公开(公告)号：US20030210446A1

公开(公告)日：2003-11-13

申请号：US10409416

申请日：2003-04-08

Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

IPC: G02B026/08 ,  G02B005/08 ,  G02B007/192

CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

公开(公告)号：US20030101721A1

公开(公告)日：2003-06-05

申请号：US09997955

申请日：2001-11-30

Inventor： Adrian P. Janssen ,  Martin Paul Rees ,  Mark R. Pollard

IPC: F02G001/04 ,  F01B029/10

CPC classification number: B81B3/0051 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/051 ,  F03G7/06 ,  H01H1/0036 ,  H01H61/01 ,  H01H2061/006

Abstract: A MEMS actuator 1 comprising an actuator member 2 operably engaged by at least one actuator beam 4 and heating means 12 for heating the or each beam 4. The heating may cause expansion of the or each beam4, wherein the or each beam 4 has two ends A, Anull and the or each beam 4 is fixed at only one end A and wherein the expansion effects movement of the actuator member 2. The heating may cause thermal expansion of the beam 4 in one direction and longitudinal displacement of the beam 4 in the direction of thermal expansion, which longitudinal displacement effects movement of the actuator member 2. The beam 4 may act on the member 2 at a position in relation to a pivot point P so as to produce a torque which effects pivoting of the member 2 about the pivot point P. The actuator may have at least two actuator beams 4 and heating the at least two beams 4 may cause simultaneous expansion of the at least two beams 4, which simultaneous expansion effects movement of the actuator member 2. Alternatively, heating one of the at least two beams 4 may cause differential expansion of the at least two beams 4, which differential expansion effects movement of the actuator member 2. The actuator may have at least two actuator members 202 operably engaged by at least one actuator beam 204 and heating the or each beam 204 may cause expansion of the or each beam 204, which expansion effects differential movement of the at least two members 202 or bending of the at least two members 202.

Abstract translation: MEMS致动器1包括由至少一个致动器梁4可操作地接合的致动器构件2和用于加热或每个梁4的加热装置12.加热可以引起梁或每个梁4的膨胀，其中，每个梁4具有两个端部 A'和每个梁4仅固定在一端A，并且其中膨胀影响致动器构件2的运动。加热可能导致梁4在一个方向上的热膨胀并且梁4的纵向位移 热膨胀的方向，其纵向位移影响致动器构件2的运动。梁4可以在关于枢轴点P的位置处作用在构件2上，以便产生使构件2绕枢转点枢转的扭矩 致动器可以具有至少两个致动器梁4并且加热至少两个梁4可以引起至少两个梁4的同时膨胀，这同时膨胀影响致动器构件2的移动。备用 加热至少两个光束4中的一个可能导致至少两个光束4的不同的膨胀，该不同的膨胀影响致动器构件2的运动。致动器可以具有至少两个致动器构件202，其可操作地与至少一个 致动器梁204和加热该梁204或每个梁204可能导致该梁204或每个梁204的膨胀，该膨胀影响该至少两个构件202的差动运动或至少两个构件202的弯曲。

公开(公告)号：US20030044106A1

公开(公告)日：2003-03-06

申请号：US09915232

申请日：2001-07-24

Inventor： Chuang-Chia Lin

IPC: G02B006/26 ,  H01P001/10

CPC classification number: G02B6/3518 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/053 ,  B81C1/00214 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/358

Abstract: A microelectromechanical systems (MEMS) element, MEMS optical switch and MEMS fabrication method are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element moveable is moveably attached to the substrate for motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. The perpendicular portion may be formed substantially perpendicular portion to the substrate. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate The MEMS elements may be fabricated by providing a substrate; forming one or more trenches in the substrate to define a perpendicular portion of a element; and moveably attaching the moveable element to a first surface of the substrate; removing a portion of the substrate such that at least a part of the perpendicular portion projects beyond a second surface of the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.

Abstract translation: 描述了微机电系统（MEMS）元件，MEMS光开关和MEMS制造方法。 MEMS元件包括可移动地附接到基底的结晶和可移动元件。 可移动元件包括垂直于基本垂直于基底平面的垂直部分。 垂直部分和基底的晶体结构基本相似。 可移动的可移动元件可移动地附接到基板，用于基本上约束到基本上垂直于基板的平面定向的平面的运动。 在至少一个位置中，可移动元件的垂直部分的一部分突出超过衬底的表面。 可移动元件可以通过闩锁保持在适当的位置。 垂直部分可以形成为基本上垂直于基底的部分。 可以实现这种结构的阵列以用作光学开关。 光学开关可以包括晶体衬底和可移动地附接到衬底的一个或多个可移动元件。可以通过提供衬底来制造MEMS元件; 在所述衬底中形成一个或多个沟槽以限定元件的垂直部分; 以及将所述可移动元件可移动地附接到所述基板的第一表面; 去除所述基底的一部分，使得所述垂直部分的至少一部分突出超过所述基底的第二表面。 各种实施例提供了可以简单地制造和密集包装的鲁棒且可靠的MEMS元件。

