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    BROAD BAND REFERENCING REFLECTOMETER
    91.
    发明申请
    BROAD BAND REFERENCING REFLECTOMETER 有权
    宽带参考反射计

    公开(公告)号：US20100328648A1

    公开(公告)日：2010-12-30

    申请号：US12876242

    申请日：2010-09-07

    Applicant: Dale A. Harrison

    Inventor： Dale A. Harrison

    IPC: G01N21/55 ,  G01J3/00

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

    Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

    Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

    IMAGING DEVICES WITH COMPONENTS FOR REFLECTING OPTICAL DATA AND ASSOCIATED METHODS OF USE AND MANUFACTURE
    92.
    发明申请
    IMAGING DEVICES WITH COMPONENTS FOR REFLECTING OPTICAL DATA AND ASSOCIATED METHODS OF USE AND MANUFACTURE 有权
    用于反射光学数据的组件的成像装置和相关的使用和制造方法

    公开(公告)号：US20100245650A1

    公开(公告)日：2010-09-30

    申请号：US12748035

    申请日：2010-03-26

    Applicant: Douglas Kreysar ,  Ronald F. Rykowski ,  Richard E. Albrecht

    Inventor： Douglas Kreysar ,  Ronald F. Rykowski ,  Richard E. Albrecht

    IPC: H04N5/335

    CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0235 ,  G01J3/08 ,  G01J3/50 ,  G01J3/505 ,  G01J3/51

    Abstract: The present disclosure is directed to imaging device, systems, and methods for collecting optical data for use with spectrometers. An imaging device configured in accordance with one aspect of the disclosure includes a lens configured to introduce light into the imaging device along an optical path, and an image sensor spaced apart from the lens and configured to receive at least a portion of the light along the optical path. The imaging device further includes a filter assembly positioned between the lens and the image sensor, and a reflector or mirror carried by the filter assembly. The filter assembly is configured to move the reflector between first and second positions. In the first position the reflector is at least partially aligned with the optical path and reflects at least a portion of the light to a corresponding light input for a spectrometer. In the second position the reflector is positioned outside of the optical path.

    Abstract translation: 本公开涉及用于收集用于光谱仪的光学数据的成像装置，系统和方法。 根据本公开的一个方面构造的成像装置包括被配置为沿着光路将光引入成像装置的透镜以及与透镜间隔开的并被配置为沿着光路接收光的至少一部分的图像传感器 光路。 成像装置还包括位于透镜和图像传感器之间的过滤器组件以及由过滤器组件承载的反射器或反射镜。 过滤器组件被配置为在第一和第二位置之间移动反射器。 在第一位置，反射器至少部分地与光路对准，并且将至少一部分光反射到用于光谱仪的相应光输入。 在第二位置，反射器位于光路的外侧。

    ATOMIC ABSORPTION SPECTROPHOTOMETER
    94.
    发明申请
    ATOMIC ABSORPTION SPECTROPHOTOMETER 有权
    原子吸收光谱仪

    公开(公告)号：US20100091277A1

    公开(公告)日：2010-04-15

    申请号：US12574213

    申请日：2009-10-06

    Applicant: Kazuo YAMAUCHI

    Inventor： Kazuo YAMAUCHI

    IPC: G01N21/74 ,  G01J3/30

    CPC classification number: G01N21/3103 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/08 ,  G01J3/42

    Abstract: The present invention has been accomplished to provide an atomic absorption spectrophotometer capable of obtaining measurement data always in the state where the lowest detection limit performance is optimized, without depending on the frequency of the power supply. In a control program which runs on the microcomputer chip 42 mounted on the atomic absorption spectrophotometer 110, a plurality of lighting periods of the light sources 11 and 12 and extraction periods of the sampling data are memorized, whose lowest detection limit performance are optimized for the frequencies (50 Hz and 60 Hz) of the AC power source for driving the AC motor 22. In using the apparatus, by the control program, the frequency of the power source used in this apparatus is identified, the lighting period and sampling data extraction period corresponding to the identified frequency and the measurement mode that a user of the apparatus has previously set are selected from among a plurality of memorized values, and the appropriate lighting period is set to the hardware (PLD 43). Accordingly, without depending on the frequency, it is possible to obtain measurement data always in the state where the lowest detection limit performance is optimized.

