公开(公告)号：US06936831B2

公开(公告)日：2005-08-30

申请号：US09860958

申请日：2001-05-17

申请人： Tomoharu Fujiwara ,  Noriyuki Hirayanagi ,  Kazuaki Suzuki ,  Teruaki Okino

发明人： Tomoharu Fujiwara ,  Noriyuki Hirayanagi ,  Kazuaki Suzuki ,  Teruaki Okino

IPC分类号： G03F1/20 ,  G03F1/68 ,  G03F7/16 ,  G03F7/20 ,  H01J37/305 ,  H01J37/317 ,  H01L21/027 ,  H01J37/00 ,  H01L21/30

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F7/16 ,  G03F7/70433 ,  H01J37/3174 ,  H01J2237/0453

摘要： Reticles and apparatus for performing charged-particle-beam microlithography, and associated methods, are disclosed, in which the pattern to be transferred to a sensitive substrate is divided according to any of various schemes serving to improve throughput and pattern-transfer accuracy. The methods and apparatus are especially useful whenever a divided stencil reticle is used that includes complementary pattern portions.

摘要翻译： 公开了用于进行带电粒子束微光刻的网状物和设备及其相关方法，其中根据用于提高生产量和图案转印精度的各种方案中的任何一种将要转移到敏感基板的图案进行划分。 当使用包括互补图案部分的分割模板掩模版时，该方法和装置特别有用。

公开(公告)号：US06447964B2

公开(公告)日：2002-09-10

申请号：US09795258

申请日：2001-02-27

申请人： Teruaki Okino ,  Tomoharu Fujiwara ,  Noriyuki Hirayanagi

发明人： Teruaki Okino ,  Tomoharu Fujiwara ,  Noriyuki Hirayanagi

IPC分类号： G03C500

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/30455 ,  H01J2237/31764 ,  Y10S430/143

摘要： Methods are disclosed for reducing effects of thermal expansion of a sensitive substrate arising during microlithographic exposure of the substrate using a charged particle beam. Thermal expansion ordinarily causes lateral shift of exposure position of dies (chips) on the substrate which tends to reduce the positional accuracy with which images of the dies are formed on the substrate. Generally, regions of the substrate where entire dies are formed are exposed first, followed by regions (especially peripheral regions) exposed with only portions of dies. In addition, the substrate can be mounted on a wafer chuck configured to circulate a heat-transfer gas in contact with the substrate to remove heat from the substrate. In addition, the wafer chuck can be maintained at a constant temperature by circulating a liquid coolant through a conduit in the body of the wafer chuck.

摘要翻译： 公开了用于减少使用带电粒子束在基板的微光刻曝光期间产生的敏感基板的热膨胀效应的方法。 热膨胀通常导致基板上的模具（芯片）的曝光位置的横向偏移，这倾向于降低在基板上形成管芯图像的位置精度。 通常，首先露出形成有整个模具的基板的区域，然后暴露出仅一部分模具的区域（特别是周边区域）。 此外，基板可以安装在晶片卡盘上，该卡盘被配置为使与基板接触的传热气体循环，以从基板去除热量。 此外，通过使液体冷却剂通过晶片卡盘的主体中的导管循环，可以将晶片卡盘保持在恒定温度。

公开(公告)号：US06657207B2

公开(公告)日：2003-12-02

申请号：US09805732

申请日：2001-03-13

申请人： Shintaro Kawata ,  Teruaki Okino ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Shintaro Kawata ,  Teruaki Okino ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G21G500

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/30455 ,  H01J2237/31764

摘要： Charged-particle-beam (CPB) apparatus and methods are disclosed that achieve efficient correction of imaging conditions such as shape-astigmatic aberrations, etc., caused by differences in the distribution of pattern elements within respective subfields of the reticle. Indices based on the pattern-element distributions within subfields are stored, together with corresponding optical-correction data for the subfields. As the subfields are exposed, respective data are recalled and the exposure is performed with optical corrections made according to the data. The indices are determined beforehand from pattern data at time of reticle manufacture. The tabulated data are rewritable with changes in apparatus parameters such as beam-current density and beam-divergence angle. Intermediate data can be determined by interpolation of tabulated data.

