Power supply optimization for electrical circuits designed over the internet
    101.
    发明授权
    Power supply optimization for electrical circuits designed over the internet 有权
    通过互联网设计的电路的电源优化

    公开(公告)号:US08332789B2

    公开(公告)日:2012-12-11

    申请号:US13104552

    申请日:2011-05-10

    CPC classification number: G06F17/5063 G06F17/5036 G06F2217/08 H02M3/156

    Abstract: A method may include receiving an input from an optimization control that indicates a value along a scale, wherein the value is indicative of a design tradeoff between at least optimization for a first parameter of an electrical design and an optimization for a second parameter of the electrical design, wherein the value places an emphasis on the first parameter and an emphasis on the second parameter such that when the value on the scale is closer to the first parameter a larger emphasis is placed on the first parameter of the electrical design and when the value on the scale is closer to the second parameter a larger emphasis is placed on the second parameter of the electrical design. The method may further include choosing components for the electrical design based on the value indicated using the optimization control, the emphases affecting the components selected for the electrical design.

    Abstract translation: 方法可以包括从优化控制接收指示沿尺度的值的输入,其中该值表示在电气设计的第一参数的至少优化和电气设计的第二参数的优化之间的设计权衡 其中所述值强调所述第一参数并且强调所述第二参数,使得当所述刻度上的值更接近所述第一参数时,较大的重点放在所述电气设计的所述第一参数上,并且当所述值 在规模上更接近于第二参数,较大的重点放在电气设计的第二参数上。 该方法可以进一步包括基于使用优化控制指示的值来选择用于电气设计的部件,重点是影响为电气设计选择的部件。

    Interference microscope with scan motion detection using fringe motion in monitor patterns
    102.
    发明授权
    Interference microscope with scan motion detection using fringe motion in monitor patterns 失效
    干涉显微镜扫描运动检测使用边缘运动在监视器模式

    公开(公告)号:US08107084B2

    公开(公告)日:2012-01-31

    申请号:US12363617

    申请日:2009-01-30

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    Abstract: An apparatus includes an interferometer configured to generate an interference pattern by combining test light from a test object with reference light reflected from a reference object, the interferometer being further configured to direct at least a first part of a monitor test beam to the test object at a first incident angle and at least a second part of a monitor reference beam to the reference object at a second incident angle, and recombine the first part and the second part of the monitor beams after they reflect from the test and reference surfaces to interfere with one another and form a monitor pattern, where the first and second angles cause the monitor pattern to have spatial interference fringes, and wherein a change in the position of the interference fringes is indicative of a change in a relative position between the test and reference objects.

    Abstract translation: 一种装置包括:干涉仪,被配置为通过将来自测试对象的测试光与从参考对象反射的参考光组合来产生干涉图案,干涉仪还被配置为将至少一个监视测试光束的第一部分引导到测试对象 第一入射角和监视器参考光束的至少第二部分以第二入射角到参考对象,并且在它们从测试和参考表面反射之后将监视器束的第一部分和第二部分重新组合以干扰 彼此形成监视器模式,其中第一和第二角度使得监视器模式具有空间干涉条纹,并且其中干涉条纹位置的变化表示测试对象和参考对象之间的相对位置的变化 。

    Compound reference interferometer
    103.
    发明授权
    Compound reference interferometer 失效
    复合参比干涉仪

    公开(公告)号:US07978338B2

    公开(公告)日:2011-07-12

    申请号:US12541325

    申请日:2009-08-14

    Abstract: Interferometry system are disclosed that include a detector sub-system including a monitor detector, interferometer optics for combining test light from a test object with primary reference light from a first reference interface and secondary reference light from a second reference interface to form a monitor interference pattern on a monitor detector, wherein the first and second reference interfaces are mechanically fixed with respect to each other and the test light, a scanning stage configured to scan an optical path difference (OPD) between the test light and the primary and secondary reference light to the monitor detector while the detector sub-system records the monitor interference pattern for each of a series of OPD increments, and an electronic processor electronically coupled to the detector sub-system and the scanning stage, the electronic processor being configured to determine information about the OPD increments based on the detected monitor interference pattern.

