公开(公告)号：US10312246B2

公开(公告)日：2019-06-04

申请号：US14790540

申请日：2015-07-02

Applicant: Silicon Storage Technology, Inc.

Inventor： Jeng-Wei Yang ,  Man-Tang Wu ,  Chun-Ming Chen ,  Chien-Sheng Su ,  Nhan Do

IPC: H01L27/115 ,  H01L27/11521 ,  H01L29/66 ,  H01L29/40 ,  H01L21/8234 ,  H01L29/423 ,  H01L29/788

Abstract: A non-volatile memory cell includes a semiconductor substrate of first conductivity type, first and second spaced-apart regions in the substrate of second conductivity type, with a channel region in the substrate therebetween. A floating gate has a first portion disposed vertically over a first portion of the channel region, and a second portion disposed vertically over the first region. The floating gate includes a sloping upper surface that terminates with one or more sharp edges. An erase gate is disposed vertically over the floating gate with the one or more sharp edges facing the erase gate. A control gate has a first portion disposed laterally adjacent to the floating gate, and vertically over the first region. A select gate has a first portion disposed vertically over a second portion of the channel region, and laterally adjacent to the floating gate.

公开(公告)号：US20190164984A1

公开(公告)日：2019-05-30

申请号：US16264349

申请日：2019-01-31

Applicant: Silicon Storage Technology, Inc

Inventor： Hieu Van Tran ,  Hung Quoc Nguyen ,  Nhan Do

IPC: H01L27/11526 ,  H01L29/788 ,  H01L29/423 ,  G11C16/14 ,  G11C16/04 ,  G11C16/26 ,  H01L27/11521 ,  H01L27/11519

Abstract: A memory device with memory cell pairs each having a single continuous channel region, first and second floating gates over first and second portions of the channel region, an erase gate over a third portion of the channel region between the first and second channel region portions, and first and second control gates over the first and second floating gates. For each of the pairs of memory cells, the first region is electrically connected to the second region of an adjacent pair of memory cells in the same active region, and the second region is electrically connected to the first region of an adjacent pair of the memory cells in the same active region.

公开(公告)号：US10276696B2

公开(公告)日：2019-04-30

申请号：US15494499

申请日：2017-04-22

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Leo Xing ,  Andy Liu ,  Melvin Diao ,  Xian Liu ,  Nhan Do

IPC: H01L29/66 ,  H01L27/11531 ,  H01L27/11536 ,  H01L27/115 ,  H01L21/3213 ,  H01L27/11521 ,  H01L29/423

Abstract: A method of forming a non-volatile memory cell on a substrate having memory cell and logic circuit regions by forming a pair of conductive floating gates in the memory cell region, forming a first source region in the substrate between the pair of floating gates, forming a polysilicon layer in both regions, forming an oxide layer over the polysilicon layer in the logic circuit region, performing a chemical-mechanical polish of the polysilicon layer in the memory cell area leaving a first block of the polysilicon layer between the floating gates that is separated from remaining portions of the polysilicon layer, and selectively etching portions of the polysilicon layer to result in: second and third blocks of the polysilicon layer disposed in outer regions of the memory cell area, and a fourth block of the polysilicon layer in the logic circuit region.

公开(公告)号：US10276236B2

公开(公告)日：2019-04-30

申请号：US15597709

申请日：2017-05-17

Applicant: Silicon Storage Technology, Inc. ,  Agency For Science, Technology, and Research

Inventor： Santosh Hariharan ,  Hieu Van Tran ,  Feng Zhou ,  Xian Liu ,  Steven Lemke ,  Nhan Do ,  Zhixian Chen ,  Xinpeng Wang

IPC: G11C13/00 ,  G11C11/00 ,  H01L27/24 ,  H01L45/00

Abstract: A memory device includes a metal oxide material disposed between and in electrical contact with first and second conductive electrodes, and an electrical current source configured to apply one or more electrical current pulses through the metal oxide material. For each of the one or more electrical current pulses, an amplitude of the electrical current increases over time during the electrical current pulse to form a conductive filament in metal oxide material.

公开(公告)号：US10269440B2

公开(公告)日：2019-04-23

申请号：US15374588

申请日：2016-12-09

Applicant: Silicon Storage Technology, Inc. ,  The Regents of the University of California

Inventor： Xinjie Guo ,  Farnood Merrikh Bayat ,  Dmitri Strukov ,  Nhan Do ,  Hieu Van Tran ,  Vipin Tiwari

IPC: G11C16/14 ,  G11C16/34 ,  G11C16/10 ,  G11C16/26 ,  H01L27/11521 ,  H01L27/11558 ,  G11C7/18 ,  G11C8/14 ,  G11C16/04 ,  H01L29/788 ,  H01L27/11524

Abstract: A memory device that provides individual memory cell read, write and erase. In an array of memory cells arranged in rows and columns, each column of memory cells includes a column bit line, a first column control gate line for even row cells and a second column control gate line for odd row cells. Each row of memory cells includes a row source line. In another embodiment, each column of memory cells includes a column bit line and a column source line. Each row of memory cells includes a row control gate line. In yet another embodiment, each column of memory cells includes a column bit line and a column erase gate line. Each row of memory cells includes a row source line, a row control gate line, and a row select gate line.

