Methods for fabricating integrated circuit capacitor electrodes using first and second insulating layers and a buffer layer
    111.
    发明授权
    Methods for fabricating integrated circuit capacitor electrodes using first and second insulating layers and a buffer layer 有权
    使用第一和第二绝缘层和缓冲层制造集成电路电容器电极的方法

    公开(公告)号:US06171926B2

    公开(公告)日:2001-01-09

    申请号:US09289364

    申请日:1999-04-09

    CPC classification number: H01L28/92 H01L27/10814 H01L28/60 H01L28/84

    Abstract: Integrated circuit capacitor lower electrodes are fabricated by forming a plurality of spaced-apart contact pads on an integrated circuit substrate. A first insulating layer is formed on the integrated circuit substrate including on the contact pads. A plurality of spaced-apart conductive lines is formed on the first insulating layer that are laterally offset from the plurality of spaced-apart contact pads. A second insulating layer is formed on the first insulating layer including on the conductive lines. A buffer layer comprising material that is different from the second insulating layer, is formed on the second insulating layer. Openings are formed that extend through the buffer layer, through the second insulating layer and into the first insulating layer between the conductive lines to expose the contact pads. A conductive layer is formed in the openings and on the buffer layer. The conductive layer is etched between the openings to form the capacitor lower electrodes. The buffer layer preferably comprises material that has lower reflectivity than that of the second insulating layer and also preferably comprises material that has an etch rate for a predetermined etchant, that is intermediate that of the second insulating layer and the conductive layer. The first and second insulating layers preferably comprise silicon dioxide, the buffer layer preferably comprises at least one of silicon nitride and silicon oxynitride and the conductive layer preferably comprises polysilicon. During etching, a polymer preferably is formed on the capacitor lower electrode sidewalls adjacent the buffer layer. The etchant preferably is a plasma etchant including sulfur hexafluoride, chlorine and/or nitrogen gases.

    Abstract translation: 集成电路电容器下电极通过在集成电路基板上形成多个间隔开的接触焊盘来制造。 在包括接触焊盘的集成电路基板上形成第一绝缘层。 在第一绝缘层上形成多个间隔开的导电线,其横向偏离多个间隔开的接触焊盘。 在包括导电线的第一绝缘层上形成第二绝缘层。 包含与第二绝缘层不同的材料的缓冲层形成在第二绝缘层上。 形成开口,其延伸穿过缓冲层,穿过第二绝缘层并进入导线之间的第一绝缘层,以露出接触焊盘。 在开口和缓冲层上形成导电层。 在开口之间蚀刻导电层以形成电容器下电极。 缓冲层优选地包括具有比第二绝缘层低的反射率的材料,并且还优选地包括具有预定蚀刻剂的蚀刻速率的材料,其与第二绝缘层和导电层的蚀刻速率相等。 第一绝缘层和第二绝缘层优选地包括二氧化硅,缓冲层优选地包括氮化硅和氮氧化硅中的至少一种,并且导电层优选地包括多晶硅。 在蚀刻期间,优选在与缓冲层相邻的电容器下电极侧壁上形成聚合物。 蚀刻剂优选是等离子体蚀刻剂,包括六氟化硫,氯和/或氮气。

    Process for preparing n,n'-disubstituted urea using selenium-based
catalyst
    112.
    发明授权
    Process for preparing n,n'-disubstituted urea using selenium-based catalyst 有权
    使用硒基催化剂制备n,n'-二取代脲的方法

    公开(公告)号:US6127575A

    公开(公告)日:2000-10-03

    申请号:US395388

    申请日:1999-09-13

    CPC classification number: C07C273/1809 C07C2101/14

    Abstract: A process is disclosed for preparing N,N'-disubstituted urea by reacting an amine and CO/O.sub.2 mixture gas in the presence of a catalyst system comprising at least one selenium compound selected from SeO.sub.2, (CH.sub.3 O)Se(O)(OH) and (CH.sub.3 CH.sub.2 O)Se(O)(OH), and M.sub.2 CO.sub.3 (M=alkali metal) as a co-catalyst. The process enables less active aromatic amine with a low reactivity as well as an aliphatic amine to be easily transformed into disubstituted urea avoiding the use of expensive precious metal catalysts.

