Ultra high purity delivery system for liquefied compressed gases
    126.
    发明授权
    Ultra high purity delivery system for liquefied compressed gases 失效
    用于液化压缩气体的超高纯度输送系统

    公开(公告)号:US5644921A

    公开(公告)日:1997-07-08

    申请号:US651311

    申请日:1996-05-22

    Abstract: A method and apparatus for storing ultra high purity non-cryogenic liquefied compressed gases, such as ammonia (NH.sub.3), and delivering a vaporized gaseous product from those liquefied gases for semiconductor processing applications. The delivery method includes withdrawing and heating gaseous product from a storage vessel containing the liquefied compressed gas, and then piping the heated gas through the liquid contained in the storage vessel in a heat exchange fashion. The heat exchange with the liquid inside the vessel induces boiling to maintain a vaporized gaseous product under a minimum positive pressure in said vessel. After liberating its heat, the gaseous product is delivered to a semiconductor manufacturing point of use.

    Abstract translation: 用于储存例如氨(NH 3)的超高纯度非低温液化压缩气体的方法和装置,并从用于半导体处理应用的那些液化气体输送蒸发的气体产物。 输送方法包括从含有液化压缩气体的储存容器中取出和加热气态产物,然后以热交换的方式将加热的气体通过储存容器中所含的液体进行配管。 与容器内部的液体的热交换引起沸腾以在所述容器中保持在最小正压下的蒸发的气态产物。 释放出热量后,气态产物被输送到半导体制造使用点。

    System and method for regulating the temperature of cryogenic liquids
    128.
    发明授权
    System and method for regulating the temperature of cryogenic liquids 失效
    用于调节低温液体温度的系统和方法

    公开(公告)号:US5613366A

    公开(公告)日:1997-03-25

    申请号:US451092

    申请日:1995-05-25

    Abstract: A relatively inexpensive system and method for regulating the temperature of a cryogenic liquid in a storage vessel (2), such as vehicle refueling station, comprises inner and outer walls (6, 8) defining a inner chamber (12) for housing the cryogenic liquid. To provide a variable thermal resistance around the inner chamber, a thermal control fluid is disposed within an insulation space (10) between the inner and outer walls. A fluid conduit (30) has an inlet and outlet in fluid communication with the chamber and a heat exchanger coil (36) disposed within the insulation space. A control valve (38) allows the cryogenic liquid to flow through the fluid conduit so that the cryogenic liquid is in heat exchange relationship with the thermal control gas as the liquid passes through the coil (i.e., the cryogenic liquid cools and condenses the thermal control gas to reduce the control gas pressure). The pressure of the control gas within the insulation space can be modulated to thereby control the heat flow into the inner chamber by controlling the flow rate of the cryogenic liquid through the fluid conduit.

    Abstract translation: 用于调节诸如车辆加油站的存储容器(2)中的低温液体的温度的相对便宜的系统和方法包括限定用于容纳低温液体的内室(12)的内壁和外壁(6,8) 。 为了在内腔周围提供可变的热阻,热控制流体设置在内壁和外壁之间的绝缘空间(10)内。 流体管道(30)具有与腔室流体连通的入口和出口以及设置在绝热空间内的热交换器线圈(36)。 控制阀(38)允许低温液体流过流体导管,使得当液体通过线圈时,低温液体与热控制气体处于热交换关系(即,低温液体冷却并冷凝热控制器 气体减少控制气体压力)。 可以调节绝缘空间内的控制气体的压力,从而通过控制通过流体导管的低温液体的流量来控制进入内室的热流。

    Cryogenic liquid storage tank
    130.
    发明授权
    Cryogenic liquid storage tank 失效
    低温储液罐

    公开(公告)号:US5404918A

    公开(公告)日:1995-04-11

    申请号:US117302

    申请日:1993-09-03

    Inventor: Keith Gustafson

    Abstract: The storage tank consists of a main tank and ullage tank connected by a relatively small passage having a flow rate capacity up to 30% of the main fill line. To fill the tank, liquid cryogen is delivered to the main tank by either a top or bottom fill. Because the fill line is significantly larger than the passage, the main tank will become liquid full while the ullage tank remains substantially empty. When the tank becomes liquid full a dramatic drop in the flow rate will result that can be detected by a relatively insensitive, and inexpensive, flow monitoring device thereby to stop the filling operation. The ullage tank will retain trapped gas and gradually allow the liquid from the main tank to enter the ullage tank through the passage until the liquid level in the tanks are equal. Once the liquid levels in the tanks equalize, a vapor space is created above the liquid to accommodate vaporizing cryogen and provide long hold times.

    Abstract translation: 储罐由一个主槽和一个相当小的通道连接的排水箱组成,流量可以达到主填充管线的30%。 为了填充油箱,液体冷冻剂通过顶部或底部填充物输送到主油箱。 因为填充线明显大于通道,所以主油箱将在液体充满的同时保持空白。 当罐变得液体充满时,流量的显着下降将导致可以通过相对不敏感且廉价的流量监测装置来检测,从而停止填充操作。 排空罐将保留被捕获的气体,并逐渐允许来自主罐的液体通过通道进入排空罐,直到罐中的液面相等。 一旦罐中的液面均匀化,就会在液体上方产生蒸汽空间,以适应蒸发的冷冻剂并提供较长的保持时间。

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