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公开(公告)号：US12058938B2
公开(公告)日：2024-08-06
申请号：US17722713
申请日：2022-04-18
Applicant: STMicroelectronics S.r.l.
Inventor： Maria Fortuna Bevilacqua , Flavio Francesco Villa , Rossana Scaldaferri , Valeria Casuscelli , Andrea Di Matteo , Dino Faralli
IPC: H10N30/30 , H02N2/18 , H10N30/01 , H10N30/03 , H10N30/06 , H10N30/082 , H10N30/853 , H10N30/87 , H10N30/88
CPC classification number: H10N30/308 , H02N2/186 , H10N30/01 , H10N30/03 , H10N30/06 , H10N30/082 , H10N30/304 , H10N30/8554 , H10N30/87 , H10N30/88
Abstract: A process for manufacturing a MEMS piezoelectric device includes: forming a membrane at a first surface of wafer of semiconductor material further having a second surface (the first and second surfaces being opposite along a vertical axis and extending parallel to a horizontal plane formed by first and second horizontal axes); forming a cavity within the wafer so that the membrane is suspended above the cavity; forming a piezoelectric material layer above a first surface of the membrane; forming an electrode arrangement in contact with the piezoelectric material layer; and forming a proof mass coupled to a second surface of the membrane opposite to the first surface along the vertical axis. The proof mass deforms the membrane in response to environmental mechanical vibrations. Forming the proof mass includes forming a connection element at a central position between the membrane and the proof mass in the direction of the vertical axis.
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公开(公告)号：US11251580B2
公开(公告)日：2022-02-15
申请号：US16669438
申请日：2019-10-30
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Flavio Francesco Villa , Guido Chiaretti , Gabriele Barlocchi
IPC: H01S5/026
Abstract: An integrated optical device, including: a semiconductor body delimited by a top surface; and at least one buried cavity, which extends in the semiconductor body, at a distance from the top surface, so as to delimit at the bottom a front semiconductor region, which functions as an optical guide.
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公开(公告)号：US10961117B2
公开(公告)日：2021-03-30
申请号：US16431485
申请日：2019-06-04
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Lorenzo Baldo , Flavio Francesco Villa , Gabriele Barlocchi
Abstract: A process for manufacturing a microelectromechanical device envisages: providing a wafer of semiconductor material; forming a buried cavity, completely contained within the wafer, and a structural layer formed by a surface portion of the wafer and suspended over the buried cavity; forming first trenches through the structural layer as far as the buried cavity, which define the suspended structure in the structural layer; filling the first trenches and the buried cavity with sacrificial material; forming a closing structure above the structural layer; removing the sacrificial material from the first trenches and from the buried cavity to release the suspended structure, the suspended structure being isolated and buried within the wafer in a buried environment formed by the first trenches and by the buried cavity.
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4.发明授权公开(公告)号：US10576500B2
公开(公告)日：2020-03-03
申请号：US15626824
申请日：2017-06-19
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Francesco Foncellino , Flavio Francesco Villa , Andrea Di Matteo
IPC: H01L41/09 , H01L41/29 , B06B1/06 , B06B1/02 , H01L41/113 , H01L41/293 , H01L41/332
Abstract: A piezoelectric micro-machined ultrasonic transducer (PMUT) comprising: a semiconductor body having a first cavity and a membrane, which is suspended over the first cavity and faces a front side of the semiconductor body; and a piezoelectric transducer assembly extending at least in part on the membrane, which may be actuated for generating a deflection of the membrane. A second cavity extends buried in a peripheral region of the membrane and delimits a central region of the membrane. Moreover, the peripheral portion has a stiffness lower than the stiffness of the central portion.
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公开(公告)号：US09975756B2
公开(公告)日：2018-05-22
申请号：US15276613
申请日：2016-09-26
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Enri Duqi , Sebastiano Conti , Lorenzo Baldo , Flavio Francesco Villa
CPC classification number: B81B7/0038 , B81B3/0086 , B81B7/0019 , B81B7/0061 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81B2207/012 , B81C1/00269
Abstract: A micro-electro-mechanical pressure sensor device, formed by a cap region and by a sensor region of semiconductor material. An air gap extends between the sensor region and the cap region; a buried cavity extends underneath the air gap, in the sensor region, and delimits a membrane at the bottom. A through trench extends within the sensor region and laterally delimits a sensitive portion housing the membrane, a supporting portion, and a spring portion, the spring portion connecting the sensitive portion to the supporting portion. A channel extends within the spring portion and connects the buried cavity to a face of the second region. The first air gap is fluidically connected to the outside of the device, and the buried cavity is isolated from the outside via a sealing region arranged between the sensor region and the cap region.
