公开(公告)号：US08698257B2

公开(公告)日：2014-04-15

申请号：US13377898

申请日：2010-06-30

Applicant: Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

Inventor： Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

IPC: H01L29/84

CPC classification number: H03H3/0072 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/00142 ,  B81C1/0015 ,  H03H9/02338 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02511

Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

Abstract translation: 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

公开(公告)号：US08441773B2

公开(公告)日：2013-05-14

申请号：US12412744

申请日：2009-03-27

Applicant: Hiroshi Konishi ,  Junji Suzuki

Inventor： Hiroshi Konishi ,  Junji Suzuki

IPC: H01G7/06 ,  H01G5/16 ,  H01G7/00

CPC classification number: G02B26/08 ,  B81B3/0086 ,  B81B2201/016 ,  H01G5/16 ,  H01G5/18 ,  H01L23/5223 ,  H01L27/0808 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion provided with a first driving electrode and a first signal electrode, and a movable portion provided with a second driving electrode and a second signal electrode, movable with respect to the fixed portion and provided to generate a spring force to make restoration to a predetermined position. An electrostatic force is generated between the first and second driving electrodes by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract translation: 在等于或大于常规范围的移动范围内驱动是可能的，其驱动电压具有小于引入电压的范围。 电子元件包括设置有第一驱动电极和第一信号电极的固定部分，以及设置有第二驱动电极和第二信号电极的可动部分，该第二驱动电极和第二信号电极可相对于固定部分移动，并产生弹簧力 恢复到预定位置。 通过施加在第一和第二驱动电极之间的电压产生静电力，使得静电力抵抗弹簧力; 并且第一和第二驱动电极以及第一和第二信号电极被布置成使得在第一和第二信号电极之间的间隔距离变宽的方向产生静电力。

公开(公告)号：US20120091547A1

公开(公告)日：2012-04-19

申请号：US13377898

申请日：2010-06-30

Applicant: Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

Inventor： Tomohide Kamiyama ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Kunihiko Nakamura ,  Keiji Onishi

IPC: H01L29/84 ,  H01L21/02

CPC classification number: H03H3/0072 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/00142 ,  B81C1/0015 ,  H03H9/02338 ,  H03H9/2463 ,  H03H2009/02291 ,  H03H2009/02511

Abstract: A resonator using the MEMS technology is provided which improves the accuracy of a shape of electrodes so as avoid a short circuit that would otherwise be caused between input and output electrodes to thereby increase the reliability thereof. A resonator includes a substrate 101, an insulation layer 102 formed selectively on the substrate 101 as a sacrificial surface, a beam 103 formed on the substrate 101 via a space, a first support portion 104A formed on the insulation layer 102 of the same material as that of the beam 103, and electrodes formed with a space defined between the beam 103 and themselves for signals to be inputted thereinto and outputted therefrom. A sectional area of the beam 103 and a sectional area of the first support portion 104A are substantially equal in a section which is perpendicular to a longitudinal direction of the beam 103.

Abstract translation: 提供了使用MEMS技术的谐振器，其提高了电极形状的精度，以避免在输入和输出电极之间将产生的短路，从而增加其可靠性。 谐振器包括基板101，作为牺牲表面的基板101上选择性地形成的绝缘层102，经由空间形成在基板101上的光束103，形成在绝缘层102上的相同材料的第一支撑部分104A 光束103的光束，以及形成有在光束103和其之间的空间的电极，用于输入信号并从其输出的信号。 梁103的截面积和第一支撑部分104A的截面面积在垂直于梁103的纵向方向的截面中基本相等。

公开(公告)号：US08089131B2

公开(公告)日：2012-01-03

申请号：US12502500

申请日：2009-07-14

Applicant: Hiroaki Yamazaki

Inventor： Hiroaki Yamazaki

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84 ,  H01L23/02

CPC classification number: H01H59/0009 ,  B81B3/0086 ,  B81B7/007 ,  B81B2201/016 ,  B81B2201/0264 ,  B81B2207/098 ,  H01H2059/0054

Abstract: A micro movable device includes a protection cap for protecting a movable unit arranged above a semiconductor substrate and the movable unit, signal line for transmitting a high-frequency signal formed above the semiconductor substrate, and insulation layer that has projection formed to project upward from the semiconductor substrate and coated surfaces with the signal line.