公开(公告)号：US20030035192A1

公开(公告)日：2003-02-20

申请号：US09995588

申请日：2001-11-29

Applicant: FUJITSU LIMITED

Inventor： Yoshihiro Mizuno ,  Satoshi Ueda ,  Osamu Tsuboi ,  Ippei Sawaki ,  Hisao Okuda ,  Fumio Yamagishi ,  Norinao Kouma

IPC: G02B026/00

CPC classification number: G02B26/0841 ,  B01D53/885 ,  B01J8/0453 ,  B01J8/0496 ,  B01J2208/00212 ,  B01J2208/00309 ,  B01J2208/025 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C1/00142 ,  B81C1/00626 ,  B81C2201/0142 ,  C01B3/16 ,  C01B2203/0288 ,  C01B2203/045 ,  C01B2203/0485 ,  Y10S359/904

Abstract: A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar.

Abstract translation: 提供了制造微镜单元的方法。 根据该方法，微镜单元由具有由硅层和至少一个中间层构成的多层结构的材料基板制成。 所得到的微镜单元包括反射镜形成基座，框架和扭杆。 该方法包括以下步骤。 首先，通过使一个硅层进行蚀刻来形成预扭杆。 所获得的预扭杆的厚度比反射镜形成基座的厚度小，并与中间层保持接触。 然后，通过去除与预扭杆接触的中间层来获得所需的扭力杆。

公开(公告)号：US06504643B1

公开(公告)日：2003-01-07

申请号：US09675045

申请日：2000-09-28

Applicant: Eric Peeters ,  Michel A. Rosa ,  David K. Fork

Inventor： Eric Peeters ,  Michel A. Rosa ,  David K. Fork

IPC: G02B2600

CPC classification number: G02B26/0841 ,  B81B3/0021 ,  B81B7/0003 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/358 ,  G02B6/3584 ,  Y10S359/904

Abstract: Optical cross-connect involve the general concept of a two dimensional array of MEMS tilt mirrors being used to direct light coming from a first optical fiber to a second optical fiber. Each MEMS tilt mirror in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms attached to a substrate.

Abstract translation: 光学交叉连接涉及用于将来自第一光纤的光引导到第二光纤的MEMS倾斜镜的二维阵列的一般概念。 二维阵列中的每个MEMS倾斜镜可围绕其x轴和y轴旋转并且被附接到基底的多个悬挂臂悬挂。

公开(公告)号：US20020195674A1

公开(公告)日：2002-12-26

申请号：US10217714

申请日：2002-08-13

Applicant: 3M Innovative Properties Company

Inventor： Billy L. Weaver ,  Douglas P. Goetz ,  Kathy L. Hagen ,  Mike E. Hamerly ,  Robert G. Smith ,  Silva K. Theiss

IPC: H01L029/82

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B3/0037 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/0118 ,  B81B2203/053 ,  B82Y15/00 ,  G02B6/352 ,  G02B6/3576 ,  H01G5/18 ,  H01H1/0036 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

Abstract: A micrometer sized, single-stage, vertical thermal actuator capable of repeatable and rapid movement of a micrometer-sized optical device off the surface of a substrate. The vertical thermal actuator is constructed on a surface of a substrate. At least one hot arm has a first end anchored to the surface and a free end located above the surface. A cold arm has a first end anchored to the surface and a free end. The cold arm is located above the hot arm relative to the surface. A member mechanically and electrically couples the free ends of the hot and cold arms such that the member moves away from the substrate when current is applied to at least the hot arm. The hot arm can optionally include a grounding tab to minimize thermal expansion of the cold arm.

Abstract translation: 微米尺寸的单级垂直热致动器，其能够将微米尺寸的光学器件重复并快速地移动离开衬底的表面。 垂直热致动器构造在基板的表面上。 至少一个热臂具有锚固在表面上的第一端和位于表面上方的自由端。 冷臂具有锚固在表面上的第一端和自由端。 冷臂相对于表面位于热臂上方。 机构和电气耦合热臂和冷臂的自由端，使得当电流施加到至少热臂时，构件远离基板移动。 热臂可以可选地包括接地片，以最小化冷臂的热膨胀。

