Dual-probe scanning probe microscope

    公开(公告)号:US10197595B2

    公开(公告)日:2019-02-05

    申请号:US15077599

    申请日:2016-03-22

    申请人: Bruker Nano, Inc.

    发明人: Chanmin Su

    摘要: An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

    High speed adaptive-multi-loop mode imaging atomic force microscopy

    公开(公告)号:US10041970B2

    公开(公告)日:2018-08-07

    申请号:US15326237

    申请日:2015-07-14

    IPC分类号: G01Q10/00 G01Q10/06 G01Q60/34

    摘要: A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (Aset), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.

    Scanning probe microscope and control method thereof

    公开(公告)号:US09977049B2

    公开(公告)日:2018-05-22

    申请号:US15092027

    申请日:2016-04-06

    发明人: Nobuaki Sakai

    摘要: A scanning probe microscope includes a cantilever having a probe at a free end thereof; a scanner to three-dimensionally relatively move the probe and a sample; a vibrator to vibrate the cantilever based on a vibrating signal; a displacement detector to detect a displacement of the cantilever and to output a displacement signal indicating the displacement; and a phase difference information detecting section to generate a phase signal including information of a phase difference between the vibrating signal and the displacement signal. The phase difference information detecting section includes a phase regulating portion to provide, to the phase difference, a phase offset to cancel an initial phase difference present in a state in which the probe is not in contact with the sample.

    Scanning mechanism and scanning probe microscope

    公开(公告)号:US09519005B2

    公开(公告)日:2016-12-13

    申请号:US14862538

    申请日:2015-09-23

    发明人: Nobuaki Sakai

    摘要: A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.