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公开(公告)号：US06744258B2
公开(公告)日：2004-06-01
申请号：US10189565
申请日：2002-07-08
申请人： Seiichiro Ishio , Yasutoshi Suzuki , Hajime Ito , Yasuaki Makino , Norikazu Ohta , Keiichi Shimaoka , Hirofumi Funabashi
发明人： Seiichiro Ishio , Yasutoshi Suzuki , Hajime Ito , Yasuaki Makino , Norikazu Ohta , Keiichi Shimaoka , Hirofumi Funabashi
IPC分类号： G01R3112
CPC分类号： G01D3/08
摘要： In a capacitive sensor apparatus, a capacitive sensor includes a plurality of physical-quantity-detection capacitors each having a movable electrode and a fixed electrode. A conversion device operates for converting an output signal of the capacitive sensor into an apparatus output signal. Each of the physical-quantity-detection capacitors is selectively connected and disconnected to and from the conversion device. A determination is made as to whether or not each of the physical-quantity-detection capacitors fails in response to the sensor output signal. When it is determined that a first one of the physical-quantity-detection capacitors fails, the first one is disconnected from the conversion device and a second one of the physical-quantity-detection capacitors is connected to the conversion device.
摘要翻译： 在电容传感器装置中，电容式传感器包括多个物理量检测电容器，每个物理量检测电容器具有可动电极和固定电极。 转换装置用于将电容式传感器的输出信号转换成装置输出信号。 每个物理量检测电容器被选择性地连接到转换装置和从转换装置断开。 确定每个物理量检测电容器是否响应于传感器输出信号而失败。 当确定物理量检测电容器中的第一个电容器发生故障时，第一个物理量检测电容器与转换装置断开连接，并且第二个物理量检测电容器连接到转换装置。
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公开(公告)号：US06647795B2
公开(公告)日：2003-11-18
申请号：US10157229
申请日：2002-05-30
IPC分类号： G01L900
摘要： A capacitive physical load sensor includes a substrate, which has fixed electrodes, and a diaphragm, which has movable electrodes. The diaphragm is located across a gap from the substrate, and retaining parts for the diaphragm are formed around the diaphragm. Protruding parts extend into the gap from the diaphragm or from the substrate. The protruding parts support the diaphragm at different levels of deformation to alter the characteristics of the diaphragm and extend its range.
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公开(公告)号：US06640643B2
公开(公告)日：2003-11-04
申请号：US10196210
申请日：2002-07-17
IPC分类号： G01L912
CPC分类号： G01L9/0042 , G01L9/0073
摘要： On a substrate, first and second capacitive portions are formed to have movable diaphragms having different areas for pressure measurement and diagnostic, wherein a communication structure is provided between the cavity spaces of the first and second capacitive portions to equalize the pressure in the first capacitive space to that of the second capacitive space. The different sizes provide different sensitivity for efficient diagnostic. The first and second capacitive portions can be made in one diaphragm, wherein the second capacitive portion is formed around the first capacitive portion. The cavity spaces of the first and second capacitive portions are connected. Moreover, between the first and second capacitive spaces, an insulation portion may be formed in a ring shape to support the diaphragm portion of the first capacitive portion and the diaphragm portion the second capacitive portion with communication portions.
摘要翻译： 在基板上，第一和第二电容部分形成为具有用于压力测量和诊断的不同区域的可移动隔膜，其中在第一和第二电容部分的空腔之间设置有连通结构，以使第一电容空间 到第二电容空间。 不同的尺寸为有效的诊断提供不同的灵敏度。 第一和第二电容部分可以制成在一个隔膜中，其中第二电容部分围绕第一电容部分形成。 连接第一和第二电容部分的空腔。 此外，在第一和第二电容空间之间，绝缘部分可以形成为环形，以将第一电容部分的隔膜部分和隔膜部分支撑为具有连通部分的第二电容部分。
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公开(公告)号：US20060176043A1
公开(公告)日：2006-08-10
申请号：US11311182
申请日：2005-12-20
CPC分类号： G05F3/30
摘要： A reference voltage circuit includes an operational amplifier, a first fixed resistance resistor, a second fixed resistance resistor, a third fixed resistance resistor, a first diode and a second diode. The reference voltage circuit further includes a fourth fixed resistance resistor having an end connected to a non-inverting input terminal of the operational amplifier and the other end connected to the first diode. The reference voltage circuit is characterized by a value of the resistance of the fourth resistor being less than the resistance of the first resistor and a temperature coefficient of the fourth resistor being greater than any of the temperature coefficients of the first, second and third resistors.
