公开(公告)号：US5684658A

公开(公告)日：1997-11-04

申请号：US727264

申请日：1996-10-07

Applicant: Xizeng Shi ,  Yimin Guo ,  Kochan Ju ,  Cherng-Chyi Han ,  Yimin Hsu ,  Jei-Wei Chang

Inventor： Xizeng Shi ,  Yimin Guo ,  Kochan Ju ,  Cherng-Chyi Han ,  Yimin Hsu ,  Jei-Wei Chang

IPC: G11B5/012 ,  G11B5/39 ,  G11B5/48

CPC classification number: G11B5/3954 ,  G11B5/012 ,  G11B5/3967 ,  G11B5/488

Abstract: A method for forming a dual stripe magnetoresistive (DSMR) sensor element, and the dual stripe magnetoresistive (DSMR) sensor element formed through the method. To practice the method, there is formed upon a substrate a first magnetoresistive (MR) layer, where the first magnetoresistive (MR) layer has a first sensor region longitudinally magnetically biased in a first longitudinal bias direction through a patterned first longitudinal magnetic biasing layer. There is then formed a second magnetoresistive (MR) layer parallel with and separated from the first magnetoresistive (MR) layer by an insulator layer. The second magnetoresistive (MR) layer has a second sensor region longitudinally magnetically biased in a second longitudinal bias direction through a patterned second longitudinal magnetic biasing layer. The first longitudinal bias direction and the second longitudinal bias direction are substantially parallel. In addition, the first sensor region and the second sensor region are physically offset. Finally, the first magnetoresistive (MR) layer is electromagnetically biased with a first bias current in a first bias current direction and the second magnetoresistive (MR) layer is electromagnetically biased with a second bias current in a second bias current direction, where the first bias current direction and the second bias current direction are substantially parallel.

Abstract translation: 一种用于形成双条磁阻（DSMR）传感器元件的方法和通过该方法形成的双条带磁阻（DSMR）传感器元件。 为了实施该方法，在衬底上形成第一磁阻（MR）层，其中第一磁阻（MR）层具有通过图案化的第一纵向磁偏置层在第一纵向偏置方向上纵向磁偏置的第一传感器区。 然后通过绝缘体层形成与第一磁阻（MR）层平行并与第一磁阻（MR）层分离的第二磁阻（MR）层。 第二磁阻（MR）层具有通过图案化的第二纵向磁偏置层在第二纵向偏置方向上纵向磁偏置的第二传感器区。 第一纵向偏置方向和第二纵向偏置方向基本平行。 此外，第一传感器区域和第二传感器区域被物理偏移。 最后，第一磁阻（MR）层在第一偏置电流方向上以第一偏置电流进行电磁偏置，第二磁阻（MR）层在第二偏置电流方向上以第二偏置电流进行电磁偏置，其中第一偏置 电流方向和第二偏置电流方向基本上平行。

公开(公告)号：US08238056B2

公开(公告)日：2012-08-07

申请号：US11982597

申请日：2007-11-02

Applicant: Liejie Guan ,  Joe Smyth ,  Moris Dovek ,  Yoshitaka Sasaki ,  Cherng-Chyi Han

Inventor： Liejie Guan ,  Joe Smyth ,  Moris Dovek ,  Yoshitaka Sasaki ,  Cherng-Chyi Han

IPC: G11B5/23 ,  G11B5/31

CPC classification number: G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

Abstract: A PMR writer with a tapered main pole layer and tapered non-magnetic top-shaping layer is disclosed that minimizes trailing shield saturation. A second non-magnetic top shaping layer may be employed to reduce the effective TH size while the bulk of the trailing shield is thicker to allow a larger process window for back end processing. A sloped surface with one end at the ABS and a second end 0.05 to 0.3 microns from the ABS is formed at a 10 to 80 degree angle to the ABS and includes a sloped surface on the upper portion of the main pole layer and on the non-magnetic top shaping layer. An end is formed on the second non-magnetic top shaping layer at the second end of the sloped surface followed by forming a conformal write gap layer and then depositing the trailing shield on the write gap layer and along the ABS.

Abstract translation: 公开了一种具有锥形主极层和锥形非磁性顶部成形层的PMR写入器，其使拖尾屏蔽饱和度最小化。 可以采用第二非磁性顶部成形层来减小有效的TH尺寸，同时尾部屏蔽的大部分较厚以允许用于后端处理的较大的工艺窗口。 在ABS处具有一端的倾斜表面和距离ABS的0.05至0.3微米的第二端与ABS形成10至80度的角度，并且包括在主极层的上部上的非倾斜表面， 磁顶成型层。 在倾斜表面的第二端处在第二非磁性顶部成形层上形成端部，随后形成共形写入间隙层，然后将后部屏蔽层沉积在写入间隙层上并沿着ABS。

公开(公告)号：US20120145551A1

公开(公告)日：2012-06-14

申请号：US13400389

申请日：2012-02-20

Applicant: Xiaomin Liu ,  Feiyue Li ,  Cherng-Chyi Han

Inventor： Xiaomin Liu ,  Feiyue Li ,  Cherng-Chyi Han

IPC: C25D5/18 ,  C25D7/00 ,  C23C28/00

CPC classification number: C25D3/562 ,  C25D5/18 ,  G11B5/3163 ,  H01F41/26

Abstract: A process is described for the fabrication, through electrodeposition, of FexCoyNiz (x=60-71, y=25-35, z=0-5) films that have, in their as-deposited form, a saturation magnetization of at least 24 kG and a coercivity of less than 0.3 Oe. A key feature is the addition of aryl sulfinates to the plating bath along with a suitable seed layer.

