公开(公告)号：US10139537B2

公开(公告)日：2018-11-27

申请号：US15715407

申请日：2017-09-26

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Shaun Ogden ,  Matt Free ,  Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) can have improved performance due to a high aspect ratio (e.g. >3, >5, >10, >15, >20, or >30), where aspect ratio equals T/W, T is a sum of a thickness of wires of the first array 11 plus a thickness of wires of the second array 12 (i.e. T=Th11+Th12), and W is a maximum width of wires of the first array 11 and/or of the second array 12. Such high aspect ratio can be achieved with two arrays of wires 11 and 12, each capped by a thin film 01 and 02.

公开(公告)号：US10139536B2

公开(公告)日：2018-11-27

申请号：US15715378

申请日：2017-09-26

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Hua Li ,  Brian Bowers

IPC: G02B5/30 ,  G02B27/28 ,  G02B1/14

Abstract: A wire grid polarizer (WGP) 10 can include wires 15 sandwiched between a first pair of thin-film layers 21 (with a first transparent layer 11 and a second transparent layer 12) and a second pair of thin-film layers 22 (with a third transparent layer 13 and a fourth transparent layer 14). An index of refraction of each outer transparent layer 11 and 14 can be greater than an index of refraction of the adjacent inner transparent layer 12 and 13, respectively. Material composition of the outer transparent layers 11 and 14 can be the same and material composition of the adjacent inner transparent layers 12 and 13 can be the same. There can be high reflection of one polarization (e.g. Rs1>93% and Rs2>93%) for light incident on either side of the WGP. The wires 15 can be embedded for protection.

公开(公告)号：US10114161B2

公开(公告)日：2018-10-30

申请号：US15248846

申请日：2016-08-26

Applicant: Moxtek, Inc.

Inventor： Bin Wang ,  Mark Davis

IPC: G02B5/30 ,  G02B5/22

Abstract: A wire grid polarizer comprising on array of parallel, elongated first rib groups disposed over a substrate. Each first rib group can comprise a central first transmissive rib and a pair of first wires including a first wire disposed along each side of the first transmissive rib. A first dielectric material can substantially fill first gaps between each rib group and an adjacent rib group. An array of parallel, elongated second wires can be disposed over the rib groups and the first dielectric material. The first wires or the second wires can be absorptive and the other of the first wires or the second wires can be reflective.

公开(公告)号：US20180259698A1

公开(公告)日：2018-09-13

申请号：US15978470

申请日：2018-05-14

Applicant: Moxtek, Inc.

Inventor： Stew Nielson ,  Matt Linford ,  Anubhav Diwan ,  Matthew C. George

IPC: G02B5/30 ,  G02B1/04 ,  G02B1/14 ,  C23C16/40 ,  C23C16/34 ,  C23C16/32 ,  C23C16/30 ,  C23C14/08 ,  C23C14/06 ,  C09D185/02 ,  C09D183/04 ,  C09D183/02 ,  C09D5/08 ,  C23C16/455 ,  G02B1/18 ,  B05D1/00 ,  B05D5/08

CPC classification number: G02B5/3058 ,  B05D1/60 ,  B05D5/08 ,  C09D5/084 ,  C09D183/02 ,  C09D183/04 ,  C09D185/02 ,  C23C14/0635 ,  C23C14/0652 ,  C23C14/0676 ,  C23C14/08 ,  C23C14/081 ,  C23C14/083 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45555 ,  G02B1/04 ,  G02B1/14 ,  G02B1/18

Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R1)d(R2)e(R3)g. In the above WGP and method, X can be a bond to the ribs; each R1 can be a hydrophobic group; each R3, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; R2 can be a silane-reactive-group; and each R6 can be an alkyl group, an aryl group, or combinations thereof.

公开(公告)号：US10054717B2

公开(公告)日：2018-08-21

申请号：US15078495

申请日：2016-03-23

Applicant: Moxtek, Inc.

Inventor： Ted Wangensteen ,  Stew Nielson ,  Fred Lane ,  Matt Linford ,  Anubhav Diwan ,  Matthew C. George

IPC: G02B1/14 ,  C09D5/08 ,  G02B1/04 ,  G02B5/30 ,  B05D5/08 ,  C23C16/30 ,  C23C16/32 ,  C23C16/34 ,  C23C16/40 ,  C23C16/455 ,  B05D1/00

CPC classification number: G02B1/14 ,  B05D1/60 ,  B05D5/08 ,  B05D2350/63 ,  C09D5/084 ,  C23C16/308 ,  C23C16/325 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/45555 ,  G02B1/04 ,  G02B5/3058

Abstract: A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.