摘要翻译： 公开了充电粒子束（CPB）装置和方法，其实现由掩模版的各个子场内的图案元素分布的差异导致的成像条件（诸如形像像差等）的有效校正。 基于子场内的图案元素分布的指数与子场的相应光学校正数据一起被存储。 当子场曝光时，调用相应的数据，并根据数据进行光学校正来进行曝光。 这些指标是从标线制造时的图形数据预先确定的。 列表数据可以随设备参数的变化而改写，例如光束电流密度和光束发散角。 中间数据可以通过插入表格数据来确定。

公开(公告)号：US5981947A

公开(公告)日：1999-11-09

申请号：US17736

申请日：1998-02-03

申请人： Mamoru Nakasuji ,  Teruaki Okino ,  Noriyuki Hirayanagi

发明人： Mamoru Nakasuji ,  Teruaki Okino ,  Noriyuki Hirayanagi

IPC分类号： H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/304 ,  H01J37/305

CPC分类号： H01J37/244 ,  H01J37/3045 ,  H01J2237/2448

摘要： Apparatus and methods are disclosed for performing highly precise mark detection by obtaining a large signal as a result of the efficient capture of secondary electrons (SEs) emitted from a surface of a specimen. A charged-particle beam is directed at a location (e.g., a mark) on the specimen (e.g., reticle or wafer). SEs emitted from the location are detected using one or more secondary-electron collectors or detectors. To guide the SEs toward the secondary-electron collectors or detectors, a magnetic flux is created that extends radially outward in the vicinity of the surface of the specimen. E.g., an objective lens is situated above the specimen adjacent the specimen surface, and an electromagnetic lens is placed below the specimen adjacent the lower surface of the specimen. The magnetic fields produced by these lenses can be mutually repulsive to form a resultant magnetic flux near the upper surface of the specimen that extends radially outward parallel with the upper surface of the specimen. Thus, electrons can escape only radially outward parallel to the sample surface to the secondary-electron collectors or detectors. The apparatus provides a stable charged-particle beam without charging because the SE collector or detector removes SEs from the vicinity of the optical axis.

摘要翻译： 公开了用于通过从样本表面发射的二次电子（SE）的有效捕获而获得大的信号来执行高精度标记检测的装置和方法。 带电粒子束被引导到样品（例如，标线片或晶片）上的位置（例如，标记）。 使用一个或多个二次电子收集器或检测器检测从该位置发射的SE。 为了将SE引向二次电子收集器或检测器，产生在样品表面附近径向向外延伸的磁通量。 例如，物镜位于与样本表面相邻的样本上方，并且电磁透镜放置在与样本下表面相邻的样本下方。 由这些透镜产生的磁场可以相互排斥，以在样本的上表面附近形成一个与样本上表面径向向外平行延伸的合成磁通量。 因此，电子可以平行于样品表面径向向外逸出到二次电子收集器或检测器。 该装置提供稳定的带电粒子束而不进行充电，因为SE收集器或检测器从光轴附近去除SE。

公开(公告)号：US06632722B2

公开(公告)日：2003-10-14

申请号：US10068172

申请日：2002-02-06

申请人： Tomoharu Fujiwara ,  Noriyuki Hirayanagi

发明人： Tomoharu Fujiwara ,  Noriyuki Hirayanagi

IPC分类号： H01L2176

CPC分类号： H01L21/67282 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  H01J37/3174 ,  H01J2237/30438 ,  H01J2237/3175 ,  H01L21/68 ,  H01L23/544 ,  H01L2223/5442 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

摘要： Fiducial mark bodies are provided for use in CPB microlithography apparatus and methods. Such bodies are especially useful for attachment to the wafer stage of such apparatus, for measuring a distance between a reference position of the CPB-optical system of the apparatus and a reference position of an optical-based alignment sensor of the apparatus. The mark bodies provide improved accuracy of these and other positional measurements. A typical mark body is made of a substrate plate (e.g., quartz or quartz-ceramic) having a low coefficient of thermal expansion. Mark elements are defined on the substrate plate by a layer of heavy metal (e.g. are Ta, W, or Pt). The mark body includes a surficial or interior layer of an electrically conductive light metal that prevents electrostatic charging of the mark body and can be connected to ground.

摘要翻译： 提供了用于CPB微光刻设备和方法的基准标记体。 这样的主体对于附接到这种装置的晶片台是特别有用的，用于测量装置的CPB-光学系统的基准位置与装置的基于光学的对准传感器的基准位置之间的距离。 标记体提供了这些和其他位置测量的改进的精度。 典型的标记体由具有低热膨胀系数的衬底板（例如石英或石英陶瓷）制成。 标记元件通过重金属层（例如Ta，W或Pt）在衬底板上限定。 标记体包括导电轻金属的表层或内层，其防止标记体的静电充电并且可以连接到地面。

公开(公告)号：US06429090B1

公开(公告)日：2002-08-06

申请号：US09513308

申请日：2000-02-25

申请人： Tomoharu Fujiwara ,  Noriyuki Hirayanagi

发明人： Tomoharu Fujiwara ,  Noriyuki Hirayanagi

IPC分类号： H01L2176

CPC分类号： H01L21/67282 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  H01J37/3174 ,  H01J2237/30438 ,  H01J2237/3175 ,  H01L21/68 ,  H01L23/544 ,  H01L2223/5442 ,  H01L2223/54453 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

摘要： Fiducial mark bodies are provided for use in CPB microlithography apparatus and methods. Such bodies are especially useful for attachment to the wafer stage of such apparatus, for measuring a distance between a reference position of the CPB-optical system of the apparatus and a reference position of an optical-based alignment sensor of the apparatus. The mark bodies provide improved accuracy of these and other positional measurements. A typical mark body is made of a substrate plate (e.g., quartz or quartz-ceramic) having a low coefficient of thermal expansion. Mark elements are defined on the substrate plate by a layer of heavy metal (e.g. are Ta, W, or Pt). The mark body includes a surficial or interior layer of an electrically conductive light metal that prevents electrostatic charging of the mark body and can be connected to ground.

