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公开(公告)号:US20250113487A1
公开(公告)日:2025-04-03
申请号:US18978230
申请日:2024-12-12
Applicant: Micron Technology, Inc.
Inventor: Collin Howder , M. Jared Barclay , Bhavesh Bhartia , Chet E. Carter , John D. Hopkins , Andrew Li , Haoyu Li , Alyssa N. Scarbrough , Grady S. Waldo
Abstract: Integrated circuitry comprising a memory array comprises strings of memory cells comprising laterally-spaced memory blocks individually comprising a first vertical stack comprising alternating insulative tiers and conductive tiers above a conductor tier. Strings of memory cells comprise channel-material strings that extend through the insulative tiers and the conductive tiers. The channel-material strings directly electrically couple with conductor material of the conductor tier. The conductive tiers individually comprise a horizontally-elongated conductive line. A second vertical stack is aside the first vertical stack. The second vertical stack comprises an upper portion and a lower portion. The upper portion comprises vertically-alternating first insulating tiers and second insulating tiers that are of different insulative compositions relative one another. The lower portion comprises a horizontal line above the conductor tier that runs parallel with the laterally-spaced memory blocks in the first vertical stack. Other embodiments, including method, are disclosed.
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公开(公告)号:US20230062084A1
公开(公告)日:2023-03-02
申请号:US17475057
申请日:2021-09-14
Applicant: Micron Technology, Inc.
Inventor: John D. Hopkins , Haoyu Li
IPC: H01L27/11582 , H01L27/11556
Abstract: A memory array comprising strings of memory cells comprises conductor tier comprising conductor material. Laterally-spaced memory blocks individually comprising a vertical stack comprises alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Conducting material of a lower of the conductive tiers directly electrically couples together the channel material of individual of the channel-material strings and the conductor material of the conductor tier. The conducting material in the lower conductive tier comprises upper conductively-doped semiconductive material, lower conductively-doped semiconductive material, and intermediate material vertically there-between. Other embodiments, including method, are disclosed.
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公开(公告)号:US10916564B2
公开(公告)日:2021-02-09
申请号:US16866236
申请日:2020-05-04
Applicant: Micron Technology, Inc.
Inventor: David Ross Economy , John Mark Meldrim , Haoyu Li , Yongjun Jeff Hu , Christopher W. Petz , Daniel Billingsley , Everett A. McTeer
IPC: H01L27/11582 , H01L27/11556 , H01L27/11519 , H01L21/311 , H01L27/11565 , H01L21/768 , H01L27/1157
Abstract: Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
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公开(公告)号:US20200266210A1
公开(公告)日:2020-08-20
申请号:US16866236
申请日:2020-05-04
Applicant: Micron Technology, Inc.
Inventor: David Ross Economy , John Mark Meldrim , Haoyu Li , Yongjun Jeff Hu , Christopher W. Petz , Daniel Billingsley , Everett A. McTeer
IPC: H01L27/11582 , H01L27/1157 , H01L21/768 , H01L27/11565 , H01L21/311 , H01L27/11519 , H01L27/11556
Abstract: Some embodiments include an assembly which has channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure has doped semiconductor material in direct contact with bottom regions of the channel material pillars. One or more of magnesium, scandium, yttrium and lanthanide elements is along the bottom regions of the channel material pillars. Some embodiments include methods of forming assemblies. A structure is formed, and a mass is formed against an upper surface of the structure. Plugs are formed within openings in the mass. The plugs comprise a second material over a first material. The first material includes one or more of magnesium, scandium, yttrium and lanthanide elements. Openings are formed to terminate on the first material, and are then extended through the first material. Channel material pillars are formed within the openings.
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公开(公告)号:US11729964B2
公开(公告)日:2023-08-15
申请号:US17449352
申请日:2021-09-29
Applicant: Micron Technology, Inc.
Inventor: Silvia Borsari , Stian E. Wood , Haoyu Li , Yiping Wang
IPC: H01L27/108 , H01L21/768 , H01L27/08 , H10B12/00
CPC classification number: H10B12/30 , H01L21/76831 , H01L21/76832 , H01L21/76834 , H01L27/0814 , H10B12/03 , H10B12/0335 , H10B12/482 , H10B12/488 , H01L2221/1057
Abstract: An apparatus comprises a conductive structure, another conductive structure, and a laminate spacer structure interposed between the conductive structure and the another conductive structure in a first direction. The laminate spacer structure comprises a dielectric spacer structure, another dielectric spacer structure, and an additional dielectric spacer structure interposed between the dielectric spacer structure and the another dielectric spacer structure. The additional dielectric spacer structure comprises at least one dielectric material, and gas pockets dispersed within the at least one dielectric material. Additional apparatuses, memory devices, electronic systems, and a method of forming an apparatus are also described.
