结果，具有压电膜或铁电体膜的压电器件或铁电体器件， 可以以良好的效率制造平面取向。

公开(公告)号：US07411339B2

公开(公告)日：2008-08-12

申请号：US10995945

申请日：2004-11-24

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/187

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US20080034563A1

公开(公告)日：2008-02-14

申请号：US11826705

申请日：2007-07-18

申请人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

发明人： Li Xin-Shan ,  Hironobu Kazama ,  Masami Murai ,  Koji Sumi ,  Maki Ito ,  Toshiaki Yokouchi

IPC分类号： H01L41/22 ,  B44C1/22

CPC分类号： B41J2/1632 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1635 ,  B41J2/1646 ,  B41J2002/14241 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/314 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49401

摘要： A manufacturing method of a liquid jet head having increased the durability and reliability thereof by preventing delamination of a vibration plate is provided. At least the following two steps are included: a vibration plate forming step which includes at least a step of forming a zirconium layer on one side of a passage-forming substrate by sputtering so that a degrees of orientation to a (002) plane of the surface becomes equal to 80% or more, as well as forming an insulation film made of zirconium oxide and constituting a part of the vibration plate by subjecting the zirconium layer to thermal oxidation; and a piezoelectric element forming step of forming piezoelectric elements on the vibration plate.

摘要翻译： 提供一种通过防止振动板的分层而提高其耐久性和可靠性的液体喷射头的制造方法。 至少包括以下两个步骤：振动板形成步骤，其至少包括通过溅射在通道形成基板的一侧上形成锆层的步骤，使得对（002）面的取向度 表面变得等于80％以上，并且通过对锆层进行热氧化来形成由氧化锆制成的绝缘膜并构成振动板的一部分; 以及在振动板上形成压电元件的压电元件形成步骤。

公开(公告)号：US07320163B2

公开(公告)日：2008-01-22

申请号：US11076028

申请日：2005-03-10

申请人： Li Xin-Shan ,  Masami Murai ,  Toshinao Shinbo ,  Maki Ito

发明人： Li Xin-Shan ,  Masami Murai ,  Toshinao Shinbo ,  Maki Ito

IPC分类号： H01L41/08

CPC分类号： B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14241 ,  H04R17/00 ,  Y10T29/42 ,  Y10T29/49401

摘要： A step of forming a vibration plate includes a step of forming an insulation film in order to cause the surface roughness Ra of the insulation film to be in the range of 1 nm to 3 nm: the insulation film being made of zirconia which has been obtained by depositing a zirconium layer, and accordingly by the thermally oxidizing the zirconium layer at a predetermined temperature, and the insulation film constituting the uppermost surface of the vibration plate. In addition, a step of forming a piezoelectric elements includes: a step of applying titanium (Ti) onto a lower electrode by use of a sputtering method, and of forming a seed titanium layer thereon; and a step of forming a piezoelectric precursor film by applying a piezoelectric material onto the seed titanium layer, and of forming a piezoelectric layer by baking, and crystallizing, the piezoelectric precursor layer.

摘要翻译： 形成振动板的步骤包括形成绝缘膜以使绝缘膜的表面粗糙度Ra在1nm至3nm的范围内的步骤：绝缘膜由已获得的氧化锆制成 通过沉积锆层，因此通过在预定温度下热氧化锆层，以及构成振动板最上表面的绝缘膜。 此外，形成压电元件的步骤包括：通过使用溅射法将钛（Ti）施加到下电极上并在其上形成晶种钛层的步骤; 以及通过将压电材料施加到种子钛层上形成压电前体膜的步骤，以及通过烘烤形成压电层并使压电前体层结晶的步骤。

公开(公告)号：US20050236929A1

公开(公告)日：2005-10-27

申请号：US11040090

申请日：2005-01-24

申请人： Li Xin-Shan

发明人： Li Xin-Shan

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/145 ,  B41J2/16 ,  H01L41/08 ,  H01L41/09 ,  H01L41/18 ,  H01L41/187 ,  H01L41/22 ,  H01L41/319 ,  H01L41/43

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49155

摘要： Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by appling by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.

摘要翻译： 本发明提供压电元件及其制造方法以及能够改善并均匀化压电体层的特性的液体喷射头。 包括：在其间形成种子钛层的步骤，通过钛（Ti）涂覆至少两次形成所需膜厚的晶种钛层; 以及通过在种子钛层上施加压电材料来形成压电前体膜的步骤，然后通过烘烤使压电前体膜结晶，从而形成压电层。

公开(公告)号：US07343654B2

公开(公告)日：2008-03-18

申请号：US11040090

申请日：2005-01-24

申请人： Li Xin-Shan

发明人： Li Xin-Shan

IPC分类号： H04R17/00 ,  H05K3/02

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1629 ,  B41J2002/14241 ,  B41J2002/14419 ,  H01L41/1876 ,  H01L41/318 ,  H01L41/319 ,  Y10T29/42 ,  Y10T29/49155

摘要： Provided are a piezoelectric element, a method of manufacturing the same, and a liquid jet head, which can improve, and homogenize, characteristics of a piezoelectric layer. Included are: a step of forming a seed titanium layer interposed therebetween, the seed titanium layer being formed at a desired film thickness by applying by titanium (Ti), at least twice; and a step of forming a piezoelectric precursor film by applying a piezoelectric material on the seed titanium layer, thereafter crystallizing the piezoelectric precursor film by baking, and thereby forming the piezoelectric layer.

摘要翻译： 本发明提供压电元件及其制造方法以及能够改善并均匀化压电体层的特性的液体喷射头。 包括：在其间形成种子钛层的步骤，通过钛（Ti）施加至少两次，以期望的膜厚形成晶种钛层; 以及通过在种子钛层上施加压电材料来形成压电前体膜的步骤，然后通过烘烤使压电前体膜结晶，从而形成压电层。