公开(公告)号：US20180052257A1

公开(公告)日：2018-02-22

申请号：US15691315

申请日：2017-08-30

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Bradley R. Williams ,  Mathew Free ,  Ted Wangensteen

IPC: G02B1/18 ,  G02B5/30 ,  G02B1/11 ,  G03B21/20

CPC classification number: G02B1/18 ,  C09D1/00 ,  C09D5/08 ,  C09D5/084 ,  G02B1/04 ,  G02B1/11 ,  G02B1/115 ,  G02B1/14 ,  G02B5/3058 ,  G03B21/2073 ,  H04N9/3167

Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.

公开(公告)号：US09839107B2

公开(公告)日：2017-12-05

申请号：US15065440

申请日：2016-03-09

Applicant: Moxtek, Inc.

Inventor： Eric Miller

IPC: G21K5/08 ,  H05F3/04 ,  H01J9/24 ,  H05K9/00

CPC classification number: H05F3/04 ,  G02F1/1303 ,  G02F1/133784 ,  H01J9/241 ,  H05K9/0066

Abstract: A method and system for reducing static charges on a material. X-rays can ionize a flowing fluid. The ions can be transported to the material and can reduce or dissipate the static charges.

公开(公告)号：US20170309436A1

公开(公告)日：2017-10-26

申请号：US15424270

申请日：2017-02-03

Applicant: Moxtek, Inc.

Inventor： Dustin Peterson ,  Richard Zimmerman ,  Vince Jones ,  Eric Miller

IPC: H01J35/14 ,  H01J35/30

Abstract: Electron beam spot characteristics can be tuned in each x-ray tube by moving a focusing-ring along a longitudinal-axis of the x-ray tube. The focusing-ring can then be immovably fastened to the x-ray tube.An x-ray source can include an x-ray tube and a focusing-ring. The focusing-ring can at least partially encircle an electron-emitter, a cathode, an evacuated-enclosure, or combinations thereof. The focusing-ring can be located outside of a vacuum of the evacuated enclosure. The focusing-ring can adjust an electron-beam spot on a target material of the x-ray tube when moved along a longitudinal-axis extending linearly from the electron-emitter to the target material.

公开(公告)号：US20170293059A1

公开(公告)日：2017-10-12

申请号：US15631256

申请日：2017-06-23

Applicant: Moxtek, Inc.

Inventor： R. Stewart Nielson ,  Mathew Free ,  Bradley R. Williams ,  Matthew R. Linford ,  Anubhav Diwan ,  Fred Lane ,  Shaun Ogden

IPC: G02B5/30 ,  C09D5/08 ,  C23C16/44 ,  C23C14/58 ,  C23C16/02 ,  C23C14/24 ,  C23C14/02 ,  G02B1/14 ,  C23C16/56

CPC classification number: G02B5/3058 ,  C09D5/08 ,  C23C14/02 ,  C23C14/12 ,  C23C14/24 ,  C23C14/58 ,  C23C16/02 ,  C23C16/308 ,  C23C16/345 ,  C23C16/401 ,  C23C16/403 ,  C23C16/405 ,  C23C16/44 ,  C23C16/56 ,  G02B1/04 ,  G02B1/14 ,  G02B1/18 ,  G03B21/2073 ,  H04N9/3167

Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.

公开(公告)号：US20170287673A1

公开(公告)日：2017-10-05

申请号：US15419620

申请日：2017-01-30

Applicant: Moxtek, Inc.

Inventor： Dustin Peterson ,  Richard Zimmerman ,  Rick Steck ,  Vince Jones ,  Eric Miller

IPC: H01J35/18 ,  H01J35/16 ,  H05G1/02 ,  H01J35/08

Abstract: A transmission-target x-ray tube can include an x-ray window 12 mounted on a window-housing 13. The window-housing 13 can be made of a high density material with a high atomic number, and can include an aperture 13a with an increasing-inner-diameter region 23 for blocking x-rays and electrons.