SWITCHABLE AND RECONFIGURABLE GRATING COUPLERS
    151.
    发明申请

    公开(公告)号:US20200166709A1

    公开(公告)日:2020-05-28

    申请号:US16199811

    申请日:2018-11-26

    Abstract: Structures for a waveguide and methods of fabricating a structure for a waveguide. A grating coupler is formed that has an arrangement of grating structures. A conformal layer is arranged over the plurality of grating structures. The conformal layer is composed of a tunable material having a refractive index that changes with an applied voltage.

    Grating couplers with multiple configurations

    公开(公告)号:US10241269B1

    公开(公告)日:2019-03-26

    申请号:US15974252

    申请日:2018-05-08

    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with multiple configurations and methods of manufacture. A structure includes: a grating coupler having a sawtooth configuration provided over a semiconductor slab; and a back end of line (BEOL) stack over the sawtooth configuration of the grating coupler.

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