公开(公告)号：US11428594B2

公开(公告)日：2022-08-30

申请号：US17143517

申请日：2021-01-07

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shigeto Iwai ,  Atsushi Yumoto ,  Makoto Noro ,  Takashi Yoshida

IPC: G01L9/00

Abstract: A resonant pressure sensor has high linearity and includes: a housing; and a pressure sensing unit that detects a static pressure based on a change value of a resonance frequency and includes: a housing-fixed portion; a substrate that includes a substrate-fixed portion and a substrate-separated portion; the pressure-receiving fluid that is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate; and a first resonator that is disposed in the substrate-separated portion and detects the change value of the resonance frequency based on a strain in the substrate caused by the static pressure applied by the pressure-receiving fluid, wherein the first resonator is made of a semiconductor material including an impurity, a concentration of the impurity is 1×1020 (cm−3) or higher, and an atomic radius of the impurity is smaller than an atomic radius of the semiconductor material.

公开(公告)号：US09893656B2

公开(公告)日：2018-02-13

申请号：US14153325

申请日：2014-01-13

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi Yoshida ,  Shigeto Iwai ,  Yoshitaka Sasaki

IPC: H02N11/00 ,  H03H3/007 ,  H03H9/24

CPC classification number: H02N11/00 ,  H03H3/0072 ,  H03H9/2463 ,  Y10T29/49007

Abstract: A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.

公开(公告)号：US11815420B2

公开(公告)日：2023-11-14

申请号：US18160632

申请日：2023-01-27

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shigeto Iwai ,  Atsushi Yumoto ,  Makoto Noro ,  Takashi Yoshida

IPC: G01L9/00

CPC classification number: G01L9/0072

Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.

公开(公告)号：US20210215560A1

公开(公告)日：2021-07-15

申请号：US17143517

申请日：2021-01-07

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shigeto Iwai ,  Atsushi Yumoto ,  Makoto Noro ,  Takashi Yoshida

IPC: G01L9/00

Abstract: An resonant pressure sensor, includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that includes a substrate-fixed portion that is fixed to the housing-fixed portion and a substrate-separated portion that is separated from the housing-fixed portion and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by the pressure-receiving fluid; and a processor. A pressure-receiving fluid is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate. The processor measures the static pressure based on the detected change of the resonance frequency.

公开(公告)号：US20230175908A1

公开(公告)日：2023-06-08

申请号：US18160632

申请日：2023-01-27

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shigeto Iwai ,  Atsushi Yumoto ,  Makoto Noro ,  Takashi Yoshida

IPC: G01L9/00

CPC classification number: G01L9/0072

Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.

公开(公告)号：US09139419B2

公开(公告)日：2015-09-22

申请号：US14336613

申请日：2014-07-21

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi Yoshida ,  Shuuji Okuda ,  Shigeto Iwai

IPC: H01L29/84 ,  B81B3/00 ,  G01N29/12 ,  H01L41/09 ,  H03H3/007 ,  H03H9/24 ,  B81B7/02 ,  B81C1/00 ,  G01L1/14

CPC classification number: B81B3/0021 ,  B81B3/0002 ,  B81B7/02 ,  B81B2201/0271 ,  B81B2201/0285 ,  B81C1/00198 ,  B81C1/00293 ,  B81C2203/0145 ,  G01L1/14 ,  G01N29/12 ,  G01N2291/014 ,  G01N2291/02827 ,  H01L41/094 ,  H03H3/0072 ,  H03H9/2463

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole, a second layer disposed over the first layer, a third layer covering the first layer and the second layer, and a projection extending from the second layer toward the resonator, the projection being spatially separated from the resonator, the projection being separated from the first layer by a first gap, the second layer being separated from the first layer by a second gap, the first gap is communicated with the second gap.

Abstract translation: 谐振换能器包括硅单晶衬底，设置在硅单晶衬底上的硅单晶谐振器，由硅构成的外壳，围绕谐振器间隙，并与硅单晶衬底一起形成腔室，令人兴奋的 模块，其被配置为激励所述谐振器;振动检测模块，被配置为检测所述谐振器的振动，设置在所述腔室上的第一层，所述第一层具有通孔，设置在所述第一层上的第二层， 第一层和第二层，以及从第二层朝向谐振器延伸的突起，突起与谐振器在空间上分离，突起与第一层隔开第一间隙，第二层与第一层分离 通过第二间隙，第一间隙与第二间隙连通。

公开(公告)号：US11592347B2

公开(公告)日：2023-02-28

申请号：US17854209

申请日：2022-06-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shigeto Iwai ,  Atsushi Yumoto ,  Makoto Noro ,  Takashi Yoshida

IPC: G01L9/00

Abstract: A resonant pressure sensor with improved linearity includes a substrate including a substrate-fixed portion fixed to a housing-fixed portion and a substrate-separated portion separated from the housing-fixed portion in a first direction; a first resonator disposed in the substrate-separated portion to detect a change of a resonance frequency based on a strain caused by static pressure applied by a pressure-receiving fluid interposed in a gap between the housing-fixed portion and the substrate; a first electrode extending along a second direction to output an excitation signal to the first resonator; a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency; and a processor that measures the static pressure based on the detected change.

公开(公告)号：US20220349766A1

公开(公告)日：2022-11-03

申请号：US17854209

申请日：2022-06-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Shigeto Iwai ,  Atsushi Yumoto ,  Makoto Noro ,  Takashi Yoshida

IPC: G01L9/00

Abstract: A resonant pressure sensor includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that comprises: a substrate-fixed portion that is fixed to the housing-fixed portion; and a substrate-separated portion that is separated from the housing-fixed portion in a first direction and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a first electrode that extends along a second direction perpendicular to the first direction and that outputs an excitation signal to the first resonator to excite the first resonator; and a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency.

公开(公告)号：US10955434B2

公开(公告)日：2021-03-23

申请号：US16693485

申请日：2019-11-25

Applicant: Yokogawa Electric Corporation

Inventor： Shigeto Iwai ,  Makoto Noro

IPC: G01P15/097 ,  G01P15/08

Abstract: A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.

公开(公告)号：US09865797B2

公开(公告)日：2018-01-09

申请号：US14446602

申请日：2014-07-30

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Takashi Yoshida ,  Takeshi Mishima ,  Shigeto Iwai ,  Yuusaku Yoshida

IPC: H01L41/083 ,  H01L41/331 ,  H03H3/007 ,  H03H9/10

CPC classification number: H01L41/083 ,  H01L41/331 ,  H03H3/0072 ,  H03H9/1057 ,  Y10T29/42

Abstract: A resonant transducer includes a silicon single crystal substrate, a silicon single crystal resonator disposed over the silicon single crystal substrate, a shell made of silicon, surrounding the resonator with a gap, and forming a chamber together with the silicon single crystal substrate, an exciting module configured to excite the resonator, a vibration detecting module configured to detect vibration of the resonator, a first layer disposed over the chamber, the first layer having a through-hole over the resonator, a second layer disposed over the first layer, the second layer covering a gap being positioned above the through-hole and being communicated with the through-hole, and a third layer covering the first layer and the second layer, and the third layer sealing the gap.