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公开(公告)号：US20250002334A1
公开(公告)日：2025-01-02
申请号：US18887130
申请日：2024-09-17
Applicant: Texas Instruments Incorporated
Inventor： Simon Joshua Jacobs , Molly Nelis Sing , Lawerence Tucker Latham
Abstract: In described examples, a MEMS device component includes a passivation layer formed from a vapor and/or a liquid compound that may include precursors. The compound may contain amino acid, antioxidants, nitriles or other compounds, and may be disposed on a surface of the MEMS device component and/or a package or package portion thereof. If the compound is a precursor, it may be treated to cause formation of the passivation layer from the precursor.
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公开(公告)号：US11959004B2
公开(公告)日：2024-04-16
申请号：US17339474
申请日：2021-06-04
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Simon Joshua Jacobs
IPC: C09K13/02 , C09K13/00 , H01L21/306 , H01L21/308
CPC classification number: C09K13/02 , C09K13/00 , H01L21/30604 , H01L21/308
Abstract: An alkaline etching solution comprising a hydroxide salt (e.g., an alkali metal hydroxide, an ammonium hydroxide, or a combination thereof), a polyol having at least three hydroxyl (—OH) groups, and water. Also provided is a method of producing a semiconductor device by obtaining a semiconductor substrate having masked and unmasked surfaces; exposing the semiconductor substrate having the masked and unmasked surfaces to an alkaline etching solution, such that the unmasked surfaces of the substrate are anisotropically etched, wherein the alkaline etching solution comprises: a hydroxide salt; a polyol having at least three hydroxyl (—OH) groups; and water; and performing additional processing to produce the semiconductor device.
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公开(公告)号：US10364144B2
公开(公告)日：2019-07-30
申请号：US15815849
申请日：2017-11-17
Applicant: Texas Instruments Incorporated
Abstract: Disclosed examples provide gas cells and a method of fabricating a gas cell, including forming a cavity in a first substrate, forming a first conductive material on a sidewall of the cavity, forming a glass layer on the first conductive material, forming a second conductive material on a bottom side of a second substrate, etching the second conductive material to form apertures through the second conductive material, forming conductive coupling structures on a top side of the second substrate, and bonding a portion of the bottom side of the second substrate to a portion of the first side of the first substrate to seal the cavity.
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公开(公告)号：US09487397B2
公开(公告)日：2016-11-08
申请号：US14844779
申请日：2015-09-03
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： William Robert Morrison , Mark Christopher Fisher , Murali Hanabe , Ganapathy Subramaniam Sivakumar , Simon Joshua Jacobs
CPC classification number: B81C1/00984 , B81B3/0005 , B81B7/0032 , B81C1/00261 , B81C1/0096 , B81C2201/112 , H01L21/02112 , H04W4/02 , Y10S257/914
Abstract: A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
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公开(公告)号：US09150410B2
公开(公告)日：2015-10-06
申请号：US14333829
申请日：2014-07-17
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： William Robert Morrison , Mark Christopher Fisher , Murali Hanabe , Ganapathy Subramaniam Sivakumar , Simon Joshua Jacobs
CPC classification number: B81C1/00984 , B81B3/0005 , B81B7/0032 , B81C1/00261 , B81C1/0096 , B81C2201/112 , H01L21/02112 , H04W4/02 , Y10S257/914
Abstract: A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
Abstract translation: 器件具有微机电系统（MEMS）部件，其中至少一个表面和涂层设置在表面的至少一部分上。 该涂层具有式M（CnF2n + 10r）的化合物，其中M是极性头基，其中n≥2r。 n的值可以在2至约20的范围内，并且r的值可以在1至约10的范围内.n加r的值可以在3至约30的范围内，并且n：r的比可以具有值 为约2：1至约20：1。
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Patent Agency Ranking
公开(公告)号：US20230059848A1
公开(公告)日：2023-02-23
申请号：US17828356
申请日：2022-05-31
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Scott Robert Summerfelt , Benjamin Stassen Cook , Simon Joshua Jacobs , Stefan Herzer
IPC: H01L23/48 , H01L25/065 , H01L21/768
Abstract: A device includes a die with a metallization stack. The device includes a substrate with a first region, a second region and a third region that underly the metallization stack and a first isolation trench filled with a polymer dielectric that extends between the first region and the second region of the substrate. The device also includes a second isolation trench filled with the polymer dielectric that extends between the second region and the third region. The polymer dielectric overlays a periphery of the substrate.
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公开(公告)号：US11345589B2
公开(公告)日：2022-05-31
申请号：US16728309
申请日：2019-12-27
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Simon Joshua Jacobs
Abstract: A microelectronic device package includes a host material and a gettering material. The microelectronic device package also includes a polymeric component between the host material and the gettering material. The polymeric component substantially encapsulates the gettering material. The microelectronic device package further includes a fluorochemical lubricant. The polymeric component serves to prevent a reaction between the fluorochemical lubricant and the gettering material. Alternatively, the fluorochemical lubricant may be encapsulated by a polymeric component and may be released upon an increase in temperature during or after a packaging step.
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公开(公告)号：US10544039B2
公开(公告)日：2020-01-28
申请号：US15698706
申请日：2017-09-08
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Benjamin Stassen Cook , Kurt Wachtler , Adam Joseph Fruehling , Juan Alejandro Herbsommer , Simon Joshua Jacobs
Abstract: Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.
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公开(公告)号：US20190084271A1
公开(公告)日：2019-03-21
申请号：US16195308
申请日：2018-11-19
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Adam Joseph Fruehling , Juan Alejandro Herbsommer , Benjamin Stassen Cook , Simon Joshua Jacobs
Abstract: A method includes forming a plurality of layers of an oxide and a metal on a substrate. For example, the layers may include a metal layer sandwiched between silicon oxide layers. A non-conductive structure such as glass is then bonded to one of the oxide layers. An antenna can then be patterned on the non-conductive structure, and a cavity can be created in the substrate. Another metal layer is deposited on the surface of the cavity, and an iris is patterned in the metal layer to expose the one of the oxide layers. Another metal layer is formed on a second substrate and the two substrates are bonded together to thereby seal the cavity.
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公开(公告)号：US10131115B1
公开(公告)日：2018-11-20
申请号：US15698346
申请日：2017-09-07
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Adam Joseph Fruehling , Juan Alejandro Herbsommer , Benjamin Stassen Cook , Simon Joshua Jacobs
Abstract: A method include forming a plurality of layers of an oxide and a metal on a substrate. For example, the layers may include a metal layer sandwiched between silicon oxide layers. A non-conductive structure such as glass is then bonded to one of the oxide layers. An antenna can then be patterned on the non-conductive structure, and a cavity can be created in the substrate. Another metal layer is deposited on the surface of the cavity, and an iris is patterned in the metal layer to expose the one of the oxide layers. Another metal layer is formed on a second substrate and the two substrates are bonded together to thereby seal the cavity.
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