公开(公告)号：US20080072593A1

公开(公告)日：2008-03-27

申请号：US10449351

申请日：2003-05-30

申请人： Ken Clements

发明人： Ken Clements

IPC分类号： F01B29/10 ,  F02G1/04

CPC分类号： F03G7/065 ,  B81B3/0029 ,  B81B2201/038 ,  B82Y15/00 ,  C21D2201/01 ,  C22C13/00 ,  C22F1/006 ,  F05B2250/84 ,  Y10S977/725 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/89

摘要： The present invention is a method and apparatus for achieving high work output per unit volume in micro-robotic actuators, and in particular TiNi actuators. Such actuators are attractive as a means of powering nano-robotic movement, and are being developed for manipulation of structures at near the molecular scale. In these very small devices (one micron scale), one means of delivery of energy is by electron beams. Movement of mechanical structures a few microns in extent has been demonstrated in a scanning electron microscope. Results of these and subsequent experiments will be described, with a description of potential structures for fabricating moving a microscopic x-y stage.

摘要翻译： 本发明是一种用于在微型机器人致动器，特别是TiNi致动器中实现每单位体积的高工作输出的方法和装置。 这样的致动器作为对纳米机器人运动的供电的手段是有吸引力的，并且正在开发用于在分子规模附近的结构的操纵。 在这些非常小的器件（一微米级）中，一种能量传递方式是电子束。 已经在扫描电子显微镜中证明了在几微米范围内的机械结构的移动。 将描述这些和随后的实验的结果，并描述了用于制造移动微观x-y阶段的潜在结构。

公开(公告)号：US20080003801A1

公开(公告)日：2008-01-03

申请号：US11897792

申请日：2007-08-30

申请人： Valery Dubin ,  Thomas Dory

发明人： Valery Dubin ,  Thomas Dory

IPC分类号： H01L21/44

CPC分类号： H01L23/373 ,  B82Y10/00 ,  H01L2224/0401 ,  H01L2224/04026 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/73253 ,  H01L2924/01037 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/16195 ,  Y10S977/732 ,  Y10S977/744 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49133 ,  Y10T29/49144 ,  Y10T428/30

摘要： According to one aspect of the invention, a method of constructing an electronic assembly is provided. A layer of metal is formed on a backside of a semiconductor wafer having integrated formed thereon. Then, a porous layer is formed on the metal layer. A barrier layer of the porous layer at the bottom of the pores is thinned down. Then, a catalyst is deposited at the bottom of the pores. Carbon nanotubes are then grown in the pores. Another layer of metal is then formed over the porous layer and the carbon nanotubes. The semiconductor wafer is then separated into microelectronic dies. The dies are bonded to a semiconductor substrate, a heat spreader is placed on top of the die, and a semiconductor package resulting from such assembly is sealed. A thermal interface is formed on the top of the heat spreader. Then a heat sink is placed on top of the thermal interface.

摘要翻译： 根据本发明的一个方面，提供一种构造电子组件的方法。 在其上集成形成的半导体晶片的背面上形成金属层。 然后，在金属层上形成多孔层。 在孔的底部的多孔层的阻挡层变薄。 然后，催化剂沉积在孔的底部。 然后在孔中生长碳纳米管。 然后在多孔层和碳纳米管上形成另一层金属。 然后将半导体晶片分离成微电子管芯。 将模具结合到半导体衬底，将散热器放置在管芯的顶部，并且由这种组装产生的半导体封装被密封。 在散热器的顶部形成热界面。 然后将散热器放置在热界面的顶部。

公开(公告)号：US20070230241A1

公开(公告)日：2007-10-04

申请号：US11239355

申请日：2005-09-30

申请人： Marc Bockrath

发明人： Marc Bockrath

IPC分类号： G11C11/50

CPC分类号： B81B3/0021 ,  B81B2201/014 ,  B82Y10/00 ,  G11C13/025 ,  G11C23/00 ,  G11C2213/18 ,  Y10S977/732 ,  Y10S977/943

摘要： A nanomechanical device includes a nanostructure, such as a MWNT, located between two electrodes. The device switches from an OFF state to an ON state by extension of at least one inner shell of the nanostructure relative to at least one outer shell of the nanostructure upon an application of a voltage between the electrodes. If desired, the device may also switch from the ON state to the OFF state upon an application of a gate voltage to a gate electrode located adjacent to the nanostructure.