    Abstract translation: 本发明的目的是提供一种原子吸收分光光度计，其能够在不依赖于电源的频率的情况下始终以最低检测极限性能优化的状态获得测量数据。 在安装在原子吸收分光光度计110上的微计算机芯片42上运行的控制程序中，存储光源11和12的多个点亮周期和采样数据的提取周期，其最低检测限性能针对 用于驱动AC电动机22的AC电源的频率（50Hz和60Hz）。在使用该装置时，通过控制程序识别在该装置中使用的电源的频率，照明周期和采样数据提取 从多个存储值中选择对应于所识别的频率和装置的用户预先设置的测量模式的周期，并且将适当的发光周期设置到硬件（PLD 43）。 因此，在不依赖于频率的情况下，可以在最低检测极限性能优化的状态下始终获得测量数据。

    Broad band referencing reflectometer
    95.
    发明申请
    Broad band referencing reflectometer 有权
    宽带参考反射计

    公开(公告)号：US20100051822A1

    公开(公告)日：2010-03-04

    申请号：US12590151

    申请日：2009-11-03

    Applicant: Dale A. Harrison

    Inventor： Dale A. Harrison

    IPC: G01N21/47 ,  G01N21/55

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

    Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

    Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

    Contamination monitoring and control techniques for use with an optical metrology instrument
    96.
    发明授权
    Contamination monitoring and control techniques for use with an optical metrology instrument 有权
    用于光学计量仪器的污染监测和控制技术

    公开(公告)号：US07622310B2

    公开(公告)日：2009-11-24

    申请号：US11600414

    申请日：2006-11-16

    Applicant: Dale A. Harrison ,  Matthew Weldon

    Inventor： Dale A. Harrison ,  Matthew Weldon

    IPC: H01L21/66

    CPC classification number: G01N21/33 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/42 ,  G01N21/94

    Abstract: A technique is provided for generating and subsequently monitoring the controlled environment(s) within an optical metrology instrument in such a manner as to minimize absorbing species within the light path of the metrology instrument and to minimize the build-up of contaminants on the surfaces of optical elements that may result in performance degradation. Both evacuation and backfill techniques may be utilized together along with a monitoring technique to determine if the environmental is suitable for measurements or if the environment should be regenerated. The optical metrology instrument may be an instrument which operates at wavelengths that include vacuum ultra-violet (VUV) wavelengths.

    Abstract translation: 提供了一种技术，用于产生和随后监测光学测量仪器内的受控环境，使得最小化测量仪器的光路内的吸收物质的最小化，并使污染物在表面上的积聚最小化 可能导致性能下降的光学元件。 撤离和回填技术都可以与监测技术一起使用，以确定环境是否适合于测量或者是否应该再生环境。 光学测量仪器可以是在包括真空紫外（VUV）波长的波长下操作的仪器。

    OPTICAL-PATH-DIFFERENCE COMPENSATION MECHANISM FOR ACQUIRING WAVE FROM SIGNAL OF TIME-DOMAIN PULSED SPECTROSCOPY APPARATUS
    97.
    发明申请
    OPTICAL-PATH-DIFFERENCE COMPENSATION MECHANISM FOR ACQUIRING WAVE FROM SIGNAL OF TIME-DOMAIN PULSED SPECTROSCOPY APPARATUS 有权
    用于从时域脉冲光谱仪器信号采集波形的光路差分补偿机制

    公开(公告)号：US20090152469A1

    公开(公告)日：2009-06-18

    申请号：US12371325

    申请日：2009-02-13

    Applicant: Seizi Nishizawa ,  Toshiyuki Iwamoto

    Inventor： Seizi Nishizawa ,  Toshiyuki Iwamoto

    IPC: G01J5/02

    CPC classification number: G01J3/08 ,  G01N21/3586 ,  G01N2201/0696 ,  G01N2201/0698

    Abstract: A time-domain pulsed spectroscopy apparatus which has a pulsed laser light source; a splitting unit to split pulsed laser light; a pulsed-light emitting unit; a detector; a sample holder; and a sample-unit entrance and exit optical systems; wherein the time-domain pulsed spectroscopy apparatus further comprises: at least one optical-path-length varying unit for setting a photometric range; at least one optical delay unit for the wave form signal measurement; and, at least one gate member to pass or block the pulsed light to a reflector.

    Abstract translation: 一种具有脉冲激光光源的时域脉冲光谱仪; 用于分离脉冲激光的分离单元; 脉冲发光单元; 检测器 样品架 和采样单元入口和出口光学系统; 其中所述时域脉冲光谱装置还包括：用于设定光度范围的至少一个光路长度变化单元; 用于波形信号测量的至少一个光学延迟单元; 以及至少一个栅极件，以将脉冲光传递或阻挡到反射器。

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