Abstract translation: 描述了通过电沉积制造FexCoyNiz（x = 60-71，y = 25-35，z = 0-5）膜的方法，其具有以其沉积形式的至少24个饱和磁化强度 kG，矫顽力小于0.3 Oe。 一个关键的特征是在适当的种子层的同时向镀浴中加入芳基亚硫酸盐。

公开(公告)号：US08056213B2

公开(公告)日：2011-11-15

申请号：US12072272

申请日：2008-02-25

Applicant: Cherng-Chyi Han ,  Lijie Guan ,  Joe Smyth ,  Moris Dovek

Inventor： Cherng-Chyi Han ,  Lijie Guan ,  Joe Smyth ,  Moris Dovek

IPC: G11B5/127 ,  H04R31/00

CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

Abstract: A PMR head comprises a substrate, a magnetic pole formed over the substrate, the pole having a pole tip having a cross-sectional tapered shape wherein the pole tip is surrounded by a write gap layer, an integrated shield comprising side shields on the substrate laterally surrounding the pole tip and a trailing shield overlying the pole tip and integral with the side shields.

Abstract translation: PMR头包括衬底，形成在衬底上的磁极，所述极具有具有横截面锥形形状的极尖，其中极尖由写间隙层围绕;集成屏蔽，包括在衬底上的侧屏蔽 围绕极尖和覆盖极尖并且与侧护罩成一体的后挡板。

公开(公告)号：US20110216447A1

公开(公告)日：2011-09-08

申请号：US12660819

申请日：2010-03-03

Applicant: Min Li ,  Cherng-Chyi Han ,  Kenichi Takano ,  Joe Smyth

Inventor： Min Li ,  Cherng-Chyi Han ,  Kenichi Takano ,  Joe Smyth

IPC: G11B5/33 ,  G03F7/20

CPC classification number: G11B5/314 ,  G11B5/1278 ,  G11B2005/0024

Abstract: A microwave assisted magnetic recording writer is disclosed with an octagonal write pole having a top portion including a trailing edge that is self aligned to a spin transfer oscillator (STO). Leading and trailing edges are connected by two sidewalls each having three sections. A first section on each side is coplanar with the STO sidewalls and is connected to a sloped second section at a first corner. Each second section is connected to a third section at a second corner where the distance between second corners is greater than the distance between first corners. A method of forming the writer begins with a trapezoidal shaped write pole in an insulation layer. Two ion beam etch (IBE) steps are used to shape top and middle portions of the write pole and narrow the pole width to

Abstract translation: 公开了一种具有八角写磁极的微波辅助磁记录装置，其具有包括与自旋转移振荡器（STO）自对准的后沿的顶部。 前缘和后缘由具有三个部分的两个侧壁连接。 每侧的第一部分与STO侧壁共面，并且在第一角处连接到倾斜的第二部分。 每个第二部分连接到第二角处的第三部分，其中第二角之间的距离大于第一角之间的距离。 一种形成写入器的方法从绝缘层中的梯形写入极开始。 使用两个离子束蚀刻（IBE）步骤来形成写入极的顶部和中间部分，并且将极宽度窄化到<50nm而不破裂。 最后，在STO上形成一个后挡板。

公开(公告)号：US20100301007A1

公开(公告)日：2010-12-02

申请号：US12457090

申请日：2009-06-01

Applicant: Kazuo Ishizaki ,  Yoshitaka Sasaki ,  Hironori Araki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Cherng-Chyi Han

Inventor： Kazuo Ishizaki ,  Yoshitaka Sasaki ,  Hironori Araki ,  Hiroyuki Ito ,  Shigeki Tanemura ,  Cherng-Chyi Han

IPC: B44C1/22

CPC classification number: G11B5/3146 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

Abstract: A magnetic head includes a pole layer, first and second side shields, and an encasing layer having first to third grooves that accommodate the pole layer and the first and second side shields. A manufacturing method for the magnetic head includes the step of forming the first to third grooves in a nonmagnetic layer by using an etching mask layer having first to third openings. This step includes the steps of forming the first groove by etching the nonmagnetic layer using the first opening, with the second and third openings covered with a first mask; and forming the second and third grooves by etching the nonmagnetic layer using the second and third openings, with the first opening covered with a second mask.