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Patent Agency Ranking
公开(公告)号：US20160016168A1
公开(公告)日：2016-01-21
申请号：US14869718
申请日：2015-09-29
Applicant: STMicroelectronics S.r.l.
Inventor： Ubaldo Mastromatteo , Gabriele Barlocchi , Flavio Francesco Villa
IPC: B01L3/00 , G01N33/543
CPC classification number: B01L3/502715 , B01L2200/025 , B01L2200/027 , B01L2200/028 , B01L2200/0684 , B01L2300/0645 , B01L2300/087 , B01L2400/049 , G01N5/02 , G01N29/022 , G01N33/54366 , G01N33/5438 , G01N33/76 , G01N2035/00237
Abstract: A device for detecting the concentration of biological materials is formed in a body having a plurality of fluidic paths connectable to a multi-microbalance structure carrying a plurality of microbalances, each microbalance having a sensitive portion facing a reaction chamber. The body and the multi-microbalance structure are configured to be mechanically coupled together and each microbalance is configured to be coupled to a respective fluidic path. Each fluidic path includes an inlet, a duct and a liquid waste, each duct being configured to be coupled with a respective reaction chamber. The plurality of fluidic paths and microbalances form at least one first and one second reference cells and one first sample cell.
Abstract translation: 用于检测生物材料浓度的装置形成在具有多个可连接到承载多个微量平衡的多微平衡结构的流体路径的主体中，每个微量天平具有面向反应室的敏感部分。 主体和多微平衡结构被配置为机械耦合在一起，并且每个微量天平被配置为耦合到相应的流体路径。 每个流体路径包括入口，管道和液体废物，每个管道被配置为与相应的反应室联接。 多个流体路径和微量平衡形成至少一个第一和第二参考单元和一个第一样品池。
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公开(公告)号：US11871668B2
公开(公告)日：2024-01-09
申请号：US17158904
申请日：2021-01-26
Applicant: STMICROELECTRONICS S.R.L.
Inventor： Paolo Ferrari , Flavio Francesco Villa , Luca Zanotti , Andrea Nomellini , Luca Seghizzi
Abstract: A thermoelectric generator includes a substrate and one or more thermoelectric elements on the substrate and each configured to convert a thermal drop across the thermoelectric elements into an electric potential by Seebeck effect. The thermoelectric generator includes a cavity between the substrate and the thermoelectric elements. The thermoelectric generator includes, within the cavity, a support structure for supporting the thermoelectric elements. The support structure has a thermal conductivity lower than a thermal conductivity of the substrate.
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8.发明授权公开(公告)号：US10930799B2
公开(公告)日：2021-02-23
申请号：US16246945
申请日：2019-01-14
Applicant: STMicroelectronics S.r.l.
Inventor： Flavio Francesco Villa , Marco Morelli , Marco Marchesi , Simone Dario Mariani , Fabrizio Fausto Renzo Toia
Abstract: A semiconductor body includes a front side and a back side and is configured to support an electronic circuit. A buried region is provided in the semiconductor body at a location between the electronic circuit and the back side. The buried region includes a layer of conductive material and a dielectric layer, where the dielectric layer is arranged between the layer of conductive material and the semiconductor body. A conductive path extends between the buried region and the front side to form a path for electrical access to the layer of conductive material. A capacitor is thus formed with the layer of conductive material providing a capacitor plate and the dielectric layer providing the capacitor dielectric. A further capacitor plate is provided by the semiconductor body, or by a further layer of conductive material in the buried region.
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公开(公告)号：US10768408B2
公开(公告)日：2020-09-08
申请号：US15465019
申请日：2017-03-21
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
Abstract: A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.
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公开(公告)号：US20180031822A1
公开(公告)日：2018-02-01
申请号：US15465019
申请日：2017-03-21
Applicant: STMicroelectronics S.r.l.
Inventor： Enri Duqi , Lorenzo Baldo , Roberto Carminati , Flavio Francesco Villa
Abstract: A buried cavity is formed in a monolithic body to delimit a suspended membrane. A peripheral insulating region defines a supporting frame in the suspended membrane. Trenches extending through the suspended membrane define a rotatable mobile mass carried by the supporting frame. The mobile mass forms an oscillating mass, supporting arms, spring portions, and mobile electrodes that are combfingered to fixed electrodes of the supporting frame. A reflecting region is formed on top of the oscillating mass.
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