Gate valve apparatus
    111.
    发明授权
    Gate valve apparatus 有权
    闸阀装置

    公开(公告)号:US06386511B1

    公开(公告)日:2002-05-14

    申请号:US09654117

    申请日:2000-09-01

    IPC分类号: F16K116

    CPC分类号: F16K31/52 F16K1/16

    摘要: To be able to reduce the size of a drive part and, as a result, to achieve the reduction in size and the lowering of manufacturing cots of a gate valve. An open/close mechanism is configured from a turning pair only. This open/close mechanism is configured from a first swing link, second swing link and coupling link. The first swing link is driven by a rotation cylinder to perform a swinging motion. The second swing link is connected to a drive shaft and performs a swinging motion with the drive shaft as its axis. The first swing link and second swing link are coupled by the coupling link. When the rotation cylinder is driven, whereby the first swing link is caused to swing, the coupling link is vertically driven whereby the second swing link is caused to swing. As a result, a valve, connected to the second swing link, swings and the opening and closing operation of the flow path port is performed.

    摘要翻译: 为了能够减小驱动部件的尺寸,因此能够实现闸阀的制造小型​​化的小型化和降低。 开/关机构仅由转弯配置。 该开/关机构由第一摆动连杆,第二摆动连杆和联接杆构成。 第一摆动连杆由旋转圆筒驱动以进行摆动。 第二摆动连杆与驱动轴连接,以驱动轴为轴的方式进行摆动。 第一摆动连杆和第二摆动连杆通过联轴节连接。 当旋转圆筒被驱动时,第一摆动杆被摆动,联接杆被垂直驱动,从而使第二摆动杆摆动。 结果,与第二摆动连杆连接的阀门摆动,进行流路口的开闭动作。

    Method of treating wastewater containing chemical substances by use of
supercritical fluid and treating apparatus
    112.
    发明授权
    Method of treating wastewater containing chemical substances by use of supercritical fluid and treating apparatus 失效
    使用超临界流体和处理装置处理含有化学物质的废水的方法

    公开(公告)号:US06146533A

    公开(公告)日:2000-11-14

    申请号:US280547

    申请日:1999-03-30

    CPC分类号: B01D3/343 C02F1/048

    摘要: There is disclosed a method and an apparatus, of treating wastewater containing chemical substances, which comprises passing, into a continuous phase of water to be treated that has been formed by supplying raw water from an upper part of a tower, a supercritical fluid, from a lower part of the tower, to the upper part thereof, to bring the water to be treated and the supercritical fluid in countercurrent contact with each other, thereby separating the chemical substances from the water to be treated. These method and apparatus make it possible to treat wastewater containing chemical substances at a medium concentration, for which conventionally an effective physical or chemical treatment method is not found, efficiently without involvement of any secondary pollution.

    摘要翻译: 公开了一种处理含有化学物质的废水的方法和装置,该方法和设备包括:通过从塔的上部供应原水而形成的待处理水的连续相,超临界流体, 塔的下部到其上部,以使待处理的水和超临界流体彼此逆流接触,从而将化学物质与待处理的水分离。 这些方法和装置使得可以有效地处理中等浓度的含有化学物质的废水,其中通常没有发现有效的物理或化学处理方法,而不涉及任何二次污染。

    Substrate processing apparatus
    113.
    发明授权
    Substrate processing apparatus 失效
    基板加工装置

    公开(公告)号:US6129046A

    公开(公告)日:2000-10-10

    申请号:US795348

    申请日:1997-02-04

    摘要: The present invention provides a substrate processing apparatus having improved temperature distribution on a block heater and improved productivity. The substrate processing apparatus includes a reactor having an exhaust unit to form a vacuum environment therein for processing a surface of a substrate, a support member provided in the reactor, and gas introduction units for introducing reactive gases into the reactor, the substrate support member including a block heater. The block heater has upper, intermediate and lower members, which are placed one over another, the faying surfaces of the respective members being joined by diffusion bonding. A heating member is provided between the intermediate and lower members, and purge gas passages are formed between the intermediate and upper members.

    摘要翻译: 本发明提供一种具有改进的块加热器温度分布和提高生产率的基板处理装置。 基板处理装置包括具有排气单元的反应器,用于在其中形成用于处理基板的表面的真空环境,设置在反应器中的支撑构件和用于将反应气体引入反应器的气体引入单元,所述基板支撑构件包括 一个块加热器。 块式加热器具有一个上下放置的上部,中间和下部构件,各个构件的接合表面通过扩散接合连接。 加热构件设置在中间构件和下构件之间,并且在中间构件和上构件之间形成吹扫气体通道。

    Ionizing sputter device using a coil shield
    116.
    发明授权
    Ionizing sputter device using a coil shield 失效
    使用线圈屏蔽的电离溅射装置

    公开(公告)号:US5968327A

    公开(公告)日:1999-10-19

    申请号:US22623

    申请日:1998-02-12

    CPC分类号: H01J37/321 H01J37/3408

    摘要: A coil shield 64 that blocks the arrival at a substrate 50 of the material released by sputtering is provided to a high frequency coil 61 provided such that it surrounds the ionization space between the target 2 and the substrate holder 5. The coil shield 64 is made of metal, and is grounded, which prevents plasma formation in unnecessary places. The coil shield 64 is hollow, gas blowing holes are uniformly formed over the inner surface facing the ionization space, and the gas is flown toward the ionization space.

