Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device
    91.
    发明授权
    Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device 失效
    用于检测等离子体处理室中的浮动颗粒的方法及其装置和用于处理半导体器件的装置

    公开(公告)号:US06712928B2

    公开(公告)日:2004-03-30

    申请号:US09791677

    申请日:2001-02-26

    CPC classification number: H01J37/3299 C23C14/564 C23C16/4401 H01J2237/0225

    Abstract: The following operations are performed in order to allow particles suspended in a processing chamber to be detected using a single observation window and an optical system formed as a single unit and in order to provide precise detection of very weak particle-scattered light: when a desired film-forming/processing operation is being performed on a body being processed in a processing chamber, a beam that is P-polarized and that is intensity amplified at a frequency different from an excitation source frequency and integer multiples thereof is passed through an observation window sloped to form a Brewster angle relative to the P-polarized entry beam; back-scattered light scattered by particles in the processing chamber passes through the same observation window and received and imaged by a detection optical system; the frequency component described above and the intensity-modulated beam wavelength component are detected from the received light signal; and these detected components and the image information imaged as described above is used to determine the quantity, sizes, and distribution of the particles.

    Abstract translation: 执行以下操作以便使用单个观察窗和形成为单个单元的光学系统来检测悬浮在处理室中的颗粒,并且为了提供非常弱的粒子散射光的精确检测:当期望的 正在对处理室中正在处理的物体进行成膜/处理操作,通过观察窗口将P偏振光束以不同于激发源频率和整数倍的频率进行强度放大的光束进行成膜/ 倾斜以相对于P偏振入射梁形成布鲁斯特角; 处理室中的颗粒散射的背散射光通过相同的观察窗,并由检测光学系统接收和成像; 从接收到的光信号中检测上述频率分量和强度调制波长分量; 并且将这些检测到的成分和如上所述成像的图像信息用于确定颗粒的数量,尺寸和分布。

    Headlamp cleaner and injection control method
    92.
    发明授权
    Headlamp cleaner and injection control method 失效
    前照灯清洁剂和注射控制方法

    公开(公告)号:US06708899B2

    公开(公告)日:2004-03-23

    申请号:US10207896

    申请日:2002-07-31

    Abstract: A pump apparatus has an electric motor having an impeller fixed to a rotating axis thereof driven based on signals from an injection control unit to rotate in a normal direction and, then, switched to rotate in a reverse direction so that, when the motor is rotated in the normal direction, the washer liquid is sucked from a second intake conduit and discharged via a first discharge port from a first injection nozzle and, when the motor is rotated in the reverse direction, the washer liquid is sucked from a first intake conduit and discharged via a second discharge port from a second injection nozzle. Since the washer liquid is not injected at the same time from the first and second injection nozzles, an injection amount per unit time of the washer liquid is relatively small, which makes the pump apparatus more compact.

    Abstract translation: 泵装置具有电动机,其具有固定到其旋转轴线上的叶轮,其基于来自喷射控制单元的信号被驱动,以沿正向旋转,然后切换为沿相反方向旋转,使得当电动机旋转时 在正常方向上,洗涤液从第二进气管吸入,经由第一排出口从第一喷嘴排出,当马达沿相反方向旋转时,洗涤液从第一进气管吸入, 经由第二排出口从第二注射喷嘴排出。 由于洗涤液不从第一和第二喷射喷嘴同时喷射,所以洗涤液的每单位时间的喷射量相对较小,这使得泵装置更紧凑。

    Optical transmission device and optical transmission system employing the same

    公开(公告)号:US06671431B2

    公开(公告)日:2003-12-30

    申请号:US10270505

    申请日:2002-10-16

    CPC classification number: H04B10/2935 H04B2210/256 Y10S372/703

    Abstract: An optical transmission device which reduces optical noise in an optical transmission system. The optical transmission device includes a core light amplifying unit and a first buffer light amplifying unit for amplifying a first signal light from a first transmission path and an amplified second signal light from the core light amplifying unit. The first buffer light amplifying unit supplies the core light amplifying unit with the first signal light, and supplies the first transmission path with the amplified second signal light. Also provided is a second buffer light amplifying unit for amplifying a second signal light from a second transmission path and an amplified first signal light from the core light amplifying unit. The second buffer light amplifying unit supplies the core light amplifying unit with the second signal light, and supplies the second transmission path with the amplified first signal light.

    Floating particle inspection method and its apparatus and a semiconductor device processing apparatus

    公开(公告)号:US06613588B2

    公开(公告)日:2003-09-02

    申请号:US09933185

    申请日:2001-08-21

    CPC classification number: G01N21/9501 G01N21/94 H01J2237/0225

    Abstract: The present invention is to detect particles suspended in a processing chamber using a single observation window and an optical system formed as a single unit and to provide precise detection of very weak particle-scattered light. When a thin film is being formed on an object to be processed in a processing chamber or if such a thin film is being processed, an optical guide module guides a laser beam from a laser light source separated from a laser illumination/scattered light detection optical system. The laser beam is guided to the laser illumination/scattered light detection optical system. The processing chamber is illuminated by the laser illumination/scattered light detection optical system via an observation window. The illumination light is scattered by particles in the processing chamber. Back-scattered light passing through the observation window is detected by the laser illumination/scattered light detection optical system.

    Navigation apparatus for land vehicle inputting road traffic information
    98.
    发明授权
    Navigation apparatus for land vehicle inputting road traffic information 失效
    陆路车辆输入道路交通信息的导航装置

    公开(公告)号:US5712632A

    公开(公告)日:1998-01-27

    申请号:US528432

    申请日:1995-09-14

    Abstract: A navigation apparatus stores road data which are formed by a network of internally stored road links and traveling costs corresponding to the respective ones of the internal road links. When the navigation apparatus receives traffic information corresponding to a specific external road link which is set for communication of traffic information, the apparatus identifies one or more internal links or portions thereof corresponding to the external link for which traffic information has been received, and the stored traveling costs are updated, on the basis of a conversion table. The traveling cost for an internal road link corresponding to a specific external link which is closed to traffic is updated to ".infin.". The apparatus searches for and identifies a route between an origin and a destination based on the updated traveling costs and the network of the road links. The internal links do not need to correspond directly to the external links, but rather may include more branch points for example. Traffic information of different types and for different links can be processed and assimilated for correspondence with the internal links.

    Abstract translation: 导航装置存储由内部存储的道路链路的网络形成的道路数据和对应于各个内部道路链路的行驶费用。 当导航装置接收对应于设置用于交通信息通信的特定外部道路链路的交通信息时,该装置识别与已经接收到交通信息的外部链路相对应的一个或多个内部链路或其部分,并且存储 在转换表的基础上更新旅行费用。 与特定的外部链路相对应的内部道路连接的交通费用更新为“无限”。 该装置基于更新的旅行成本和道路链路的网络来搜索并识别起点与目的地之间的路线。 内部链接不需要直接对应于外部链接,而是可以包括更多的分支点。 可以处理和吸收不同类型和不同链接的交通信息,以便与内部链接进行通信。

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