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公开(公告)号:US20210358940A1
公开(公告)日:2021-11-18
申请号:US15931421
申请日:2020-05-13
Applicant: Micron Technology, Inc.
Inventor: Yiping Wang , Andrew Li , Haoyu Li , Matthew J. King , Wei Yeeng Ng , Yongjun Jeff Hu
IPC: H01L27/11582 , H01L27/11524 , H01L27/11556 , H01L27/1157 , H01L21/306 , H01L21/283
Abstract: Some embodiments include an integrated assembly having a first structure containing semiconductor material, and having a second structure contacting the first structure. The first structure has a composition along an interface with the second structure. The composition includes additive to a concentration within a range of from about 1018 atoms/cm3 to about 1021 atoms/cm3. The additive includes one or more of carbon, oxygen, nitrogen and sulfur. Some embodiments include methods of forming integrated assemblies.
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7.
公开(公告)号:US20200373304A1
公开(公告)日:2020-11-26
申请号:US16420429
申请日:2019-05-23
Applicant: Micron Technology, Inc.
Inventor: Silvia Borsari , Stian E. Wood , Haoyu Li , Yiping Wang
IPC: H01L27/108
Abstract: An apparatus comprises a conductive structure, another conductive structure, and a laminate spacer structure interposed between the conductive structure and the another conductive structure in a first direction. The laminate spacer structure comprises a dielectric spacer structure, another dielectric spacer structure, and an additional dielectric spacer structure interposed between the dielectric spacer structure and the another dielectric spacer structure. The additional dielectric spacer structure comprises at least one dielectric material, and gas pockets dispersed within the at least one dielectric material. Additional apparatuses, memory devices, electronic systems, and a method of forming an apparatus are also described.
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公开(公告)号:US10354989B1
公开(公告)日:2019-07-16
申请号:US15980908
申请日:2018-05-16
Applicant: Micron Technology, Inc.
Inventor: Daniel Billingsley , Everett A. McTeer , Christopher W. Petz , Haoyu Li , John Mark Meldrim , Yongjun Jeff Hu
Abstract: An integrated assembly having an insulative mass with a first region adjacent to a second region. The first region has a greater amount of one or more inert interstitial elements incorporated therein than does the second region. Also, an integrated assembly which has vertically-extending channel material pillars, and which has memory cells along the channel material pillars. A conductive structure is under the channel material pillars. The conductive structure includes doped semiconductor material in direct contact with bottom regions of the channel material pillars. An insulative mass is along the bottom regions of the channel material pillars. The insulative mass has an upper region over a lower region. The lower region has a greater amount of one or more inert interstitial elements incorporated therein than does the upper region. Also, methods of forming integrated assemblies.
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公开(公告)号:US20250107094A1
公开(公告)日:2025-03-27
申请号:US18976642
申请日:2024-12-11
Applicant: Micron Technology, Inc.
Inventor: Yiping Wang , Andrew Li , Haoyu Li , Matthew J. King , Wei Yeeng Ng , Yongjun Jeff Hu
IPC: H10B43/27 , H01L21/283 , H01L21/306 , H10B41/27 , H10B41/35 , H10B43/35
Abstract: Some embodiments include an integrated assembly having a first structure containing semiconductor material, and having a second structure contacting the first structure. The first structure has a composition along an interface with the second structure. The composition includes additive to a concentration within a range of from about 1018 atoms/cm3 to about 1021 atoms/cm3. The additive includes one or more of carbon, oxygen, nitrogen and sulfur. Some embodiments include methods of forming integrated assemblies.
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10.
公开(公告)号:US20230386575A1
公开(公告)日:2023-11-30
申请号:US17752207
申请日:2022-05-24
Applicant: Micron Technology, Inc.
Inventor: Haoyu Li , John D. Hopkins , Collin Howder , Adam W. Saxler
IPC: G11C16/04 , H01L27/11519 , H01L27/11556 , H01L27/11565 , H01L27/11582
CPC classification number: G11C16/0483 , H01L27/11519 , H01L27/11556 , H01L27/11565 , H01L27/11582
Abstract: A memory array comprising strings of memory cells comprises a conductor tier comprising conductor material. Laterally-spaced memory blocks individually comprise a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. Conducting material of a lower of the conductive tiers directly electrically coupling together the channel material of individual of the channel-material strings and the conductor material of the conductor tier. The conducting material in the lower conductive tier comprises upper conductively-doped semiconductive material, lower conductively-doped semiconductive material, and intermediate material vertically there-between. The intermediate material is of different composition from those of the upper conductively-doped semiconductive material and the lower conductively-doped semiconductive material and comprises at least one of carbon, nitrogen, oxygen, metal, and n-type doped material also comprising boron. Other embodiments, including method, re disclosed.
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