摘要翻译： 纳米机械装置包括位于两个电极之间的纳米结构，例如MWNT。 通过在施加电极之间的电压的情况下，纳米结构的至少一个内壳相对于纳米结构的至少一个外壳延伸，从而将器件从OFF状态切换到ON状态。 如果需要，当将栅极电压施加到位于与纳米结构相邻的栅电极时，器件还可以从导通状态切换到断开状态。

公开(公告)号：US06945100B2

公开(公告)日：2005-09-20

申请号：US10748827

申请日：2003-12-29

申请人： Joonhyung Kwon ,  Young Seok Kim ,  Sang-il Park

发明人： Joonhyung Kwon ,  Young Seok Kim ,  Sang-il Park

IPC分类号： G01B21/30 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q20/02 ,  G01Q30/00 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q70/02 ,  G01Q70/10 ,  H01J37/26 ,  G01N13/16 ,  G01B5/28

CPC分类号： G01Q20/02 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q70/02 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/869 ,  Y10S977/87 ,  Y10S977/873 ,  Y10S977/881

摘要： A mounting mechanism for the probe tip of a Scanning Probe Microscope (SPM) includes a scanner supported by a stationary frame, and a kinematic mechanism supported by the scanner. The kinematic mechanism includes at least three protrusions and at least one magnet. The mounting mechanism for the probe tip also includes a chip mount having a hole, a slot and a flat surface. The chip mount, on being held by the magnet, provides an easy way to mount the probe tip without requiring any tools.

摘要翻译： 用于扫描探针显微镜（SPM）的探针尖端的安装机构包括由固定框架支撑的扫描仪和由扫描仪支撑的运动机构。 运动机构包括至少三个突起和至少一个磁体。 用于探针尖端的安装机构还包括具有孔，槽和平坦表面的芯片安装件。 由磁体保持的芯片安装座提供了一种简单的方法来安装探针尖端，而不需要任何工具。

公开(公告)号：US20050130551A1

公开(公告)日：2005-06-16

申请号：US10501516

申请日：2002-11-21

申请人： Graham Cross ,  Michel Despont ,  Urs Duerig ,  Gregoire Genolet ,  Reto Schlittler

发明人： Graham Cross ,  Michel Despont ,  Urs Duerig ,  Gregoire Genolet ,  Reto Schlittler

IPC分类号： B81B3/00 ,  B82B3/00 ,  C01B31/02 ,  G01B7/34 ,  G01Q70/12 ,  G01Q70/16 ,  G11B9/00 ,  G11C23/00 ,  H01J9/04 ,  H01J9/12

CPC分类号： G11C23/00 ,  G01Q70/06 ,  G01Q70/12 ,  G01Q70/16 ,  G11B9/1409 ,  G11B9/1418 ,  G11C13/025 ,  G11C2213/81 ,  Y10S977/732 ,  Y10S977/733

摘要： A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.

摘要翻译： 描述了形成微结构的方法。 该方法包括：将种子材料沉积在基底上; 从种子材料生长纳米管; 将微结构材料沉积在衬底上以将纳米管嵌入微结构材料中; 并且分离基板以释放微结构。 所得到的微结构包括主体部分和嵌入在主体部分中的纳米管。

公开(公告)号：US20040238907A1

公开(公告)日：2004-12-02

申请号：US10453783

申请日：2003-06-02

发明人： Joseph F. Pinkerton ,  John C. Harlan ,  Jeffrey D. Mullen

IPC分类号： H01L029/82 ,  H01L021/00

CPC分类号： G11C23/00 ,  B81B3/0021 ,  B81B2201/014 ,  B82Y10/00 ,  B82Y30/00 ,  G11C13/025 ,  G11C2213/16 ,  H01H1/0094 ,  H01H1/027 ,  Y10S977/732

摘要： Nanoelectromechanical switch systems (NEMSS) are provided that utilize the mechanical manipulation of nanotubes. Such NEMSS may realize the functionality of, for example, automatic switches, adjustable diodes, amplifiers, inverters, variable resistors, pulse position modulators (PPMs), and transistors. In one embodiment, a nanotube is anchored at one end to a base member and coupled to a voltage source that creates an electric charge at the tip of the nanotube's free-moving-end This free-moving end may be electrically controlled by applying an additional electric charge, having the same (repelling) or opposite (attracting) polarity as the nanotube, to a nearby charge member layer. A contact layer is located in the proximity of the free-moving end such that when a particular electric charge is provided to the nanotube (or charge member layer), the nanotube electrically couples with the contact layer.

