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1.发明申请公开(公告)号：US20220252397A1
公开(公告)日：2022-08-11
申请号：US17728635
申请日：2022-04-25
IPC分类号： G01C19/5712 , B81B3/00 , G01C19/5755 , G01C19/574
摘要： The MEMS gyroscope has a mobile mass carried by a supporting structure to move in a driving direction and in a first sensing direction, perpendicular to each other. A driving structure governs movement of the mobile mass in the driving direction at a driving frequency. A movement sensing structure is coupled to the mobile mass and detects the movement of the mobile mass in the sensing direction. A quadrature-injection structure is coupled to the mobile mass and causes a first and a second movement of the mobile mass in the sensing direction in a first calibration half-period and, respectively, a second calibration half-period. The movement-sensing structure supplies a sensing signal having an amplitude switching between a first and a second value that depend upon the movement of the mobile mass as a result of an external angular velocity and of the first and second quadrature movements. The first and second values of the sensing signal are subtracted from each other and compared with a stored difference value to supply information of variation of the scale factor.
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公开(公告)号：US20180112981A1
公开(公告)日：2018-04-26
申请号：US15639608
申请日：2017-06-30
IPC分类号： G01C19/5747 , G01C19/5769
CPC分类号： G01C19/5747 , G01C19/574 , G01C19/5769
摘要： A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
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3.发明申请VIBRATING DEVICE FOR POSITIONING A MINIATURIZED PIECE IN A TESTING ACCOMMODATION, AND POSITIONING METHOD 有权用于在测试住宅中定位微型板的振动装置和定位方法公开(公告)号：US20140312925A1
公开(公告)日：2014-10-23
申请号：US14258911
申请日：2014-04-22
IPC分类号： G01R1/04
CPC分类号： G01R31/2887 , G01R1/0408 , G01R1/0483 , G01R31/2891 , G01R31/2893
摘要： An embodiment of a device for positioning a miniaturized piece, including: a positioning structure, which forms a first cavity, designed to receive with play the miniaturized piece, and a second cavity communicating with the first cavity; at least one electrical-contact terminal, facing the second cavity and electrically coupleable to an electronic testing device, designed to carry out an electrical test on the miniaturized piece; and an actuator device, which causes a vibration of the positioning structure, the vibration being such that the miniaturized piece translates, in use, towards the second cavity, until it penetrates at least in part into the second cavity.
摘要翻译： 一种用于定位小型化件的装置的实施例，包括：定位结构，其形成第一腔体，设计成用于放置小型化件接收，以及与第一腔体连通的第二腔室; 至少一个电接触端子，面向第二腔并电耦合到电子测试装置，设计用于对小型化件进行电测试; 以及致动器装置，其引起定位结构的振动，振动使得小型化件在使用中朝向第二腔平移，直到其至少部分地进入第二腔。
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公开(公告)号：US20240003685A1
公开(公告)日：2024-01-04
申请号：US18339084
申请日：2023-06-21
IPC分类号： G01C19/5733 , G01C19/5712 , G01C19/5769
CPC分类号： G01C19/5733 , G01C19/5712 , G01C19/5769
摘要： MEMS gyroscope, having a first movable mass configured to move with respect to a fixed structure along a first drive direction and along a first sense direction, transverse to the first drive direction; a first drive assembly, coupled to the first movable mass and configured to generate a first alternate drive movement; a first drive elastic structure, coupled to the first movable mass and to the first drive assembly, rigid in the first drive direction and compliant in the first sense direction; a second movable mass, configured to move with respect to the fixed structure in a second drive direction parallel to the first drive direction and in a second sense direction parallel to the first sense direction; a second drive assembly, coupled to the second movable mass and configured to generate a second alternate drive movement in the second drive direction; and a second drive elastic structure, coupled to the second movable mass and to the second drive assembly, rigid in the second drive direction and compliant in the second sense direction.
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5.发明公开公开(公告)号：US20230358540A1
公开(公告)日：2023-11-09
申请号：US18353692
申请日：2023-07-17
IPC分类号： G01C19/5712 , G01C25/00
CPC分类号： G01C19/5712 , G01C25/005
摘要： A microelectromechanical gyroscope includes: the support structure; a sensing mass, coupled to the support structure with degrees of freedom along a driving direction and a sensing direction perpendicular to each other; and a calibration structure facing the sensing mass and separated from the sensing mass by a gap having an average width, the calibration structure being movable with respect to the sensing mass so that displacements of the calibration structure cause variations in the average width of the gap. A calibration actuator controls a relative position of the calibration structure with respect to the sensing mass and the average width of the gap.
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公开(公告)号：US20230322548A1
公开(公告)日：2023-10-12
申请号：US18185189
申请日：2023-03-16
IPC分类号： B81B7/02
CPC分类号： B81B7/02 , B81B2201/0228 , B81B2203/0109 , B81B2203/0163 , B81B2203/0307 , B81B2203/04
摘要： A MEMS angular rate sensor is presented with two pairs of suspended masses that are micromachined on a semiconductor layer. A first pair includes two masses opposite to and in mirror image of each other. The first pair of masses has driving structures to generate a mechanical oscillation in a linear direction. A second pair of masses includes two masses opposite to and in mirror image of each other. The second pair of masses is coupled to the first pair of driving masses with coupling elements. The two pairs of masses are coupled to a central bridge. The central bridge has a differential configuration to reject any external disturbances. Each of the masses of the two pairs of masses includes different portions to detect different linear and angular movements.
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公开(公告)号：US20230194910A1
公开(公告)日：2023-06-22
申请号：US17559534
申请日：2021-12-22
IPC分类号： G02F1/035
CPC分类号： G02F1/035 , G02F2202/32
摘要： A MEMS based device includes a phononic crystal body formed from unit cells and having a defect line extending through the phononic crystal body. Unit cells inside of the defect line lack a same phononic bandgap as the unit cells outside of the defect line. An input MEMS resonator is mechanically coupled to a first end of the defect line, and an output MEMS resonator is mechanically coupled to a second end of the defect line. Each of the unit cells outside of the defect line has an identical geometry. The input MEMS resonator and output MEMS resonator each have a natural frequency within the same phononic bandgap possessed by the unit cells outside of the defect line. There may be more than one defect line, and in such cases, the MEMS device may include more than one input MEMS resonator and/or more than one output MEMS resonator.
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公开(公告)号：US20200096339A1
公开(公告)日：2020-03-26
申请号：US16697092
申请日：2019-11-26
IPC分类号： G01C19/5747 , G01C19/574 , G01C19/5769
摘要： A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.
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9.发明申请公开(公告)号：US20170108337A1
公开(公告)日：2017-04-20
申请号：US14964347
申请日：2015-12-09
IPC分类号： G01C19/5733
CPC分类号： G01C19/5733 , G01C19/5747 , G01C19/5762
摘要： A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.
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10.发明公开公开(公告)号：US20240142235A1
公开(公告)日：2024-05-02
申请号：US18490392
申请日：2023-10-19
IPC分类号： G01C19/5762
CPC分类号： G01C19/5762
摘要： A microelectromechanical gyroscope with detection along a vertical axis is provided with a detection structure having a movable structure, suspended above a substrate so as to perform, as a function of an angular velocity around the vertical axis a sense movement along a first horizontal axis. The movable structure has at least one drive mass internally defining a window, elastically coupled to a rotor anchor, at an anchoring region, through elastic anchoring elements; at least one bridge element, rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes, carried integrally by the bridge element with extension along a second horizontal axis. The detection structure also has stator electrodes, arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element, which extends longitudinally above the same stator electrodes and the movable electrodes.
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