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公开(公告)号：US20070224339A1
公开(公告)日：2007-09-27
申请号：US11723845
申请日：2007-03-22
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： According to one embodiment, there is provided a method of manufacturing a patterned media having a substrate and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filling recesses between the magnetic patterns. The method includes depositing a first nonmagnetic material to fill the recesses between the magnetic patterns, carrying out surface reforming of the first nonmagnetic material, depositing a second nonmagnetic material on the first nonmagnetic material, and etching back the second and first nonmagnetic materials.
摘要翻译： 根据一个实施例，提供了一种制造图案化介质的方法，该图案化介质在基板上具有基板和磁记录层，该基板包括突出的磁图案和填充磁图案之间的凹槽的非磁性材料。 该方法包括沉积第一非磁性材料以填充磁性图案之间的凹槽，进行第一非磁性材料的表面重整，在第一非磁性材料上沉积第二非磁性材料，以及蚀刻第二和第一非磁性材料。
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92.发明申请Method of forming patterns and method of manufacturing magnetic recording media 失效形成图案的方法和制造磁记录介质的方法公开(公告)号：US20070090087A1
公开(公告)日：2007-04-26
申请号：US11580862
申请日：2006-10-16
CPC分类号： C23F4/00 , B82Y10/00 , C23C2/02 , C23C2/26 , C23C4/02 , C23C4/18 , G03F7/0046 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855 , H01F41/34
摘要： According to one embodiment, a method of forming patterns is provided, in which the method including forming a resist on an underlying material, pressing a stamper having patterns of protrusions and recesses, sidewalls of which protrusions are tapered, onto the resist to form a patterned resist having patterns of protrusions and recesses, sidewalls of which protrusions are tapered, forming a protective film on the patterned resist, performing anisotropic etching to leave the protective film on the tapered sidewalls of protrusions of the patterned resist, etching a resist residue remaining in recesses of the patterned resist using the protective film as a mask, and etching the underlying material using the protective film and the patterned resist as a mask.
摘要翻译： 根据一个实施例，提供了一种形成图案的方法，其中所述方法包括在下层材料上形成抗蚀剂，将具有突起和凹陷图案的压模（其突出部分的锥形的侧壁）按压到抗蚀剂上以形成图案化 抗蚀剂具有突起和凹陷的图案，其侧壁突起成锥形，在图案化的抗蚀剂上形成保护膜，进行各向异性蚀刻以将保护膜留在图案化抗蚀剂的突起的锥形侧壁上，蚀刻保留在凹槽中的抗蚀剂残渣 使用保护膜作为掩模的图案化抗蚀剂，并使用保护膜和图案化的抗蚀剂作为掩模蚀刻下面的材料。
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公开(公告)号：US20070070547A1
公开(公告)日：2007-03-29
申请号：US11527458
申请日：2006-09-27
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/65 , G11B5/66 , G11B5/667 , G11B5/743 , G11B5/855 , G11B2005/0029
摘要： According to one embodiment, a magnetic recording media includes a magnetic recording layer formed on a substrate, in which recording tracks and servo areas are prescribed as patterns of protrusions and recesses formed on the magnetic recording layer so that thin film portions of the magnetic recording layer are formed under the recesses, a thickness of magnetic recording layer at the thin film portion is smaller than a thickness of magnetic recording layer at the protrusion in the servo area, and a magnetization direction of the protrusion is antiparallel to a magnetization direction of the thin film in the servo area.
摘要翻译： 根据一个实施例，磁记录介质包括形成在基板上的磁记录层，其中记录轨道和伺服区被指定为在磁记录层上形成的突起和凹槽的图案，使得磁记录层的薄膜部分 形成在凹部下方，薄膜部分处的磁记录层的厚度小于伺服区域中的突起处的磁记录层的厚度，并且突起的磁化方向与薄的磁化方向反平行 电影在伺服区。
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94.发明申请Method for manufacturing substrate for discrete track recording media and method for manufacturing discrete track recording media 失效用于制造离散轨道记录介质的基板的方法和用于制造离散轨道记录介质的方法公开(公告)号：US20070001331A1
公开(公告)日：2007-01-04
申请号：US11476038
申请日：2006-06-28
IPC分类号： B29C45/76
CPC分类号： G03F7/0002 , B08B7/0092 , B82Y10/00 , B82Y40/00 , G11B5/8404 , G11B5/855
摘要： According to one embodiment, a method for manufacturing a substrate for a discrete track recording media, the method includes forming an imprint resist layer on a substrate, imprinting, on the imprint resist layer, a stamper formed with patterns of protrusions and recesses corresponding to recording track zones and servo zones to transfer the patterns of protrusions and recesses to the imprint resist layer, removing the stamper from the imprint resist layer, and diffusing liquefied CO2 in a process chamber set at a pressure of 2 to 5 atm, diffusing liquefied H2O in the process chamber set at a pressure of 0.01 to 1 atm, or diffusing a reactive gas selected from a group consisting of liquefied CF4, CHF3, SF6, and C2F6 in the process chamber set at an arbitrary pressure, to jet spray the liquefied gas onto a surface of the substrate.