    Abstract translation: 公开了一种通过在包含至少一种选自SeO 2,(CH 3 O)Se(O)(OH))的硒化合物的催化剂体系存在下使胺和CO / O 2混合气体反应来制备N,N'-二取代的脲的方法, 和(CH 3 CH 2 O)Se(O)(OH)和作为助催化剂的M2CO3(M =碱金属)。 该方法使得具有低反应性的较少活性的芳族胺以及脂族胺易于转化为二取代的脲,避免使用昂贵的贵金属催化剂。

    Method for preparation of carbamates
    113.
    发明授权
    Method for preparation of carbamates 失效
    氨基甲酸酯的制备方法

    公开(公告)号:US5962721A

    公开(公告)日:1999-10-05

    申请号:US69285

    申请日:1998-04-29

    CPC classification number: C07C269/04

    Abstract: A method of preparing carbamates by reacting amine with alcohol and mixed gas of CO/O.sub.2 in the presence of one or more catalyst selected from the group consisting of monovalent copper halide having the structural formula of Cu�NCMe.sub.4 !X, K�CuX.sub.2 !, �CuX(S)! (wherein X=Cl, Br, or I; S=solvent) or monovalent copper compound having carbonyl group having the structural formula of �Cu(CO)X.sub.a L.sub.b !.sub.m Y.sub.n (wherein, X=CF.sub.3 CO.sub.2, Cl, HB(pz).sub.3 (wherein, pz=pyrazoyl,C.sub.3 H.sub.3 N.sub.2), LBF.sub.2, {LBF.sub.2 =difluoro-3,3'-(trimethylenedinitrilo)bis(2-butanone oximato)borate}; L=en, diene; Y=BPh.sub.4, AsF.sub.6 ; a,b=0,1; m=1-4; n=0,1).

    Abstract translation: 在一种或多种催化剂存在下,通过使胺与醇和CO 2 O 2的混合气体反应制备氨基甲酸酯的方法,所述催化剂选自具有结构式为Cu [NCMe4] X,K [CuX2], [CuX(S)](其中X = Cl,Br或I; S =溶剂)或具有结构式为[Cu(CO)XaLb] mYn的羰基的一价铜化合物(其中,X = CF 3 CO 2, HB(pz)3(其中,pz =吡唑基,C3H3N2),LBF2,{LBF2 =二氟-3,3' - (三亚甲基二亚硝基)双(2-丁酮肟基)硼酸酯}; L =烯,二烯; Y = BPh4, AsF6; a,b = 0,1; m = 1-4; n = 0,1)。

    Medium access control protocol and method for wireless ATM networks
    114.
    发明授权
    Medium access control protocol and method for wireless ATM networks 失效
    无线ATM网络的媒体接入控制协议和方法

    公开(公告)号:US5953328A

    公开(公告)日:1999-09-14

    申请号:US851722

    申请日:1997-05-05

    Abstract: A medium access control protocol for wireless ATM network in communication protocol for controlling an access between a plurality of mobile terminals and an access control station in the wireless ATM system is provided, including: an up-stream frame for controlling a medium access by enabling the plurality of mobile terminals to transmit connection control data and status data of the terminal; and a down-stream frame for controlling the medium access by enabling the access control station receiving the up-stream frame to transmit the slot allocation data and the connection control data to the mobile terminals.

    Abstract translation: 提供了一种用于在通信协议中用于无线ATM网络中的用于控制多个移动终端与无线ATM系统中的接入控制站之间的接入的媒体接入控制协议,包括:用于控制媒体接入的上行帧, 多个移动终端发送终端的连接控制数据和状态数据; 以及下行帧,用于通过使接入上行帧的接入控制站向移动终端发送时隙分配数据和连接控制数据来控制媒体接入。

    Dust neutralizing and floculating system
    115.
    发明授权
    Dust neutralizing and floculating system 失效
    除尘和絮凝系统

    公开(公告)号:US5711788A

    公开(公告)日:1998-01-27

    申请号:US625803

    申请日:1996-03-28

    CPC classification number: B01D51/02 B03C3/0175

    Abstract: A dust neutralizing and flocculating system used in an air cleaning system for removing contaminants contained in indoor air including a radio frequency generating electrode and an ion generating electrode. Fine particles passing through a moderately efficient filter equipped in the air cleaning system sequentially pass through the radio frequency generating electrode and ion generating electrode. The fine particles are dipolarly magnetized while passing through the radio frequency generating electrode, thereby exhibiting an increased inter-particles attraction. The ion generating electrode adds cations and anions to the fine particles, thereby promoting the flocculation of the fine particles circulating in the room installed with the air cleaning system. By virtue of the promoted flocculations, the particle size of the particles circulating in the room increases. The particles with an increased size are secondarily removed by the filter.