摘要翻译： 提供了利用纳米管的机械操作的纳米机电开关系统（NEMSS）。 这样的NEMSS可以实现例如自动开关，可调二极管，放大器，反相器，可变电阻器，脉冲位置调制器（PPM）和晶体管的功能。 在一个实施例中，纳米管在一端锚定到基底构件并且耦合到在纳米管自由移动端的尖端处产生电荷的电压源。该自由移动端可以通过施加额外的 具有与纳米管相同（排斥）或相反（吸引）极性的电荷附着到附近的电荷元件层。 接触层位于自由移动端附近，使得当向纳米管（或电荷元件层）提供特定的电荷时，纳米管与接触层电耦合。

公开(公告)号：US20040150100A1

公开(公告)日：2004-08-05

申请号：US10357927

申请日：2003-02-03

发明人： Valery M. Dubin ,  Thomas S. Dory

IPC分类号： H01L023/34

CPC分类号： H01L23/373 ,  B82Y10/00 ,  H01L2224/0401 ,  H01L2224/04026 ,  H01L2224/16225 ,  H01L2224/16227 ,  H01L2224/73253 ,  H01L2924/01037 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/16195 ,  Y10S977/732 ,  Y10S977/744 ,  Y10T29/49117 ,  Y10T29/49126 ,  Y10T29/49133 ,  Y10T29/49144 ,  Y10T428/30

摘要： According to one aspect of the invention, a method of constructing an electronic assembly is provided. A layer of metal is formed on a backside of a semiconductor wafer having integrated formed thereon. Then, a porous layer is formed on the metal layer. A barrier layer of the porous layer at the bottom of the pores is thinned down. Then, a catalyst is deposited at the bottom of the pores. Carbon nanotubes are then grown in the pores. Another layer of metal is then formed over the porous layer and the carbon nanotubes. The semiconductor wafer is then separated into microelectronic dies. The dies are bonded to a semiconductor substrate, a heat spreader is placed on top of the die, and a semiconductor package resulting from such assembly is sealed. A thermal interface is formed on the top of the heat spreader. Then a heat sink is placed on top of the thermal interface.

摘要翻译： 根据本发明的一个方面，提供一种构造电子组件的方法。 在其上集成形成的半导体晶片的背面上形成金属层。 然后，在金属层上形成多孔层。 在孔的底部的多孔层的阻挡层变薄。 然后，催化剂沉积在孔的底部。 然后在孔中生长碳纳米管。 然后在多孔层和碳纳米管上形成另一层金属。 然后将半导体晶片分离成微电子管芯。 将模具结合到半导体衬底，将散热器放置在管芯的顶部，并且由这种组装产生的半导体封装被密封。 在散热器的顶部形成热界面。 然后将散热器放置在热界面的顶部。

公开(公告)号：US20040140424A1

公开(公告)日：2004-07-22

申请号：US10748827

申请日：2003-12-29

申请人： PSIA Corporation

发明人： Joonhyung Kwon ,  Young Seok Kim ,  Sang-il Park

IPC分类号： H01J003/14

CPC分类号： G01Q20/02 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q70/02 ,  Y10S977/732 ,  Y10S977/849 ,  Y10S977/869 ,  Y10S977/87 ,  Y10S977/873 ,  Y10S977/881

摘要： A scanning probe microscope uses two different scanners (also called nullscanning stagesnull) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called nullx-y scannernull) scans a sample in a plane (also called nullx-y planenull), while the other scanner (called nullz scannernull) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called nullz directionnull) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.