Abstract translation: 磁头包括极层，第一和第二侧屏蔽以及包含第一至第三沟槽的封装层，其容纳极层和第一和第二侧屏蔽。 磁头的制造方法包括通过使用具有第一至第三开口的蚀刻掩模层在非磁性层中形成第一至第三沟槽的步骤。 该步骤包括通过使用第一开口蚀刻非磁性层来形成第一凹槽的步骤，其中第二和第三开口被第一掩模覆盖; 以及通过使用所述第二和第三开口蚀刻所述非磁性层来形成所述第二和第三凹槽，其中所述第一开口被第二掩模覆盖。

公开(公告)号：US20090091862A1

公开(公告)日：2009-04-09

申请号：US12072272

申请日：2008-02-25

Applicant: Cherng Chyi Han ,  Lijie Guan ,  Joe Smyth ,  Moris Dovek

Inventor： Cherng Chyi Han ,  Lijie Guan ,  Joe Smyth ,  Moris Dovek

IPC: G11B5/33

CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

Abstract: A PMR head comprises a substrate, a magnetic pole formed over the substrate, the pole having a pole tip having a cross-sectional tapered shape wherein the pole tip is surrounded by a write gap layer, an integrated shield comprising side shields on the substrate laterally surrounding the pole tip and a trailing shield overlying the pole tip and integral with the side shields.

Abstract translation: PMR头包括衬底，形成在衬底上的磁极，所述极具有具有横截面锥形形状的极尖，其中极尖由写间隙层围绕;集成屏蔽，包括在衬底上的侧屏蔽 围绕极尖和覆盖极尖并且与侧护罩成一体的后挡板。

公开(公告)号：US20080297945A1

公开(公告)日：2008-12-04

申请号：US11809346

申请日：2007-05-31

Applicant: Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

Inventor： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

IPC: G11B5/127 ,  G11B5/147 ,  H04R31/00

CPC classification number: G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

Abstract: A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

Abstract translation: 垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。 楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果 。 然后在侧屏和极上方形成写间隙层和上屏蔽。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

公开(公告)号：US20080197021A1

公开(公告)日：2008-08-21

申请号：US11707826

申请日：2007-02-16

Applicant: Xiaomin Liu ,  Cherng-Chyi Han ,  Feiyue Li

Inventor： Xiaomin Liu ,  Cherng-Chyi Han ,  Feiyue Li

IPC: C25D5/50

CPC classification number: C25D3/562 ,  C25D5/00 ,  C25D5/006 ,  G11B5/3163 ,  H01F41/26

Abstract: A process sequence for forming a soft magnetic layer having Hce and Hch of ≦2 Oe, Hk≦5 Oe, and Bs of ≧24 kG is disclosed. A CoFe or CoFe alloy is electroplated in a 10O C to 25O C. bath (pH 2 to 3) containing Co+2 and Fe+2 ions in addition to boric acid and one or more aryl sulfinate salts to promote magnetic softness in the deposited layer. Peak current density is 30 to 60 mA/cm2. A two step magnetic anneal process is performed to further improve softness. An easy axis anneal is followed by a hard axis anneal or vice versa. In an embodiment where the magnetic layer is a pole layer in a write head, the temperature is maintained in a 180O C to 250O C range and the applied magnetic field is kept a 300 Oe or below to prevent degradation of an adjacent read head.

Abstract translation: 公开了用于形成具有<= 2Oe，Hk <= 5Oe，Bs> = 24kG的Hce和Hch的软磁性层的工艺顺序。 CoFe或CoFe合金电镀在10欧姆至25微米的范围内。 除了硼酸和一种或多种芳基亚磺酸盐之外，还含有Co 2+，Fe 2+和Fe 2+ 2+的浴（pH 2至3）以促进沉积层中的磁性 。 峰值电流密度为30〜60mA / cm 2。 进行两步磁退火处理以进一步提高柔软度。 易轴退火之后是硬轴退火，反之亦然。 在磁性层是写入头中的极层的实施例中，温度保持在180℃至250℃范围内，施加的磁场为 保持300 Oe或以下，以防止相邻读头的退化。

公开(公告)号：US07359150B2

公开(公告)日：2008-04-15

申请号：US11091160

申请日：2005-03-28

Applicant: Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

Inventor： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

IPC: G11B5/39 ,  G11B5/147

CPC classification number: G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

Abstract: A trimmed upper pole piece for a magnetic write head is presented, said pole piece having a uniform width above and below a write gap layer and said pole piece being formed on a pedestal of uniform width projecting from a planar surface of a magnetic shield layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the typical alumina write-gap filling material. The present pole piece uses NiCr, NiFeCr or Ru as write gap filling materials because they have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and allow a uniform trimming to occur.

Abstract translation: 提出了一种用于磁性写入头的修整的上极片，所述极片在写间隙层上方和下方具有均匀的宽度，并且所述极片形成在从磁屏蔽层的平坦表面突出的均匀宽度的基座上。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于典型的氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本极极片使用NiCr，NiFeCr或Ru作为写入间隙填充材料，因为它们的蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并允许发生均匀的修整。