公开(公告)号：US10249375B2

公开(公告)日：2019-04-02

申请号：US15987735

申请日：2018-05-23

Applicant: Silicon Storage Technology, Inc. ,  The Regents of the University of California

Inventor： Xinjie Guo ,  Farnood Merrikh Bayat ,  Dmitri Strukov ,  Nhan Do ,  Hieu Van Tran ,  Vipin Tiwari

IPC: G11C16/14 ,  G11C16/34 ,  G11C16/10 ,  G11C16/26 ,  H01L27/11521 ,  H01L27/11558 ,  G11C7/18 ,  G11C8/14 ,  G11C16/04 ,  H01L29/788 ,  H01L27/11524

Abstract: A memory device that provides individual memory cell read, write and erase. In an array of memory cells arranged in rows and columns, each column of memory cells includes a column bit line, a first column control gate line for even row cells and a second column control gate line for odd row cells. Each row of memory cells includes a row source line. In another embodiment, each column of memory cells includes a column bit line and a column source line. Each row of memory cells includes a row control gate line. In yet another embodiment, each column of memory cells includes a column bit line and a column erase gate line. Each row of memory cells includes a row source line, a row control gate line, and a row select gate line.

公开(公告)号：US10056398B1

公开(公告)日：2018-08-21

申请号：US15945659

申请日：2018-04-04

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Nhan Do

IPC: H01L27/11521 ,  G11C16/04 ,  H01L29/423 ,  G11C16/16 ,  G11C16/10

Abstract: A memory device that includes a substrate of semiconductor material of a first conductivity type, first and second regions spaced apart in the substrate and having a second conductivity type different than the first conductivity type, with a continuous channel region in the substrate extending between the first and second regions. A first floating gate is disposed over and insulated from a first portion of the channel region adjacent to the first region. A second floating gate is disposed over and insulated from a second portion of the channel region adjacent to the second region. A word line gate is disposed over and insulated from a third portion of the channel region between the first and second channel region portions. A first erase gate disposed over and insulated from the first region. A second erase gate disposed is over and insulated from the second region.

公开(公告)号：US09985042B2

公开(公告)日：2018-05-29

申请号：US15489548

申请日：2017-04-17

Applicant: Silicon Storage Technology, Inc.

Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Man-Tang Wu ,  Chun-Ming Chen ,  Hieu Van Tran ,  Nhan Do

IPC: H01L21/306 ,  H01L21/8238 ,  H01L27/11568 ,  H01L21/3065

CPC classification number: H01L27/11568 ,  H01L21/30604 ,  H01L21/30625 ,  H01L21/3065 ,  H01L21/823821 ,  H01L28/00

Abstract: A method of forming a memory device with memory cells over a planar substrate surface and FinFET logic devices over fin shaped substrate surface portions, including forming a protective layer over previously formed floating gates, erase gates, word line poly and source regions in a memory cell portion of the substrate, then forming fins into the surface of the substrate and forming logic gates along the fins in a logic portion of the substrate, then removing the protective layer and completing formation of word line gates from the word line poly and drain regions in the memory cell portion of the substrate.

公开(公告)号：US09972630B2

公开(公告)日：2018-05-15

申请号：US15295022

申请日：2016-10-17

Applicant: Silicon Storage Technology, Inc.

Inventor： Chien-Sheng Su ,  Feng Zhou ,  Jeng-Wei Yang ,  Hieu Van Tran ,  Nhan Do

IPC: H01L21/336 ,  H01L27/11521 ,  H01L21/28 ,  H01L29/423 ,  H01L29/66 ,  H01L29/788 ,  H01L27/11524

CPC classification number: H01L27/11521 ,  H01L21/28273 ,  H01L27/11524 ,  H01L29/42328 ,  H01L29/66825 ,  H01L29/788 ,  H01L29/7881

Abstract: A memory device including a silicon substrate having a planar upper surface in a memory cell area and an upwardly extending silicon fin in a logic device area. The silicon fin includes side surfaces extending up and terminating at a top surface. The logic device includes spaced apart source and drain regions with a channel region extending there between (along the top surface and the side surfaces), and a conductive logic gate disposed over the top surface and laterally adjacent to the side surfaces. The memory cell includes spaced apart source and drain regions with a second channel region extending there between, a conductive floating gate disposed over one portion of the second channel region, a conductive word line gate disposed over another portion of the second channel region, a conductive control gate disposed over the floating gate, and a conductive erase gate disposed over the source region.

公开(公告)号：US09972493B2

公开(公告)日：2018-05-15

申请号：US15594883

申请日：2017-05-15

Applicant: Silicon Storage Technology, Inc.

Inventor： Chien-Sheng Su ,  Jeng-Wei Yang ,  Man-Tang Wu ,  Chun-Ming Chen ,  Hieu Van Tran ,  Nhan Do

IPC: H01L21/336 ,  H01L21/28 ,  H01L21/306 ,  G11C16/04 ,  H01L29/772 ,  H01L29/423

CPC classification number: H01L21/28 ,  G11C16/0425 ,  H01L21/28273 ,  H01L21/30604 ,  H01L27/11539 ,  H01L29/42328 ,  H01L29/772

Abstract: A method of forming a memory device that includes forming a first insulation layer on a semiconductor substrate, forming a conductive material layer on the first insulation layer, forming an insulation block on the conductive material layer, forming an insulation spacer along a side surface of the insulation block and on the conductive material layer, etching the conductive material layer to form a block of the conductive material disposed directly under the insulation block and the insulation spacer, removing the insulation spacer, forming a second insulation layer having a first portion wrapping around an exposed upper edge of the block of the conductive material and a second portion disposed on a first portion of the first insulation layer over the substrate, and forming a conductive block insulated from the block of the conductive material by the second insulation layer and from the substrate by the first and second insulation layers.