公开(公告)号：US06487000B2

公开(公告)日：2002-11-26

申请号：US09925847

申请日：2001-08-08

Applicant: Ubaldo Mastromatteo ,  Bruno Murari

Inventor： Ubaldo Mastromatteo ,  Bruno Murari

IPC: G02B2600

CPC classification number: H02N1/004 ,  B81B3/0051 ,  B81B2201/045 ,  B81B2203/051 ,  B81B2203/058 ,  F16H21/02 ,  G02B26/0841 ,  G02B26/0866

Abstract: A microelectromechanical structure, usable in an optical switch for directing a light beam towards one of two light guide elements, including: a mirror element, rotatably movable; an actuator, which can translate; and a motion conversion assembly, arranged between the mirror element and the actuator. The motion conversion assembly includes a projection integral with the mirror element and elastic engagement elements integral with the actuator and elastically loaded towards the projection. The elastic engagement elements are formed by metal plates fixed to the actuator at one of their ends and engaging the projection with an abutting edge countershaped with respect to the projection.

Abstract translation: 一种微机电结构，可用于将光束引向两个光导元件中的一个的光学开关中，包括：反射镜元件，可旋转地移动; 可以翻译的执行器; 以及布置在镜元件和致动器之间的运动转换组件。 运动转换组件包括与镜子元件一体的突起和与致动器成一体的弹性接合元件，并朝向突起弹性加载。 弹性接合元件由金属板形成，金属板在它们的一端固定到致动器，并且与突起接合，并且相对于突起相对地配置有邻接边缘。

公开(公告)号：US20020171327A1

公开(公告)日：2002-11-21

申请号：US10191917

申请日：2002-07-09

Inventor： Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

IPC: H02N001/00

CPC classification number: B81B3/004 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/053 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  G02B2006/12104 ,  G11B7/0927 ,  H02N1/006 ,  H02N1/008

Abstract: A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Abstract translation: 公开了一种微机电（MEM）装置，其具有能够在基板上升高并以任意角度倾斜的平台，该平台使用支撑平台并控制其运动的多个柔性构件。 每个柔性构件由一个或多个用于弯曲柔性构件的MEM致动器进一步控制。 MEM致动器可以是静电梳状致动器或垂直拉链致动器，或其组合。 MEM装置可以包括镜面涂层以形成用于重定向或切换用于投影显示器的一个或多个光束的可编程镜子。 具有镜面涂层的MEM装置还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

公开(公告)号：US20020154422A1

公开(公告)日：2002-10-24

申请号：US09840698

申请日：2001-04-23

Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

IPC: G02B026/08

CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Abstract translation: 公开了用于表面微加工光学系统的加强镜微结构的各种实施例。 公开了多层和结构加强的镜面微观结构，包括两层和三层微结构。 这些多层反射镜微结构中的相邻结构层可以通过多个垂直设置的柱，或多个至少大致横向延伸的轨道或肋或其某些组合在结构上加强和互连。 还公开了具有从其下表面悬臂的结构增强组件的单层反射镜微结构的各种实施例。

公开(公告)号：US06360033B1

公开(公告)日：2002-03-19

申请号：US09475051

申请日：1999-12-30

Applicant: Jong Hyun Lee ,  Myung Lae Lee

Inventor： Jong Hyun Lee ,  Myung Lae Lee

IPC: G02B626

CPC classification number: G02B6/358 ,  B81B3/0054 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/051 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833

Abstract: An optical switch selectively transmits an optical signal to one of multiple optical paths for use in an optical communication. The optical switch includes a mobile structure provided with a mirror surface at one end surface of the mobile structure to change the optical path by moving the mobile structure backward and forward along an axis parallel to the mirror surface. It has at least a pair of leaf springs in the form of a shallow arch, wherein each of the leaf springs is connected to both side surfaces of the mobile structure in a leaf spring axis perpendicular to the mirror surface, respectively, thereby obtaining a latch-up function and an actuator for moving the mobile structure. In the optical switch, elastic bodies are introduced into connection portions of the leaf springs, respectively, to give rise to a degree of freedom to the connection portions in the direction of the leaf spring axis. The elastic body can be an I-shape beam, a multiple spring with a curvature and an S-shape beam allowing angle deflection.

Abstract translation: 光开关选择性地将光信号发送到多个光路中的一个以用于光通信。 光学开关包括在移动结构的一个端面处设置有镜面的移动结构，以通过沿着平行于镜面的轴线向前和向前移动移动结构来改变光路。 它具有至少一对形式为浅拱形的板簧，其中每个板簧分别在垂直于镜面的板簧轴上连接到移动结构的两个侧表面，从而获得闩锁 -up功能和用于移动移动结构的致动器。 在光学开关中，弹性体分别被引入到板簧的连接部分中，从而在板簧轴线的方向上产生连接部分的自由度。 弹性体可以是I形梁，具有曲率的多重弹簧和允许角度偏转的S形梁。