摘要翻译： 根据一个实施例，一种用于制造用于离散轨道记录介质的基板的方法，所述方法包括在基板上形成压印抗蚀剂层，在压印抗蚀剂层上压印形成有对应于记录的突起和凹部的图案的压模 轨道区域和伺服区域，以将突起和凹陷的图案转印到抗蚀剂层，从压印抗蚀剂层移除压模，并将液化CO 2扩散到设置在压力为2的处理室中 至5atm，在处理室中扩散液化H 2 O 2，压力为0.01至1atm，或扩散选自液化CF 4 >，CHF 3 3，SF 6 6和C 2 F 6 6在设置在任意压力下的处理室中 将液化气喷射到基板的表面上。
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公开(公告)号：US20060012905A1
公开(公告)日：2006-01-19
申请号：US11182065
申请日：2005-07-15
CPC分类号： G11B5/74 , B82Y10/00 , G11B5/59688 , G11B5/743 , G11B5/82 , G11B5/855 , G11B5/865 , G11B2005/0029
摘要： A magnetic recording media has a magnetic layer formed on a substrate and includes data regions including a magnetic pattern constituting a recoding track and servo regions including magnetic patterns used as address bits, the data regions and the servo regions being contained in a plane of the magnetic layer. In a case where two magnetic patterns used as address bits on the servo regions corresponding to two adjacent recording tracks are arranged in such a manner that one corner of one of the magnetic patterns is closest to one corner of the other, the corners of the two magnetic patterns are substantially joined together.
摘要翻译： 磁记录介质具有在基板上形成的磁性层，并且包括包括构成记录轨迹的磁图案的数据区域和包括用作地址位的磁图案的伺服区域，数据区域和伺服区域包含在磁性平面中 层。 在与两个相邻的记录磁道对应的伺服区域上用作地址位的两个磁图形被布置成使得一个磁性图案的一个角最靠近另一个的角部的情况下， 磁性图案基本上连接在一起。
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公开(公告)号：US08681454B2
公开(公告)日：2014-03-25
申请号：US13424266
申请日：2012-03-19
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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公开(公告)号：US08289645B2
公开(公告)日：2012-10-16
申请号：US12897281
申请日：2010-10-04
IPC分类号： G11B21/02
摘要： According to one embodiment, there is provided a magnetic disk apparatus having a magnetic disk having magnetic dot lines each including magnetic dots arrayed at equal intervals in a down track direction, and a read/write head which uses a plurality of adjacent magnetic dot lines as one track and sequentially performs read and write on the magnetic dots included in the magnetic dot lines constituting the track, in which the magnetic dots included in each of the magnetic dot lines in each track of the magnetic disk are displaced in the down track direction from the magnetic dots included in the adjacent dot line in the track depending on a possible skew angle between the read/write head and the track so that the magnetic dots are sequentially accessed by the read/write head.
摘要翻译： 根据一个实施例，提供了一种具有磁盘的磁盘装置，该磁盘具有磁点线，每个磁点线包括沿下行方向等间隔排列的磁点，以及使用多个相邻磁点线的读/写头作为 一个磁道，并顺序地对构成磁道的磁点线中包括的磁点进行读和写，其中包括在磁盘的每个磁迹中的每个磁点线中的磁点在下行轨道方向上移位， 根据读/写头和轨道之间的可能的倾斜角度，包括在轨道中的相邻点线中的磁点，使得磁点由读/写头顺序地访问。
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98.发明申请公开(公告)号：US20120250398A1
公开(公告)日：2012-10-04
申请号：US13238198
申请日：2011-09-21
CPC分类号： G11C11/14 , G11C11/161 , G11C11/1673 , G11C11/1675 , G11C19/0841
摘要： A magnetic storage element according to an embodiment includes: a magnetic thin wire extending in a first direction and having a plurality of magnetic domains partitioned by domain walls; an electrode capable of applying a current flowing in the first direction and a current flowing in the opposite direction from the first direction, to the magnetic thin wire; and an assisting unit receiving an electrical input and assisting movement of the domain walls in an entire or part of the magnetic thin wire.
摘要翻译： 根据实施例的磁存储元件包括：沿第一方向延伸并具有由畴壁分隔的多个磁畴的磁性细线; 能够将沿第一方向流动的电流和从第一方向向相反方向流动的电流的电极施加到磁性细线; 以及辅助单元，其接收电输入并且辅助磁畴薄壁的全部或一部分中的畴壁的移动。
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公开(公告)号：US20120177948A1
公开(公告)日：2012-07-12
申请号：US13424266
申请日：2012-03-19
IPC分类号： G11B5/82
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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公开(公告)号：US20120067843A1
公开(公告)日：2012-03-22
申请号：US13064301
申请日：2011-03-16
申请人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
发明人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
IPC分类号： C23F1/02
CPC分类号： H01L21/3086 , B82Y10/00 , G03F7/0002 , G03F7/165 , G03F7/168 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0332 , H01L21/0337 , H01L21/3081
摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.
摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。
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