    Abstract translation: 一种用于空气净化系统中用于除去包含射频产生电极和离子产生电极的室内空气中所含的污染物的灰尘中和和絮凝系统。 通过配置在空气净化系统中的中等效率的过滤器的微粒依次通过射频发生电极和离子产生电极。 细颗粒在通过射频产生电极时被偶极磁化,从而表现出增加的颗粒间吸引力。 离子产生电极将阳离子和阴离子添加到细颗粒中,从而促进在安装有空气净化系统的房间中循环的细颗粒的絮凝。 由于促进的絮凝,在室内循环的颗粒的粒径增加。 具有增大尺寸的颗粒被过滤器二次除去。

    Method for measuring radical species distribution in plasma and an
apparatus therefor
    116.
    发明授权
    Method for measuring radical species distribution in plasma and an apparatus therefor 失效
    用于测量血浆中自由基物质分布的方法及其装置

    公开(公告)号:US5627640A

    公开(公告)日:1997-05-06

    申请号:US588308

    申请日:1996-01-18

    CPC classification number: G01N21/73

    Abstract: The present invention relates to a method for measuring radical species distribution in plasma by determining the intensity of the light emitted from the radical species and plasma parameters in plasma with the aid of optical and electrostatic probes, and an apparatus for measuring the radical species distribution. The method of the invention comprises the steps of: (i) measuring integral light intensity in a vacuum container by an optical probe inserted to the vacuum container; (ii) determining light intensity at each point of the vacuum container by differentiating the integral light intensity; (iii) measuring current and voltage applied to the electrostatic probe in the vacuum container; (iv) determining plasma parameters from the measured current and voltage; and, (v) measuring distribution of radical species from the light intensity and plasma parameters.

    Abstract translation: 本发明涉及通过使用光学和静电探针来测定从自由基物质发射的光的强度和等离子体中的等离子体参数以及用于测量自由基物质分布的装置来测量等离子体中的自由基物质分布的方法。 本发明的方法包括以下步骤:(i)通过插入真空容器的光学探针测量真空容器中的积分光强度; (ii)通过微分积分光强度来确定真空容器的每个点处的光强度; (iii)测量施加到真空容器中的静电探针的电流和电压; (iv)从所测量的电流和电压确定等离子体参数; 和(v)从光强度和等离子体参数测量自由基物质的分布。

    Multifunctional control type video head selecting device and method
thereof
    117.
    发明授权
    Multifunctional control type video head selecting device and method thereof 失效
    一种用于多功能VTR中的头信道选择信号的部分的装置和方法

    公开(公告)号:US5291342A

    公开(公告)日:1994-03-01

    申请号:US384753

    申请日:1989-07-25

    Applicant: Yong-jin Kim

    Inventor: Yong-jin Kim

    CPC classification number: H04N9/84 G11B15/026 G11B15/125 G11B15/14 H04N9/87

    Abstract: A multifunctional control device and method is used to determine a head channel selecting signal for playback heads of a video tape recorder and for controlling a phase shift direction of a video signal according to a desired reproduction mode. The video tape recorder has four heads, a first pair for use during standard play and a second pair for use during super long play. The heads read out recorded video signals and a first switch is connected to the first pair of heads and a second switch is connected to the second pair of heads for selectively providing outputs to corresponding amplifiers, under control of a servo controller. A third switch is connected to the outputs of the amplifiers for providing outputs under control of a microcomputer. The microcomputer controls the servo controller which in turn controls the speed of a drum motor and a capstan motor. The microcomputer also provides a phase shift direction controlling signal. An output of the servo controller is provided to the microcomputer along with an output of a comparator comparing the outputs of the amplifiers.