摘要翻译： 参考电压电路包括运算放大器，第一固定电阻电阻，第二固定电阻电阻，第三固定电阻电阻，第一二极管和第二二极管。 参考电压电路还包括第四固定电阻电阻器，其端部连接到运算放大器的非反相输入端子，另一端连接到第一二极管。 参考电压电路的特征在于第四电阻器的电阻小于第一电阻器的电阻值，第四电阻器的温度系数大于第一，第二和第三电阻器的任何温度系数。
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5.发明授权Circuit for outputting stable reference voltage against variation of background temperature or variation of voltage of power source 有权用于输出稳定的参考电压的电路，以抵抗背景温度的变化或电源电压的变化公开(公告)号：US07233136B2
公开(公告)日：2007-06-19
申请号：US11311182
申请日：2005-12-20
CPC分类号： G05F3/30
摘要： A reference voltage circuit includes an operational amplifier, a first fixed resistance resistor, a second fixed resistance resistor, a third fixed resistance resistor, a first diode and a second diode. The reference voltage circuit further includes a fourth fixed resistance resistor having an end connected to a non-inverting input terminal of the operational amplifier and the other end connected to the first diode. The reference voltage circuit is characterized by a value of the resistance of the fourth resistor being less than the resistance of the first resistor and a temperature coefficient of the fourth resistor being greater than any of the temperature coefficients of the first, second and third resistors.
摘要翻译： 参考电压电路包括运算放大器，第一固定电阻电阻，第二固定电阻电阻，第三固定电阻电阻，第一二极管和第二二极管。 参考电压电路还包括第四固定电阻电阻器，其端部连接到运算放大器的非反相输入端子，另一端连接到第一二极管。 参考电压电路的特征在于第四电阻器的电阻小于第一电阻器的电阻值，第四电阻器的温度系数大于第一，第二和第三电阻器的任何温度系数。
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公开(公告)号：US07888840B2
公开(公告)日：2011-02-15
申请号：US11448799
申请日：2006-06-08
申请人： Keiichi Shimaoka , Hirofumi Funabashi , Yasuichi Mitsushima , Toshiaki Nakagawa , Toshihiro Wakita , Shigeru Ando , Nobutaka Ono
发明人： Keiichi Shimaoka , Hirofumi Funabashi , Yasuichi Mitsushima , Toshiaki Nakagawa , Toshihiro Wakita , Shigeru Ando , Nobutaka Ono
摘要： A microphone that identifies the direction along which acoustic waves propagate with one diaphragm, and has superior durability is provided. The microphone includes a circular diaphragm supported at a center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one surface of the diaphragm and second electrodes are arranged facing corresponding first electrodes to form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm and fourth electrodes are arranged facing corresponding third electrodes to form a second capacitor. A controller applies a voltage to the second capacitors so that the capacitance of the first capacitors will be constant and identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors.
摘要翻译： 一种麦克风，用于识别声波以一个隔膜传播的方向，并具有优异的耐久性。 麦克风包括在其中心部分处支撑的圆形隔膜。 当隔膜接收到声波时，围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上，并且第二电极被布置成面对相应的第一电极以形成第一电容器。 第三电极布置在隔膜的另一个表面上，第四电极被布置成面对相应的第三电极以形成第二电容器。 控制器向第二电容器施加电压，使得第一电容器的电容将是恒定的，并且基于施加到每个第二电容器的电压的差异来识别声波传播的方向。
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公开(公告)号：US20060284516A1
公开(公告)日：2006-12-21
申请号：US11448799
申请日：2006-06-08
申请人： Keiichi Shimaoka , Hirofumi Funabashi , Yasuichi Mitsushima , Toshiaki Nakagawa , Toshihiro Wakita , Shigeru Ando , Nobutaka Ono
发明人： Keiichi Shimaoka , Hirofumi Funabashi , Yasuichi Mitsushima , Toshiaki Nakagawa , Toshihiro Wakita , Shigeru Ando , Nobutaka Ono
IPC分类号： H01L41/00
摘要： A microphone that may identify the direction along which acoustic waves propagate with one diaphragm, and which has superior durability is provided. The microphone comprises a circular diaphragm. The diaphragm is supported at the center portion thereof. When the diaphragm receives acoustic waves, each position around the center thereof will vibrate with a phase depending upon the direction of the acoustic waves. First electrodes are arranged on one of the surfaces of the diaphragm. Second electrodes are arranged so that each second electrode faces corresponding first electrode with gap. Each first electrode and corresponding second electrode facing thereto form a first capacitor. Third electrodes are arranged on the other surface of the diaphragm. Fourth electrodes are arranged so that each fourth electrode faces corresponding third electrode with gap. Each third electrode and corresponding fourth electrode facing thereto form a second capacitor. The controller applies a voltage to each of the second capacitors so that the capacitance of each of the first capacitors will be a constant value. The controller identifies the direction along which the acoustic waves propagate based on the difference in the voltages applied to each of the second capacitors. Vibration of the diaphragm will be inhibited by the voltages applied to the second capacitors while the direction is identified based on the voltages. The durability of the diaphragm can be improved.
