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公开(公告)号:US4182187A
公开(公告)日:1980-01-08
申请号:US899607
申请日:1978-04-24
Applicant: Richard A. Hanson
Inventor: Richard A. Hanson
CPC classification number: G01L1/086 , G01P2015/0828
Abstract: In order to reduce bias errors resulting from mounting of a force restoring coil assembly element of a force balancing transducer, the force coil assembly is suspended by means of one or more hinges from a force sensing movable member, which includes position pick-off means, that in turn is connected by hinging means to a support member. The effects of strain may further be reduced by locating the first hinges essentially along the axis of the centroid of the pick-off means.
Abstract translation: 为了减少由力平衡换能器的力恢复线圈组件元件的安装引起的偏移误差,力线圈组件通过一个或多个铰链悬挂在力传感可移动构件上,力传感可移动构件包括位置传感装置, 这又通过铰接装置连接到支撑构件。 通过将第一铰链基本上沿着拾取装置的重心的轴线定位,可以进一步减小应变的影响。
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公开(公告)号:US4102202A
公开(公告)日:1978-07-25
申请号:US745259
申请日:1976-11-26
Applicant: Lincoln Stark Ferriss
Inventor: Lincoln Stark Ferriss
IPC: G01P15/125 , G01P15/00
CPC classification number: G01P15/125 , G01P2015/0828
Abstract: A digitally responsive electrostatic accelerometer having a pendulum pivotally movable about a hinge. A pair of torquer electrodes mounted on opposite sides of the pendulum are connected to a source of constant current. As the pendulum moves from its null position under the influence of acceleration forces, the displacement from null position is indicated by an increase in charge on the electrode which is in closer proximity to the pendulum. Electronic circuit means are provided to detect the direction of displacement of the pendulum from null and to apply a charge to the proper torquer electrode to force the pendulum back to null position. The principle of operation of the device is based upon the fact that the magnitude of the voltage on the torquer electrodes when charged from a constant current source contains information indicative of the position of the pendulum from null.
Abstract translation: 一种数字响应式静电加速度计,其具有围绕铰链枢转运动的摆动。 安装在摆锤的相对侧上的一对绞盘电极连接到恒定电流源。 由于摆锤在加速力的影响下从其零位移动,从零位置的位移由靠近摆锤的电极上的电荷增加表示。 提供电子电路装置以检测摆锤的位移方向为零,并将电荷施加到适当的扭转电极,以将摆锤强制回到零位置。 器件的工作原理是基于以下事实:当从恒定电流源充电时,电极上的电压幅值包含表示摆锤位置的信息为零。
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公开(公告)号:US4047144A
公开(公告)日:1977-09-06
申请号:US605120
申请日:1975-08-15
Applicant: Herbert Vernon Wong
Inventor: Herbert Vernon Wong
CPC classification number: G01L1/18 , G01B7/20 , G01P15/0802 , G01P15/123 , G01P2015/0828
Abstract: An electromechanical transducer is provided which employs a piezoresistive substrate support body of semiconductive material of which a first type N or P and a lineal resistor composed of material of a second type (P or N) formed on one surface thereof. The support body has a reduced neck intermediate two pads. The lineal resistor extends between the pads and across the neck on one side of the support body. The lineal resistor is formed by diffusing semiconductive material of the second type of conductivity into the substrate material. Strain is detected by measuring the change in resistance of the lineal resistor. When the transducer is subjected to strain, the resistance changes by an amount depending on the strain. While the electrical current flows through the resistor, heat developed in the resistors flows into the neck and then is conducted through the flaring portions of the neck to the pads and then to an object under test.
Abstract translation: 提供了一种机电传感器,其使用半导体材料的压阻基板支撑体,第一类型的N或P和由在其一个表面上形成的第二类型(P或N)的材料构成的线性电阻器。 支撑体在两个垫之间具有减小的颈部。 线性电阻器在衬垫之间延伸并且在支撑体的一侧上延伸穿过颈部。 线性电阻器通过将第二类导电性的半导体材料扩散到衬底材料中而形成。 通过测量线性电阻的电阻变化来检测应变。 当换能器受到应变时,电阻根据应变而改变一定量。 当电流流过电阻器时,在电阻器中产生的热量流入颈部,然后通过颈部的扩张部分传导到垫,然后传导到被测物体。
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公开(公告)号:US3783374A
公开(公告)日:1974-01-01
申请号:US3783374D
申请日:1972-04-07
Applicant: SUNDSTRAND DATA CONTROL
IPC: G01P15/125 , G01R27/26 , G01R11/52
CPC classification number: G01R27/2605 , G01P15/125 , G01P2015/0828
Abstract: A circuit for detecting or sensing the ratio of or unbalance between two impedance elements, as the sections of a differential capacitor in a servoed instrument. A source of alternating current has two outputs of opposite phase, one connected in each of a pair of circuits with the two impedance elements. A diode in each of the circuits is poled so that both circuits conduct during the same half cycle. A load connected with both circuits sums the opposite phase currents and the difference between the currents represents the ratio of the impedance elements.
Abstract translation: 用于检测或感测两个阻抗元件之间的比例或不平衡的电路,作为伺服仪器中的差分电容器的部分。 交流电源具有相反相位的两个输出,一个连接在具有两个阻抗元件的一对电路中。 每个电路中的二极管被极化,使得两个电路在相同的半周期内导通。 与两个电路相连的负载将相反相电流相加,电流之差表示阻抗元件的比例。
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公开(公告)号:US10054609B2
公开(公告)日:2018-08-21
申请号:US15549421
申请日:2016-02-01
Applicant: DENSO CORPORATION
Inventor: Toshihiko Takahata , Eiichi Taketani
CPC classification number: G01P15/08 , B81B2201/0235 , B81B2207/095 , B81C1/00301 , B81C2203/0109 , G01P15/0802 , G01P2015/0828 , H01L23/02 , H01L29/84
Abstract: A method for manufacturing a semiconductor device includes: preparing a first substrate; forming a metal film having a Ti layer as the most outermost surface on one surface of the first substrate a metal film having a Ti layer as the outermost surface; patterning the metal film to form a first pad portion; preparing a second substrate; forming on one surface of the second substrate a metal film having a Ti layer as the outermost surface; patterning the metal film to form a second pad portion; vacuum annealing the first substrate and the second substrate to remove an oxide film formed on the Ti layer in the first pad portion and the second pad portion; and bonding the first pad portion and the second pad portion together.