公开(公告)号：US08018577B2

公开(公告)日：2011-09-13

申请号：US11437595

申请日：2006-05-19

申请人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G03B27/54

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70558

摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.

摘要翻译： 公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。 示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器， 参考反射表面，并到达投影光学系统的图像表面。 基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。 基于由校准的第一传感器获得的检测数据来控制基板的曝光。

公开(公告)号：US20060290916A1

公开(公告)日：2006-12-28

申请号：US11437595

申请日：2006-05-19

申请人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

发明人： Hajime Yamamoto ,  Tohru Isogami ,  Kazuaki Suzuki ,  Noriyuki Hirayanagi

IPC分类号： G03B27/32

CPC分类号： G03F7/7085 ,  G03F7/70516 ,  G03F7/70558

摘要： Exposure apparatus are disclosed that can control, to high precision, exposure doses on a photosensitive substrate of a mask pattern defined on a reflective mask as the pattern is being exposed on the substrate using a projection-optical system. An exemplary apparatus includes a first illumination sensor for detecting light that is incident on a reflective mask from an illumination system and a second illumination sensor for detecting light that has propagated from the illumination system to a reference reflective surface on the reflective mask, reflected from the reference reflective surface, and arrived at an image surface of the projection-optical system. Calibration of the first sensor is performed based on detection data obtained by the first sensor and detection data obtained by the second sensor. Exposure of the substrate is controlled based on the detection data obtained by the calibrated first sensor.

摘要翻译： 公开了一种曝光装置，其可以使用投影光学系统在图案被曝光在基板上的同时，在限定在反射掩模上的掩模图案的感光基板上高精度地控制曝光量。 示例性装置包括用于检测从照明系统入射到反射掩模上的光的第一照明传感器和用于检测从照明系统传播到反射掩模上的参考反射表面的光的第二照明传感器， 参考反射表面，并到达投影光学系统的图像表面。 基于由第一传感器获得的检测数据和由第二传感器获得的检测数据执行第一传感器的校准。 基于由校准的第一传感器获得的检测数据来控制基板的曝光。

公开(公告)号：US20090219504A1

公开(公告)日：2009-09-03

申请号：US12351500

申请日：2009-01-09

申请人： Noriyuki Hirayanagi

发明人： Noriyuki Hirayanagi

IPC分类号： G03B27/62

CPC分类号： G03F1/62 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/48 ,  G03F1/66 ,  G03F7/70733 ,  G03F7/70741 ,  G03F7/7075 ,  G03F7/70908 ,  G03F7/70916 ,  G03F7/70983 ,  H01L21/67196 ,  H01L21/67225 ,  H01L21/67742

摘要： A substrate conveyor apparatus carries a substrate on which patterns are formed, carries the substrate in a state protected by a protective cover when the substrate is not used, and carries a cover protection means that covers the inner surface of the protective cover when the substrate is used. The substrate conveyor apparatus has a grounding means that grounds the substrate or the protective cover.

摘要翻译： 基板输送装置承载形成有图案的基板，在不使用基板时将基板承载在被保护盖保护的状态下，并且当基板为基板时，承载覆盖保护盖内表面的盖保护装置 用过的。 基板输送装置具有使基板或保护盖接地的接地装置。

公开(公告)号：US20060087638A1

公开(公告)日：2006-04-27

申请号：US11235130

申请日：2005-09-27

申请人： Noriyuki Hirayanagi

发明人： Noriyuki Hirayanagi

IPC分类号： G03B27/58

CPC分类号： G03F1/62 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/48 ,  G03F7/70741 ,  G03F7/70983 ,  H01L21/67196 ,  H01L21/67225 ,  H01L21/67742

摘要： With respect to a substrate conveyor apparatus that, being a substrate conveyor apparatus that carries substrates on which patterns are formed, carries the substrates in a state protected by a protective cover when the substrate is not used, a substrate conveyor apparatus having a cover protection means that conceals the inner surface of the protective cover when the substrate is used.

摘要翻译： 对于作为基板输送装置的基板输送装置，其特征在于，作为基板输送装置，当基板不使用时，承载基板的图案形成在基板上的状态下，将基板保持在被保护盖保护的状态的基板输送装置，具有盖保护装置 当使用基板时，隐藏保护盖的内表面。