摘要翻译： 扫描探针显微镜使用两个不同的扫描仪（也称为“扫描阶段”），其彼此完全分离，并且由固定框架物理地分开。 一个扫描仪（称为“xy扫描仪”）扫描平面中的样品（也称为“xy平面”），而另一个扫描仪（称为“z扫描仪”）扫描探针尖端（其在悬臂的自由端支撑） ）在垂直于该平面的方向（也称为“z方向”）上。 两个扫描仪之间的分离可以消除串扰。

公开(公告)号：US06422077B1

公开(公告)日：2002-07-23

申请号：US09543992

申请日：2000-04-06

申请人： Alan R. Krauss ,  Dieter M. Gruen ,  Michael J. Pellin ,  Orlando Auciello

发明人： Alan R. Krauss ,  Dieter M. Gruen ,  Michael J. Pellin ,  Orlando Auciello

IPC分类号： G01P1508

CPC分类号： G01H9/00 ,  B82Y35/00 ,  G01D5/30 ,  G01H11/06 ,  G01L1/005 ,  G01L1/044 ,  G01P15/0888 ,  G01P15/0894 ,  G01P15/093 ,  Y10S977/732 ,  Y10S977/932

摘要： An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

摘要翻译： 在一个高灵敏度的超小型传感器中，采用悬臂结构形成的超微晶金刚石（UNCD）元件用于在宽动态范围内测量加速度，冲击，振动和静压力。 悬臂UNCD元件可以与单个阳极组合使用，测量光学或电容测量。 在另一个实施例中，悬臂UNCD元件设置在两个阳极之间，其中DC电压施加到两个阳极。 通过施加到UNCD悬臂元件的小的AC调制电压，并且由于Fowler-Nordheim方程中施加的电压和阳极 - 阴极间隙距离的对称性，维持指定的阳极电压比V1 / N2的任何变化 电流比精确匹配UNCD悬臂元件的任何位移与平衡。 通过测量维持指定电流比所需的阳极电压比的变化，可以精确地确定UNCD悬臂的偏转。 通过适当地调制在UNCD悬臂与两个阳极之间施加的电压或极限电极，可以精确地独立测量压力，单轴加速度，振动和冲击。 本发明还考虑了用于制造用于传感器的悬臂UNCD结构的方法。

公开(公告)号：US06377066B1

公开(公告)日：2002-04-23

申请号：US09610668

申请日：2000-07-05

申请人： Greg E. Bridges ,  Douglas J. Thomson

发明人： Greg E. Bridges ,  Douglas J. Thomson

IPC分类号： G01R3126

CPC分类号： G01R1/06705 ,  G01R31/311 ,  Y10S977/732 ,  Y10S977/873 ,  Y10S977/901 ,  Y10S977/953

摘要： A sub-micron probe apparatus to be added to an existing probe station. In one embodiment, the probe apparatus includes a course positioning unit to be optionally mounted or added to an existing probe station platform. A fine positioning unit is attached to an arm attached to the course positioning unit. A cantilever having a tip is attached to a support structure attached to the fine positioning unit. The course and fine positioning units are used to place the cantilever and tip over a surface of a device under test (DUT). Motion of the cantilever is detected with a motion sensor. An image of the surface of the DUT may be obtained. In addition, an electrical signal carried in an electrical trace on or near the surface of the DUT can be detected. An electrical signal may also be supplied to the electrical trace on or near the surface of the DUT. The field of vision of an optical imager used to image the DUT at the probe area is not obstructed by the probe apparatus.

摘要翻译： 要添加到现有探针台的亚微米探针装置。 在一个实施例中，探针装置包括可选地安装或添加到现有探测台平台的路线定位单元。 精细定位单元附接到附接到路线定位单元的臂。 具有尖端的悬臂连接到附接到精细定位单元的支撑结构。 课程和精细定位单元用于将悬臂和尖端放置在待测器件（DUT）的表面上。 用运动传感器检测悬臂的运动。 可以获得DUT的表面的图像。 此外，可以检测携带在DUT表面上或附近的电迹线中的电信号。 电信号也可以提供给DUT表面上或附近的电迹线。 用于在探针区域成像DUT的光学成像器的视野不被探测装置阻挡。