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1.发明授权Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US08436994B2
公开(公告)日：2013-05-07
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01J4/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
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公开(公告)号：US20120314218A1
公开(公告)日：2012-12-13
申请号：US13573032
申请日：2012-08-15
申请人： Martin M. Liphardt , Ping He
发明人： Martin M. Liphardt , Ping He
IPC分类号： G01N21/47
CPC分类号： G01N21/211 , G02B26/0883 , G02B27/1073 , G02B27/143
摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.
摘要翻译： 一种允许目视观察由电磁波束进行调查的样品的系统和方法，以便与检测电磁辐射的样本波束一起被引起撞击的样本，与检测电磁波的样本束的数据检测器结合 它与样品相互作用后的辐射。
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公开(公告)号：US20120057158A1
公开(公告)日：2012-03-08
申请号：US13373037
申请日：2011-11-03
申请人： James N. Hilfiker , Jianing Sun , Ping He , Martin M. Liphardt
发明人： James N. Hilfiker , Jianing Sun , Ping He , Martin M. Liphardt
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/213
摘要： System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
摘要翻译： 具有例如非随机有效的“规则”织构表面的样品的椭圆测量和椭圆曲线研究和分析方法和/或由不规则阵列的小平面结构表征的表面的系统和方法。
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公开(公告)号：US07633625B1
公开(公告)日：2009-12-15
申请号：US11901225
申请日：2007-09-17
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
CPC分类号： G01J3/02 , G01J3/0213 , G01J3/0224 , G01J3/10 , G01N21/211 , G01N21/274 , G01N2021/213
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
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公开(公告)号：US07616319B1
公开(公告)日：2009-11-10
申请号：US11890354
申请日：2007-08-05
申请人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
发明人： John A. Woollam , Blaine D. Johs , Craig M. Herzinger , Ping He , Martin M. Liphardt , Galen L. Pfeiffer
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008 , G02B27/286
摘要： A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
摘要翻译： 具有电磁辐射的多色光束源的旋转补偿器光谱椭偏仪或偏振计系统，偏振器，用于支撑材料系统的分级器，分析器，分散光学器件和检测器系统，其包括多个检测器元件，该系统 功能上存在于环境控制室中，因此适用于宽光谱范围（例如，130-1700nm）。 优选的补偿器设计包括基本上消色差的多元件补偿器系统，其中多个全内反射进入到输入的电磁辐射束的延迟，并且其元件被定向为使净延迟相对于由于 元素系统的位置和/或旋转。
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6.发明授权Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sample 有权椭圆偏振计满足scheimpflug条件，在样品上提供基本上圆形的电磁辐射点公开(公告)号：US07567345B1
公开(公告)日：2009-07-28
申请号：US11784750
申请日：2007-04-10
申请人： Martin M. Liphardt , Brooks A. Hitt , Jeffrey S. Hale , Ping He
发明人： Martin M. Liphardt , Brooks A. Hitt , Jeffrey S. Hale , Ping He
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01J4/00
摘要： A reflectometer, ellipsometer, polarimeter or the like system with aperture, focusing means, sample and optionally detector planes oriented so that the Scheimpflug condition is substantially met on incident and/or, optionally, reflection sides of a sample. In addition beneficial aperture hole aspect ratio and aperture plane orientation is described.
摘要翻译： 具有孔径，聚焦装置，样品和可选的检测器平面的反射计，椭偏仪，偏振计等系统，使得在入射和/或可选的反射面上基本满足Scheimpflug条件。 此外，还描述了有利的孔径纵横比和孔平面取向。
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7.发明申请Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US20090103093A1
公开(公告)日：2009-04-23
申请号：US12313760
申请日：2008-11-25
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N21/01 , G01N21/21 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，应用于 映射椭偏仪等。
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公开(公告)号：US07317530B2
公开(公告)日：2008-01-08
申请号：US11085450
申请日：2005-03-22
申请人： Martin M. Liphardt , Ping He
发明人： Martin M. Liphardt , Ping He
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/211 , G02B17/008
摘要： Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.
摘要翻译： 低像差继电器系统被修改为在反射计，分光光度计，椭偏仪，偏振计等系统中作为空间滤光器。
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公开(公告)号：US08587781B2
公开(公告)日：2013-11-19
申请号：US13573032
申请日：2012-08-15
申请人： Martin M Liphardt , Ping He
发明人： Martin M Liphardt , Ping He
CPC分类号： G01N21/211 , G02B26/0883 , G02B27/1073 , G02B27/143
摘要： A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.
摘要翻译： 一种允许目视观察由电磁波束进行调查的样品的系统和方法，以便与检测电磁辐射的样本波束一起被引起撞击的样本，与检测电磁波的样本束的数据检测器结合 它与样品相互作用后的辐射。
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10.发明申请Fast sample height, AOI and POI alignment in mapping ellipsometer or the like 有权快速样品高度，AOI和POI校准在映射椭偏仪等公开(公告)号：US20110109906A1
公开(公告)日：2011-05-12
申请号：US12930762
申请日：2011-01-15
IPC分类号： G01B11/00
CPC分类号： G01N21/01 , G01N21/21 , G01N21/211 , G01N21/55 , G01N2021/151 , G01N2021/212 , G01N2021/213 , G01N2021/214 , G01N2201/021 , G01N2201/0693
摘要： A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
摘要翻译： 与对准系统（AS）功能组合的样本调查系统（ES）以及启用校准和非常快速（例如秒），样本高度，入射角度和入射平面调整的方法，具有 映射椭偏仪等应用。
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