    Abstract translation: 公开了一种干涉测量系统,其包括检测器子系统,该检测器子系统包括监视器检测器,用于将来自测试对象的测试光与来自第一参考接口的主要参考光组合的来自第二参考接口的第二参考光组合的干涉仪光学元件,以形成监视器干涉图案 在监视器检测器上,其中所述第一参考接口和所述第二参考接口相对于彼此和所述测试光机械地固定;扫描台,被配置为扫描所述测试光和所述主参考光与所述次参考光之间的光程差(OPD) 监视器检测器,同时检测器子系统记录用于一系列OPD增量中的每一个的监视器干涉图案,以及电子处理器,电子耦合到检测器子系统和扫描级,电子处理器被配置为确定关于 OPD根据检测到的监视器干扰模式递增。

    INTERFEROMETER WITH SCAN MOTION DETECTION
    105.
    发明申请
    INTERFEROMETER WITH SCAN MOTION DETECTION 失效
    具有扫描运动检测的干涉仪

    公开(公告)号:US20100195112A1

    公开(公告)日:2010-08-05

    申请号:US12363617

    申请日:2009-01-30

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    Abstract: An apparatus includes an interferometer configured to generate an interference pattern by combining test light from a test object with reference light reflected from a reference object, the interferometer being further configured to direct at least a first part of a monitor test beam to the test object at a first incident angle and at least a second part of a monitor reference beam to the reference object at a second incident angle, and recombine the first part and the second part of the monitor beams after they reflect from the test and reference surfaces to interfere with one another and form a monitor pattern, where the first and second angles cause the monitor pattern to have spatial interference fringes, and wherein a change in the position of the interference fringes is indicative of a change in a relative position between the test and reference objects.

    Abstract translation: 一种装置包括:干涉仪,被配置为通过将来自测试对象的测试光与从参考对象反射的参考光组合来产生干涉图案,干涉仪还被配置为将至少一个监视测试光束的第一部分引导到测试对象 第一入射角和监视器参考光束的至少第二部分以第二入射角到参考对象,并且在它们从测试和参考表面反射之后将监视器束的第一部分和第二部分重新组合以干扰 彼此形成监视器模式,其中第一和第二角度使得监视器模式具有空间干涉条纹,并且其中干涉条纹位置的变化表示测试对象和参考对象之间的相对位置的变化 。

    Mireau interference objective lens v3
    108.
    发明申请
    Mireau interference objective lens v3 失效
    Mireau干涉物镜v3

    公开(公告)号:US20060007557A1

    公开(公告)日:2006-01-12

    申请号:US10886817

    申请日:2004-07-08

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G02B21/02 G02B27/0068

    Abstract: A Mireau interference microscope is corrected for spherical and other aberrations induced by the beamsplitter and mirror support windows by incorporating a cover glass correcting-objective lens. The support windows for the beamsplitter and mirror have a combined thickness within the adjustment range of the cover glass correcting-objective lens.

    Abstract translation: 通过并入玻璃校正物镜,对分光镜和反射镜支撑窗所引起的球面和其它像差校正Mireau干涉显微镜。 用于分束器和反射镜的支撑窗口具有在玻璃校正物镜的调节范围内的组合厚度。

    Interference scatterometer
    110.
    发明申请
    Interference scatterometer 有权
    干涉散射仪

    公开(公告)号:US20050046855A1

    公开(公告)日:2005-03-03

    申请号:US10647742

    申请日:2003-08-25

    Applicant: Mark Davidson

    Inventor: Mark Davidson

    CPC classification number: G03F7/70633 G01J3/453 G01N21/95684

    Abstract: An interference spectroscopy instrument provides simultaneous measurement of specular scattering over multiple wavelengths and angles. The spectroscopy instrument includes an interference microscope illuminated by Koehler illumination and a video camera located to image the back focal plane of the microscope's objective lens while the path-length difference is varied between the reference and object paths. Multichannel Fourier analysis transforms the resultant intensity information into specular reflectivity data as a function of wavelength. This multitude of measured data provides a more sensitive scatterometry tool having superior performance in the measurement of small patterns on semiconductor devices and in measuring overlay on such devices.

    Abstract translation: 干涉光谱仪可以同时测量多个波长和角度上的镜面散射。 光谱仪器包括由科勒照明器照明的干涉显微镜和摄像机,其用于对显微镜物镜的后焦面进行成像,同时路径长度差在参考路径和对象路径之间变化。 多通道傅里叶分析将合成的强度信息转换为镜面反射率数据作为波长的函数。 这种大量的测量数据提供了一种更敏感的散射测量工具,在测量半导体器件上的小图案以及测量这些器件上的覆盖层方面具有卓越的性能。

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