摘要翻译： 提供可以识别声波以一个隔膜传播的方向并且具有优异的耐久性的麦克风。 麦克风包括圆形隔膜。 隔膜在其中心部分被支撑。 当隔膜接收到声波时，围绕其中心的每个位置将根据声波的方向以相位振动。 第一电极布置在隔膜的一个表面上。 第二电极布置成使得每个第二电极面对具有间隙的相应的第一电极。 每个第一电极和与其对应的相应的第二电极形成第一电容器。 第三电极布置在隔膜的另一个表面上。 第四电极布置成使得每个第四电极具有间隙的相应的第三电极。 每个第三电极和与其对应的相应的第四电极形成第二电容器。 控制器向每个第二电容器施加电压，使得每个第一电容器的电容将为恒定值。 控制器基于施加到每个第二电容器的电压的差异来识别声波传播的方向。 通过施加到第二电容器的电压来抑制振膜的振动，同时基于电压来识别方向。 可以提高隔膜的耐久性。
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公开(公告)号：US4986131A
公开(公告)日：1991-01-22
申请号：US458538
申请日：1989-12-28
CPC分类号： G01L1/2281 , G01L9/0054 , G01L9/065
摘要： In a semiconductor strain detector, the temperature characteristic of the output of a zero-point temperature compensating circuit is added to the zero-point temperature characteristic of the output of a bridge circuit composed of strain gauges, to perform a zero-point temperature compensation of the final output. Further, two kinds of diffusion resistors having different surface impurity densities are used in each amplifying circuit to perform a sensitivity-temperature compensation in which a temperature coefficient of sensitivity is considered up to the second-order term.
摘要翻译： 在半导体应变检测器中，将零点温度补偿电路的输出的温度特性加到由应变计构成的桥式电路的输出的零点温度特性中，以进行零点温度补偿 最终输出。 此外，在每个放大电路中使用具有不同表面杂质浓度的两种扩散电阻器，以执行灵敏度温度补偿，其中灵敏度温度系数被考虑到二阶项。
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公开(公告)号：US08816451B2
公开(公告)日：2014-08-26
申请号：US13035186
申请日：2011-02-25
申请人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
发明人： Hirofumi Funabashi , Yutaka Nonomura , Yoshiyuki Hata , Motohiro Fujiyoshi , Teruhisa Akashi , Yoshiteru Omura
摘要： In a MEMS structure, a first trench which penetrates the first layer, the second layer and the third layer is formed, and a second trench which penetrates the fifth layer, the forth layer and the third layer is formed. The first trench forms a first part of an outline of the movable portion in a view along the stacked direction. The second trench forms a second part of the outline of the movable portion in the view along the stacked direction. At least a part of the first trench overlaps with the first extending portion in the view along the stacked direction.
摘要翻译： 在MEMS结构中，形成贯穿第一层，第二层和第三层的第一沟槽，形成贯穿第五层，第四层和第三层的第二沟槽。 第一沟槽沿着堆叠的方向形成可动部分的轮廓的第一部分。 第二沟槽沿着堆叠方向在视图中形成可动部分的轮廓的第二部分。 第一沟槽的至少一部分沿着堆叠方向在视图中与第一延伸部分重叠。
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公开(公告)号：US08365597B2
公开(公告)日：2013-02-05
申请号：US12723971
申请日：2010-03-15
IPC分类号： G01P15/00
CPC分类号： G01C19/5719 , G01P2015/082
摘要： An apparatus with a second movable portion that moves along an x-axis direction and a z-axis direction and a first movable portion that only moves along the z-axis direction is disclosed. The apparatus is provided with a fixed portion fixed to a support portion, a plurality of first spring portions connected to the fixed portion, a first movable portion connected to the plurality of first spring portions, a second spring portion connected to the first movable portion, and a second movable portion connected to the second spring portion. A spring constant of each of the plurality of first spring portions in the z-axis direction is lower than spring constants of each of the plurality of first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of the second spring portion in the x-axis direction is lower than spring constants of the second spring portion in the y-axis and the z-axis directions respectively. The first movable portion is configured to move along the z-axis but not to move along the x-axis and the y-axis nor to rotate around the z-axis, and the second movable portion is configured to move along the x-axis and the z-axis with respect to the support portion.
摘要翻译： 公开了一种具有沿x轴方向和z轴方向移动的第二可移动部分和仅沿着z轴方向移动的第一可动部分的装置。 该装置设置有固定到支撑部分的固定部分，连接到固定部分的多个第一弹簧部分，连接到多个第一弹簧部分的第一可动部分，连接到第一可动部分的第二弹簧部分， 以及与第二弹簧部连接的第二可动部。 多个第一弹簧部分中的每一个在z轴方向上的弹簧常数分别低于多个第一弹簧部分在x轴和y轴方向上的弹簧常数，弹簧常数 x轴方向上的第二弹簧部分分别低于第二弹簧部分在y轴和z轴方向上的弹簧常数。 第一可移动部分被配置为沿着z轴移动但不沿着x轴和y轴移动，也不围绕z轴旋转，并且第二可移动部分构造成沿x轴移动 和z轴相对于支撑部分。
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