Abstract translation: 微型可移动装置包括用于保护布置在半导体衬底上方的可移动单元的保护盖和用于传输形成在半导体衬底上方的高频信号的可移动单元，信号线，以及具有突起的绝缘层，所述突起形成为从 半导体衬底和涂有表面的信号线。

公开(公告)号：US20110260267A1

公开(公告)日：2011-10-27

申请号：US12990123

申请日：2009-05-06

Applicant: Robertus T. F. Van Schaijk

Inventor： Robertus T. F. Van Schaijk

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81B3/0086 ,  B81B3/0078 ,  B81B2201/016 ,  B81B2203/0118

Abstract: A MEMS device and method, comprising: a substrate; a beam; and a cavity located therebetween; the beam comprising a first beam layer and a second beam layer, the first beam layer being directly adjacent to the cavity, the second beam layer being directly adjacent to the first beam layer; the first beam layer comprising a metal or a metal alloy containing silicon; and the second beam layer comprising a metal or a metal alloy substantially not containing silicon. Preferably the second beam layer is thicker than the first beam layer e.g. at least five times thicker, and the first beam layer comprises a metal or alloy containing between 1% and 2% of silicon. The second beam layer provides desired mechanical and/or optical properties whilst the first beam layer prevents spiking.

Abstract translation: 一种MEMS器件和方法，包括：衬底; 一束 和位于其间的腔体; 所述光束包括第一光束层和第二光束层，所述第一光束层直接邻近所述空腔，所述第二光束层直接邻近所述第一光束层; 所述第一束层包含含有硅的金属或金属合金; 并且第二束层包含基本上不含硅的金属或金属合金。 优选地，第二光束层比第一光束层厚。 至少五倍厚，第一束层包含含有1％至2％硅的金属或合金。 第二光束层提供期望的机械和/或光学特性，同时第一光束层防止尖峰。

公开(公告)号：US07978034B2

公开(公告)日：2011-07-12

申请号：US12304757

申请日：2007-06-14

Applicant: Yasuyuki Naito ,  Yoshito Nakanishi

Inventor： Yasuyuki Naito ,  Yoshito Nakanishi

IPC: H01H51/22

CPC classification number: B81B3/0078 ,  B81B2201/016 ,  H01H59/0009 ,  H01H69/01

Abstract: A quick response/low voltage driven electromechanical switch equipped with a mechanism for adjusting a spring constant of a movable electrode is provided. The electromechanical element includes a first electrode formed on a substrate, a second electrode formed at a predetermined interval to the first electrode so that the interval is changed, and supporting portions for supporting the second electrode, wherein the supporting portions of the second electrode are able to be displaced.

Abstract translation: 提供一种具有用于调节可动电极的弹簧常数的机构的快速响应/低压驱动机电开关。 机电元件包括​​形成在基板上的第一电极，以第一电极以预定间隔形成的间隔改变的第二电极和用于支撑第二电极的支撑部分，其中第二电极的支撑部分能够 被流离失所

公开(公告)号：US20090190284A1

公开(公告)日：2009-07-30

申请号：US12412744

申请日：2009-03-27

Applicant: HIROSHI KONISHI ,  Junji Suzuki

Inventor： HIROSHI KONISHI ,  Junji Suzuki

IPC: H01G5/00 ,  H01H57/00

CPC classification number: G02B26/08 ,  B81B3/0086 ,  B81B2201/016 ,  H01G5/16 ,  H01G5/18 ,  H01L23/5223 ,  H01L27/0808 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

Abstract: Driving is made possible in a moving range equivalent to or wider than the conventional range, with a driving voltage having a range smaller than a pull-in voltage. An electronic element includes a fixed portion, and a movable portion which is movable with respect to the fixed portion and which is provided to generate a spring force to make restoration to a predetermined position. The fixed portion is provided with a first driving electrode and a first signal electrode. The movable portion is provided with a second driving electrode and a second signal electrode. An electrostatic force is generated between the first driving electrode and the second driving electrode by a voltage applied therebetween so that the electrostatic force resists against the spring force; and the first and second driving electrodes and the first and second signal electrodes are arranged so that the electrostatic force is generated in a direction in which a spacing distance between the first and second signal electrodes is widened.

