摘要:
A semiconductor device manufacturing apparatus has a first space and a second space in a process chamber in which a semiconductor wafer is accommodated, the first and second spaces being separated by the semiconductor wafer. A process gas port opens into the first space adjacent to the obverse surface of the semiconductor wafer, and an infrared light transmission window is formed in a wall of the chamber at the second space facing the reverse surface of the semiconductor wafer. No layers are deposited on the reverse surface of the semiconductor wafer and the infrared light transmission window so that the emissivity at the reverse surface of the semiconductor wafer is not changed during layer deposition. The temperature during processing can therefore be monitored accurately with a pyrometer, and a reduction in the transmissivity of the window is prevented.
摘要:
A semiconductor apparatus having a region for isolation between devices comprises a semiconductor substrate, a polycrystalline silicon layer portions selectively formed to be spaced apart from each other on the semiconductor substrate, an impurity diffused region formed under the polycrystalline silicon layer, and a silicon oxide film for filling in a space between the respective adjacent portions of the polycrystalline silicon layer. The impurity diffused region constitutes a source or drain region of a field effect device such as a MOS transistor isolated by the silicon oxide film.
摘要:
A method of manufacturing a semiconductor capacitor provided with a substrate, a dielectric film formed on the substrate and a pair of electrode layers stacked on both sides of the dielectric film comprises a step of forming a polycrystalline silicon layer for serving as one of the electrode layers on the substrate, a step of making at least a surface region of the polycrystalline silicon layer amorphous, a step of forming the dielectric film on the polycrystalline silicon layer while maintaining an amorphous surface state, and a step of forming another one of the electrode layers on the dielectric film. The lower electrode of the capacitor has its surface or the whole layer made amorphous. The surface of the electrode which is amorphous has smooth surface configuration, thereby improving the quality of the dielectric film formed thereon.
摘要:
A safety mechanism system for double vacuum bottle construction to prevent liquid contained within the inner bottle element from escaping when the system is upset or overturned and including a cover portion disposed directly above and in contact with the body portion of the bottle, a bellows to serve as a pump provided inside the cover with the lower portion of the bellows in communication with the inside part of the cover and in further communication by an air valve and air vent with the inner portion of an inside bottle of the double bottle vacuum system, with a cylinder in vertical arrangement with the bellows and inner bottle member and located within a plug member for the mouth of the inner bottle, and adjacent to the cylinder a chamber connected by apertures to the inside of the inner bottle, as well as a receiving portion adjacent to the cylinder and in vertical relation therewith and containing therein blades projected therefrom and having a closing element adapted to cooperate with said receiving portion and the blades for opening and closing the receiving portion in contact with a liquid-draw-up pipe and a liquid pouring pipe such that, in operation, the weight and arrangement of the closing element is so oriented as to function in a manner to permit passage of a liquid due to pressure exerted thereon unless the system is upset or overturned.
摘要:
A novel medical catheter, formed of a rubber component comprising substantially a homopolymer of epichlorohydrin and fillers comprising silica and/or silicates, possesses sufficient tensile strength and flexibility and meets the sanitary requirements.
摘要:
A motor stator 9b and a flange portion 41 are integrally formed with each other, so that a stator assembly is formed. The flange portion 41 extends outward from a coil arrangement portion of the motor stator 9b in a radial direction, and at least a part of a radial outer face 41a of the flange portion 41 is exposed to the outside of a housing 7. The position of the stator assembly 12 can be adjusted with respect to the housing 7 in a circumferential direction along a circle that has an axial center of a rotating shaft 11 as a center thereof. A wiring hole 41b through which a cable passes is formed in the flange portion 41, and the wiring hole 41b is opened at the radial outer face 41a of the flange portion 41.
摘要:
According to the present invention, provided is a liquid crystal display device in which a polymer layer having a stable alignment regulating force is formed. The liquid crystal display device according to the present invention includes a liquid crystal cell that includes a pair of substrates and a liquid crystal layer which is held between the pair of substrates, in which at least one substrate of the pair of substrates includes an electrode, an undercoat film which is formed on a liquid crystal layer side of the electrode, and a polymer layer which is formed on a liquid crystal layer side of the undercoat film and controls the alignment of liquid crystal molecules adjacent to the polymer layer, the undercoat film is formed of a photoactive material, the polymer layer is formed by polymerization of a monomer added to the liquid crystal layer, and the liquid crystal layer contains liquid crystal molecules having, in a molecular structure thereof, a multiple bond other than conjugated double bonds of a benzene ring.
摘要:
Control node includes: current memories provided in corresponding relation to a plurality of equipments to store, for each of the equipments, a first current data set for remote-controlling an operational condition of the equipment and a second current data set for remote-controlling a logical connection between the equipment and another equipment; and library memories provided in corresponding relation to the equipments to store, for each of the equipments, a plurality of first data sets each for remote-controlling the operational condition of the equipment and a plurality of second data sets each for remote-controlling the logical connection between the equipment and another equipment. In response to a scene readout instruction, first and second data sets, corresponding to the scene designated by the instruction, are read out from the library memories and stored into the current memories as first and second current data sets, and a readout command for the designated scene is transmitted, via a network, to each of the equipments.
摘要:
A driver (41) for driving a rotary motor (20) directly connected to a rotating shaft member of a supercharger is mounted on a board (39) together with a control device (51) and a heat sink (39a) and is housed in an engine room. Even when a temperature (ambient temperature) in the engine room detected by a temperature sensor (47b) rises up to an upper limit temperature (upper limit ambient temperature) of the ambient temperature, if a temperature (driver temperature) of a portion of the driver (41) that has a highest temperature detected by a temperature sensor (47a) is yet to rise to an upper limit temperature (upper limit internal temperature) of the driver temperature, the control device (51) causes the rotary motor (20) to continue to drive as the motor while lowering an upper limit of an output current.
摘要:
A warming-up system performing a catalytic converter warming-up method has an electric motor (1m) enabling a turbocharger (1) to increase the amount of air supplied to an internal combustion engine (2) regardless of the amount of exhaust gas flowing through a turbine (1t) of the turbocharger (1), a variable nozzle (1n) regulating the flow of exhaust gas through the turbine (1t), and an ECU (5) for controlling the operation of the electric motor (1m) and the variable nozzle (1n) and the amount of fuel supplied to the internal combustion engine (2). After the internal combustion engine (2) is started, the ECU (5) warms up the catalytic converter (4) by driving the electrical motor (1m) to forcibly rotate the turbine (1t), opening the variable nozzle (1n), and increasing fuel supply to the internal combustion engine (2).