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公开(公告)号:US20180164339A1
公开(公告)日:2018-06-14
申请号:US15837007
申请日:2017-12-11
Applicant: Safran Colibrys SA
Inventor: Pascal Zwahlen , Sophie Birling , Bertrand Dutoit
CPC classification number: G01P15/125 , B81B3/0062 , B81B7/0048 , B81B7/02 , B81B2201/0235 , G01P1/023 , G01P15/0802 , G01P15/18 , G01P2015/0814 , G01P2015/0828
Abstract: Accelerometer including a seismic mass in a plane and a first capacitor plate and a second capacitor plate arranged parallel to the plane. The seismic mass is arranged in between the first capacitor plate and the second capacitor plate. The first capacitor plate and the second capacitor plate are configured to detect movements of the seismic mass out of the plane. A pillar extending from the first capacitor plate to the second capacitor plate through a cut-out in the seismic mass for stiffening the accelerometer.
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公开(公告)号:US20180149532A1
公开(公告)日:2018-05-31
申请号:US15572594
申请日:2015-05-08
Applicant: Fugro Technology B.V.
Inventor: Martijn MATTHIJSSEN , Bastiaan MEULBLOK , German Enrique KNOPPERS , Devrez Mehmet KARABACAK
CPC classification number: G01L1/246 , G01D5/35316 , G01H9/004 , G01L5/0033 , G01P15/093 , G01P15/18 , G01P2015/0828 , G01P2015/0837 , G01V1/186
Abstract: The invention relates to an optical sensor device comprising a reference body and at least one sensing transducer. The sensing transducer is arranged for receiving an input action, and is movably arranged relative to the reference body for moving relative to the reference body in response to the input action. The device further comprises an optical fiber and one or more transmission arms including a first transmission arm. The optical fiber comprises an intrinsic fiber optic sensor. The optical fiber is connected with a first connecting part thereof to the first transmission arm and with a second connecting part thereof to an element exterior to said first transmission arm. The first connecting part and the second connecting part are on either side of the intrinsic fiber optic sensor. For receiving the input action, a base of the first transmission arm is connected at a first part thereof with the reference body and with a second part thereof with the sensing transducer. The optical fiber is connected at a location along the first transmission arm remote from the base thereby converting the input action received by the sensing transducer into a sensing action applied to the optical fiber such as to modify strain in the optical fiber dependent on said input action.
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公开(公告)号:US20170307653A1
公开(公告)日:2017-10-26
申请号:US15137409
申请日:2016-04-25
Applicant: Honeywell International Inc.
Inventor: Paul W. Dwyer
IPC: G01P15/125
CPC classification number: G01P15/125 , G01P15/132 , G01P2015/0828
Abstract: An accelerometer includes an upper stator, a lower stator, and a proof mass assembly disposed between the upper and the lower stator. At least one of the upper stator or the lower stator includes an excitation ring, a magnet coupled to the excitation ring, and an asymmetric pole piece coupled to a top surface of the magnet. The asymmetric pole piece covers at least a portion of the top surface of the magnet such that a center of magnetic flux associated with the at least one of the upper stator or the lower stator is aligned with a center of mass of the proof mass assembly.
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公开(公告)号:US20170219619A1
公开(公告)日:2017-08-03
申请号:US15086081
申请日:2016-03-31
Applicant: GlobalMEMS Co., Ltd.
Inventor: Chun-I Chang , Ming-Ching Wu
IPC: G01P15/12
CPC classification number: G01P15/123 , G01P15/0802 , G01P15/18 , G01P2015/0828 , G01P2015/0831
Abstract: An accelerometer includes a base, two elastic portions and two masses. The base includes a supporting portion. Each of the elastic portions is connected to the supporting portion. The supporting portion is located between the two masses, the two masses are connected to the two elastic portions respectively, and the base supports the two elastic portions and the two masses merely by the supporting portion. The two masses are adapted to produce movements to enable the two elastic portions to be elastically deformed.
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公开(公告)号:US09658244B2
公开(公告)日:2017-05-23
申请号:US14326224
申请日:2014-07-08
Applicant: Honeywell International Inc.
Inventor: Paul W. Dwyer , William Lee
CPC classification number: G01P15/125 , B32B37/12 , B32B37/18 , B32B2037/1253 , B32B2307/546 , B32B2457/00 , G01P1/006 , G01P15/13 , G01P15/132 , G01P2015/0828
Abstract: Techniques of manufacturing an accelerometer as disclosed herein include positioning an accelerometer between a first stator and a second stator, and the accelerometer comprises a plurality of features. In some examples, the plurality of features include a proof mass, a support structure defining a plane and configured to support the proof mass, a flexure configured to flexibly connect the proof mass to the support structure, and a plurality of raised pads, the plurality comprising at least one raised pad positioned between the flexure and an exterior of the support structure, wherein the at least one raised pad is configured to be isolatable. Techniques of manufacturing the accelerometer as disclosed herein further include compressing the first stator and the second stator onto the accelerometer, attaching a bellyband to the first stator and the second stator, and isolating the at least one raised pad.
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