摘要:
To be able to reduce the size of a drive part and, as a result, to achieve the reduction in size and the lowering of manufacturing cots of a gate valve. An open/close mechanism is configured from a turning pair only. This open/close mechanism is configured from a first swing link, second swing link and coupling link. The first swing link is driven by a rotation cylinder to perform a swinging motion. The second swing link is connected to a drive shaft and performs a swinging motion with the drive shaft as its axis. The first swing link and second swing link are coupled by the coupling link. When the rotation cylinder is driven, whereby the first swing link is caused to swing, the coupling link is vertically driven whereby the second swing link is caused to swing. As a result, a valve, connected to the second swing link, swings and the opening and closing operation of the flow path port is performed.
摘要:
There is disclosed a method and an apparatus, of treating wastewater containing chemical substances, which comprises passing, into a continuous phase of water to be treated that has been formed by supplying raw water from an upper part of a tower, a supercritical fluid, from a lower part of the tower, to the upper part thereof, to bring the water to be treated and the supercritical fluid in countercurrent contact with each other, thereby separating the chemical substances from the water to be treated. These method and apparatus make it possible to treat wastewater containing chemical substances at a medium concentration, for which conventionally an effective physical or chemical treatment method is not found, efficiently without involvement of any secondary pollution.
摘要:
The present invention provides a substrate processing apparatus having improved temperature distribution on a block heater and improved productivity. The substrate processing apparatus includes a reactor having an exhaust unit to form a vacuum environment therein for processing a surface of a substrate, a support member provided in the reactor, and gas introduction units for introducing reactive gases into the reactor, the substrate support member including a block heater. The block heater has upper, intermediate and lower members, which are placed one over another, the faying surfaces of the respective members being joined by diffusion bonding. A heating member is provided between the intermediate and lower members, and purge gas passages are formed between the intermediate and upper members.
摘要:
A plasma processing apparatus is furnished with a reactor which is furnished with a susceptor 12, a reaction gas delivery mechanism which delivers reaction gas to the inside of the reactor, a pumping mechanism 24 which pumps out an interior of the reactor, and a plasma-generating mechanism. The reactor is made of metal, the plasma-generating mechanism includes an at least single-winding coil 16 which produces an induced electric field, and the coil is established within the reactor and surrounding the plasma-generating space in a state surrounded by dielectrics parts 15 and 17.
摘要:
A soundproof material comprising a porous member having an air permeation amount based on the pressure difference of 2.039.times.1/10.sup.4 mmH.sub.2 O of from 1.times.1/10.sup.10 to 2.times.1/10.sup.2 cc/cm.sup.2 /second, and having a compressibility.
摘要翻译:一种隔音材料,其特征在于,具有空气透过量为2.039×1 / 104mmH 2 O的空气透过量为1×10 1/10 10〜2×10 2 cc / cm 2 /秒的多孔构件,具有压缩性。
摘要:
A coil shield 64 that blocks the arrival at a substrate 50 of the material released by sputtering is provided to a high frequency coil 61 provided such that it surrounds the ionization space between the target 2 and the substrate holder 5. The coil shield 64 is made of metal, and is grounded, which prevents plasma formation in unnecessary places. The coil shield 64 is hollow, gas blowing holes are uniformly formed over the inner surface facing the ionization space, and the gas is flown toward the ionization space.
摘要:
A multichamber sputtering apparatus which is used for manufacturing a semiconductor device and the like. In the apparatus, a plurality of sputter chambers and a degas chamber are airtightly connected to and arranged around a center transfer chamber, and processes including sputtering are continuously conducted in a vacuum. A plurality of heat stages are disposed in the degas chamber so that a plurality of substrates are simultaneously heated. In each heat stage, as required, a heating gas introducing unit for introducing a heating gas with causing the heating gas to make contact with the rear face of the substrate, a pressing mechanism which presses the substrate against the heat stage so as to enhance the surface contact between the heat stage and the substrate, or an electrostatic chucking mechanism is disposed.
摘要:
A decarburization-annealed steel strip as an intermediate material for grain-oriented electrical steel strip having good secondary recrystallization and excellent electrical properties is provided by causing a steel strip to possess a micro-structure in which the primary recrystallization grains have an average diameter d of not less than 15 .mu.m and a coefficient of diameter deviation .sigma.* of not more than 0.6.
摘要翻译:通过使钢带具有其中一次再结晶晶粒具有平均直径+ E的微观结构,提供具有良好的二次再结晶和优异的电特性的用于取向电工钢带的中间材料的脱碳退火钢带 ,ovs d + EE不小于15μm,直径偏差系数σ*不大于0.6。
摘要:
A compound represented by general formula (1) or an innocuous salt thereof, a process for producing the same, and a schizophrenia remedy containing the same as the active ingredient (wherein the nitrogeneous ring B represents 3-azabicyclo [3.2.2] nonan-3-yl or 4-azatricyclo [4.3.1.1.sup.3.8 ] undecan-4-yl; and R represents hydrogen, lower alkyl, lower alkoxy, hydroxy or halogen). The above compound and salt have a high affinity for sigma-binding sites and are useful as an antischizophrenic drug.
摘要:
A control system for an automatic transmission including a main transmission unit for setting a reverse stage and a plurality of forward stages and an auxiliary transmission unit connected in series to the main transmission unit and capable to be changed between two higher and lower stages. The control system comprises: a solenoid valve for outputting a signal pressure when at least the reverse stage and a predetermined one of the forward stages are to be set; a change-over valve for changing the signal pressure selectively into a signal pressure for setting the auxiliary transmission unit to a high gear stage and a signal pressure for controlling an engine braking state; and an engine braking control valve for controlling an engine braking frictional element at the predetermined forward stage into a released state in response to the signal pressure coming from the change-over valve. The acting state of the solenoid valve when the reverse stage is to be set and the acting state of the solenoid valve when the predetermined forward stage for making the engine braking ineffective is to be set are identical to each other.