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    Probe for scanning over a substrate and a data storage device
    3.
    发明申请
    Probe for scanning over a substrate and a data storage device 失效
    用于扫描基板和数据存储设备的探头

    公开(公告)号：US20080013437A1

    公开(公告)日：2008-01-17

    申请号：US11332137

    申请日：2006-01-13

    申请人： Thomas Albrecht ,  Michel Despont ,  Urs Duerig ,  Mark Lantz ,  Hugo Rothuizen ,  Dorothea Wiesmann Rothuizen

    发明人： Thomas Albrecht ,  Michel Despont ,  Urs Duerig ,  Mark Lantz ,  Hugo Rothuizen ,  Dorothea Wiesmann Rothuizen

    IPC分类号： G11B3/00

    CPC分类号： G01Q70/14 ,  G01Q80/00 ,  G11B9/1409 ,  G11B11/007

    摘要： A data storage device comprises a storage medium for storing data in the form of marks and at least one probe for scanning the storage medium. The storage medium may be comprised in a substrate. The probe comprises a cantilever that comprises terminals serving as electrical contacts an being during operation of the probe mechanically fixed to a probe-holding structure, which may be a common frame of the data storage device. A probe further comprises a supporting structure, to which the terminals are mechanically directly coupled or coupled via hinges and which extends away from the terminals. A tip with a nanoscale apex is provided. A beam structure comprises a heating resistor and is attached at ends to the supporting structure. The beam structure is thinned at least in a direction parallel to an axis of the tip compared to an area of the supporting structure abutting the beam structure.

    摘要翻译： 数据存储装置包括用于以标记形式存储数据的存储介质和用于扫描存储介质的至少一个探针。 存储介质可以包含在基板中。 探头包括悬臂，其包括用作电触点的端子，所述端子在机械地固定到探头保持结构的探头的操作期间，探头保持结构可以是数据存储装置的公共框架。 探头还包括支撑结构，端子通过铰链机械地直接联接或耦合到该支撑结构，并且远离端子延伸。 提供具有纳米级顶点的尖端。 梁结构包括加热电阻器，并且在端部附接到支撑结构。 与支撑结构邻接梁结构的区域相比，梁结构至少在平行于尖端的轴线的方向上变薄。

    High-speed scanning probe microscope
    9.
    发明授权
    High-speed scanning probe microscope 有权
    高速扫描探针显微镜

    公开(公告)号：US08327461B2

    公开(公告)日：2012-12-04

    申请号：US13146355

    申请日：2010-01-15

    申请人： Harish Bhaskaran ,  Michel Despont ,  Abu Sebastian

    发明人： Harish Bhaskaran ,  Michel Despont ,  Abu Sebastian

    IPC分类号： G01Q60/14 ,  G01N13/16 ,  G01N13/10

    CPC分类号： G01Q60/16

    摘要： The invention is directed to a probe for scanning probe microscopy. The probe 20 comprises a tunnel-current conducting part 30 and a tunnel-current insulating part 40. The said parts are configured such that the insulating part determines a minimal distance between the conducting part 30 and the sample surface. The invention may further concern a scanning probe microscope having such a probe, and a corresponding scanning probe microscopy method. Since the distance to the sample surface 100 is actually determined by the insulating part 40, controlling the vertical position of the probe 20 relative to the sample surface is easily and rapidly achieved. The configuration of the parts allows for a fast scan of the sample surface, whereby high-speed imaging can be achieved. Further, embodiments allow for topographical variations to be accurately captured through tunneling effect.

    摘要翻译： 本发明涉及用于扫描探针显微镜的探针。 探针20包括隧道电流传导部分30和隧道电流绝缘部分40.所述部分被构造成使得绝缘部分确定导电部分30和样品表面之间的最小距离。 本发明还可以涉及具有这种探针的扫描探针显微镜和相应的扫描探针显微镜方法。 由于到达样品表面100的距离实际上由绝缘部件40确定，因此容易且快速地实现了探针20相对于样品表面的垂直位置的控制。 部件的构造允许对样品表面进行快速扫描，由此可以实现高速成像。 此外，实施例允许通过隧道效应准确地捕获地形变化。