Abstract translation: 在等于或大于常规范围的移动范围内驱动是可能的，其驱动电压具有小于引入电压的范围。 电子元件包括固定部分和可相对于固定部分移动并且被设置成产生弹簧力以使其恢复到预定位置的可动部分。 固定部设置有第一驱动电极和第一信号电极。 可动部设置有第二驱动电极和第二信号电极。 通过施加在第一驱动电极和第二驱动电极之间的电压产生静电力，使得静电力抵抗弹簧力; 并且第一和第二驱动电极以及第一和第二信号电极被布置成使得在第一和第二信号电极之间的间隔距离变宽的方向产生静电力。

公开(公告)号：US20080007814A1

公开(公告)日：2008-01-10

申请号：US11582964

申请日：2006-10-19

Applicant: Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Seung-jin Oh ,  Eun-sung Lee ,  Seung-tae Choi

Inventor： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Seung-jin Oh ,  Eun-sung Lee ,  Seung-tae Choi

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B2201/016 ,  B81C1/00571 ,  H01H1/0036 ,  H01H1/58 ,  H01H59/0009 ,  H01H2001/0052

Abstract: A MEMS structure includes an element substrate, an electrode pad formed on the element substrate, a MEMS activated element formed on the element substrate, and having an electrode-connecting layer, and a connecting line to electrically connect the electrode pad and the electrode-connecting layer.

Abstract translation: MEMS结构包括元件基板，形成在元件基板上的电极焊盘，形成在元件基板上的MEMS激活元件，并具有电极连接层，以及连接线，用于将电极焊盘和电极连接 层。

公开(公告)号：US20080001691A1

公开(公告)日：2008-01-03

申请号：US11585235

申请日：2006-10-24

Applicant: Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

Inventor： Young-tack Hong ,  Jong-seok Kim ,  In-sang Song ,  Sang-wook Kwon ,  Sang-hun Lee ,  Che-heung Kim

IPC: H01F7/08

CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/014 ,  B81B2201/016

Abstract: A MEMS switch includes a substrate, at least one signal line and at least one electrode formed on the substrate, and a moving beam disposed in a spaced-apart relation with respect to the substrate above the substrate so as to be connected with or disconnected from the signal line according to an operation of the electrode. The moving beam includes at least one body, and at least one support to support the body. The body has a modulus of elasticity larger than that of the support. The MEMS switch prevents the moving beam from being stuck and increases a contact force generating between the moving beam and the signal line, thereby enabling a signal to be stably transmitted.

Abstract translation: MEMS开关包括衬底，至少一个信号线和形成在衬底上的至少一个电极以及相对于衬底在衬底上间隔开的关系设置的移动束，以便与衬底连接或断开 根据电极的操作的信号线。 移动梁包括至少一个主体和至少一个支撑体以支撑身体。 身体的弹性模量大于支撑体的弹性模量。 MEMS开关防止移动光束被卡住，并增加在移动光束和信号线之间产生的接触力，从而使信号能够稳定地传输。

公开(公告)号：US20070086237A1

公开(公告)日：2007-04-19

申请号：US11528712

申请日：2006-09-27

Applicant: Sandip Tiwari ,  Chung Kim

Inventor： Sandip Tiwari ,  Chung Kim

IPC: G11C11/34

CPC classification number: H01L27/115 ,  B81B3/0072 ,  B81B2201/016 ,  B82Y10/00 ,  G11C13/0014 ,  G11C13/0016 ,  G11C13/025 ,  G11C23/00 ,  G11C2213/14 ,  G11C2213/17 ,  G11C2213/77 ,  H01H9/547 ,  H01H59/0009 ,  H01H61/0107 ,  H01L21/28273 ,  H01L27/112 ,  H01L29/66825 ,  H01L29/785

Abstract: Mechanical devices having bistable positions are utilized to form switches and memory devices. The devices are actuatable to different positions and may be coupled to a transistor device in various configurations to provide memory devices. Actuation mechanisms include electrostatic methods and heat. In one form, the mechanical device forms a gate for a field effect transistor. In a further form, the device may be a switch that may be coupled to the transistor in various manners to affect its electrical characteristics when on and off. The memory switch in one embodiment comprises side walls formed with tensile or compressive films. A cross point switch is formed from a plurality of intersecting conductive rows and columns of conductors. Actuatable switches are positioned between each intersection of the rows and columns such that each intersection is independently addressable.

Abstract translation: 利用具有双稳态位置的机械装置来形成开关和存储装置。 这些器件可被驱动到不同的位置，并且可以以各种配置耦合到晶体管器件以提供存储器件。 致动机制包括静电法和热量。 在一种形式中，机械装置形成用于场效应晶体管的栅极。 在另一种形式中，器件可以是开关，其可以以各种方式耦合到晶体管，以便在接通和断开时影响其电特性。 在一个实施例中的存储器开关包括由拉伸或压缩膜形成的侧壁。 交叉点开关由多个交叉的导电行和导体列形成。 可执行开关位于行和列的每个交叉点之间，使得每个交叉点可独立寻址。