    摘要翻译: 提供了阻挡到通过溅射释放的材料到达基板50的线圈屏蔽件64,其设置成使其围绕靶材2和基板保持件5之间的电离空间。高频线圈61被制成 的金属,并且接地,这防止在不必要的地方形成等离子体。 线圈护罩64是中空的,气体吹出孔均匀地形成在面向电离空间的内表面上,并且气体朝向电离空间流动。

    Multichamber sputtering apparatus
    117.
    发明授权
    Multichamber sputtering apparatus 失效
    多层溅射装置

    公开(公告)号:US5925227A

    公开(公告)日:1999-07-20

    申请号:US859077

    申请日:1997-05-20

    CPC分类号: C23C14/568

    摘要: A multichamber sputtering apparatus which is used for manufacturing a semiconductor device and the like. In the apparatus, a plurality of sputter chambers and a degas chamber are airtightly connected to and arranged around a center transfer chamber, and processes including sputtering are continuously conducted in a vacuum. A plurality of heat stages are disposed in the degas chamber so that a plurality of substrates are simultaneously heated. In each heat stage, as required, a heating gas introducing unit for introducing a heating gas with causing the heating gas to make contact with the rear face of the substrate, a pressing mechanism which presses the substrate against the heat stage so as to enhance the surface contact between the heat stage and the substrate, or an electrostatic chucking mechanism is disposed.

    摘要翻译: 用于制造半导体器件等的多层溅射装置。 在该装置中,多个溅射室和脱气室与中心传送室气密连接并布置,并且包括溅射在内的处理在真空中连续进行。 多个加热台设置在脱气室中,使多个基板同时加热。 在每个加热阶段,根据需要,加热气体引入单元,用于引入加热气体,使加热气体与基板的背面接触;按压机构,将基板压靠在加热台上,以增强 设置热台和基板之间的表面接触,或静电吸附机构。

    Adamantane derivative, process for producing the same, and use thereof
    119.
    发明授权
    Adamantane derivative, process for producing the same, and use thereof 失效
    金刚烷衍生物,其制备方法及其用途

    公开(公告)号:US5650406A

    公开(公告)日:1997-07-22

    申请号:US702453

    申请日:1996-10-08

    摘要: A compound represented by general formula (1) or an innocuous salt thereof, a process for producing the same, and a schizophrenia remedy containing the same as the active ingredient (wherein the nitrogeneous ring B represents 3-azabicyclo [3.2.2] nonan-3-yl or 4-azatricyclo [4.3.1.1.sup.3.8 ] undecan-4-yl; and R represents hydrogen, lower alkyl, lower alkoxy, hydroxy or halogen). The above compound and salt have a high affinity for sigma-binding sites and are useful as an antischizophrenic drug.

    摘要翻译: PCT No.PCT / JP95 / 00740 Sec。 371日期1996年10月8日第 102(e)日期1996年10月8日PCT提交1995年4月17日PCT公布。 WO95 / 28390 PCT公开号 日期:1995年10月26日<1>(1)由通式(1)表示的化合物或其无毒盐,其制备方法和含有该活性成分的精神分裂症药物(其中,所述硝化环 B表示3-氮杂双环[3.2.2]壬烷-3-基或4-氮杂三环[4.3.1.13.8]十一烷-4-基; R表示氢,低级烷基,低级烷氧基,羟基或卤素。 上述化合物和盐对σ-结合位点具有高亲和力,可用作抗精神分裂症药物。

    Control system for automatic transmission
    120.
    发明授权
    Control system for automatic transmission 失效
    自动变速器控制系统

    公开(公告)号:US5593365A

    公开(公告)日:1997-01-14

    申请号:US509456

    申请日:1995-07-31

    摘要: A control system for an automatic transmission including a main transmission unit for setting a reverse stage and a plurality of forward stages and an auxiliary transmission unit connected in series to the main transmission unit and capable to be changed between two higher and lower stages. The control system comprises: a solenoid valve for outputting a signal pressure when at least the reverse stage and a predetermined one of the forward stages are to be set; a change-over valve for changing the signal pressure selectively into a signal pressure for setting the auxiliary transmission unit to a high gear stage and a signal pressure for controlling an engine braking state; and an engine braking control valve for controlling an engine braking frictional element at the predetermined forward stage into a released state in response to the signal pressure coming from the change-over valve. The acting state of the solenoid valve when the reverse stage is to be set and the acting state of the solenoid valve when the predetermined forward stage for making the engine braking ineffective is to be set are identical to each other.

    摘要翻译: 一种用于自动变速器的控制系统,包括用于设置反向级的主传动单元和多个前级,以及与主传动单元串联连接并能够在两个较高和较低级之间变化的辅助传动单元。 所述控制系统包括:电磁阀,用于在至少所述反向级和所述前级中的预定的一级被设定时输出信号压; 用于将信号压力选择性地改变成用于将辅助变速器单元设置到高档位的信号压力和用于控制发动机制动状态的信号压力的换向阀; 以及发动机制动控制阀,用于响应于来自转换阀的信号压力,将预定的前级的发动机制动摩擦元件控制到释放状态。 要设定倒档时的电磁阀的作用状态和要使发动机制动无效的规定的前进阶段要被设定时的电磁阀的动作状态相同。