    Abstract translation: 多功能控制装置和方法用于确定用于磁带录像机的重放头的头信道选择信号,并根据期望的再现方式控制视频信号的相移方向。 磁带录像机有四个头,第一对在标准播放期间使用,第二对在超长时间播放期间使用。 磁头读出记录的视频信号,并且第一开关连接到第一对磁头,并且第二开关连接到第二对磁头,用于在伺服控制器的控制下选择性地向对应的放大器提供输出。 第三开关连接到放大器的输出端,用于在微型计算机的控制下提供输出。 微型计算机控制伺服控制器,伺服控制器又控制鼓马达和主导轴马达的速度。 微型计算机还提供相移方向控制信号。 伺服控制器的输出与比较放大器的输出的比较器的输出一起提供给微计算机。

    APPLICATION SHARING SERVICE METHOD AND APPARATUS APPLIED THERETO
    118.
    发明申请
    APPLICATION SHARING SERVICE METHOD AND APPARATUS APPLIED THERETO 审中-公开
    应用共享服务方法和应用的设备

    公开(公告)号:US20160148217A1

    公开(公告)日:2016-05-26

    申请号:US14899845

    申请日:2014-03-25

    Applicant: Yong Jin KIM

    CPC classification number: G06Q30/0185 G06Q10/00 G06Q10/10

    Abstract: The present invention discloses an application sharing service method and a device applied to the service method. That is, a company service device can be enabled to provide service content by sharing an application by selecting, among the applications which are installed on a terminal device, a target application to be shared which can be shared with the company service device, and enabling the terminal device to access the service content which is provided by the company service device through the selected target application to be shared.

    Abstract translation: 本发明公开了一种应用共享服务方法和应用于服务方法的设备。 也就是说,可以通过在安装在终端设备上的应用程序中选择要与公司服务设备共享的要共享的目标应用程序,通过共享应用程序来启用公司服务设备来提供服务内容,并且启用 该终端设备通过所选择的目标应用访问由公司服务设备提供的服务内容以进行共享。

    Method for sharing data of device in M2M communication and system therefor
    119.
    发明授权
    Method for sharing data of device in M2M communication and system therefor 有权
    M2M通信中的设备数据共享方法及其系统

    公开(公告)号:US09197639B2

    公开(公告)日:2015-11-24

    申请号:US14358877

    申请日:2011-12-16

    Abstract: The present invention relates to a method for sharing data of a device in M2M communication and a system therefor. The invention comprises: a step of allowing a resource user terminal to request access authority of protected resource data to a resource owner terminal, in order to prevent a security threat; a verification step of allowing the resource owner terminal to verify the resource user terminal to request the setting of the access authority to an M2M server, and to transmit a verification key issued from the M2M server to the resource user terminal; an access authority setting step of allowing the M2M server to generate an access authentication key based on the verification key, and to transmit the access authentication key to the resource user terminal; and a using step of allowing the resource user terminal to inquire about the protected resource data from the M2M server based on the access authentication key, and to use the protected resource data.

    Abstract translation: 本发明涉及用于共享M2M通信中的设备的数据的方法及其系统。 本发明包括:为了防止安全威胁,允许资源用户终端向资源所有者终端请求受保护资源数据的访问权限; 验证步骤,允许所述资源所有者终端验证所述资源用户终端请求对M2M服务器的访问权限的设置,以及将从所述M2M服务器发出的验证密钥发送到所述资源用户终端; 访问权限设定步骤,使M2M服务器基于验证密钥生成访问认证密钥,并将访问认证密钥发送给资源用户终端; 以及使用步骤,用于基于所述访问认证密钥,使所述资源用户终端从所述M2M服务器查询受保护的资源数据,并使用所述受保护的资源数据。

    Method of forming a pattern
    120.
    发明授权
    Method of forming a pattern 有权
    形成图案的方法

    公开(公告)号:US09048192B2

    公开(公告)日:2015-06-02

    申请号:US13493146

    申请日:2012-06-11

    Abstract: A method of forming a pattern includes forming a mask pattern on a substrate; etching the substrate by deep reactive ion etching (DRIE) and by using the mask pattern as an etch mask; partially removing the mask pattern to expose a portion of an upper surface of the substrate; and etching the exposed portion of the upper surface of the substrate. In the method, when a pattern is formed by DRIE, an upper portion of the pattern does not protrude or scarcely protrudes, and scallops of a sidewall of the pattern are smooth, and thus a conformal material layer may be easily formed on a surface of the pattern.

    Abstract translation: 形成图案的方法包括在基板上形成掩模图案; 通过深反应离子蚀刻(DRIE)蚀刻衬底并通过使用掩模图案作为蚀刻掩模; 部分地去除所述掩模图案以暴露所述基板的上表面的一部分; 并蚀刻衬底的上表面的暴露部分。 在该方法中,当由DRIE形成图案时,图案的上部不突出或几乎不突出,并且图案的侧壁的扇形光滑,因此可以容易地在保护层的表面上形成共形材料层 模式。

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